CL

11 22 52 100.5 8 CLQ H GR H1 I N NA K L P PG PH PL PW RR S U Z ZZ MM NN Bore size (mm) 1/8 1/8 1/8 1/4 20 4 22 19.5 20 38 9 127 14 198 207 41 5 28 5 30 M8 x 1.25 15 24 M20 x 1.5 MLGP 25 7 27 24 24 41 9 137 14 212 221 45 6 33.5 5.5 30 M10 x 1.25 15 30 M26 x 1.5 32 7 27 24 24 41 9 139 14 214 223 45 6 37.5 5.5 30 M10 x 1.25 15 34.5 M26 x 1.5 RLQ 40 7 29 24 24 41 11 167 18 256 267 50 8 46.5

MU

Single Clevis (Double clevis pivot bracket) Double Clevis (Single clevis pivot bracket) DDH10 8 10 10 14 14 DJ 7 10 10 14 16 DI 17 22 27 32 38 CDH10 8 10 10 14 14 DH 11 13 13 17 19 CJ 7 10 10 14 16 DF 4 7 10 12 14 CI 17 22 27 32 38 CH 11 13 13 17 19 DE 3.5 3.5 3.5 5.5 6 DB 23 27 31 37 48 CF 4 7 10 12 14 DA 53 67 85 103 122 CE 3.5 3.5 3.5 5.5 6 CB 23 27 31 37 48 CA 53 67 85 103 122 Part no

CJ2

(mm) GB 5 5 GA 14.5 8 8 FZ 32 32 42 FY 14 14 20 FX 24 24 33 FT 1.6 1.6 2.3 FC 4.5 4.5 5.5 FB 13 13 19 F 8 8 8 D 3 4 5 T 3 NN M6 X 1.0 M8 X 1.0 C 14 14 20 S 49 46 47 MM M3 X 0.5 M4 X 0.7 M5 X 0.8 B 12 12 18 NB 7 9.5 9.5 H 28 28 28 A 15 15 15 NA 16 12.5 12.5 Z 77 74 75 Bore 6 10 16 M10 X 1.0 With air cushion/Dimensions not mentioned in the below table are the same as the above table.

High Purity Fluoropolymer

Model G F B H L E M M H LQ1T2A LQ1T1A 2 1/8" 10 11.5 18.5 8 4 1/2" 3/4" 3/8" 1/2" 1/4" 3/8" 1/8" 3/16" 1/4" LQ1T3B LQ1T3A LQ1T2C LQ1T2B 15 16.5 28 14 12 6 4 25 1 5 Class 6 23 36.5 17 18 9 20 LQ1T4A LQ1T4B 6 28 11 22 21 45 20 LQ1T6B LQ1T6A LQ1T5B LQ1T5A 7 29 39 26 28 14 54 3/4" 1" 8 39.5 49 18 36 36 69.5 14 Series LQ1 Dimensions Panel Mount Union: LQ1P Metric sizes Applicable tubing O.D.

Cylinder with Lock

Bore size B DA DB DL DU DC DX DE DO DR DT DS DH Z DD H10 32 219 40 237 50 268 63 280 80 351 100 371 MB-B03 32 46 42 32 22 10 44 14 62 9 6.6 15 7 33 213 10+0.058 0 40 52 42 32 22 10 44 14 62 9 6.6 15 7 33 231 10+0.058 0 MB-B05 50 65 53 43 30 11.5 60 20 81 10.5 9 18 8 45 260 14+0.070 0 63 75 53 43 30 11.5 60 20 81 10.5 9 18 8 45 272 14+0.070 0 MB-B08 80 95 73 64 45 14 86 30 111 12.5 11 22 10

MGG

Dimensions 20 to 50 Reinforcing bracket Mounted in case of 301mm or longer strokes (mm) Width across flats HT Front mounting flange Bore size (mm) R Y HS HT HU B 14 108 28.5 14 30.7 20 14 108 31 14 33.2 25 14 110 34.5 14 36.5 32 HS C D 15 121 39 14 41 40 View C-C' 16 136 49.5 17 46.2 50 16 139 56.5 17 53.2 63 HU 23 165 75.5 23 62.2 80 D' C' 23 165 86 26 72.7 100 A Dimensions other than the

4 Port Direct Operated Poppet Solenoid Valve Series VQD1000 1

Refer to page 3-3-14.

Rubber seal Series 10-SYJ3000/5000/7000 4/5 port solenoid valve

-7 SYJ3000-14-6 SYJ3000-14-2 Note) Please insert the protrusion for positioning of the manifold gasket into the hole of the valve body completely.

ITV

G PPA ITV203 0.005 to 0.5 MPa 14-8-14 1/4, 3/8 AL ITV205 0.005 to 0.9 MPa Series ITV3000 ITV301 0.005 to 0.1 MPa Controls air pressure steplessly in proportion to an electric signal. ITV303 1/4, 3/8, 1/2 0.005 to 0.5 MPa 14-8-14 ITV305 0.005 to 0.9 MPa Series ITV209 Controls vacuum pressure steplessly in proportion to an electric signal.

NCA1

, 16, 18, 20 1, 2, 3, 4, 5, 6, 8, 10, 12, 14, 16, 18, 20, 24 1, 2, 3, 4, 5, 6, 8, 10, 12, 14, 16, 18, 20, 24, 28 Smooth movements even at 0.4 to 2 inch/sec Auto switch mounting available.

NCA1

, 16, 18, 20 1, 2, 3, 4, 5, 6, 8, 10, 12, 14, 16, 18, 20, 24 1, 2, 3, 4, 5, 6, 8, 10, 12, 14, 16, 18, 20, 24, 28 Smooth movements even at 0.4 to 2 inch/sec Auto switch mounting available.

High Purity Fluoropolymer Fittings HYPER FITTING ® Series LQ1 1

Model N L L E J M H W ( T ) 3 TI/ TIL 12 10 19 12 25 19 LQ1F41 LQ1F42 LQ1F51 LQ1F52 LQ1F61 LQ1F62 60 53 34 28 33.1 12 30 21 PA 65.2 58 SMC (W) (M) N J SMC 58 41 40 14 32 36 26 PAX 63.2 3/4 19 69 51 81.5 49 14 39.5 36 H (E) (T) PB JIS 10K flange Class 4, 5 Inch sizes Applicable tubing O.D.

MU

MU-D02 MU-D03 MU-D04 MU-D05 MU-D06 8 10 10 14 14 8 10 10 14 14 +0.058 0 +0.058 0 +0.058 0 +0.070 0 +0.070 0 +0.058 0 +0.058 0 +0.058 0 +0.070 0 +0.070 0 Applicable pin DZ 8 10 10 14 16 CZ 8 10 10 14 16 DY 9 11 13 16 16 CX 9 11 13 16 16 DX 18 22 26 32 32 CT 9.5 11 14 17 20 DT 9.5 11 14 17 20 CR 5.3 6.4 8.4 10.5 13 DR 5.3 6.4 8.4 10.5 13 CL 26 42 54 64 72 DL 26 42 54 64 72 Part No.

CG5-S

41 10.5 20 25.6 30 20 12.8 14 IY-G03SUS +0.5 +0.3 +0.058 0 +0.070 0 10 10 18 18 I-G04SUS Y-G04SUS 40 40 M14 x 1.5 42 14 22 30 M14 x 1.5 12 14 42 16 22 41.6 30 36 12 14 IY-G04SUS +0.5 +0.3 +0.5 +0.3 14 14 22 22 I-G05SUS Y-G05SUS 50, 63 50,63 M18 x 1.5 56 18 28 40 M18 x 1.5 16 20 56 20 25 50.6 40 44 16 20 IY-G05SUS +0.070 0 18 18 28 28 I-G08SUS Y-G08SUS 80 80 M22 x 1.5 71 21 38 50 M22 x 1.5

Air Preparation Equipment Degrees of quality Max. particle diameter ( µ m) Min. pressure dew point ( ° C) Max. oil density (mg/m 3 ) International Standard ISO 8573-1: 1991 Degrees of Quality Japanese Industrial Standard JIS B 8392-1: 2000 Degrees of Qual

AT11C-06 AFF8B-04 IDF8DAM350-04 AMD350-04 11 1.5 HAA15-10 HAW22-14 AT11C-06 AFF8B-06 IDF11CAM350-06 AMD450-06 15 2.0 HAA22-14 HAW22-14 AT22C-14 AFF11B-06 IDF15CAM450-06 AMD450-06 22 3.0 HAA37-14 HAW37-14 AT22C-14 AFF22B-10 IDF22C1-3 AM550-10 AMD550-10 27 3.5 HAA37-14 HAW37-14 AT37C-14 AFF22B-10 IDF22C1-3 AM550-10 AMD550-10 37 5.0 HAW55-20 AT37C-14 AFF37B-14 IDF37C1-3 AM650-14 AMD650-14

C85

15.5 57.5 57.5 16 14 15.5 82.5 82.5 16 14 15.5 15 D-A7H/A80H D-A73C/A80C D-F7/J79 D-F7W/J79W D-F7V D-F7WV D-J79C/A72 D-F7BAL D-F79F Hs 15.5 31 46.5 16 20 25 8 10 12 8(33) 8(33) 14 12 13.5 58 58 14 12 13.5 83 83 14 12 13.5 D-H7 D-H7C D-H7W D-H7BAL D-H7NF (mm) C85 Auto Switch Mounting Height D-A7 D-A80 D-A7H/A80H D-F7/J79 D-F7W/J79W D-F7BAL D-F79F D-F7V D-F7WV D-F7BAVL D-C7/C80 D-H7 D-H7W

Mechanically Jointed Rodless Cylinder Series MY3 ø16, ø25, ø40, ø63 1

(Refer to page 8-14-26.)

CG5-S

20 25.6 30 M10 x 1.25 20 12.8 14 IY-G03SUS +0.5 +0.3 +0.058 0 +0.070 0 I-G04SUS Y-G04SUS 40 40 10 10 18 18 M14 x 1.5 42 14 22 30 M14 x 1.5 12 14 42 16 22 41.6 30 36 12 14 IY-G04SUS +0.5 +0.3 +0.5 +0.3 I-G05SUS Y-G05SUS 50, 63 50,63 14 14 22 22 M18 x 1.5 56 18 28 40 M18 x 1.5 16 20 56 20 25 50.6 40 44 16 20 IY-G05SUS +0.070 0 I-G08SUS Y-G08SUS 80 80 18 18 28 28 M22 x 1.5 71 21 38 50 M22 x

Cylinder with Lock Series MNB

L1 E1 R1 U1 A1 U1 R1 A MM NDH10 NZ MM NDH10 NX NX E1 L1 30 40 50 60 60 20 22 28 40 40 12 12.5 16.5 23.5 23.5 16 19 24 34 34 32 40 50, 63 80 100 32 40 50, 63 80 100 14 19 24 26 26 10 11 14 20 20 16 19 24 34 34 40 50 64 80 80 M10x1.25 M14 x 1.5 M18 x 1.5 M22 x 1.5 M26 x 1.5 M10 x 1.25 M14 x 1.5 M18 x 1.5 M22 x 1.5 M26 x 1.5 10 10 14 22 22 14 14 20 30 30 28 28 40 60 60 10 10 14 22 22 14 14 20

JIS Standard Hydraulic Cylinder Series CH2E/CH2F/CH2G/CH2H

(mm) With rod boot Bore size (mm) Stroke range (mm) l J B BB C F GA GB M NA NB P R S CD LH LT LW LX X Y Z SS e f Q 32 M10 x 1.25 58 109 38 14 21 15 11 37 31 3/8 39 130 11 35 14 13 88 29 14 98 57 52 21.5 15 25 to 1400 1/3.5 stroke 40 M10 x 1.25 65 118 45 10 21 15 11 36 30 3/8 42 130 11 37.5 14 13 95 29 14 98 57 52 12 15 25 to 1400 50 M10 x 1.25 76 145 52 10 27 19 11 43 35 1/2 46 142 14 45