Table of Contents

x 1.25 depth 14 32 40 75 22 16 18 107 8.6 140 50 34.5 160 14 depth 10 M10 x 1.5 depth 18 37 M8 x 1.25 depth 16 45 110 22 19 23 142 10.5 170 80 37 194 17 depth 12 M12 x 1.75 depth 21 42 M10 x 1.5 depth 20 Bore size (mm) W Z Y X WH W V U T S R Q O N M L K J I P 20 25 32 40 50 30 140 80 30 23 36 40 86 12 26 12 21 M6 x 1 25 38 80 60 44 25 M5 x 0.8 30 153 80 37 25 44 47 98 13 31 12 21 M6 x 1

5 Port Solenoid Valve

D side U side Stations 7 6 5 4 3 2 1 n [Communication connector D-sub] (DIN rail clamping screw) BUS OUT BUS R R R 76.7 76.7 62.5 BUS IN 58.7 3 3 3 X 12 X 12 X 12 40.5 B B B B B B B B PWR PWR P P P 25 1 1 1 A A A A A A A A A 18.5 9.5 7.5 56.9 13 20.5 (7.5) One-touch fitting [1(P), 3(R) port] 13.4 56.9 Applicable tube O.D.

SYJ300/500/700

P, R port thread type S 20 20 stations A A X port (External pilot type) M5 x 0.8 A port size Nil Rc X P R A port M5 x 0.8, C4 R port M5 M5 x 0.8 + + + + F G 1/8 C4 4 One-touch fitting A A P port X P R N NPT P port 1/8 N3 5/32" One-touch fitting 1/8 T NPTF X port (External pilot type) M5 x 0.8 R port A port M5 x 0.8, C4 Note) For more than 8 stations, supply/exhaust air to/from both sides

Battery-less

DA DB X P C FB 0.5 Connector 4 4 x G through Z WA (0.5) Motor cable Section Y details 4 x OA through 24 L + Stroke XA H9 depth XA 65 4 x NA X2 Stroke end [Origin]3 24 thread depth NB T2 Rod operating range1 [2] 2 Origin2 Section XX [Stroke end] (FC) Y M H S Q EV GA J U EH T X EB EA M C A + Stroke B + Stroke Y 0.5 FB FA Stroke XA H9 depth XA 4 x OA thread depth OB 2 x NA thread depth NC LEYGmM

Electric Actuators

C depth 4 4H9 +0.030 0 L-M6 x 1 Depth 4 T-slot B Cross section C-C (mm) 10 4 5.5 D 4 4 4 4 6 E 6 6 8 8 8 F 107 112 122 132 112 G 55 65 75 85 65 I 1 1 1 1 2 J 65 75 65 70 75 K 2 2 3 3 3 L 6 6 6 6 8 N 55 65 75 85 65 P 2 2 2 2 3 U 52 47 47 47 47 Model 5.8 LXSHAB50--X LXSHAB75--X LXSHAB-100--X LXSHAB-125--X LXSHAB-150--X 1 3 10.5 6.5 3.3 6.5 T-slot A dimension T-slot B dimension Note) The overall

4 Port Direct Operated Poppet Solenoid Valve Series VQD1000 1

Valve stations 01 Solenoid on same side of A and B port 1 station Nil P port: Rc 1/8 A port: M5 x 0.8 B port: M5 x 0.8 Thread type R port: Rc 1/8 20 Solenoid on same side of A and B port 20 stations Type S41 Nil F N T Rc S Type VK334 Type VK3140 Port size G M5 M5 x 0.8 C4 4 cassette NPT P port: Rc 1/8 NPTF R port: Rc 1/8 B port: M5 x 0.8 A port: M5 x 0.8 Type 42: Base mounted (A, B port

ZP

Flat pad P. 11 3.5 x 7 4 x 10 4 x 20 4 x 30 5 x 10 5 x 20 5 x 30 6 x 10 6 x 20 6 x 30 8 x 20 8 x 30 W P. 17 Oval pad 3.5 x 7 2 x 4 4 x 10 U H P. 33 HT P. 33 Heavy-duty pad HB P. 35 HW P. 36 U P. 27 Mark-free pad H P. 28 Related pad S Sponge pad P. 30 Resin attachment K P. 29 Pad with ball spline buffer U P. 24 H P. 37 Heavy-duty ball joint pad HB P. 43 Cyclone pad (Non-contact pad) Made

5 Port Solenoid Valve

R2) 1 (P) 5 (R1) 3 (R2) q w e q w (A) 4 (B) 2 (A) 4 (B) 2 VQC5200 VQC5201 1 (P) 5 (R1) 3 (R2) 1 (P) 5 (R1) 3 (R2) e r q w e r q w (A) 4 (B) 2 (A) 4 (B) 2 VQC5301 VQC5401 (A) 4 (B) 2 (A) 4 (B) 2 VQC5300 VQC5400 1 (P) 5 (R1) 3 (R2) 1 (P) 5 (R1) 3 (R2) 1 (P) 5 (R1) 3 (R2) 1 (P) 5 (R1) 3 (R2) (A) 4 (B) 2 VQC5500 (A) 4 (B) 2 VQC5501 1 (P) 5 (R1) 3 (R2) 1 (P) 5 (R1) 3 (R2) Component Parts Component

ZP

Flat pad P. 11 3.5 x 7 4 x 10 4 x 20 4 x 30 5 x 10 5 x 20 5 x 30 6 x 10 6 x 20 6 x 30 8 x 20 8 x 30 W P. 17 Oval pad 3.5 x 7 2 x 4 4 x 10 U H P. 33 HT P. 33 Heavy-duty pad HB P. 35 HW P. 36 U P. 27 Mark-free pad H P. 28 Related pad S Sponge pad P. 30 Resin attachment K P. 29 Pad with ball spline buffer U P. 24 H P. 37 Heavy-duty ball joint pad HB P. 43 Cyclone pad (Non-contact pad) Made

Rubber seal Series 10-SYJ3000/5000/7000 4/5 port solenoid valve

suppressor) 41.5[48.5] + M5 x 0.8 (X port) 35.6 28.5 26.1 X R P 13 5 5 10 M5 x 0.8 (P, R port) 10 8.6 7.5 17.5 23 L plug connector (L): 10-SYJ34M-L-M5 M plug connector (M): 10-SYJ34M-M-M5 M8 connector (WO): 10-SYJ34M-WO-M5 Approx. 300 (Lead wire length) 41.5[48.5] 26.1 46 M8 x 1 28.5 52.6[59.6] Approx. 300 (Lead wire length) 58.5[60.7] 48.7[50.9] 57.6 50.2 43.7 R P R P R P 10 8.6 10 8.6

Magnetically Coupled Rodless Cylinder

D 1.6 x P 0.1 x Wcos + Wsin D 5.0 x P 0.1 x W + W D 5.0 x P W W > Wv P > Pv Determination of allowable load mass & pressure Inclined operation (For vertical operation, refer to page 1205.)

High Vacuum Angle Valve

1010 (FKM) 1.3 x 1011 (FKM) A w, e, r 1.3 x 108 1.3 x 109 B w, e 1.3 x 108 1.3 x 109 C r 1.3 x 1010 (FKM) 1.3 x 109 D w 1.3 x 108 1.3 x 1011 (FKM) E w, r 1.3 x 108 1.3 x 109 Seal material Symbol Seal material Compound no.

Mechanically Jointed Rodless Cylinder Series MY1

MY1C25/32/40 Stroke L (LL) 2 x 2 x B counterbore depth C LD through-hole 4 x MM depth M PA LW NE MY1B QW NW PB MY1M MY1C PG Q + Stroke MY1H W P (Port) P (Hexagon socket head taper plug) MY1HT PP2 QQ PP1 QQ SS RR2 RR1 SS LH MY1W H NH NC MY2C Auto switch magnet holder G TT UU G P (Port) TT UU Cushion needle MY2H MW GB N P 2 x P (Hexagon socket head taper plug) (Hexagon socket head taper plug

Air Cylinder Series CM2

-H -R -W N L Stroke Axial foot style: CBM2L Bore size LH B 4 x LD 2 x LC LT X Y Y X LS + Stroke Z ZZ + Stroke LZ LX -H -R -W N L Stroke N L Stroke Head side flange style: Rod side flange style: CBM2F Bore size -H -R -W CBM2G Bore size 4 x FD Mounting hole C2 2 x FD Mounting hole FY B FX FZ Z + Stroke FT FT Z 20 to 32 40 -H -R -W N L Stroke Single clevis style: CBM2C Bore size CD U L RR CX

Table of Contents

stud axis 4/2.5 x M5 6/4 x M5 M3 female x M3 female x M3 male For soft nylon and polyurethane tubing M-5ALU-4 M-3UT P. 58 Universal nipple M-5UN M-5ALU-6 P. 56 P. 57 Body rotates at 360 around the stud axis M5 male x M5 male PAT.

Table of Contents

D D t D t t c e c c e e u u s u s s d i d i d i g g g o o o n n n r r r P P P A A A 1 1 9 9 9 9 9 9 w w 9 w 9 9 m I m I n n 9 9 9 u d u d a a a r u r u o s o F s tr F i e tr i e 9 9 9 D r r D r r r e e e e v v s 1 d d s 1 1 d o o i i n g n g n n n n a a H H n P n P g g r r o o i i s s d d e e u u D D c c t t d A d A r r w w a a 12-11-1 2 Courtesy of Steven Engineering, Inc.-230 Ryan Way,

MY1

3.75 x 1.7 P-5 4 x 1.8 x 1.1 5.1 x 3 x 1.05 7.15 x 3.75 x 1.7 P-6 8.3 x 4.5 x 1.9 C-9 8.3 x 4.5 x 1.9 C-12.5 6.2 x 3 x 1.6 7 x 4 x 1.5 Note) Two types of dust seal band are available.

Stability of suction position,

W = P x S x 0.1 x 1/t W = 1 g = 0.0098 N 0.0098 = P x 0.13 x 0.1 x 1/4 S = p/4 x (0.4)2 = 0.13 cm2 P = 3.0 kPa t = 4 (Horizontal lifting) According to the calculation, 3.0 kPa or more of vacuum pressure can adsorb the workpiece. (3) Based on the workpiece shape and type, select: Pad type: Flat type with groove Pad material: Silicone rubber (4) According to the results above, select a vacuum

0.4

(R1) r r e q w e q w VQ1301 VQ1401 VQ1300 VQ1400 (B) 2 (A) 4 (B) 2 (A) 4 (B) 2 (A) 4 (B) 2 (A) 4 3 (R2) 1 (P) 5 (R1) 3 (R2) 1 (P) 5 (R1) 3 (R2) 1 (P) 5 (R1) 3 (R2) 1 (P) 5 (R1) VQ1500 VQ1501 r r (B) 2 (A) 4 (B) 2 (A) 4 3 (R2) 1 (P) 5 (R1) 3 (R2) 1 (P) 5 (R1) e q w VQ1A01 VQ1B01 4 (A) 2 (B) 4 (A) 2 (B) 5 (R1) 3 (R2) 5 (R1) 3 (R2) 1 (P) 1 (P) r VQ1C01 4 (A) 2 (B) 5 (R1) 3 (R2) 1 (P) Component

CL

M10 X 1.25 M12 X 1.75 M12 X 1.75 30 35 35 40 40 MY1 M18 X 1.5 M18 X 1.5 M22 X 1.5 M26 X 1.5 Bore (mm) W/o rod boot W/ rod boot P N PG PH PL PW S W TT TX TY TZ H Z ZZ TDe8 Z ZZ e f h l 40 50 63 80 100 0.032 0.059 1/4 Stroke 1/4 Stroke 1/4 Stroke 1/4 Stroke 1/4 Stroke 15 15 18 25 25 27 30 31 37 40 42 46 48.5 55 56.5 1/4 3/8 3/8 1/2 1/2 11 10 13 15 15 153 168 182 208 226 8 0 0 0 0 20 21 23 23