CYV

The cushion effect (smooth start-up, soft stop) is not available an intermediate stop or return from an intermediate stop using an external stopper, etc. When using an intermediate stop with the above information taken into account, implement measures to prevent particulate generation and set the operating pressure to no more than 0.3MPa.

High Vacuum L Type Valve

flange) Fn D H B A G A Unit: mm Model A B C D E Fn Fd G H XLA-16-2 40 108 38 20 30 17 44 XLA-25-2 50 121 48 27 12 40 26 44 XLA-40-2 65 171 66 39 11 55 41 67 XLA-50-2 70 185 79 46 11 75 52 72 XLA-63-2 88 212 100 55 11 87 95 70 76 XLA-80-2 90 257 117 65 11 114 110 83 104 12 XL-OMS0001-B 6.

PFA/PFW

Never use in an atmosphere of explosive gases. The structure of switches is not intended to prevent explosion. Never use in an atmosphere with an explosive gas since this may cause a serious explosion. 2. Mount switches in locations without vibration (98m/s or less) or impact (490m/s or less). 3. Do not use in an area where surges are generated.

ITVH

It will lead to an operation failure. Caution 1. This product does not have a filtering function. Install an air filter on the supply side close to the product. Select an air filter with a filtration degree of 5 m or finer. 2. Compressed air containing large amounts of drainage can cause a malfunction of this product and other pneumatic equipment.

5 Port Solenoid Valve Metal Seal/Rubber Seal Body Ported

Note 3) K (High pressure) and Y (Low wattage) are not available. Electrical ently: L/ M plug connector only.

LX Series Compact Electric Actuators

I l 50i 70 , iiFl.r* 0 q . . , . 50 6o ' 3 0 3o , , , . 3 0 , : LXPB5SA 40 40 '" .,1 i Slide Screw \ I i LXPB5SB 2D 2A LXSH2BC 100 50 220 High rigidity linear guide Ball LXSH2BD 100 50 90 Screw LXSH5BC 1 0 0 50 1 6 0 LXSH5BD 1 0 0 50 70 LXSH2SA 90 40 60 Slide LXSH2SB 45 20 30 Screw LXSHSSA 60 20 40 LXSH5SB 30 1 0 20 , \ | '-t 'oo"ot| I PLc I ll'i;!:-,?

25

Connector with cable or without cable may be selected when placing an order for the power supply cable. When only an e-con is required, place an order for it as a part.

Compact Cylinder with Solenoid Valve/

, 45, 50, 75, 100 5, 10, 15, 20, 25, 30, 35 40, 45, 50, 75, 100 10, 15, 20, 25, 30, 35 40, 45, 50, 75, 100 10, 15, 20, 25, 30, 35 40, 45, 50, 75, 100 Surge voltage suppressor Diode (Non-polar: Varistor) 32 1 Indicator light LED Note) The S and Z types of surge voltage suppressor have an internal circuit allowing voltage drop, so use within the following allowable voltage range.

MU

50 63 Size 25 32 40 50 63 Part No.

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Note 5) For command pulse input with an open collector method.

VQC

In the case of mixed wiring, use the option symbol "-K".

PF2D

Ratio of resistance [k m] 100 10 50 Particle ratio [number/cc] 1 0 5 10 15 20 25 30 Duration of flow [min] 2 or 3 particles/cc Tube 00 10 20 30 40 50 60 70 Duration of flow [min] The data was obtained by performing an actual 10 minutes supersonic cleaning using an average 16 Mcm of deionized water at class 10 clean room (1 l/min flow rate).

LVQ

Description Body class Symbol LVC LVA Bracket assembly LQ-GBL LVH J, K 1, 2 LVD J type K type LVQ LQ 1, 2, 3, 4, 5, 6 L, M LVN L type M type (for short piping) TI/ TIL Table 1 Tubing size symbols Part No. Description Replacement parts PA Tubing O.D.

Large blow and

56.5 29 21.6 Rc1/4 44 ZH30 40--X185 Without bracket Air pressure supply (P) port Thread size: Q 45 45 Fluid passage dia.: P R J K 2 x L H I O 4 x Sa Thread depth Sb G M N A D F Vacuum flow Dust bag When dust bag is mounted E T Suction air Suction air Discharge air B C C U Hose band V Note 1) (mm) A 158 B 70 C 50 D 20 E F 24.5 G 60.5 H 5 I 70 J 60 K 5.5 L 72 M 37 N 2 O 30 P Rc1/4 Q R 59 Sa

Coolant Valve

Applicable cable O.D. 6 to 8 Light/surge voltage suppressor (For DZ) Manual override (Non-locking push type) E Pilot port 12(P1), 10(P2) Port size: refer to table below C K (External pilot solenoid) P1 P2 J J B (Air operated) D 4 x 2 x 18 mouting hole 32 H F A Applicable flange Port 1, 2 Pilot port 12(P1), 10(P2) A Model B C D E F H J K Note) VNC5-32F VNC6-40F VNC7-50F 1 8 1 4 1 4 32 40

Silencers/Exhaust Cleaner Series AN
/Series AMC 1

8 M4 x 0.7 1 2 3 4 AMC520 102 173.5 193.5 3.2 Depth 8 20 20 30 70 176.5 , 40 70 On the type for the AMC220, an R 1/4 fitting can be attached by removing the drain cock.

RLQ

YB-03 32, 40 12 7 25 9 34 11.5 depth 7.5 Joint YB-05 50, 63 12 9 32 11 42 14.5 depth 8.5 K ( across flats) H (With locking) Weight (g) Bore size (mm) RS T1 T2 V W Part No. YB-03 32, 40 80 9 6.5 10 18 50 d2 d1 YB-05 50, 63 120 11 6.5 12 22 60 L UT C UA (mm) Part No.

MU

1 Plate Cylinder Series MU 25, 32, 40, 50, 63 By adopting an elliptical piston design, a slim, square shaped body has been achieved, resulting in a space-saving cylinder with unrestricted mounting directions.

Air Pilot Operated Series NVSA

You have an option of either a red or gresn risinq pin on your indlcator. @ aDE IXITtENS|ONS HOW TO ORDER PART NO. suFFtx No.

MU

1 Plate Cylinder Series MU 25, 32, 40, 50, 63 By adopting an elliptical piston design, a slim, square shaped body has been achieved, resulting in a space-saving cylinder with unrestricted mounting directions.