SX

Clean appearance P N SS5X3-42 SX340(R) P N SS5X5-41 SX540 P N SS5X5-42 SX540(R) P N SS5X7-42 SX740(R) P N SS5X3-41 SX340 Single base/B mount Common SUP/Common EXH 4 to 12 stations 3 to 12 stations Base Side Rc 1 8 Rc 1 8 Rc 1 8 Rc 1 4 Rc 1 4 Model Applicable valve Manifold type P (SUP)/R (EXH) Valve stations (1) In case of a flat cable style, each valve is wired on the print board of manifold

Micro Mechanical Valve Series VM1000

(R) 1 (P) Poppet VM200 2 port 3 port (A) 2 (A) 2 Side ported 1/4 Page 13 12 12 10 10 1 (P) 3 (R) 1 (P) VM400 3 port (OUT) 2 3 10 12 1 (N.C.)

Series SV

TYPE 1 TYPE 1 TYPE 1 TYPE 1 TYPE 1 TYPE 1 TYPE 1 TYPE 1 TYPE1 US C R C US US C R R R R R R R US C US C US C US C US C US C SERIAL NO.

I

ZS-22-A H O W T O O R D E R P O S I T I V E P R E S S U R E S W I T C H S E R I E S ISE4 H O W T O O R D E R V A C U U M P R E S S U R E S W I T C H S E R I E S ZSE4 PANEL MOUNTING KIT ZS-22-A ZSE4B ISE4 B O P E R AT I N G P R E S S U R E O P T I O N S -0.1 ~ 1MPa L -10 ~ 100KPa Non-Backlit (Standard) B Backlit LCD O P T I O N S P I P I N G S P E C I F I C AT I O N S Non-Backlit (Standard

ZP

Dimensions: Without Buffer ZP2-R W-A5 04 06 ZP2-R 20 W-A5 04 06 ZP2-R 30 W-A5 04 06 Width across flat 8 (Hexagon) Width across flat 8 (Hexagon) Width across flat 8 (Hexagon) Width across flat 10 (Hexagon) Q Q Q Width across flat 10 (Hexagon) Width across flat 10 (Hexagon) 4 4 4 4 4 4 21 21 21 M5 x 0.8 M5 x 0.8 M5 x 0.8 P P P (60) (60) (60) S S 31 8 31 S 31 14.9 A 14.9 14.9 R R R 6 6 6 M5

Made to Order

P.1729 P.1731 P.1732 P.1733 P.1738 P.1739 P.1742 P.1743 P.1744 P.1747 P.1748 P.1752 P.1755 P.1756 P.1760 P.1765 P.1766 P.1769 P.1770 P.1776 P.1781 P.1786 P.1794 P.1796 P.1801 P.1802 P.1803 P.1804 P.1806 P.1806 P.1807 P.1809 P.1817 P.1818 P.1819 P.1820 P.1822 P.1823 P.1829 P.1829 P.1830 P.1831 P.1832 P.1832 P.1833 P.1836 P.1838 P.1839 P.1839 P.1841 P.1844 P.1844 P.1845 P.1848 P.1849 P.1850

Air Fittings & Tubing

(mm) Thread R(PT) H (Hex.) D P M Part No.

Compact 5-Port Solenoid Valve

w q e r w 5 (EA) 4 (A) 3 (EB) 2 (B) 1 (P) 2-position single 2-position double (A)4 2(B) (A)4 2(B) 3(EB) (EA)5 1 3(EB) (EA)5 1 (P) (P) 4-position dual 3-port valve 3-position closed center/exhaust center/pressure center q e r w q e r w 3-position closed center 3-position exhaust center 4-position dual 3-port valve N.C. valve x 2 pcs.

Series 10-SYJ300/500/700 Rubber Seal 3 Port Solenoid Valve

R. Fittings & Tubing Air Cylinders Rotary Actuators N.C. N.O. 3(R) (P)1 3(R) (P)1 e t q r e t q r (A) (A) 2 2 u u 3 (R) 1 (P) 3 (R) 1 (P) w w y y Component Parts Replacement Parts Note Zinc die-casted Part no.

0.4

r (R1)5 1 (P) 3(R2) (R1)5 1 (P) 3(R2) e q w e w q VQ1201 VQ1200 2(B) (A)4 2(B) (A)4 (R1)5 1 (P) 3(R2) (R1)5 1 (P) 3(R2) r r e q w e q w VQ1301 VQ1401 VQ1300 VQ1400 2(B) (A)4 2(B) (A)4 2(B) (A)4 2(B) (A)4 (R1)5 1 (P) 3(R2) (R1)5 1 (P) 3(R2) (R1)5 1 (P) 3(R2) (R1)5 1 (P) 3(R2) VQ1501 VQ1500 r r 2(B) (A)4 2(B) (A)4 (R1)5 1 (P) 3(R2) (R1)5 1 (P) 3(R2) e q w VQ1A01 VQ1B01 4(A) 2(B) 2(B) 4(A) 5

0.4

r (R1)5 1 (P) 3(R2) (R1)5 1 (P) 3(R2) e q w e w q VQC1201 VQC1200 2(B) (A)4 2(B) (A)4 (R1)5 1 (P) 3(R2) (R1)5 1 (P) 3(R2) r r e q w e q w VQC1300 VQC1400 VQC1301 VQC1401 2(B) (A)4 2(B) (A)4 2(B) (A)4 2(B) (A)4 (R1)5 1 (P) 3(R2) (R1)5 1 (P) 3(R2) (R1)5 1 (P) 3(R2) (R1)5 1 (P) 3(R2) VQC1500 VQC1501 r r 2(B) (A)4 2(B) (A)4 (R1)5 1 (P) 3(R2) (R1)5 1 (P) 3(R2) e q w VQC1A01 VQC1B01 2(B) 4(A) 4

SV

TYPE 1 TYPE 1 TYPE 1 TYPE 1 TYPE 1 TYPE 1 TYPE 1 TYPE 1 TYPE1 US C R C US US C R R R R R R R US C US C US C US C US C US C SERIAL NO.

Table of Contents

-X 20Front mounting flange Data 2-P R Y + Stroke Y R P Bore size (mm) 20 88 14 Rc 1/8 25 88 14 Rc 1/8 32 90 14 Rc 1/8 40 101 15 Rc 1/8 50 116 16 Rc 1/4 Dimensions other than the above are the same as those on pages 8-22-14 to 8-22-25. 8-22-7 8 Series MGC Slide Bearing Allowable End Load and Deflection MGCM20Stroke -R MGCM25Stroke -R MGCM32Stroke -R (Slide bearing type) (Slide bearing type

ZP

Dimensions: Without Buffer ZP2-R W-A5 04 06 ZP2-R 20 W-A5 04 06 ZP2-R 30 W-A5 04 06 Width across flat 8 (Hexagon) Width across flat 8 (Hexagon) Width across flat 8 (Hexagon) Width across flat 10 (Hexagon) Q Q Q Width across flat 10 (Hexagon) Width across flat 10 (Hexagon) 4 4 4 4 4 4 21 21 21 M5 x 0.8 M5 x 0.8 M5 x 0.8 P P P (60) (60) (60) S S 31 8 31 S 31 14.9 A 14.9 14.9 R R R 6 6 6 M5

Table of Contents

bore 1/8 R 4-R 4-R 36.8 E 36.8 E R P VEX P D D AMR + + MADE IN JAPAN ITV MADE IN JAPAN SMC SMC IC VBA Model Port size A B C D E G H I VE K L M N P Q R AV2000-02-G AV2000-02-GS AV2000-02-D AV2000-02-DZ AV2000-02-Y AV2000-02-YZ AV3000-03-G AV3000-03-GS AV3000-03-D AV3000-03-DZ AV3000-03-Y AV3000-03-YZ AV4000-04-G AV4000-04-GS AV4000-04-D AV4000-04-DZ AV4000-04-Y AV4000-04-YZ AV5000-G AV5000

4/5 Port Solenoid Valve Series SYJ3000/5000/7000

A, B port P port -+ -+ A B R P -+ -+ A B B R port R P For detailed specifications about SYJ3000, refer to page 14.

Electric Actuators

Driver for Non-standard Motor Regenerative Absorption Unit Series LC7R Teaching Box Dedicated AC Servomotor Controller Series LC1 P. 205 P. 200 P. 185 P. 196 Features 5 Electric Actuator Line-up of Products Short Stroke Electric Actuator Series LX Series LX Stepper motor High Rigidity Slide Table Type Series LXS Low Profile Slide Table Series LXF Guide Rod Type Series LXP P. 250 P. 210 P

VQZ1000/2000/3000

required) DIN terminal (YZ) DIN terminal (Y) 1 (P) 5 (R) Except VQZ1000 ) ( VQZ2000 N.C. 1.4 1.6 (B) 2 1 (P) 3 (R) Except VQZ1000) ( N.O.

VM

(mm) Port size R Applicable tubing O.D. (mm) Port size R 1 8 1 4 3 8 1 2 1 8 1 4 3 8 1 2 4 6 8 10 12 1(P) 1(P) M5 4 6 8 10 12 1(P) 1(P) M5 Applicable tubing O.D. (mm) Applicable tube O.D. (mm) Applicable tubing O.D.

High Vacuum Angle Valve

N P R Port P (Pressure port) In case of double solenoid valve Port R (Exhaust port) Q K L M B EB EA P A In case of single solenoid valve Port R (Exhaust port) (mm) P K L M N Q R Model XLCV-50 XLCV-63 XLCV-80 12.5 9.5 9.5 1 1 23.5 52.6 17.4 9.5 9.5 1 1 18.6 62.3 23.5 9.5 9.5 1 1 12.4 70.8 Other dimensions are the same as the XLC.