XM, XY

Valve side exhaust 482 Stainless steel High Vacuum Angle/In-line Valve XMA, XYA Series Dimensions XMA/Angle type C D L2 (KF flange) Fn Fd Fc C (Fc) L1 (K flange) (CF flange) H B G A A (mm) Model A 103 113 158 170 196 235 B 38 48 66 79 100 117 C 1 1 2 2 3 3 D 30 40 55 75 87 114 Fn Fd 34 Fc 17 26 41 52 70 83 G 40 39 63 68 69 96 H P.C.D L1 6 x 4.4 L2 XMA-16 XMA-25 XMA-40 XMA-50 XMA-63 XMA-

REA/REB

Dynamic moment We = 5 x 10-3WgU = 5 x 10-319.8300 = 15 [N ] Me3 = 1/3We(L2-A) = 1/3150.182 = 0.91 [Nm] 3 = Me3/Me3max = 0.91/10 = 0.091 Me3 Guide central axis We W L2 Review Me3.

Table of Contents

, CA 94080-6370-Main Office: (650) 588-9200-Outside Local Area: (800) 258-9200-www.stevenengineering.com CX D-X 20Data L2 L1 2.

MY1

F1 -X L2 L1 50 50 50 L3 2040 40 40 30 30 30 Data 20 20 20 1.

5

Clevis Pin x Material: Cast iron 80, 100 L2 Material: Carbon steel (mm) Part no.

Made to Order

L1 With coil scraper: C(D)Q2D-XC26C35 Spatter resistant specification for arc welding: CDQ2D-XC26C88/C89/C91 Th9 L2 (L) (A + Stroke) [mm] Bore size Stroke range XC35/XC91 XC88/XC89 A L L1 L2 Th9 A L L1 L2 Th9 Without magnet for auto switch Built-in magnet for auto switch Built-in magnet for auto switch 32 50 or less 116 126 51 33.5 5 23 0 0.052 131 56 38.5 10 23 0 0.052 75, 100 126 40 50

Compact manifold regulator ARM5 Series

IN side OUT side Fitting size Straight Elbow Elbow Elbow Straight Elbow Elbow Elbow R S T U V W X Y 4, 5/32 2.5 6 11 35.5 6 3 12.5 19 35.5 3 6.5 11 36 1/4 3 12.5 19 35.5 6.5 6 11.5 38.5 8, 5/16 5 13.5 21 38.5 ARM5AB Centralized supply type (DIN rail mount) n = Number of stations for regulator block L2 L2-10.5 L1=(14 x n)+56 11.5 Y Pressure gauge (Accessory) 10 10 14 14 16 10 10 5.3 W V T

MLGP

= 50mm V = 200mm/s 26 l2 = 100mm V = 200mm/s 50 50 100 100 100 100 80 80 50, 63 80 80 50, 63 50, 63 32, 40 50, 63 Load weight m (kg) Load weight m (kg) Load weight m (kg) 10 10 32, 40 32, 40 32, 40 25 25 20 20 25 20 25 20 1 10 50 51 100 300 200 1 10 50 51 100 300 200 Stroke (mm) Stroke (mm) 27 l2 =50mm V = 400mm/s 28 l2 =100mm V = 400mm/s 50 50 100 100 100 100 80 80 80 63 80 63 63 63 50

MLGP

= 50mm V = 200mm/s 26 l2 = 100mm V = 200mm/s 50 50 100 100 100 100 80 80 50, 63 80 80 50, 63 50, 63 32, 40 50, 63 Load weight m (kg) Load weight m (kg) Load weight m (kg) 10 10 32, 40 32, 40 32, 40 25 25 20 20 25 20 25 20 1 10 50 51 100 300 200 1 10 50 51 100 300 200 Stroke (mm) Stroke (mm) 27 l2 =50mm V = 400mm/s 28 l2 =100mm V = 400mm/s 50 50 100 100 100 100 80 80 80 63 80 63 63 63 50

MXW

B L2 1 = W/Wmax = 1/7 = 0.14 L3 C 2. Static moment Mr = W x 9.8 (L3 + C) Examine Mr. (Mp, My values do not apply to this example.)

Conforming to ISO Standard Solenoid Valve (with M12 Connector) Series EVS7-6/7-8/7-10 (Size 1) (Size 2) (Size 3) 1

A B L1 L2 14 12 A PA B A B 14 SMC A PA B A B A PA 40 (53) L-side R-side L-side R-side (2n-1/8) D-side D-side 14 34 103 2 103 174.5 (Single) 4n-3/8, 1/2 2, 4 port 94 62 59 17 174.5 (Single) 216.5 (Double) 216.5 (Double) 221.5 216.5 (3 position) 221.5 216.5 (3 position) Bottom ported M12 connector L: Dimensions n: Stations n P, R1, R2 port 2 3 4 5 6 7 8 9 10 1 Formulas L 157 L1 L2 L1 L2 176

MXW Series Long Stroke Slide Table

=50 {mm} L2 {B L3 Item Load factors n Note (1) Max. movable load W B L2 Examine W.

REA/REB

H A L2 L1 RZQ Item Load factor n Note MI W S CEP1 1.

0.01

1 Left Right OUT 1 OUT 5 Stations L1 L2 L3 1 106 2 144 38 3 182 38 76 4 220 76 114 5 258 114 152 6 296 152 190 63 (Max. 65) 34 DC () OUT 6 5 17 DC (+) 39 (With HW, SW) M4 x 8 Detection port 19 Rc, NPT, G 1/8 Terminal block box wiring diagram For the bracket mounting position, refer to page 877. (21) Seal conduit entry With DIN rail L1 60 3 38 L2 38 5 Terminal block box LED level meter

Residual Pressure Release Valve

pressure release push button (Red) VCHC D With One-touch fitting without a push button guard Release button (Blue) Release button (Blue) ASR ASQ D L1 Q B A D 8 4.2 Applicable tubing W (mm) M M L2 L2 Applicable tubing Weight (g) Model Applicable tubing O.D. 6 8 10 12 D L1 L2 Q W M KEB06 KEB08 KEB10 KEB12 12.8 15.2 18.5 20.9 25 27 27.7 29 21 23 26.5 28.5 5.3 6 6.8 7.5 13 15.4 18.7 21.1 17

KB

L4 Weight (g) L2 L3 D1 D2 L1 D3 A Part No.

S070

-Outside Local Area: (800) 258-9200-www.stevenengineering.com R1.7 7 25.5 3.4 28.5 VT 3.5 150 (Lead wire AWG#26) 27 VP 5 150 (Lead wire AWG#26) ~ = VG 3.5 VP ~ = ~ = S070 6 barb fitting 1 (SUP) port n U side 1 2 3 4 5 D side VQ 6 barb fitting 3 (EXH) port VKF (18) 12 VQZ 7 3.5 5 5 3.2 3.5 VZ P = 7.2 12.8 n-3.2, 4 barb fitting 2 (OUT) port VS VFN Dimensions Formulas: L1 = n x 7.2 + 14.8, L2

3 Port Direct Operated Poppet Solenoid Valve Series VKF300 1

L3 Common SUP, Individual EXH/Top Ported Type 21 Manifold Grommet: G DIN terminal: D Manual override (Non-locking) 2-Rc 1/8 1(P) port Applicable cable O.D. 4 to 6.5 MAX.10 71.5 78.5 71 Indicator light (Type DZ only) 67.5 59 32 17 2 2-4.5 (Mounting hole) P mPm P 19 35 Pg.7 2-Rc 1/8 1(P) port A A A 11 20 26 49 300 (lead wire length) 1 P = 19 13.5 L2 5.5 L1 47.5 11 5 n-Rc 1/8, M5 x 0.8 2(A

3 Port Solenoid Valve Series VQ100 1

= 10n + 7, n: Station (Maximum 20 stations) Dimensions S070 n L L1 L2 2 33 27 3 43 37 4 53 47 5 63 57 6 73 67 7 83 77 8 93 87 9 10 113 107 11 123 117 12 133 127 13 143 137 14 153 147 15 163 157 16 173 167 17 183 177 18 193 187 19 203 197 20 213 207 1 23 17 103 97 VQ VKF Plug Lead Unit, Type U (Large Flow Type) Mounted Manifold (VV3Q12U) L1 L2 7 VQZ Round head combination screw M1.7 x 14

3 Port Solenoid Valve Metal Seal/Rubber Seal, Base Mounted Series VQZ100/200/300 21

L plug connector (L) M plug connector (M) (Lead wire length) Cover diameter 1.5 Cross section 0.23 mm2 300 56 Indicator light 59.5<64.5> 300 66<71> Indicator light (Lead wire length) Cover diameter 1.5 Cross section 0.23 mm2 50 P R 3 1 P R 3 1 < >: AC < >: AC Formula L1 = 10.5n + 9.5 L2 = 10.5n + 22.5 n: Stations (Maximum 20 stations) Dimensions L n 2 3 4 5 6 7 8 9 10 11 12 13 14 15 16 17