Precision Air Slide Table Series MXP ø6, ø10, ø12, ø16

L L 6 6 6 L = 80mm L = 80mm L = 80mm MXP 6-5 MXPJ6-5 MXP 6-10 MXPJ6-10 MXP 6-5 MXPJ6-5 MXP 6-10 MXPJ6-10 MXP 6-5 MXPJ6-5 MXP 6-10 MXPJ6-10 0.05 0.05 0.06 0.04 Table displacement mm Table displacement mm Table displacement mm 0.04 0.03 0.04 0.03 0.02 0.03 0.02 0.02 0.01 0.01 0.01 0 10 20 30 40 Load N 0 10 20 30 50 Load N 0 10 20 30 40 Load N 40 10 10 10 L = 100mm L = 100mm L = 100mm MXP10-

KJ

Principal Parts Material PBT Model KM11 KM12 Body Stud Chuck Guide Collet, Release button Seal, O-ring C3604BD Stainless steel 304 Stainless steel 304, C3604BD POM NBR Construction KM11 KM12 Body Release button Body O-ring Stud Seal Port B Port B Port B Seal Port B Guide Chuck Collet Guide Chuck Collet Port A Release button Port A Port A: One-touch fitting Port B: One-touch fitting Port

VQ

Latching Negative COM Large flow capacity H Y B Option Note) Latching style manual override: Looking-push slotted style only. (1) L Electrcal entry N L plug connector, With lead wire and light/surge voltage suppressor L U Option Note 1) Except for latching and large flow capacity style.

Cylinder

015 l 15 7 12 6 -g~ 19 9 I 6 7 M5 x O.B . ~I ~--~~ K ~~ P~ ' ~k I -TFunnion Pin' . , nue ' :e In . L L 1===:: . e ~l Nut ftO'a E . d Nilt ;1 ' , 0 , d d u {} B I I H B ILH ~ I Model j Bore,size(rnm} . d , I .Ji'.. ..I ~. e ~:C _ ~1IlIOB~sjze (mh''' d, H B C I NTP.()06 I 6 M3XQ.5 1.8 5,5 6,' SNP.oo6 6 Ml0X1.0 3 I. 16.2 _ ~.c1D. '1.0 Mt2X1.0 3 17 19,6 I NTP.()10 10' .

Compact Guide Cylinder

L [mm] Eccentric distance L [mm] MGPKL32 50 mm stroke or less, V = 400 mm/s Over 50 mm stroke, V = 400 mm/s 30 30 10 10 Load mass m [kg] Load mass m [kg] 1 0.1 1 10 100 100 10 Eccentric distance L [mm] Eccentric distance L [mm] 16 MGPK Series L L Plate Material Carbon Steel /MGPKL Horizontal Mounting m m MGPKL16 L = 50 mm, V = 200 mm/s or less L = 100 mm, V = 200 mm/s or less 10 10 Load

Clean Room Rodless Cylinder Series CYP ø15, ø32 1

+ B) x 103 Yaw moment M3 = m x g x (L + A) x 103 Roll moment M2 = m x g x (L + B) x 103 (mm) Model CYP15 CYP32 A 16.5 27.0 B 25.5 48.0 L B L B L A M1, 2, 3 : Moment [Nm] m : Load mass [kg] L : Distance to load center of gravity [mm] A, B : Distance to guide shaft [mm] g : Gravitational acceleration [9.8 m/s2] M2 M1 M3 m x g m x g Guide shaft mounting surface Guide central axis m x g Cylinder

CYV

+ B) x 103 Yaw moment M3 = m x g x (L + A) x 103 Roll moment M2 = m x g x (L + B) x 103 (mm) Model CYV15 CYV32 A 16.5 27.0 B 25.5 48.0 L B L B L A M1, 2, 3 : Moment [Nm] m: Load mass [kg] L: Distance to load center of gravity [mm] A, B: Distance to guide shaft [mm] g: Gravitational acceleration [9.8m/s2] M2 M1 M3 m x g m x g Guide shaft mounting surface m x g Central axis of guide Central

PF-OMN0011_C

min (20 L/min 0) 7112 L/min (7 L/min 0) 3.545.0 L/min (3.5 L/min 0.0) 1.718.0 L/min (1.7 L/min 0.0) 0.354.50 L/min (0.35 L/min 0.00) 0.354.50 L/min 1.718.0 L/min 3.545.0 L/min 7112 L/min 20280 L/min 0.01 L/min 0.1 L/min 1 L/min 2 L/min (50 ms) 0.05 L/pulse 0.1 L/pulse 0.5 L/pulse 1 L/pulse 2 L/pulse L/minL 0.5F.S. 0.5F.S. 0.5F.S. 0.5%F.S.(25 ) 9.9 L 9 L 1 0.1L 0.5L 1L NPN

HRX-OM-X071

70 or less 200 or less Calcium hardness [mg/L] 50 or less 150 or less Ion silica [mg/L] 30 or less 50 or less Iron [mg/L] 0.3 or less 1.0 or less Copper [mg/L] 0.1 or less 0.3 or less Sulfide ion [mg/L] Not detected Not detected Referential item Ammonium ion [mg/L] 0.1 or less 1.0 or less Residual chlorine [mg/L] 0.3 or less 0.3 or less Free carbon dioxide [mg/L] 4.0 or less 4.0 or less

3 Port Solenoid Valve Metal Seal/Rubber Seal, Body Ported Series VQZ100/200/300 1

LO: L plug connector Without connector MO: M plug connector Without connector M: M plug connector With lead wire G: Grommet (DC specifications) L: L plug connector With lead wire With light/surge voltage suppressor With light/surge voltage suppressor With light/surge voltage suppressor With light/surge voltage suppressor B C A B C A Note) Standard lead wire length: 300 mm.

C85

2-LD D D SW C KK ND B LH K NA LX AM NA 3 N1 N2 L S + Stroke H ZZ + Stroke Head cover Y Head cover F (mm) NA Bore KK ZZ AM B C D EE G1 G2 H K L LD LH LX N1 N2 ND h8 S SW WH XB 0 0.033 0 0.033 20 20 8 28 106 20 G 1/8 30 6 15 21 76 13 10 22 33.5 30.3 22 8 M8 x 1.25 29 15 24 5.5, 9.5 depth of counterbore 6.5 25 26 10 33.5 115 22 G 1/8 36 8 18 25 79 17 14 26 36.6 22 8 29 15 30 39 M10 x 1.25 6.6

1.63

10 100 -X Eccentric distance L (mm) 507 MGPW Series L L m m Horizontal Mounting Slide bearing MGPWM20 to 63 (17) L = 50 mm, V = 200 mm/s or less (18) L = 100 mm, V = 200 mm/s or less 100 100 Load mass m (kg) Load mass m (kg) 50, 63 50, 63 50, 63 50, 63 32, 40 32, 40 10 10 32, 40 32, 40 25 25 25 20 25 20 20 20 1 1 10 100 50 51 200 10 100 50 51 200 Stroke (mm) Stroke (mm) (19) L = 50 mm, V

Vacuum Ejector Box Type (Built-in Silencer)/Body Ported Type Series ZH 1

22.45 (Mounting hole) Model I J K L M N O P Misc.

Support Guide/11-LEFG Series

B side LES LEPY LEPS q 0.08 C side LER w LEFG32 (L = 30 mm) Displacement [mm] 0.06 LEFG25 (L = 25 mm) D side LEH LEFG16 (L = 20 mm) 0.04 LEY -X5 Model Traveling parallelism [mm] (Every 300 mm) LEFG40 (L = 37 mm) q C side traveling parallelism to A side w D side traveling parallelism to B side 11LEFS 0.02 LEFG16 0.05 0.03 LEFG25 0.05 0.03 11LEJS LEFG32 0.05 0.03 0 0 100 200 300 400 500 25ALEFG40

VCW

R C R C (44) G1/2 E A H 2-P Port size B (S) E G1/2 2-M Thread depth N D A H B 2-P Port size 2-M Thread depth N D L L K K N.O.

T

24 1 3 to 90 L x 5.3 + 200 TCU1208-1-N-X6 TCU0604-2-N-X6 1 3 to 35 N x 12 67 L x 5 + 200 6 4 N x 12 2 3 to 66 37 L x 3.8 + 200 12 8 TCU1208-2-N-X6 TCU0604-3-N-X6 2 3 to 30 67 N x 24 L x 3 + 200 37 N x 18 3 3 to 44 L x 2.5 + 200 : B (Black), W (White), R (Red), BU (Blue), Y (Yellow), G (Green), C (Clear), YR (Orange) 15-6-8 1 Polyurethane Flat Tubing Series TFU Compact piping possible Model

MHY2/MHW2

D-Y7 W N B D-Y7BA D-Y69 A B D-Y7 WV N B Protrusion [mm] In-line Perpendicular A B D-Y59 O MHW2-20D S 7 12 5 12 12 O MHW2-25D S 7 11 5 10 11 O MHW2-32D S 4 9 2 8 9 O MHW2-40D S 3 8 1 7 8 Hysteresis Switch operating position (ON) O MHW2-50D S 1 6 5 6 Switch return position (OFF) N B D-Y7BA Auto switch model No. Gripper model No.

3 Port Solenoid Valve Metal Seal/Rubber Seal, Base Mounted Series VQZ100/200/300 21

L plug connector (L) VQ 2.0 3.0 M plug connector (M) (A) 2 VKF 1 (P) 3 (R) M plug connector (M) VQZ N.O.

Air Cylinder CLA Series Fine Lock Model

Conversion Chart English to Metric (Multiply by To obtain ) Metric to English (l,tultiply _ by To Obtain ) Torque mm ft.lb m m t t . l b cm m Prcssure in(H,O) 2.5357 x 1o-3kg/cm'z in(Hg) 0.03518 kglcm'?

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Conversion Chart English to Metric (Multiply by To obtain ) Metric to English (l,tultiply _ by To Obtain ) Torque mm ft.lb m m t t . l b cm m Prcssure in(H,O) 2.5357 x 1o-3kg/cm'z in(Hg) 0.03518 kglcm'?