S070

Number No. r t y u i SS070A 01 1A O-ring FKM SS070A-80A-1 10 VFN Port size Clip Stainless steel SS070A-80A-2 10 With 3.18/2 barb fitting With 4/2.5 barb fitting 01 02 Metal joint Stainless steel SS070A-80A-3 10 Leaf spring Stainless steel SS070A-80A-4 10 Mounting bracket Stainless steel SS070A-80A-5 10 < U Side End Plate Assembly > w U side end plate assembly no.

MR Unit (Regulator with Mist Separator) AMR3000 to 6000 Series

Meanwhile, the clean compressed air in housing w passes through flow hole A of body q , it is reduced to a specified pressure by the pressure reducing valve, and is discharged from the OUT. !1 SRH MPa e SRP SMC t q SRF OUT IN ITV MC cartridge element u IC i Seperation element Flow hole A ITVH y Auto-drain type w ITVX !

Combination Cylinder

Description q w e r t y u i o !0 !1 !2 !3 !4 !5 !6 !7 !8 !9 @0 @1 @2 @3 @4 @5 No. Description q w e r t y u i o !0 !1 !2 !3 !4 !5 !6 !7 !8 !

CL

Description q w e r t y u i o !0 !1 !2 !3 !4 !5 !6 !7 !8 !9 @0 @1 @2 @3 @4 @5 No. Description q w e r t y u i o !0 !1 !2 !3 !4 !5 !6 !7 !8 !

MGC

e r t y u i o !

VQ7-6/7-8

0 t t r i u w y e q r i w e q VQ7-8-FG-DVQ7-8-FG-D-R !0 !0 t t r i w y e q r i w e q VQ7-8-D-R FHG FJG FIG VQ7-8-DFHG FJG FIG !0 !0 t t r i w y e q r i w e q VQ7-8-FPG-D!0 t r i w y e q o Replacement Parts (For valve) Description VQ7-8-FG-SVQ7-8-FG-DVQ7-8-FPG-DVQ7-8-FG-S-R VQ7-8-FG-D-R VQ7-8--D-R VQ7-8--DNumber q w e r t y u i o !

VQ5000

How to order single valves (example) T 5 04 VQ5100 Thread type (ports P, R and A, B ) Cylinder port size How to order valves (example) Nil N T F Rc NPT NPTF G VQ5100 R 5 04 External pilot specification How to order manifolds (example) VV5Q51 T 08 03 FU1 Thread type (ports P, R and A, B) Cylinder port size Nil N T F Rc NPT NPTF G External pilot port 2-Rc1/8 External pilot port Rc1/8

VQ7-6/7-8

VQ7-6-FG-SVQ7-6-FG-S-R o o t r u t r u w y e q w y e q Courtesy of Steven Engineering, Inc.-230 Ryan Way, South San Francisco, CA 94080-6370-Main Office: (650) 588-9200-Outside Local Area: (800) 258-9200-www.stevenengineering.com VQ7-6-FG-DVQ7-6-FG-D-R o o t r u t r u w y e q w y e q FHG FJG FIG FHG FJG FIG VQ7-6-DVQ7-6-D-R o o t r u t r u w y e q w y e q VQ7-6-FPG-Do t r u w y e q i Replacement

Air Cylinder

9 w y !8 e i u !6 !9 !5 o t !7 Long stroke t 20 to 32 With air cushion o r t !9 q !2 !4 w e !8 !3 !6 !9 !5 !1 @0 !7 i !0 Long stroke Component Parts Replacement Parts: Seal Kit Bore size (mm) Kit no. Contents 20 CG1KN20Z-PS Set of the nos. !7, !8, !9 No.

Rotary Actuator/Vane Style Series CRB1

63 90 S T79L XC1C30 With auto switch E W CD P With solenoid valve (Refer to page 127.)

AS-FPQ/AS-FPG

0 w w u TMH u r r ASD t e AS e !4 AS-FE !4 !3 KE !3 q q AS-FG i i y AS-FP AS-FP !5 AS-FM Meter-in type M5 type AS-D AS-T ASP ASN AQ ASV AK VCHC ASR ASQ Component Parts No.

AS-FPQ/AS-FPG

0 w w u TMH u r r ASD t e AS e !4 AS-FE !4 !3 KE !3 q q AS-FG i i y AS-FP AS-FP !5 AS-FM Meter-in type M5 type AS-D AS-T ASP ASN AQ ASV AK VCHC ASR ASQ Component Parts No.

VER2000/4000

6 q w e r t y u i Block packing !

AZ1000

q w q AZ1510S e q FV4 FV4 FV4 FV4 w FV4 FV4 FV4 FV4 r 2PW 3PW 3PW 4PW 0 1 1 MPA MPA 2PW 3PW 4PW 40 qIN wOUT eGauge port (Inlet) rGauge port (Outlet) 1) Refer to gauge guide (P.94) for gauge specifications.

Vacuum Unit Ejector / Vacuum Pump System

T is selected, select C, L, L1, Y for (6) Wiring Combinations.

A_HEC-OM-K001

Remote off alarm 5 Fig.6-4 occurrence 6.1 How to Identify Alarm 6-1 A_HEC-OM-K001-1.7 Chapter 6 Alarms 6.2 Alarm indication BLINK E R R 1 4 T h e r m o s t a t A l a r m M O D E < S h u t o f f Fig. 6-1 Alarm indication in the event ERR14 occurs BLINK E R R 1 4 P B R a n g e M O D E < 2 . 0 C Fig. 6-2 Alarm indication in the event ERR14 occurs during PB range setting input LIGHT W R N P

HRX-OM-R026

20-HRSH090-W-4014 Facility water temperature: 32 oC 12 Cooling capacity [kW] Facility water temperature: 40 oC 10 8 6 4 2 0 5 10 15 20 25 30 35 40 Circulating fluid temperature [] Fig. 9-7 Cooling capacity(HRSH090-W-20-HRSH090-W-40-) HRSH Series 9.4 Cooling capacity 9-11 HRX-OM-R026 Chapter 9 Documents Pump capacity 9.4.4 HRSH090-A-20/40-HRSH090-W-20/400.6 60 Circulating fluid pressure [MPa

Tie-rod Type Hydraulic Cylinder

T 2 x Rc P Cushion adjustment screw 4 x J GA Air release GA V V Width across flats G Width across flats G MM MM R (max.) d W W D d E E D M MA a a M MA F NA NA F K A A K C H + Stroke S + Stroke H B ZZ + 2 strokes (mm) Bore size (mm) B C A a d E D F G GA J K M MA MM NA P R S T V W H ZZ 0 0.018 0 0.021 0 0.021 0 0.021 0 0.025 0 0.025 0 0.025 0 0.062 0 0.062 0 0.074 0 0.074 0 0.074 0 0.074 0

Series VQ4000 Base Mounted Plug-in/Plug Lead Single Unit For details about certified products conforming to international standards, visit us at www.smcworld.com.

e q w VQC SQ VQ0 4 (B) 2 4 (B) 2 (A) (A) VQ4151 VQ4150 VQ4 VQ5 1 (P) (R1) (R2) 3 5 1 (P) (R1) (R2) 3 5 VQZ e q w e q w VQD 4 (B) 2 4 (B) 2 (A) (A) VQ4250 VQ4251 1 (P) (R1) (R2) 3 5 1 (P) (R1) (R2) 3 5 e q w r e q w r 4 (B) 2 4 (B) 2 (A) (A) VQ4351 VQ4350 1 (P) (R1) (R2) 3 5 1 (P) (R1) (R2) 3 5 4 (B) 2 (A) 4 (B) 2 (A) VQ4451 VQ4450 1 (P) (R1) (R2) 3 5 1 (P) (R1) (R2) 3 5 4 (B) 2 (A) 4 (B)

Base Mounted Type, VQ5000 Series, 5 Port Metal Seal/Rubber Seal Solenoid Valve

How to order single valves (example) T 5 04 VQ5100 Thread type (ports P, R and A, B ) Cylinder port size How to order valves (example) Nil N T F Rc NPT NPTF G VQ5100 R 5 04 External pilot specification How to order manifolds (example) VV5Q51 T 08 03 FU1 Thread type (ports P, R and A, B) Cylinder port size Nil N T F Rc NPT NPTF G External pilot port 2-Rc1/8 External pilot port Rc1/8