MHF2

thread depth 12 Mounting thread 6 127.5 5 Finger closing port M5 x 0.8 50 142 2-M5 x 0.8 thread depth 5.5 122 26 10.6 Mounting thread E 20 20 24 33 E 0 -0.1 1.2 4-4.3 through (mounting hole) 27 37 1.2 37 M5 x 0.8 Finger opening port 4-7.5 +0.1 0 Close: 0 E-E Open: 641 8-M4 x 0.7 thread depth 4 106 Attachment mounting thread 4-M5 x 0.8 thread depth 5.5 Mounting thread 20 43 Groove for auto

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E Approx. 300 M M Approx. 280 E C C VXE2 VXED2 VXEZ2 G1/2 A A L L OUT IN OUT IN B B (D) K J F H K J (D) F H 2 x P Port size 2 x P Port size Conduit terminal: T DIN terminal: D M N E (N) (M) E C C 25 32 31.5 (44) A A G1/2 L L G1/2 OUT IN OUT IN Applications B B (D) F H (D) F H K J K J 2 x P Port size Cable 6 to 12 2 x P Port size With bracket e a g d Bracket h b i (mm) Model A B C D E F H

3 Way,3 Port Solenoid Valve NVZ Series

(l\.,15) 0.15 (70) A-R 0.05 Body ported type NVZI2SSg-M5 N.O. 0 70PSl (0 -5kgt/cm'?) 22tn-f,g 85PSl VAC -55PSl R A 0.034 0.034 Note IncaseofNV1l20 supplyarlo R porl.

CXWM/CXWL

A B C D E F A B C D E F G H Pressure port Pressure port Right Left Left Right Left Right Right Left Left Right Right Left Left Right Operating direction Operating direction There are 9 possible reciprocating piping methods. There are 16 possible reciprocating piping methods.

Electric Actuator Triple Axis P&P Unit

+191 D section detail (S=2/1) L Stroke+214 26 10 10 (92) 14 2-M5 x 0.8 Effective screw length 10 61 60 57 31 12 6 Reference plane 63.5 62.5 3 3 130 4-M5 x 0.8depth10 F-M5 x 0.8depth10 3-4H10depth5 4-6.5 20 20 12.5 C 31 63.5 13.5 E-100 4H10depth5 5 (26) (44) 110 100 Stroke69 (Stroke+131) 10 208 (For 200 to 1000 strokes) 85 (For 100 to 150 strokes) 92 C section detail (S=2/1) Dimension table

Series 10-SQ1000 5 Port Solenoid Valve Plug-in Unit

Note 4) Note 3) 5 station weight (g) Port size Note 1) Applicable solenoid valve Connection type Applicable stations Base model A, B P, R Port size Port location C3 (For 3.2) C4 (For 4) C6 (For 6) M5 (M5 thread) F kit: D-sub connector 420 20 1 to 12 stations Side 1 to 12 stations 26P P kit: Flat ribbon cable 420 20 20P 1 to 9 stations C8 (For 8) 10-SS5Q13-10-SQ131 J kit: Flat ribbon cable

3 Port Solenoid Valve Metal Seal/Rubber Seal, Base Mounted Series VQZ100/200/300 21

Body Aluminum die-casted q Metal seal Spool/Sleeve Stainless steel w Rubber seal Spool valve Aluminum/HNBR Piston Resin e Pilot valve assembly r For How to Order Pilot Valve Assembly, refer to page 4-14-41. 4-14-29 Base Mounted 30 Series VQZ100/200/300 Dimensions: VQZ100 Single unit Grommet (G): VQZ115(R)-G-01 23.4 mounting hole M5 x 0.8 external pilot port 53 14.5 14.5 (Only external pilot

Compact Cylinder

J E I T D M Flat washer 4 pcs.

Magnetically Coupled Rodless Cylinder Low Profile Guide Type Series CY1F ø10, ø15, ø25 1

Determination of load's kinetic energy (E) bore size E > Es E Es Determination of bore size Review of larger bore size E = m E 2 a ( ) 2 = (Refer to page 8-16-8.) 1000 P Ps P > Ps Determination of pressure for intermediate stop (p) (Refer to page 8-16-8.)

Magnetically Coupled Rodless Cylinder Low Profile Guide Type Series CY1F ø10, ø15, ø25 1

m3 x g Vertical mounting Mounting orientation Horizontal Ceiling Wall Vertical m1 m2 m3 m4 Static load m M3 M1 m1 x g x X m2 x g x X m4 x g x Z Static moment M1 m1 x g x Y m2 x g x Y m3 x g x Z y z M2 z Y m3 x g x X m4 x g x Y M3 m4 x g g: Gravitational acceleration Dynamic Moment z Mounting orientation Horizontal Ceiling Wall Vertical M1 x a x mn x g 1.4 100 Dynamic load FE 1 3 a Dynamic

Rubber seal 5 Port Solenoid Valve Series SYJ5000

Note) Do not replace SV111 (G, H, L, M, W) to SV115 (DIN terminal) and vice versa when replacing pilot valve assembly only. 27 Series SYJ5000 2 Position Single [ ]: AC G H Grommet (G), (H): SYJ5120-M5 With bracket SYJ5120-M5-F G H 37 30 3.5 G: Approx. 300 H: Approx. 600 (Lead wire length) 2-3.5 (For mounting) 63.1 [65.3] 41 19.5 18 25 + 19.7 11 B A 5 35.1 [42.1] M5 x 0.8 (A, B port) 2-2.6

VZ3000

A E Push type A Push-locking type E Dimensions: Single Dimensions: VZ1120-G-M5-X1 Push type A (Push type A) Manual override Manual override (Non-locking) (Mounting hole for manifold) Push-locking type E (Piping port) Manual override (Push-locking type E) ( ) Pressing makes the valve operate.

Compact

) Side Support Side support MYC-SA 2 x H D C B A G F E Model Applicable actuator A B C D E F G H MYC-S16A LEMC25 60.6 64.6 70.6 77.2 15 26 4.9 3.4 MYC-S25A LEMC32 95.9 97.5 107.9 115.5 25 38 6.4 4.5 A set of side supports consists of a left support and a right support.

3 Port Solenoid Valve Series VQ100 1

Dimensions Grommet VQ10-G-M5 (M3) 29.2 6.1 Manual override 4.9 12.4 14.8 E 2-2.7 mounting hole 12 3.7 18.1 (Lead wire length) 300 Locking type manual override 30.7 28 11 A P (5.9) (5.9) 7 ( 4 . 1 ) 5 5 5 4.9 9.7 4.9 3-M5, (M3) (18.1) ( ): M3 Broken line: Locking type manual override 4-12-10 11 3 Port Solenoid Valve Series VQ100 Dimensions L plug connector VQ10-L-M5 (M3) 35.1 Manual override

3 Port Solenoid Valve Series VQ100

Dimensions Grommet VQ10-G-M5 (M3) 29.2 6.1 Manual override 4.9 12.4 14.8 E 2-2.7 mounting hole 12 3.7 18.1 (Lead wire length) 300 Locking type manual override 30.7 28 11 A P (5.9) (5.9) 7 ( 4 . 1 ) 5 5 5 4.9 9.7 4.9 3-M5, (M3) (18.1) ( ): M3 Broken line: Locking type manual override 4-12-10 3 Port Solenoid Valve Series VQ100 Dimensions L plug connector VQ10-L-M5 (M3) 35.1 Manual override

3 Port Solenoid Valve Series VQ100 1

Dimensions Grommet VQ10-G-M5 (M3) 29.2 6.1 Manual override 4.9 12.4 14.8 E 2-2.7 mounting hole 12 3.7 18.1 (Lead wire length) 300 Locking type manual override 30.7 28 11 A P (5.9) (5.9) 7 ( 4 . 1 ) 5 5 5 4.9 9.7 4.9 3-M5, (M3) (18.1) ( ): M3 Broken line: Locking type manual override 4-12-10 11 3 Port Solenoid Valve Series VQ100 Dimensions L plug connector VQ10-L-M5 (M3) 35.1 Manual override

Stroke Reading Cylinder and Counter

D M E J F C X B + Stroke L Z M A + Stroke E T 2 x P (Port size) Q I Metal connector 15.5 M14 x 1 (mm) A B C D E F G H I J K Standard stroke Bore size (mm) 32 40 50 63 131 90 27 16 45 49.5 64 M14 x 1.5 14 4.5 14 50, 75, 100, 125, 150, 175, 200, 250, 300 177 136 27 16 52 57 71.5 M14 x 1.5 24 5 14 100, 125, 150, 175, 200, 250, 300, 400, 500 200, 300, 500 193 144 32 20 64 71 85.5 M18 x 1.5 25.5

Low Profile Guide Type

Coordinates and Moments z M3: Yawing M1: Pitching y x M2: Rolling Static Moment Ceiling mounting Horizontal mounting Wall mounting M2 M1 M1 M2 M2 M3 y x y x z x Y Y X X X Z m1 x g m2 x g m3 x g Vertical mounting Mounting orientation Horizontal Ceiling Wall Vertical m1 m2 m3 m4 Static load m m1 x g x X m2 x g x X m4 x g x Z Static moment M1 M3 M1 CY3B CY3R m3 x g x Z m1 x g x Y m2 x g x Y

VHK

L1 H 1(P) 2(A) C D E F G J K L3 L4 L5 L6 L2 Q 18 61.6 58.2 2.0 2.0 29 29.1 44.5 14.5 1 27 22 16.5 26 41 29.1 16.5 3.5 11 1.2 26 23 11 30 54 51 11 M5 M5 M5 VHK-B1A VHKm-01S-M5 VHKm-M5-M5 1 8 18 41 32.6 16.5 3.5 11 44.5 14.5 1 27 22 16.5 26 8.6 1.2 13 57 13 VHK-B1A VHKm-01S-01S 1 8 1 8 32.6 65.2 VHKm-02S-01S 18 41 71.6 39 32.6 39 78 16.5 3.5 11 9.0 9.7 1.2 39 13 47 62 66 17 VHK-B1A 44.5 14.5

Series SYJ500 Rubber seal 3 Port Pilot Solenoid Valve

DO Without connector Do not replace V111 (G, H, L, M, W) to V115 (DIN terminal) and vice versa when replacing pilot valve assembly only. 18 Series SYJ500 Body Ported [ ] for AC Grommet (G), (H): SYJ52G H -M5 With bracket: SYJ52G H -M5-F G: Approx. 300 H: Approx. 600 (Lead wire length) 55.6 [57.8] 37 M5 x 0.8 (A port) 33.5 2-3.5 (For mounting) 30 3.5 15.5 2.5 15 11 A 18 25 + Manual override