CRQ2

DRotation starting point End of rotation 20e R g 10 ot 10 n at ra L io B Rotation starting point End of rotation n n io 70 70 ra at n ot g R e 10 10 L L B B A 10 10 Rotation starting point End of rotation 160 R A e R A o g t n a a ti r o n Lmax 15 18 24 27 31.5 Lmax 15 18 24 27 31.5 Lmax Size 10 15 20 30 40 Size 10 15 20 30 40 Size 10 15 20 30 40 15 18 24 27 31.5 The figure shows the view

4/5 Port Air Operated Valve Series SYJA3000

Station n L1 L2 Station 2 78 50 Station 20 438 410 3 98 70 4 118 90 5 138 110 6 158 130 7 178 150 8 198 170 9 218 190 10 238 210 11 258 230 12 278 250 13 298 270 14 318 290 15 338 310 16 358 330 17 378 350 18 398 370 19 418 390 1-5-68 5 Port Solenoid Valve Rubber Seal Series SYJ7000 Type 42: Side Ported/SS5YJ7-42Stations C6,N7 C8,N9 [ ]: AC Grommet (G) 122 [126.4] Approx. 300 (Lead wire length

Hydraulic Cylinder 7MPa Nominal Pressure Series CHN

A B D +0.058 0 +0.2 +0.1 +0.2 +0.1 +0.3 +0.1 +0.3 +0.1 AD-EI-20 AD-EI-25 AD-EI-32 AD-CHN-40 -0.016 -0.034 -0.016 -0.034 -0.016 -0.034 -0.016 -0.034 Y-02 Y-03 Y-04C YHN-04 20 25 32 40 45.5 45.5 52 60 35.5 35.5 42 50 3.2 3.2 4 4 10 10 12 16 9 9 16 16 36 38 55 55 16 18 22 22 9 9 12 15 20 25 32 40 12 12 13 13 20 20 24 24 14 14 25 25 18 18 38 38 M8 x 1.25 M10 x 1.25 M14 x 1.5 M16 x 1.5 3.2 x 16l

JXCx-OMT0005CN

No.JXC-OMT0005CN-A DeviceNet (DC24V) // JXCD1 1. . 4 2 . 6 2.1. . 6 2.2. . 7 2.3 . 8 2.4 () . 9 1 . 9 2 . 9 3 . 9 4PLC . 9 5 . 9 6 . 10 7 . 10 8() . 11 9 . 11 3 . 12 3.1. . 12 3.2 . 13 3.3. . 14 3.4. . 16 (1) . 16 (2) . 16 (3) . 17 4 . 18 4.1 Node Address/Data Rate . 18 4.2 . 19 4.3 DeviceNet . 19 1Step Data Class 67h . 19 2IO Class 68h . 20 3IO . 21 4IO . 21 5 . 23 5.1 PWR

Brake mechanism added

18 15 0.1 0.3 +0.3 +0.1 0.032 0.059 16 +0.070 0 15 86 105 59 130 11.5 101 107 40 16 23 23 352 49 110 148 263 25 25 18 0.1 0.3 +0.3 +0.1 0.032 0.059 20 +0.084 0 18 102 130 76 160 13.5 119 126 48 20 28 28 403 61 140 192 297 31.5 31.5 25 0.1 0.3 +0.3 +0.1 0.040 0.073 +0.084 0 25 18 116 150 92 180 13.5 133 140 58 25 23.5 36 430 64 162 214 309 0.1 0.3 +0.3 +0.1 0.040 0.073 35.5 35.5 25 Mounting

HRX-OM-X037

Required facility water system (for water cooled type) Table 3-1 Heat Radiated Heat Facility water specifications Model Radiated kW HRL100-W*-40 Approx.18 Refer to 9.1 Specifications.

Table of Contents

M3 x 27l M3 x 29l M3 x 31l M3 x 33l M3 x 38l M3 x 43l M3 x 27l M3 x 29l M3 x 31l M3 x 33l M3 x 38l M3 x 43l 5 18 5 M3 x 18l 5 18 5 M3 x 18l 5 18 5 M3 x 18l 7-2-6 6 Mini-free Mount Cylinder Series CUJ Clean Series How to Order Double acting 10 6 8 D C D UJB F8N Number of auto switches Nil 2 pcs. 1 pc.

LX Series Compact Electric Actuators

pa9e 4 & 5 Product Variations .pa9e 6 & 7 Specifications/Construction/Parts List .page B Selection Chart & Duty Ratio .page 9 Kinetic Moment Allowance &Table Deflection ,.page 10 Criteria of Accelerating Speed . .page 11 How To Order. .pages 12 & 13 How to Mount .Page 14 Dimensions. ."...pa9es 15 & 16 Specifications/Construction/Parts List . ...page 17 Selection Chart & Duty Ratio ..,.page 18

3

screen) Line name Expanded flow range Compact, Space saving Wide range of flow measurement with one product Compared with the current PF2A, Flow ratio 78 % reduction Weight 74% reduction 100:1 Mounting space 1100 g a 240 g Compared with PFMC7202-06 and PF2A703H-10 Rated flow ratio is 10 : 1 for current PF2A. 2000 L type 55 Applicable flow range [L/min] PFMC7202 New 1 2 5 10 20 25 50 100 150

Compact

pa9e 4 & 5 Product Variations .pa9e 6 & 7 Specifications/Construction/Parts List .page B Selection Chart & Duty Ratio .page 9 Kinetic Moment Allowance &Table Deflection ,.page 10 Criteria of Accelerating Speed . .page 11 How To Order. .pages 12 & 13 How to Mount .Page 14 Dimensions. ."...pa9es 15 & 16 Specifications/Construction/Parts List . ...page 17 Selection Chart & Duty Ratio ..,.page 18

4 Way • 4 and 5 Port, Rubber Seal • Solenoid Pilot Valve, Series SYJ3000

B A B A 0.6 P R R P R R Pilot pressure MPa Pilot pressure range SS5YJ3-41-03-M5T SYJA3140 SYJA3240 SYJ3000-21-2A 0.5 3 Position pressure center 3 Position pressure center 1pc. 1pc. 1pc. 1pc. 0.4 B A B A 0.3 P R R P R 0.2 0.1 0.2 0.3 0.4 0.5 0.6 Operating pressure MPa 18 18 18 18 18 18 Air Pilot Drawings Series SYJ3000 (mm) Body Ported Type / Dimensions Base Mounted Type / Dimensions

Thermo-chiller/Rack Mount Type

For pipe thread type N, an NPT thread conversion fitting set is included. 18 Not included for Option Z (Removed parts) 19 Not included for Options Z and Z1 (Removed parts) 18 HRR Series Specifications: 200 to 230 VAC Water-cooled Refrigeration Model HRR050-W-20-(DM)U(YZ) Cooling method Water-cooled refrigeration Refrigerant R410A (HFC) Refrigerant charge [kg] 0.59 Control method PID control

HRX-OM-Y098

Alarms that allow continuous pump operation are shown in Table 5.4-18 Alarms that allow continuous pump operation (1/2) and Table 5.4-19 Alarms that allow continuous pump operation (2/2).

7

S F D Q Grommet (with surge voltage suppressor) C 300 U E R B T A N IN OUT SMC 8 x 18 S Q D F U V E DIN terminal G1/2 Cable 6 to 12 C (44) 31.5 R T A SMC IN OUT N B 8 x 18 S Q D F (mm) Electrical entry Model Grommet (with surge voltage suppressor) DIN terminal Grommet Applicable flange A B C E F N Q R S D T T U U 90 (98) V T 76 (84) 179.5 (187.5) 90.5 (98.5) 98.5 (106.5) 85 (93) 192.5 (

HRX-OM-M090

Fig. 3-18 Connecting the connector 3.7.3 Setting items Table 3-9 shows the setting items of the external switch. For details, refer to 5.19 Communication function.

HRX-OM-W060

Alarms that allow continuous pump operation are shown in Table 5.4-17 Alarms that allow continuous pump operation (1/2) and Table 5.4-18 Alarms that allow continuous pump operation (2/2).

JXCx-OMT0061CN

(P.71) * 7 4.2 (P.18) PLC CC-link LED LED PWR ALM L ERR CC-Link L RUN CC-Link LED 8. LED (P.28) (LEC)LEDL RUNLEDL ERR/PLC PLC 17. CC-Link (P.77) 4.2 (P.18)4.3 PLC (P.18)PLC 10 - 8() ()() () 9 10. (P.32) PLC 14.

Series CJ2Y ø 10, ø 16 Smooth Cylinder Double Acting, Single Rod

Bore size (mm) Standard stroke (mm) Maximum manufacturable stroke (mm) 10 15, 30, 45, 60, 75, 100, 125, 150 400 16 15, 30, 45, 60, 75, 100, 125, 150, 175, 200 400 Symbol Specifications -XAl Change of rod end shape -XC3 Special port location -XC9 Adjustable stroke cylinder/Adjustable retraction type Note 1) Manufacture of intermediate strokes at 1 mm intervals is possible.

3-Position Rotary Table

150 130 120 50 50 MSZA30A (High precision type) MSZA50A(High precision type) D70 60 50 40 30 20 10 0 120 100 80 60 40 20 0 Load N Load N 291 Rotary Table Air Consumption Air consumption is the volume of air which is expended by the rotary tables reciprocal operation inside the actuator and in the piping between the actuator and the switching valve, etc.

Compact Type

Standard Stroke (mm) Manufacturable stroke range Model Standard strokes CXSJ6 CXSJ10 CXSJ15 CXSJ20, 25, 32 60 to 100 10, 20, 30, 40, 50 80 to 150 10, 20, 30, 40, 50, 75 110 to 150 10, 20, 30, 40, 50, 75, 100 110 to 200 Strokes beyond the standard stroke range are available as a special order.