5 Port Solenoid Valve Series VFR2000/3000/4000/5000/6000 Material Description Pilot valve assembly AXT627-42-1 (M5 x 50) AXT627-10-1 VFR51 AXT627-10-1 VFR52 AXT627-42-1 (M5 x 50) AXT627-10-1 VFR53/54/55 8 NBR Hexagon socket head screw Gasket 9 10 AXT627-42-1 (M5 x 50) Refer to How to Order Pilot Valve Assembly on page 1298.
1.25 M14 x 1.5 JIS class 2 Standard stroke: mm M5 x 0.8 (10-32 nominal), Rc 1/8 M5 x 0.8 (10-32 nominal) 6 M3 x 0.5 M5 x 0.8 8 M4 x 0.7 M6 x 1.0 10 M5 x 0.8 M8 x 1.25 12 M6 x 1.0 M10 x 1.25 Female threads Rod end threads Female threads Rod end threads Male threads Male threads Rod end thread tolerance Stroke tolerance Port size Vacuum port, relief port JIS class 2 Rod end thread tolerance
M5 x 0.8 Thread depth 10 6 Metal connector M14 x 1 4 x M5 x 0.8 depth 6 (Bottom 4.3 through-hole) 7.5 counterbore depth 4 (500 or 3000) 25 5 Width across flats 8 70 0.5 7 3 10 18f8 6f7 3.8 44 17 27 18 SR3.5 26.6 3 18 M5 x 0.8 13 27 40 17 5 67.5 14.5 4 x M4 x 0.7 2 x M5 x 0.8 Thread depth 7.5 71.5 (Port size) 103 + Stroke 24 127 + Stroke 2 D-X 651 CEP1 Series Dimensions: 12 Foot type: CEP1L12
C Example) Bolt M5 x 45L: 4 pcs.
M5 x 0.8 Prepared hole diameter 4.2 20 W 0.50.05 D B Vacuum port M5 x 0.8 Piping port 2 x M5 x 0.8 33 32 10 J depth 1.5 3 5.5 5 12 9.5 +0.030 0 4 Section AA B D Mounting base side +0.030 0 depth 1.5 3 Q QL 11-/22-MXP12-25 Without magnet and switch rail 2 x M2 x 0.4 depth 3 8 5.7 3.5 L 20 20 6 x M4 x 0.7 depth 4.5 2 x M3 x 0.5 depth 3.5 (mm) G H J K L M Q QL S V W Z Model 11-/22-MXP12-15
length) Lead wire marking No.1 (+), No.2 () 0.75 mm2 5.9 17 ATEX Compliant Base Mounted Type Series 52-SY7000 Dimensions 2-position double L plug connector (L) 52-SY7240 (R) -L21 22.5 02 03 13.5 4 61 41.7 2 x 4.3 (Mounting holes) M5 x 0.8 (External pilot port) 21.5 21 Manual override 38 4 Insulation: Black () B A 23 23 E P B A 46 X Insulation: Red (+) EB EA P 21 69 21.5 M5 x 0.8 (Pilot EXH
lead type VQZ VZ VS 0.1 W with power saving circuit 150 (Lead wire AWG#26) 3.5 27 6 VFN 26 23.5 20.5 3 9.5 28.5 3.5 4-11-5 Series S070 Dimensions Base mounted with screws S070B-G-M5 Grommet type 16.5 3 7 15 21 2-3.4 mounting hole 150 (Lead wire AWG#26) 22 5 6 22 20.5 3 2 11 1 7 6 5 12 12.3 12 25 M5 x 0.8 3 (EXH) port M5 x 0.8 2 (OUT) port M5 x 0.8 1 (SUP) port S070B-C-M5 Plug lead type 0.1
1010 (FKM) 1.3 x 1011 (FKM) A w, e, r 1.3 x 108 1.3 x 109 B w, e 1.3 x 108 1.3 x 109 C r 1.3 x 1010 (FKM) 1.3 x 109 D w 1.3 x 108 1.3 x 1011 (FKM) E w, r 1.3 x 108 1.3 x 109 Seal material Symbol Seal material Compound no.
, CA 94080-6370-Main Office: (650) 588-9200-Outside Local Area: (800) 258-9200-www.stevenengineering.com 150 (Lead wire AWG#26) 22 5 6 22 20.5 3 2 11 1 7 6 5 12 12.3 12 25 M5 x 0.8 3 (EXH) port M5 x 0.8 2 (OUT) port M5 x 0.8 1 (SUP) port S070B-C-M5 Plug lead type 0.1 W with power saving circuit 6 150 (Lead wire AWG#26) 3.5 27 27.5 25 22 3 11 28.5 3.5 4-11-6 7 Series S070 3 Port Solenoid Valve
N,,13 x 0-5 0.05 tM3 x o.5l lo.o5l M3 x 0.5 0.04(18) NVJA322.M3 N.O. NVJA3l+M5 1G32 Nom. (M5) [10-32Nom. (M5) I IB3T ] 0.086(39) /without subplate\ \0.04(18) t NVJA324.M5 Bas mounted typo with subdato N.C. N.O. 0.1 t0.081 Note) B3T : One touch fitting for %' tube.
N,,13 x 0-5 0.05 tM3 x o.5l lo.o5l M3 x 0.5 0.04(18) NVJA322.M3 N.O. NVJA3l+M5 1G32 Nom. (M5) [10-32Nom. (M5) I IB3T ] 0.086(39) /without subplate\ \0.04(18) t NVJA324.M5 Bas mounted typo with subdato N.C. N.O. 0.1 t0.081 Note) B3T : One touch fitting for %' tube.
1.5 Up to 700 1/8 146 37 200 M8 x 1.25 5 8 33.5 5 20 25 MI W S 34.5 M26 x 1.5 Up to 700 1/8 146 41 204 M10 x 1.25 6 8 37.5 5.5 20 32 42.5 M26 x 1.5 Up to 1000 1/8 159 41 217 M10 x 1.25 6 8 46.5 5.5 22 40 CEP1 51 M32 x 2 Up to 1000 1/4 181 45 247 M14 x 1.5 8 10 56.2 7 26.5 CE1 Rear flange style: RECG CE2 NN H2 2-RcP Width across flats B2 4-7 H1 G G Standard port Mounting hole ML2B Plugged
10 -6 Port A pressure Pa 1.3 x 10 -9 {1 x 10 -8} at ordinary temperatures, excluding gas permeation Internal External 1.3 x 10 -11 {1 x 10 -10} at ordinary temperatures, excluding gas permeation Leakage Pa m 3/s {Torr l/s} VCR 1.3 x 10 -11 {1 x 10 -10} Fitting Swagelok 1.3 x 10 -10 {1 x 10 -9} VCR/SWJ (Swagelok) Piping connection system 3/8B Connection size 1/4B 5 to 40C (41 to 104F) Operating
mounting 90 461 Series MHF2 Dimensions MHF2-16D 4H9 +0.030 0 depth 3 38 4H9 +0.030 0 depth 3 2 x M5 x 0.8 thread depth 12 6 57.5 5 (Mounting thread) M5 x 0.8 Finger closing port 50 72 2 x M5 x 0.8 thread depth 5.5 (Mounting thread) 26 52 10.6 E 20 20 24 33 E 0 0.1 2 x 4.3 through (Mounting hole) 27 25 25 M5 x 0.8 2 x 7.5 1.2 1.2 Finger opening port E-E Close: 0 +0.1 0 Open: 161 4 x M5 x
, 1/8 M5 1 (IN) port 1 (IN) port M5, 1/8 M5 2 (OUT) port 2 (OUT) port 15 2-M2.5 x 0.45 Thread depth 3.5 2-M3 x 0.5 Thread depth 5 VDW31 36 (27.6) Lead wire l approx. 300 SMC SMC 30 40 1 1 Rectifying device AC type 45 25 34 28 Bracket assembly part number.
(mm) NA Model P M3 x 0.5 M5 x 0.8 M5 x 0.8 M5 x 0.8 Rc1/8 PA 22.5 25 41.5 50 69.5 PB 24 27 44 55 75.5 PC 8 10 12 14 14.5 PD 4.5 6 7 8.5 11 PE 2.2 2.8 2.7 2.7 RA M4 x 0.7 M5 x 0.8 M8 x 1 M8 x 1 RB 7 8 12 12 17 RC 2 2.5 4 4 6 RD 5.7 6 9 9 12.4 LC MA MB MC MD ME NB 4.5 7.5 9.5 12 16.5 MIW8-8 MIW12-12 MIW20-20 MIW25-25 MIW32-32 M3 x 0.5 M4 x 0.7 M6 x 1 22 34 43.5 58 73 28 37 54 71 80 7.5 11
15 to 100 130.5 116 13 20 44 45.5 M8 x 1.25 24 17 14.5 34 M5 x 0.8 8 15.4 8.2 40 101 to 400 155.5 141 LEC SS-T 32 20 to 100 148.5 130 13 25 51 56.5 M8 x 1.25 31 22 18.5 40 M6 x 1.0 10 15.4 8.2 60 101 to 500 178.5 160 LEC Y Size Stroke range [mm] S T U PC Incremental encoder Absolute encoder Y Without lock With lock Without lock With lock W X Z W X Z W X Z W X Z Motorless 25 15 to 100 46
78 40 4 30 30 78 40 30 4 40 88 50 20 20 6 50 98 60 25 6 25 60 108 60 6 30 30 35 MXH Series Compact Slide Dimensions 20 LT (mm) 31 20 J-M5 x 0.8 Depth 9.5 LA LB 14 Plug for port (hexagon socket head set screw) 4-M5 x 0.8 x 4l 3-M6 x 1.0 through Bottom hole dia. 5.1 6-9.3 counter bore depth 8 4-M5 x 0.8 Depth 11 4-M5 x 0.8 depth 8 Guide rail width 12 2-M5 x 0.8 9.5 34 6 24.5 63.5 64.5 34
22 13 16 16 19 23 27 13 15 20 26 32 40 10 11 14 16 20 24 22 24 32 40 50 62 17 18 25 30 38 48 3 4 6 8 10 12 5 6 8 10 7 7 7 9 10 11 M3 x 0.5 M4 x 0.7 M5 x 0.8 M6 x 1.0 M8 x 1.25 M10 x 1.25 15 16.5 M3 x 0.5 depth 5 M3 x 0.5 depth 5 M4 x 0.7 depth 6 M5 x 0.8 depth 8 M5 x 0.8 depth 8 M6 x 1.0 depth 9 3.2 3.2 4.5 5.5 5.5 6.6 4 9 9 13.5 2 4.5 4.5 4.5 16.5 Note) 19 21.5 23 Without auto switch
How to Order JA 40 F 14-150 X11 Option Mounting style X11 High temperature specifications 5 to 100C Nil F L Basic style Flange style Foot style Applicable cylinder nominal thread size Thread nominal size (Standard) Nominal thread size Applicable bore size (mm) M3 x 0.5 M4 x 0.7 M5 x 0.8 M6 x 1 M8 x 1.25 M10 x 1.25 M14 x 1.5 M18 x 1.5 M22 x 1.5 M26 x 1.5 M30 x 1.5 M36 x 1.5 3-050 4-070 5-080