PSxx-OMU0008CN

51 g 48 g 47 g 54 g 46 g () 77 g 78 g 74 g 65 g 81 g 72 g +40 g 110 -5Pam 3/s 110 -10Pam 3/s 0.15 mm 2(AWG26) 1.0 mm (5 ) 3.5 -78No.PS-OMU0008CN-D 02 48.4 N02 48.9 42.6 7 M50.8 5 02R1/4 N02NPT1/4 -79No.PS-OMU0008CN-D F02 C01 M50.8 5 Rc1/8 G1/4 A2 B2 URJ1/4 TSG1/4 -80No.PS-OMU0008CN-D 02L 22.6 12 M50.8 5 02R1/4 N02LNPT1/4 -81No.PS-OMU0008CN-D F02L C01L Rc1/8 M50.8

BP1000

A Connections in A mm FV4 MV4 FV6 MV6 1.85 01 47.0 2.35 01 59.7 Hastelloy is a registered trademark of Haynes International.

AS-FPQ/AS-FPG

A (2) AS121FP-M5-04 AS121FP-M5-06 AS221FP-01-04 AS221FP-01-06 AS221FP-01-08 AS221FP-02-04 AS221FP-02-06 AS221FP-02-08 AS221FP-02-10 AS321FP-03-06 AS321FP-03-08 AS321FP-03-10 AS321FP-03-12 AS421FP-04-10 AS421FP-04-12 4 8 10.4 22.2 17 27 7 7 12.2 28.8 26 M5 x 0.8 9.6 25.2 22.4 6 12.8 23.2 18.5 8 8 28 (12.2) (28.8) (26) 4 10.4 24.3 17 17 17 31.4 13.4 35.5 30.5 6 R 1/8 12 14.2 32.4 27.4 12.8

AS-FPQ/AS-FPG

A (2) AS121FP-M5-04 AS121FP-M5-06 AS221FP-01-04 AS221FP-01-06 AS221FP-01-08 AS221FP-02-04 AS221FP-02-06 AS221FP-02-08 AS221FP-02-10 AS321FP-03-06 AS321FP-03-08 AS321FP-03-10 AS321FP-03-12 AS421FP-04-10 AS421FP-04-12 4 8 10.4 22.2 17 27 7 7 12.2 28.8 26 M5 x 0.8 9.6 25.2 22.4 6 12.8 23.2 18.5 8 8 28 (12.2) (28.8) (26) 4 10.4 24.3 17 17 17 31.4 13.4 35.5 30.5 6 R 1/8 12 14.2 32.4 27.4 12.8

NCQ8

B A HS 056 HS B A B A 075, 106 HS B A B A 150, 200, 250 Note 1) Figures in the table below are references for auto switch mounting positions in the stroke end detection.

Microspeed Cylinder

When a load, such as a relay or solenoid valve, which generates surge is directly driven, use a type of switch with a built-in surge absorbing element. 8.

Speed Controller with One-touch Fitting for Clean Room Series AS-FPQ/AS-FPG

D2 M1 L1 L2 T M5 type H (width across flats) Applicable tubing O.D. d A A4 D1 L3 D2 M1 L1 T L2 Model Weight (g) Note 2) Tubing O.D. d T H D1 D2 L1 L2 L3 M1 L4 Max.

Direct Operated Precision Regulator Series ARP20/30/40  Sensitivity: Within 0.2% F.S.  Expanded lineup  ARJ 3 types of set pressure and the body size AR425  Energy saving, Air consumption: allow more freedom in designing a circuit. to 935 80% reduct

2 OUT A IN OUT t BLEED A-A w y Note Component Parts Material No.

Series ARP20 to ARP40 10- 10- 21- 21- Direct Operated Precision Regulator Series ARP20K to ARP40K 10- 10- Direct Operated Precision 21- 21- Regulator with Backflow Function

Example) 10-ARP30K-03BG-1RY Clean room compliant, copperfree, fluorine-free, silicone-free Clean room compliant Symbol Description 20 30 40 Body size 20 30 40 Body size Nil K Without backflow function With backflow function With backflow function + Nil N F Thread type Rc NPT G + 01 02 03 04 1/8 1/4 3/8 1/2 Port size + Nil B Note 2) H a Without mounting option With bracket With set nut (For

Series 10-, 21- ARP20 to 10-, 21- ARP40 Direct Operated Precision

Example) 10-ARP30K-03BG-1RY Clean room compliant, copperfree, fluorine-free, silicone-free Clean room compliant Symbol Description 20 30 40 Body size 20 30 40 Body size Nil K Without backflow function With backflow function With backflow function + Nil N F Thread type Rc NPT G + 01 02 03 04 1/8 1/4 3/8 1/2 Port size + Nil B Note 2) H a Without mounting option With bracket With set nut (For

PSxx-OMG0001CN

PSE330 gPSE3T50 g 5 4.1 2 m 2 0.2 mm 1.12 mm CEUL/CSARoHS [mA] [V] A B E 0-101 kPa 0 -101 kPa 10.1 kPa -100100 kPa -100 kPa 100 kPa 0100 kPa 0 100 kPa -10 kPa 01 MPa 0 1 MPa -0.1 MPa 0500 kPa 0 500 kPa -50 kPa C D F 02 kPa 0 2 kPa -0.2 kPa -32No.PS-OMG0001CN-H 4 A -33No.PS-OMG0001CN-H 0.56 mm 2 n 31n +3.5n -1 2 n 31n +3.5n -1 -34No.PS-OMG0001CN-H PSE3T 90 -35No.PS-OMG0001CN-H

Shuttle Valve/AND Valve with One-Touch Fittings

Output Output 3 B Output 1 Output 2 A B C A B A Dimensions (mm) 1in = 25.4mm 1g = 0.0353 oz D3 Metric sizes: Light gray Inch sizes: Orange D2 L5 M2 IN Blue L3 L2 L4 OUT IN D1 M1 Applicable tubing O.D. d M1 L1 Metric sizes: Light gray Inch sizes: Orange Metric sizes Weight g Model d D1 D2 L3 L2 D3 L1 L4 L5 M1 M2 VR1210F-23 3.2 11.4 8.4 52 6.2 19.4 29.8 17.5 12.7 12.9 21.4 VR1210F-04 4 12.8

Shuttle Valve/AND Valve, with One-Touch Fittings, SeriesVR12

F

Output Output 3 B Output 1 Output 2 A B C A B A Dimensions Metric sizes: Light gray Inch sizes: Orange D2 L5 M2 IN Blue L3 L2 L4 OUT IN D1 M1 M1 Applicable tubing O.D. d L1 Metric sizes: Light gray Inch sizes: Orange D3 Metric sizes Weight g Model d D1 D2 L3 L2 D3 L1 L4 L5 M1 M2 3.2 11.4 8.4 52 6.2 19.4 29.8 17.5 12.7 12.9 21.4 VR1210F-23 4 12.8 10.4 56 20.3 32.2 21.9 15.7 15.8 25.2 VR1210F

VXA31/32

Option Symbol and Composition Fluid Name and Option Option symbol and body material Brass Stainless steel Option symbol Seal material Body material Support material (Driving parts) Standard A B G H J M (Non-leak) N P V (Non-leak) Fluid (Application) V M Silicon oil A H NBR FKM EPDM NBR FKM EPDM FKM FKM EPDM FKM Note 1) Note 1) Vacuum (up to 1.3 x 101 Pa) Fuel oil (up to 60C) Brass A H V M

Serial Transmission System Series EX250 Series EX500

A One-touch fitting for 12 is attached to each port.

ZQ-OM01401

SY100-30-A A X T6 61 -12 A *x2 23 - No.ZQ-OM01401-B 2 () ZQ-ZSEA M G K-2-A (1) (2) (3)(4) (5) (1) [kPa] EA NPN2 EB PNP2 0 to -100 EC NPN1 + EE PNP1 + FA NPN2 FB PNP2 FC NPN1 + -100 to 100 FE PNP1 + 1) NPN1 + VA 1) PNP1 + VB 1 2) 2) M SI (kPa) 2) 3) (:psi) P 2) (99 10 ) 3) (1) VAVB (3) G 2m) W (2m) 4) (4) (5) (V ) 0 (M5x0.8) 5) K 1 3.2 () 4) 5) (1) VAVB 2 4 () 3 6 (

3 Port Direct Operated Solenoid Valve Metal Seal, Body Ported/Base Mounted 1

How to Calculate the Flow Rate For obtaining the flow rate, refer to page 4-1-6. 4-16-1 2 Series VS3115/3110 How to Order VS311 D L 5 01 5 Thread type Accessory (Option) Nil Rc Mounting With indicator light L P With manual override N NPT T NPTF E Nil Without bracket Port size Piping Electrical entry B With bracket G 1 8 Rc 1 4 Rc 1 4 Rc 3 8 Without sub-plate Rc 01 02 02 03 00 Body ported

5 Port Solenoid Valve Series SQ1000/2000

How to Order Applicable Valves B C6 SQ 1 3 5 1 Y 1 Series SQ1000 C H G B A D F E A A A A B A B 2.PUSH 2.PUSH 1.TURN 1.TURN D Coil voltage Type of actuation A 5 24VDC 2 position single 2 position double (latching/double solenoid) 3 position closed center 3 position exhaust center 3 position pressure center Dual 3 port valve N.C. + N.C. Dual 3 port valve N.O. + N.O.

Speed Controller: Standard Type Series AS Elbow Type (Metal Body) 1

Description Material Note q Zinc alloy Body A w Brass Handle Electroless nickel plated e Brass Body B Electroless nickel plated r Brass Needle Electroless nickel plated t Brass Needle guide Electroless nickel plated y Brass Seat ring (1) Electroless nickel plated(3) u Brass(2) Lock nut i U seal NBR o O-ring NBR !0 O-ring NBR !1 O-ring NBR 01 to 04 type !2 Bushing PBT 01 to 04 type !

AZ1000

[Check valve] A check valve is a safety device intended to prevent reverse flow. The AP 64 is a unique design with only one moving part in the gas stream, an O-ring. It is a springless design, free of springs and poppets. [Vacuum generator] A venturi device that creates vacuum by flowing gas through a nozzle.