SMC Corporation of America
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Kinematic viscosity [m2/s] = Viscosity [Pas]/Density [kg/m3] 1 cP = 1 mPas = 10-3Pas 1 cSt = 1 mm2/s = 10-6m2/s 591 PB1313A Series Working Principle: Air Operated When air is supplied with the external 3-port solenoid valve turned ON (energized), air enters the driving chamber and the diaphragm moves to the left.

Q 27.5 (Q) D F 25 C R C (44) R R E G 1/2 E G 1/2 A H D (S) B B A H 2-P Port size 2-P Port size 2-M, thread depth N 2-M L L K K N.C. dimensions (mm) Grommet: G Conduit: C DIN terminal: D Conduit terminal: T P Port size Rc A B C D E F H K L M N Model Note) U Q V R Q R Q R S Q R S 83 22 23 45 44 43 58 40.5 46.5 99 43 66 13.5 28 64 31 6.5 12.5 28 14 12.8 M4 4.5 1/8 VCL21 86 22 23 46 44 44 58

BK 3 3 1 1 1 1 C3 (CN51) (CN1) (CN6) Compressor CM CM AC Power Board 3 1 PCB1 3 3 [ ] TH 14AWG BK 14AWG BK C CM 2 Current Transformer S 14AWG G/Y G3 [ ] [ ] 14AWG BK S Condenser Circuit Protector R C1 E CT 1 14AWG G/Y G1 [ ] CP R 1 1 [ ] R [ ] 14AWG BK 14AWG BK N (CN4) N [ ] 14AWG BK 14AWG BK 2 2 22 21 L L L [ ] [ ] 14AWG BK 14AWG BK 1 1 12 11 (CN2) WH BK 3 12 12 3 3 BR 11 11 6 1/2 (CN1)

-04 AS121F-M5-03 5/32" M5 x 0.8 M5 x 0.8 8 17.3 22.2 7 9.3 22.1 9.6 4 25 25.8 22.1 28.6 9.3 17.3 AS121F-U10/32-04 AS121F-U10/32-03 5/32" 10-32UNF 10-32UNF AS121F-M5-06 AS121F-M5-05 3/16" M5 x 0.8 M5 x 0.8 11.4 21.3 26.1 7 16.5 13.5 11.7 22.9 11.6 18.1 6 AS121F-U10/32-06 AS121F-U10/32-05 3/16" 10-32UNF 10-32UNF 8 11.7 28.6 25.8 22.2 25 9.6 AS221F-01-23 AS2 1F-M5-07 20.4 16 9.3 27.5 3.2 1/4

x 0.8 Rc 1/8 Rc 1/8 M5 x 0.8 M5 x 0.8 M5 x 0.8 M3 x 0.5 Except for lock unit: 0.12MPa for 12 and 16; 0.10MPa for 20 to 40 Piston Speed Order Made Order Made Specifications 8 50 to 500 0.02 12 16 20 25 32 40 50 to 800 Bore size (mm) Piston speed (mm/s) Allowable kinetic energy J Refer to page 20 for series MTS order made specifications. 0.19 0.32 0.55 0.78 1.6 2.8 End Lock Specifications

LEC Y 10 5 5 Motorless 0 0 500 1000 1500 2000 0 0 500 1000 1500 2000 2500 3000 LAT Speed [mm/s] Speed [mm/s] When the stroke of the LEJB40 series exceeds 1000 mm, the work load is 10 kg.

Q 27.5 (Q) D F 25 C R C (44) R R E G 1/2 E G 1/2 A H D (S) B B A H 2-P Port size 2-P Port size 2-M, thread depth N 2-M L L K K N.C. dimensions (mm) Grommet: G Conduit: C DIN terminal: D Conduit terminal: T P Port size Rc A B C D E F H K L M N Model Note) U Q V R Q R Q R S Q R S 83 22 23 45 44 43 58 40.5 46.5 99 43 66 13.5 28 64 31 6.5 12.5 28 14 12.8 M4 4.5 1/8 VCL21 86 22 23 46 44 44 58

From the point just found, draw a line to the Y-axis to find the air consumption. The result is approximately 9 l/min (ANR). 5 1 0 2 3 4 5 6 7 8 9 10 Cycle (Hz) Caution 1.These flow characteristics are for fresh water (viscosity 1 mPas, specific gravity 1.0). 2.

E1 L1 R1 E1 L1 MM NDH10 NX U1 NDH10 NZ A A1 R1 U1 MM NX CA2 30 40 50 65 65 100 32 40 50, 63 80 100 125 32 40 50, 63 80 100 125 20 22 28 40 40 46 I-03M I-04M I-05M I-08M I-10M I-12M Y-03M Y-04M Y-05M Y-08M Y-10M Y-12M +0.058 0 +0.058 0 +0.070 0 +0.084 0 +0.084 0 +0.084 0 0.10 0.30 0.10 0.30 0.10 0.30 0.10 0.30 0.10 0.30 0.10 0.30 +0.058 0 +0.058 0 +0.070 0 +0.084 0 +0.084 0 +0.084 0 +0.30

B Slotted locking type Nil Without valve unit Light/Surge voltage suppressor Nil None With light/surge voltage suppressor (solenoid valve connector type only) Pilot valve specifications Z DC: 1W type (with light: 1.05W) S With surge voltage suppressor Nil AC type Electrical entry DC: 0.45W type (with light: 0.5W) Y Nil Air operated For 24, 12, 6, 5, 3 VDC L Lead wire length 0.3m LN Without

Z directions for 2 hours each 100m/s2 in X, Y, Z directions 3 times each 01 type: R 1/8, M5 x 0.8; T1 type: NPT 1/8, M5 x 0.8 Front case: PBT; Rear case: PBT; Piping port: C3602 (electroless nickel plated) Sensor pressure: Silicon; O-ring: NBR Material Weight 43g (without lead wire) Note 1) When switch output is selected, analog output is not available.

Grease pack part number: GR-S-010 (10 g), GR-S-020 (20 g) Set of the nos. !4, !5, !6, !8 CS2 * Model without air cushion is designed to include rubber bumpers.

L Required facility water system 10 s 5 s 2 s Min. 1 s 0.5 s 0.2 s 0.1 s Model Heat radiation [kW] Facility water specifications HRSH100-Wl-l Approx. 20 Refer to "Facility water system" in the specifications on pages 167 and 169. 0.05 s HRSH150-Wl-l Approx. 27 HRSH200-Wl-l Approx. 34 HRSH250-Wl-l Approx. 40 0.02 s 0.01 s 100 135 200 300

How to Order Applicable Valves B C6 SQ 1 3 5 1 Y 1 Series SQ1000 C H G B A D F E A A A A B A B 2.PUSH 2.PUSH 1.TURN 1.TURN D Coil voltage Type of actuation A 5 24VDC 2 position single 2 position double (latching/double solenoid) 3 position closed center 3 position exhaust center 3 position pressure center Dual 3 port valve N.C. + N.C. Dual 3 port valve N.O. + N.O.

R 1/ 4NPT 1/4G 1/ 4 (with M5 male thread) URJ 1/4TSJ 1/ 4 Port size Leak rate 1 x 10 -5Pa. m 3/ s 1 x 10 -10Pam3/s 1MPa 1MPa 100kPa 100kPa Rated pressure range 0 0 0 0 -100kPa -100kPa Output Switch output 2 outputs NPN or PNP Analog output Output voltage 1 to 5V Features 2 For General Fluids High Precision Digital Pressure Switch Series ZSE50F/ISE50 How to Order M ISE50 02 22 L For positive

Note 2) 1 (P) 3 (R) Note 3) 1.13-4 Series VQD1000 Construction JIS Symbol (A) 4 (B) 2 Part name Component Parts Note Material No. q w e r t y u i o !0 Solenoid coil assembly Sub-plate Body Spool valve Poppet Guide ring Return spring Manual override Gasket Round head screw VQD1000-S-M5(Base mounted only) Aluminum ZDC 1 (P) 3 (R) q u e !

Configuration One thermo-chiller for one master. 2 2 R D R D 3 3 S D S D 5 5 S G S G Master This product Do not connect any wire to other PIN numbers. Fig. 3-9 Connection of RS-232C 3.3 Installation HRR Series 3-18 HRX-OM-X084 Chapter 3 Transport and Setting Up 3.4 Piping Piping port size Connect piping firmly.

Z directions for 2 hrs. each 490 m/s2 in X, Y, Z directions 3 times each 1000 Vp-p, Pulse width 1 s, Rise time 1 ns Resistance Note 1) In the case of PF2W711, 3% of F .S. or less (15C to 35C, based on 25C).

M N C D 4-O T Q 2-P E B S K L U W AA A I AP R X AB Y + Stroke J V Z + Stroke AC AD 8-AF AE For standard stroke (mm) Bore size (mm) Stroke range (mm) AC E D AF G AE AD AB AA N M F L K B J AP C H I A 20 25 32 40 50 75, 100, 125, 150, 200 M5 x 0.8 depth 10 16.5 92 60 9.5 depth 6 30 75 11 12 45 25 5.5 80 60 55 108 M8 x 1.25 depth 14 25 24 30 99 M6 x 1 depth 12 16.5 113 65 11 depth 8 30 85 13