Free Mount Cylinder for Vacuum Series ZCUK HEP Related Equipment Port size A Stroke range (mm) 5 to 30 A' B C d D E F FK FL FY GA GC Model Air port Vacuum port M5 x 0.8 M5 x 0.8 M5 x 0.8 16.5 Note 1) Note 2) ZC(D)UKQ16 ZC(D)UKQ20 ZC(D)UKQ25 ZC(D)UKQ32 M5 x 0.8 M5 x 0.8 11 12.5 20 32 2 6 7 8 13 17 28 19 12 5 to 50 14 18 22 26 32 40 40 50 62 3 4 5 8 10 12 9 10 11 8 10 12 16 20 24 20 22 29 33 43.5 51.5 19 21.5 23 21.5 22 22.5 M5 x 0.8
B + Stroke L K 2 x 4-M6 x 1.0 effective depth 10 A + Stroke M W Rod end male thread H1 Rod end nut C1 X L1 Rod End Male Thread Bore size (mm) C1 X H1 L1 20 25 18.5 12 14 M8 x 1.25 22.5 15 17.5 M10 x 1.25 Basic Style A B C D E E1 E2 F H K L M Q W Bore size (mm) 20 25 Stroke range (mm) 15 to 50 36.5 32 7 10 36 18 21 15.5 M5 x 0.8 8 4.5 25.5 21 39 15 to 50 41.5 36.5 12 12 40 20 23.5 17 M6 x
g] Stations: n VV5FA3-40 SYA 5 (R), 3 (R) port 1/4 SYJA VZA Common EXH 2 to 20 stations W = 110n + 116 VFA340 VFA3000 VFA VFA 1 (P) port 1/4 VFRA 4 (A), 2 (B) port 1/4 VPA4 SYJA VV5FA5-40 PE port M5 x 0.8 VZA 5 (R), 3 (R) port 3/8 VTA Common EXH 2 to 10 stations W = 161n + 128 VFA544 VGA VFA5000 VPA 1 (P) port 3/8 VPA3 4 (A), 2 (B) port 1/4 Note) Supply pressure to 1(P) ports and exhaust
RLQB32-20 RLQB32-25 RLQB32-30 RLQB32-40 RLQB32-50 RLQB32-75 RLQB32-100 RLQB40-20 RLQB40-25 RLQB40-30 RLQB40-40 RLQB40-50 RLQB40-75 RLQB40-100 RLQB50-30 RLQB50-40 RLQB50-50 RLQB50-75 RLQB50-100 RLQB63-30 RLQB63-40 RLQB63-50 RLQB63-75 RLQB63-100 M5 x 90l M5 x 95l M5 x 100l M5 x 110l M5 x 120l M5 x 145l M5 x 170l M5 x 100l M5 x 105l M5 x 110l M5 x 120l M5 x 130l M5 x 155l M5 x 180l M6 x 120l
Body size 1 2 3 4 M5 standard 1/8, 1/4 standard 3/8 standard 1/2 standard Port size Type Symbol Cylinder side In the side of solenoid valve M5 01 02 03 04 F01 F02 F03 F04 U10/32 N01 N02 N03 N04 Elbow 2 M5 x 0.8 R 1/8 R 1/4 R 3/8 R 1/2 R 1/8 R 1/4 R 3/8 R 1/2 10-32 UNF NPT 1/8 NPT 1/4 NPT 3/8 NPT 1/2 M5 x 0.8 Rc 1/8 Rc 1/4 Rc 3/8 Rc 1/2 G 1/8 G 1/4 G 3/8 G 1/2 10-32 UNF NPT 1/8 NPT 1/4 NPT
Centralized piping on right R R L L R L Slide table actuation direction Centralized piping on left R L L R R L Slide table actuation direction 2. The plug position of the piping port can be changed to suit the operating conditions. When screwing in the plug for the second time, wrap a sealant tape around the plug to prevent leakage. (1) M5 First tighten lightly until the rotation stops.
When sum of load rate does not exceed 1, it is possible to use. n=1+2+3 1 < = < = 47 MXS Series Air Slide Table How To Select Allowable load: W(N) Fig.1 Overhung: Ln(mm), Correction value for moment center distance An (mm) Fig.2 Pitch moment Yaw moment Roll moment W My Mp Mr W W W Static moment Kinetic moment L1 A1 L3 A5 L2 A3 W Mp Mr My W W L3 A6 W L1 A2 L2 A4 W Mey Mep L2 A4 A2 L3 Work
MI W S q w B C A CEP1 r e CE1 OUT OUT e r IN IN w q CE2 Change to motion holding circuit ML2B OUT: Meter-out IN: Meter-in To hold the present motion at the time of power failure instead of performing a return to the specified stop point, change both 3 port valves to 5 port double valves and plug A or B port, whichever is open.
50/60 Hz 5 24 VDC 6 12 VDC V 6 VDC S 5 VDC R 3 VDC F G Supply valve/Release valve combination Pilot valve J K Supply valve Nil DC: 1 W (With indicator light: 1.5 W) AC Supply valve and release valve A Supply valve (N.O.)
High pressure type (1.0 MPa) Negative COM External pilot Low wattage type (0.5 W) Nil K N R Y Seal type 3 position closed center Note) For rubber seal type only.
0 i r t !2 !4 y e q !3 o w u !1 M: Rod end male thread 32 to 63 With auto switch (Built-in magnet) !0 !2 r t !4 y i e q !3 o w u 80, 100 With auto switch (Built-in magnet) !0 q w e r t y u i !2 !4 !3 Component Parts Replacement Parts/Seal Kit No. Description Material Note Cylinder tube Piston Bore size (mm) Kit no.
Remote off alarm 5 Fig.6-4 occurrence 6.1 How to Identify Alarm 6-1 A_HEC-OM-K001-1.7 Chapter 6 Alarms 6.2 Alarm indication BLINK E R R 1 4 T h e r m o s t a t A l a r m M O D E < S h u t o f f Fig. 6-1 Alarm indication in the event ERR14 occurs BLINK E R R 1 4 P B R a n g e M O D E < 2 . 0 C Fig. 6-2 Alarm indication in the event ERR14 occurs during PB range setting input LIGHT W R N P
0 r w i Purge air for dehumidification Purge air for dehumidification Component Parts Material Description No.
B + Stroke L K 2 x 4-M6 x 1.0 effective depth 10 A + Stroke M W Rod end male threads H1 Rod end nut C1 X L1 Rod end male threads mm Bore size (mm) C1 X H1 L1 20 25 18.5 12 14 M8 x 1.25 22.5 15 17.5 M10 x 1.25 Standard type mm A B C D E E1 E2 F H K L M Q W Bore size (mm) 20 25 Stroke range (mm) 15 to 50 36.5 32 7 10 36 18 21 15.5 M5 x 0.8 8 4.5 25.5 21 39 15 to 50 41.5 36.5 12 12 40 20 23.5
M N C D 4-O T Q 2-P E B S K L U W AA A I AP R X AB Y + Stroke J V Z + Stroke AC AD 8-AF AE For standard stroke (mm) Bore size (mm) Stroke range (mm) AC E D AF G AE AD AB AA N M F L K B J AP C H I A 20 25 32 40 50 75, 100, 125, 150, 200 M5 x 0.8 depth 10 16.5 92 60 9.5 depth 6 30 75 11 12 45 25 5.5 80 60 55 108 M8 x 1.25 depth 14 25 24 30 99 M6 x 1 depth 12 16.5 113 65 11 depth 8 30 85 13
Applicable bore (mm) A D L MM N R W B C H d Applicable bore (mm) Part no.
Applicable bore (mm) A D L MM N R W B C H d Applicable bore (mm) Part no.
MHR Symbol Specifications/Description Heat resistance (100C) Fluororubber seal Without magnet EPDM for seals, Fluorine grease Fluorine grease Grease for food MHK -X4 -X5 -X50 -X53 -X63 -X79 MHS MHC MHT MHY MHW -X MRHQ MA D663 Series MHY2 Construction Closed condition 10 16 20, 25 r o !8 e w !7 t !5 r o !8 e !6 w @0 !7 t !5 r o !8 e !6 w @0 !7 t !5 !0 u !2 i q !1 !4 y !9 !0 u !2 i q !1 !
r w y HA Purge air for dehumidification Purge air for dehumidification AT ID AMG Component Parts AFF Material Description No.
B + Stroke L K A + Stroke 2 x 4-M6 x 1.0 effective depth 10 M W Rod end male threads H1 Rod end nut C1 X L1 Rod end male threads mm Bore size (mm) C1 X H1 L1 20 25 18.5 12 14 M8 x 1.25 22.5 15 17.5 M10 x 1.25 Standard type mm A B C D E E1 E2 F H K L M Q W Bore size (mm) 20 25 Stroke range (mm) 15 to 50 36.5 32 7 10 36 18 21 15.5 M5 x 0.8 8 4.5 25.5 21 39 15 to 50 41.5 36.5 12 12 40 20 23.5