High Purity Fluoropolymer Fittings HYPER FITTING ® Series LQ1 1

A A B C D E F A B C D A B C D A B C D A B C D Tubing O.D. PA 1 2 1 2 3 4 1 2 3 4 5 6 1 2 3 4 1 2 3 4 1 2 3 4 1/8" 1/8" PAX 1/8" 1/8" PB 1/4" 1/4" 1/4" 1/4" 3/8" 3/8" 3/8" 3/8" 1/2" 1/2" 1/2" 1/2" 3/4" 3/4" 3/4" 3/4" 1" 1" Note) For each body class, the second and later numbers or symbols indicate reducing.

VCB

Orifice size (mm) 2 3 4 5 7 10 Symbol 2 3 4 5 7 10 Class 3 Class 2 Class 4 Electrical entry G Grommet C Conduit Refer to the below table for orifice and port size combinations.

S070

Base mounted manifold bar base SS07 3 B01 08 C SS073B01-04C 1 set Manifold Base no. Valve no. Ports S070B-5BG 3 set 3 port 3 SS070B-10A 1 set Blanking plate assembly no.

Multi-Axis Step Motor Controller

3 ENC c Encoder connector (16 pins) Axis 3: Connect the actuator cable. !4 MOT c Motor power connector (6 pins) !5 CI Control power supply connector *1 Control power supply (+), All axes stop (+), Axis 1 lock release (+), Axis 2 lock release (+), Axis 3 lock release (+), Common () !

Micro-Mist Separator with Prefilter Series AMH

L ~ ::;; '" O.06I---+--+---+---:>I"--+-::-::c:-::!-l ~ / /o~la ~ / /v 0.7MPa ~ /-Y ~0.04 V ~ 0.04 f-i-,I"''---c,..-f'''---c-l---l-l ~ /~/ VI Q) a. 0.3MPa_0.5MPs_ ~ 80021-W'--+---+---+0.3MP.~-1__1 ~ Max.fIowline ---o.7MPa 8 0.02 Max.fIow line ~~_-0.5M!,a -I _:---..

CXS

A C MTS D-F9W, D-M9 D-A93 D-A90, D-A96 D-M9V, D-F9WV Bore size (mm) CXSJ15 to 32 B D A 15.5 25.5 31.5 39 40 49 D 9.5 7 0 3 5 5.5 C 9.5 19.5 25.5 33 34 43 B 6 9 11 11.5 B 0.5 3 10 13 15 15.5 A 15.5 25.5 31.5 39 40 49 A 19.5 29.5 35.5 43 44 53 C 11.5 21.5 27.5 35 36 45 D 5.5 3 4 7 9 9.5 D 8 5.5 1.5 4.5 6.5 7 B 6 9 11 11.5 B 0.5 3 10 13 15 15.5 C 13.5 23.5 29.5 37 38 47 C 11 21 27 34.5 35.5

CXS

A C MTS D-F9W, D-M9 D-A93 D-A90, D-A96 D-M9V, D-F9WV Bore size (mm) CXSJ15 to 32 B D A 15.5 25.5 31.5 39 40 49 D 9.5 7 0 3 5 5.5 C 9.5 19.5 25.5 33 34 43 B 6 9 11 11.5 B 0.5 3 10 13 15 15.5 A 15.5 25.5 31.5 39 40 49 A 19.5 29.5 35.5 43 44 53 C 11.5 21.5 27.5 35 36 45 D 5.5 3 4 7 9 9.5 D 8 5.5 1.5 4.5 6.5 7 B 6 9 11 11.5 B 0.5 3 10 13 15 15.5 C 13.5 23.5 29.5 37 38 47 C 11 21 27 34.5 35.5

MXQ

8 q @0 !2 e !3 !5 MX MTS t !6 r u y w !

VM

turned ON, even though C turns ON, the output 3 will not be turned ON.

REC

D RS Q G C 22 30 35 37 0.5 Graph (2) Applicable Max.

Compact Hydraulic Cylinder

0 i q y !3 !2 !1 u !4 t w e !5 Rod end male thread CHQB32 to CHQB100 r o !0 y q !2 !1 !4 u t !3 e w !5 Rod end male thread Description Material Note Parts List Replacement Parts: Seal Kit No. Bore size (mm) Seal kit no.

VXD21/22/23

VXD2390-50 Size PAX C D, T G, C T 1 4 3 8 1 2 3 4 S Note) S L, Z S L, Z PB Thread AC 1 32A 40A 50A Flange DC Note) Surge voltage suppressor is attached in the middle of lead wire.

CE

7 w @5 q y !3 @3 r t @5 e !1 @1 @1 @4 @6 !4 @6 !4 u @8 !5 @0 !8 !9 i Parts list Parts list Description Material Note Description Material Note No. No.

Slider Type Ball Screw Drive/11-LEFS Series

plug connector*3 MJ LECPMJ*2 *3 !

Mechanically Jointed Rodless Cylinder With Protective Cover Series MY1  W ø16, ø20, ø25, ø32, ø40, ø50, ø63 1

3 !1 u t q w e y !2 i r !4 !0 MX MTS MY CY !9 !8 !5 !7 MG Courtesy of Steven Engineering, Inc.-230 Ryan Way, South San Francisco, CA 94080-6370-Main Office: (650) 588-9200-Outside Local Area: (800) 258-9200-www.stevenengineering.com CX MY1WK with side seal D@5 @0 @3 @4 @2 @1 -X 20Data Component Parts No. q w e r t y u i o !0 !

Mechanically Jointed Rodless Cylinder With Protective Cover Series MY1  W ø16, ø20, ø25, ø32, ø40, ø50, ø63 1

3 !1 u t q w e y !2 i r !4 !0 MX MTS MY CY !9 !8 !5 !7 MG CX MY1WK with side seal D@5 @0 @3 @4 @2 @1 -X 20Data Component Parts No. q w e r t y u i o !0 !

XL

Valve side exhaust 18 High Vacuum Angle Valve Series XLG, XLGV Dimensions Dimensions (mm) 1in=25.4mm (b) XLG/Air operated type C D E C E E Fn (KF flange) Fd (K flange) (a) (c) G H J B Heater (optional) A A (mm) (mm) H 40 G 17 26 41 52 70 83 Fd Fn 30 40 55 75 87 114 D 1 1 2 2 3 3 C 38 48 66 79 100 117 B 110 120 171 183 209 250 A 40 50 65 70 88 90 A B C D Fn Fd G H 40 Note 1) E J E Note 1)

V

E ZPT20U C 20 23 14 3 19 25 45 8 3.5 24 15 40 12 4 1.7 F:M5x0.8 F:M6x1 Model A B C Y ZPT25U C 25 28 14 3 19 25 45 8 3.5 24 15 40 12 4 1.8 D E G D E G ZPT32U C 32 35 14.5 3 19.5 25 45 8 3.5 24.5 15 40.5 12 4.5 2.3 ZPT02U 2 2.6 1.2 D E E P T Y P E 0.8 ZPT04U 4 4.8 1.6 3 19 7 4 20 8 ZPT06U 6 7 H:M6x1 H:M8x1 2.5 Model A B D Y ZPT08U 8 9 1 A E F G I C E F G I ZPT25D 25 28 20 3 25.5 25 51 8 3.5

CLQ

3 @0 CNS CLS Section B-B' (Both ends tapped) CLQ MLGP Retraction locking Section B-B' (Through-hole) !4 !7 !8 #3 RLQ MLU ML1C D-X 20With bumper Rod end male thread Data Note) The sectional drawing above shows the locked condition. Component Parts No. q w e r t No. !7 !8 !

Series 10-, 21- AW-B Filter Regulator

44 44 44 44 72.4 85.6 91.7 93.2 175.5 11 10.5 10.5 8 6.5 91.4 121.9 153.9 155.9 242.6 25.5 24.8 28.9 30.4 42.2 40 53 70 75 95 5 3.5 1.5 1.2 3.2 1/8, 1/4 1/4, 3/8 1/4, 3/8, 1/2 3/4 3/4, 1 1/8 1/8 1/8 1/8 1/8 M28 x 1 M38 x 1.5 M42 x 1.5 M42 x 1.5 26 29.4 37.3 37.3 43.3 Note) The dimension of C is the length when the filter regulator knob is unlocked. 1082 A