VCW

) 10 is N.C.

Series VC, Direct Operated, 2 Port Solenoid Valve for Water, Series VCW

) 10 is N.C.

Electromagnetic Digital Flow Switch

LFE Remote type sensor unit 1 3 J Remote type monitor unit For details, refer to p. 10. Remote type sensor unit 3 A LFE 1 Integrated display type Rated flow range Made to Order (Refer to p. 17.)

MHZ

D4-MM thread depth L (Thread for mounting attachment) 20K K J J B A A D G D B F C S W O (mm) Model A B C D F G Open Closed Double acting Single acting J K L Weight (g) MM W MHZL2-103 MHZL2-163 MHZL2-203 MHZL2-253 +2.2 0 2H9 2.5H9 3H9 4H9 0 0.2 0 0.2 0 0.2 0 0.2 +0.025 0 5 8 10 12 0 0.05 0 0.05 0 0.05 0 0.05 70 145 290 505 M2.5 x 0.45 M3 x 0.5 M4 x 0.7 M5 x 0.8 5 6 8 10 60 135 270 460 7 9

MHZ

Flat Type Fingers [3] D4-MM thread depth L (Thread for mounting attachment) 20K J A A D G B D B K J F C S W O (mm) Model Open Closed Weight (g) F G A W B C D J K MM L MHZ2-63 (1) 0 0.05 0 0.05 0 0.05 0 0.05 0 0.05 0 0.05 0 0.05 +1.2 0.8 2H9 2.5H9 3H9 4H9 5H9 6H9 +0.2 0 2 2.45 3.05 3.95 4.9 7.3 8.7 5 1 1.4 1.4 1.6 2 3 3 4 5 8 10 12 15 18 3.5 6 8 10 12 20 24 7.2 5.2 8.3 10.5 13.1 18 22 7.5

4 Way, 5 Port / Solenoid/Pilot Operated NVFR Series

|VFR2200-OF 3 posiiion cloed center:NVFR230O-oF 3 position exhaust center:NVFR24oGOF 3 pooition pressure center:NVFB250GOF < ):26NPTF < >:/aNPTF Series NVFRz000:Base Mounted Tlpe Non Plug-in type 2 position single/Dilnerwions Grommet:NVFR21 10-OG -o ; 3 ; 6 )o.t 10-32 No.n (M5) lfu I ES.!! 10-32l.

Air preparation filter

Part name (8) (7) (1) Body (2) Element (1) (3) Bowl (4) Auto drain (5) Flange (5) (6) Stopper (7) Element service indicator (8) Bracket (9) Drain port spacer (6) (10) Drain cock (2) (3) (4) (9) (10) Options and spare parts No.

-fl Seies

|VFR2200-OF 3 posiiion cloed center:NVFR230O-oF 3 position exhaust center:NVFR24oGOF 3 pooition pressure center:NVFB250GOF < ):26NPTF < >:/aNPTF Series NVFRz000:Base Mounted Tlpe Non Plug-in type 2 position single/Dilnerwions Grommet:NVFR21 10-OG -o ; 3 ; 6 )o.t 10-32 No.n (M5) lfu I ES.!! 10-32l.

Series CG1-Z 10-/11- ø20, ø25, ø32, ø40, ø50, ø63, ø80, ø100 21-/22- Air Cylinder: Double acting, Single rod

+ Stroke Relief port With air cushion Cushion valve (Width across flats WH) WA GA RA Relief port M5 x 0.8 WB 20 10 S + Stroke ZZ + Stroke (mm) AL Bore size Stroke range 1 2 A GB I J MM P S ZZ K NA C H RA B1 KA D H1 E F GA Standard Long 20 25 32 40 50 63 80 100 35 40 40 50 58 58 71 71 5 5.5 5.5 6 7 7 10 10 24 29 35.5 44 55 69 86 106 7 7 7 9 10 10 10 10 0 0 0 10 10 10 10 10 15.5 19.5 19.5

Process Valve

Applicable cable O.D. 6 to 8 (D, DZ) P Pg9 J (DIN terminal: D, DZ) I (Grommet: G) F (Air operated) Pilot port 12 (P1) 2 x (Back side 10 (P2)) 4 x M 8 1 Manual override (Non-locking push type) P1 D S Q E 15 B A H (DIN terminal: D, DZ) G (Grommet: G) A R B C Main port 1 (A) (Back side 2 (B)) Port side: refer to table below Model Main port 1(A), 2(B) A B C D E F G H I J K L M N P Q R S VNB2V

Micro Mist Separator Series AMD Model Series AMD can separate and Model AMD450 AMD550 AMD650 AMD850 AMD150 AMD250 AMD350 remove aerosol state oil mist in Rated flow (l/min (ANR))(1) 2000 3500 6000 12000 200 500 1000 compressed air and remove Port size

Options J: With drain guide T: With element service indicator Element service indicator Dimensions with mounting bracket Model Port size (Nominal size B) A B C D E F G H 10 10 10 10 10 10 10 10 10 I 56 66 66 80 80 90 90 100 150 J 15 20 17 22 19 25 21 30 40 K 5 8 8 8 8 10 10 10 15 L 9 12 12 14 14 14 14 16 20 M 5.5 6 6 7 7 9 9 9 11 N 35 O 54 66 66 80 80 88 88 102 136 P 70 84 84 100 100 110

Thermo-chiller HRS offers convenient functions, self diagnosis and check display for easy maintenance.? An angled supply port facilitates the supply of circulating fluid, even when units are?stacked.? A?large digital display provides a clear view of the current and set values.? The dustproof filter is integrated with the grill of the front panel allowing mounting and removal of the HRS?filter

AMD

Option Bracket J: With drain guide (Option) female thread T: With element service indicatior Maintenance space Drain Element service indicator Dimensions with mounting bracket Model Port size (Nominal size B) A B C D E F G H 10 10 10 10 10 10 10 10 10 I 56 66 66 80 80 90 90 100 150 J 15 20 17 22 19 25 21 30 40 K 5 8 8 8 8 10 10 10 15 L 9 12 12 14 14 14 14 16 20 M 5.5 6 6 7 7 9 9 9 11 N 35

End Lock Cylinder Series CBM2/ø20, ø25, ø32, ø40 Series CBA1/ø40, ø50, ø63, ø80, ø100 CL MLGC CNA CB CV/MVG Maintains the cylinder’s CXW original position even if the CXS air supply is interrupted. CXT MX

MGF Z DA DDH10 (Hole) W1 B DF DH DS DT DR DO DC DU DE DL DX CA1-B04 CA1-B05 CA1-B06 CA1-B08 CA1-B10 40 50 63 80 100 165 10 57 60 52 40 8 17 9 10 85 15 65 11 35 10 +0.058 0 CY1 183 10 57 70 52 40 8 17 9 10 85 18 65 11 35 12 +0.070 0 196 10 67 85 66 50 10 22 11 12.5 105 25 80 13.5 40 16 +0.070 0 MY1 235 12 93 102 90 65 12 24 13.5 15 130 31.5 100 16.5 60 20 +0.084 0 256 12 93 116 90 65 12 24

VEX1

Symbol Parts name VEX11001 02 VEX12001 02 VEX13002 03 04 04 06 10 VEX150VEX17010 12 VEX19014 20 VEX3-32A VEX5-32A VEX7-32A VEX9-32A VEX1-18-1A G27-10-01 G36-10-01 B F G Bracket (with bolt and washer) Air operated External pilot solenoid G46-10-01 VEX1-18-2A Pressure gauge (1) Note 1) When requring the gauge except mentioned above, specify the model number.

Electric Actuator Triple Axis P&P Unit

Y axis/Z axis Axis type Ball screw specifications Rolled ball screw (mm) 15, lead 5 15, lead 10 15, lead 20 16, lead 32 Symbol H A C J Y axis motor in-line mount Z axis motor in-line mount Z axis motor side mount Y ZB ZC 1 2 Stroke(mm) 1) Used for X axis in double and triple axis P&P. 2) Used for Y axis in double and triple axis P&P. 100 150 10 15 Motor specifications 950 1000 95 A0 Brake

17

Load Mass Allowable Moment MY1B/M1 MY1B/M3 MY1B/M2 MY1B/m1 200 200 200 300 400 500 20 30 40 50 100 100 50 20 30 40 100 50 10 40 30 20 30 40 50 5 4 3 2 10 Load mass kg Moment Nm Moment Nm Moment Nm 20 5 4 3 2 10 1 10 MY1B40 5 4 3 2 MY1B40 MY1B40 MY1B32 MY1B25 MY1B40 0.2 0.3 0.4 0.5 MY1B32 5 4 3 1 MY1B32 MY1B32 MY1B25 0.5 0.4 1 MY1B25 MY1B25 D0.1 0.3 0.2 2 0.5 0.4 0.3 0.05 0.04 0.03 0.2 -X

Series ARP20 to ARP40 10- 10- 21- 21- Direct Operated Precision Regulator Series ARP20K to ARP40K 10- 10- Direct Operated Precision 21- 21- Regulator with Backflow Function

0.4 MPa setting (Ex.)10-ARP30-02BG 0.005 to 0.4 MPa Set pressure range Note1) 0.2 MPa setting (Ex.)10-ARP30-02BG-1 0.005 to 0.2 MPa 0.6 MPa setting (Ex.)10-ARP30-02BG-3 0.008 to 0.6 MPa Within 0.2% F.S.

Series 10-, 21- ARP20 to 10-, 21- ARP40 Direct Operated Precision

0.4 MPa setting (Ex.)10-ARP30-02BG 0.005 to 0.4 MPa Set pressure range Note1) 0.2 MPa setting (Ex.)10-ARP30-02BG-1 0.005 to 0.2 MPa 0.6 MPa setting (Ex.)10-ARP30-02BG-3 0.008 to 0.6 MPa Within 0.2% F.S.

Series 10-, 21- AF-A Air Filter

Option Applicable model 10-/21-AF20-A 10-/21-AF30-A 10-/21-AF40-A 10-/21-AF40-06-A 10-/21-AF50-A 10-/21-AF60-A Bracket assembly Note 2) AF52P-050AS AF22P-050AS AF32P-050AS AF42P-050AS AF42P-070AS Note 2) Assembly includes a bracket and 2 mounting screws. 1069-1 A Air Filter 1021-AF-A Dimensions AF20-A AF30-A to 40-06-A 10211021T N S J M U D J M U D S N T Air Preparation Equipment Pressure