Aluminum High Vacuum Angle Valve

(Compound No. 2101-80) Resistant to NH3 gas, etc. 460 b Glossary 4 6 Outgassing Molecular Flow Conductance Orifice conductance In the case of a A (cm2) hole in an ultra-thin plate, conductance C results from V, the average velocity of the gas; R, the gas constant; M, the molecular weight; and T, the absolute temperature. From the formula C=11.6A (L/sec) at an air tempearture of 20C.

High Vacuum Angle Valve

(Compound No. 2101-80) Resistant to NH3 gas, etc. 460 B Glossary 4 6 Outgassing Molecular Flow Conductance Orifice conductance In the case of a A (cm2) hole in an ultra-thin plate, conductance C results from V, the average velocity of the gas; R, the gas constant; M, the molecular weight; and T, the absolute temperature. From the formula C=11.6A (L/sec) at an air tempearture of 20C.

Vacuum Pad: Large/Heavy Duty Type Series ZPT/ZPX

Silicon rubber Urethane rubber Fluororubber EPR -B10 -B12 152 271 ZCUK ZPX50HBN-01-B 8 ZPX100HBN-01-B10 166 464 40 50 63 80 100 125 1 -B10 -B12 164 460 AMJ 2 ZPX63HBN-01-B10 ZPX125HBN-01-B10 235 648 3 -B12 -B12 225 644 AMV 6 12 AEP 22 How to Order HEP ZPX 40 HB N B01 B10 Related Equipment Pad diameter (mm) Mounting thread 40 40 50 50 B 8 M8 x 1.25 63 63 B10 M10 x 1.5 80 80 B12 M12 x 1.75

ZP

ZPX40HBN-B01-B8 -B10 ZPX50HBN-B01-B8 -B10 ZPX63HBN-B01-B10 -B12 ZPX 80HBN-B01-B10 -B12 ZPX100HBN-B01-B10 -B12 ZPX125HBN-B01-B10 -B12 150 275 40 50 63 80 100 125 +1 0 +10 152 271 1 +1 0 +19 166 464 2 +2 0 +37 164 460 3 +2 0 +61 235 648 6 +4 +1 +121 225 644 12 +7 +228 +3 22 How to Order ZPX 40 HB N B01 B10 Pad diameter (mm) Mounting thread 40, 50 63, 80 100, , 125 40 40 50 B 8 50 M8 x 1.25

Air Tank Series AT 1

Drain Anchor bolt mounting hole Anchor bolt mounting hole Model Air connection Socket Flange A B C D E F G H J K L Anchor bolt 406.4 609 609 609 962 962 962 1216 1216 361 510 510 510 824 824 824 1019 1019 440 650 650 650 1080 1080 1080 1300 1300 1268 1258 1978 2278 1550 2160 2770 2558 3288 1000 945 1340 1340 1100 1550 1650 1700 1700 550 645 740 740 750 750 750 850 850 6 9 9 9 12 12 12 16 16 460

Air Cooled Aftercooler Series HAA 1

.-230 Ryan Way, South San Francisco, CA 94080-6370-Main Office: (650) 588-9200-Outside Local Area: (800) 258-9200-www.stevenengineering.com HAA15/22 Air inlet Air outlet Port size Ball valve Power source code Port size A 460 588 394 484 33 52 70 70 59 60 485 580 428 505 320 333 150 150 150 150 320 400 70 94 58 65 200 200 480 610 220 220 225 238 Model HAA15 HAA22 B C D E F G H J K L M N P

Special Specifications:

AM500 AM600 AMD100 AMD200 AMD300 AMD400 AMD500 AMD600 AMF200 AMF300 AMF400 AMF500 AMF600 100 x 100 x 253 150 x 140 x 446 200 x 170 x 526 280 x 280 x 497 63 x 63 x 191 85 x 85 x 258 120 x 120 x 236 140 x 140 x 383 180 x 170 x 465 63 x 63 x 136 80 x 82 x 170 90 x 90 x 233 140 x 140 x 380 140 x 140 x 490 140 x 140 x 590 80 x 80 x 153 90 x 90 x 216 140 x 140 x 250 140 x 140 x 360 140 x 140 x 460

Table of Contents

31 (41) 34 (44) 37 (47) C(D)U6-D 36 (41) 40 (50) 44 (54) 48 (58) 52 (62) 56 (66) C(D)U10-D 50 (75) 56 (86) 62 (92) 68 (98) 74 (104) 80 (110) C(D)U16-D 95 (128) 106 (143) 117 (154) 128 (165) 139 (176) 150 (187) 172 (209) 194 (231) C(D)U20-D 176 (230) 193 (252) 210 (269) 227 (286) 244 (303) 261 (320) 295 (354) 329 (388) C(D)U25-D 262 (335) 286 (364) 310 (388) 334 (412) 358 (436) 382 (460

Dual Rod Cylinder: Basic Type Series CXS ø6, ø10, ø15, ø20, ø25, ø32 1

588-9200-Outside Local Area: (800) 258-9200-www.stevenengineering.com 10 62 180 122 15 9 20 72 200 132 Standard stroke Long stroke (-XB11) 30 82 220 142 13 8.5 2-5.7 40 92 240 152 46 50 102 260 162 46 75 127 310 187 4-Rc 1/8 thread depth 6.5 (Piping port) (Opposite side: Same) 100 152 360 212 125 177 410 237 (Z) (30) 4-M5 x 0.8 thread depth 7.5 (30) 6 2-M8 x 1.25 thread depth 12 150 202 460

CXWM/CXWL

4-8 counterbore depth 4.5 2 x 2-5H7 depth 6 +0.012 0 2-RB0805-X552 Shock absorber (mm) ZZ Z SS S Q P L F Model CXWL16-25 CXWL16-50 CXWL16-75 CXWL16-100 CXWL16-125 CXWL16-150 CXWL16-175 CXWL16-200 184 148 121 27 160 52 39 34.5 234 198 146 52 210 52 64 47 284 248 171 77 260 65 89 53 334 298 196 102 310 90 114 53 384 348 221 127 360 90 139 65.5 434 398 246 152 410 90 164 78 484 448 271 177 460

CLS

With Auto Switch Without rod boot With rod boot Bore size (mm) 125 140 160 180 200 250 Bore size (mm) Stroke range (mm) 125 140 160 180 200 250 Bore size (mm) Stroke range (mm) 125 140 160 180 200 l T V W ZZ P S N f h ZZ1 S e MA MB MM ZZ1 ZZ 5 5 5 35 35 39 39 39 49 1/2 1/2 3/4 3/4 3/4 1 98 30 30 30 332 40 40 40 45 45 55 30 to 1000 75 133 355 Up to 1000 98 332 338 378 442 467 355 361 399 460

Mechanically Jointed Rodless Cylinder Series MY3 ø16, ø25, ø40, ø63 1

Weight reduced by 53% at the maximum Overall length (Z + Stroke) Overall Length (Z) Weight (mm) (kg) Series MY3A MY3B MY1B Series MY3A MY3B MY1B 63 63 40 40 25 25 16 16 320 8.26 240 2.95 150 0.99 110 0.34 356 8.99 276 3.08 178 1.09 122 0.35 460 14.5 340 4.41 220 1.57 160 0.73 At a 100 mm stroke Series Variations Positioning cushion mechanism The uniquely designed piston shape enables reduction

Cylinder (Tube) Inner Diameter(φ): 40, Stroke(mm): 460, Cylinder Operation Method: [Double Acting] Double Acting, Rod Operation Method: Double rod, Main Body Shape: Standard, Additional Function: Standard, Environment, Applications: Standard, End Locking: -, Valves: -, Cushion: Air cushion, Operating Pressure(MPa): 0.05 to 1.0, Specification: Built-in magnet, Port thread type: Rc, Auto Switches

Cylinder (Tube) Inner Diameter(φ): 63, Stroke(mm): 460, Cylinder Operation Method: [Double Acting] Double Acting, Rod Operation Method: Single Rods, Main Body Shape: Standard, Additional Function: Standard, Environment, Applications: Standard, End Locking: -, Valves: -, Cushion: Air cushion, Operating Pressure(MPa): 0.05 to 1.0, Specification: Built-in magnet, Port thread type: Rc, Auto Switches

Cylinder (Tube) Inner Diameter(φ): 63, Stroke(mm): 460, Cylinder Operation Method: [Double Acting] Double Acting, Rod Operation Method: Double rod, Main Body Shape: Standard, Additional Function: Standard, Environment, Applications: Standard, End Locking: No, Valves: No, Cushion: Air cushion, Operating Pressure(MPa): 0.05 to 1.0, Specification: Built-in magnet, Port thread type: Rc, Auto

Cylinder (Tube) Inner Diameter(φ): 40, Stroke(mm): 460, Cylinder Operation Method: [Double Acting] Double Acting, Rod Operation Method: Double rod, Main Body Shape: Standard, Additional Function: Standard, Environment, Applications: Standard, End Locking: -, Valves: -, Cushion: Air cushion, Operating Pressure(MPa): 0.05 to 1.0, Specification: Built-in magnet, Port thread type: Rc, Auto Switches

Cylinder (Tube) Inner Diameter(φ): 63, Stroke(mm): 460, Cylinder Operation Method: [Double Acting] Double Acting, Rod Operation Method: Single Rods, Main Body Shape: Standard, Additional Function: Standard, Environment, Applications: Standard, End Locking: -, Valves: -, Cushion: Air cushion, Operating Pressure(MPa): 0.05 to 1.0, Specification: Built-in magnet, Port thread type: Rc, Auto Switches

Cylinder (Tube) Inner Diameter(φ): 63, Stroke(mm): 460, Cylinder Operation Method: [Double Acting] Double Acting, Rod Operation Method: Single Rods, Main Body Shape: Standard, Additional Function: Standard, Environment, Applications: Standard, End Locking: -, Valves: -, Cushion: Air cushion, Operating Pressure(MPa): 0.05 to 1.0, Specification: Built-in magnet, Port thread type: Rc, Auto Switches

Cylinder (Tube) Inner Diameter(φ): 32, Stroke(mm): 460, Cylinder Operation Method: [Double Acting] Double Acting, Rod Operation Method: Double rod, Main Body Shape: Standard, Additional Function: Standard, Environment, Applications: Standard, End Locking: No, Valves: No, Operating Pressure(MPa): 0.05～1, Auto Switches: Without auto switch (built-in magnet), Lead Wire Length(m): N/A, The number

Cylinder (Tube) Inner Diameter(φ): 40, Stroke(mm): 460, Cylinder Operation Method: [Double Acting] Double Acting, Rod Operation Method: Double rod, Main Body Shape: Standard, Additional Function: Standard, Environment, Applications: Standard, End Locking: No, Valves: No, Operating Pressure(MPa): 0.05～1, Auto Switches: Without auto switch (built-in magnet), Lead Wire Length(m): N/A, The number