1

ZZ Bore size ZZ Rc1/8 NPT1/8 20 10.5 11 7.5 54 (59.5) 75 (80.5) 20 60.5 (66) 25 10.5 11 7.5 52.5 (58) 76.5 (82) 25 59 (64.5) 32 10.5 10.5 7.5 53 (59) 77 (83) 32 59.5 (65.5) 40 10.5 10.5 7.5 57.5 (63.5) 87.5 (93.5) 40 64 (70) Bore size GA GB S ZZ Bore size ZZ 20 9 5 41 (46.5) 62 (67.5) 20 47.5 (53) 25 11 5 43.5 (49) 67.5 (73) 25 50 (55.5) 32 10.5 5 43.5 (49.5) 67.5 (73.5) 32 50 (56) 40 11

Guide Cylinder Series MGG

speed 50 to 700mm/s 50 to 1000mm/s Base cylinder Rubber bumper Cushion Guides Built-in shock absorber (2 pcs.)

HRX-OM-X037

Table 8.1-1 Quality criteria for clean water (tap water) Item Unit Criterion Circulating fluid Facility water pH (at 25 oC) 6.0 to 8.0 6.5 to 8.2 Electric conductance (at 25 oC) [S/cm] 100 to 300 100 to 800 Chloride ion [mg/L] 50 or less 200 or less Standard Sulphate ion [mg/L] 50 or less 200 or less item Acid consumption (at pH 4.8) [mg/L] 50 or less 100 or less Total hardness [mg/L] 70

10

R Thrust energy E2 m g S F S + m g S F S m g S Absorbed energy E E1 + E2 E1 + E2 E1 + E2 E1 + E2 Note 2) E 2 2 E 2 2 E 2 2 E 2 2 Equivalent mass Me Note 1) This is the momentary speed at which an object is impacting against a shock absorber.

PF-OMM0004_C

1 L/min 2 L/min (50 ms) 1 L/pulse 070 () L/minL 3F.S. 3F.S. 2F.S. 2 5%F.S.(25 ) 3 3 9 L 4 1L NPN PNP 80 mA DC28 V NPN1 V (80 mA ) PNP1.5 V (80 mA ) 25 0.5 s/1 s/2 s 6 0.5 s/1 s/2 s 15 V 1 k 420 mA DC12 V 300 DC24 V 600 0.4 V ()30 ms 2 4 7 /6 11 ) 5 / 12 DC1224 V10 50 mA -68No.PF-OMM0004-D PF3W711 PF3W721 0.4 V ()30 ms 2 4 7 /6 11 ) 5 / 12 DC1224 V10

ML2B

Horizontal and lateral Mounting Vertical Mounting 50 RS H A 2.

ML2B

Horizontal and lateral Mounting Vertical Mounting 50 RS H A 2.

ZR

With surge voltage suppressor S S and Z are not available for grommet style (DC). S is not available for AC. DC voltage (with surge voltage suppressor) If the polarity is incorrect at DC (surge voltage suppressor), diode or switching element may be damaged.

Air Cylinder Series MB

(Non-lube) 50 to 700mm/s 50 to 1000mm/s Operating piston speed +1.0 0 +1.4 0 +1.8 0 up to 250: , 251 to 1000: ,1001 to 1500: Allowable stroke tolerance Cushion Note 1) Both ends (Air cushion) JIS class 2 Thread tolerance 1/8 1/4 1/4 3/8 3/8 1/2 1/2 Port size (Rc, NPT, G) JIS Symbol Double acting Basic, Foot, Front flange, Rear flange, Mounting Single clevis, Double clevis, Center trunnion

End Lock Cylinder Series CBM2/ø20, ø25, ø32, ø40 Series CBA1/ø40, ø50, ø63, ø80, ø100 CL MLGC CNA CB CV/MVG Maintains the cylinder’s CXW original position even if the CXS air supply is interrupted. CXT MX

Same side 75 90 100 110 90+50 (n4) 2 n=4, 8, 12, 16, 100+50 (n4) 2 n=4, 8, 12, 16, 110+50(n4) 2 n=4, 8, 12, 16, 20+50(n2) Dif. sides Additional Weight of Lock (kg) D-B59W n=2, 4, 6, 8, n (n2) 2 40 50 63 80 100 Bore size (mm) 75+50 n=2, 3, 4, 90+50(n2) n=2, 4, 6, 8, 100+50(n2) n=2, 4, 6, 8, 110+50(n2) n=2, 4, 6, 8 , Same side Rear end lock (H) 0.02 0.03 0.03 0.10 0.12 Manual release

Series IDG

) With dew point indicator 1 10/2.5 3 25/6 50/12 100/25 200/50 300/75 500/125 600/125 750/150 1000/190 5 S Standard equipment 10 20 30 50 60 75 100 Note) In case of two or more options, indicate them in alphabetical order.

Model Selection 1

/N.O./ Double acting Single unit LVD1/2/3/4/5-S 17-5-43 Direct operated, Tube extensions type N.C./N.O./ Double acting LVD2/3/4/5-T 17-5-50 Single unit Direct operated, Integral fitting type HYPER FITTING N.C./N.O./ Double acting Air operated valve 17-5-63 LVQ2/3/4/5/6-S Single unit Direct operated, Space saving type N.C.

Wedge Cam Operation Provides

MHK 2 20 D 1 F Long stroke model MHKL 2 20 S D 1 F F9NL Number of auto switches Number of fingers _ S 2 1 2 2 fingers Bore size 12 16 20 25 12mm 16mm 20mm 25mm Action D S C Double acting Single (Normally open) Single (Normally closed) Finger material _ 1 Carbon steel Stainless steel Dust cover material _ Chloroprene rubber (CR) Fluoro rubber (FKM) Silicon rubber (Si) F S Auto switch _ Without

Electric Actuator Series LJ1H/LJ1S Made to Order Specifications

Vacuuming Graphs Top cover Seal separator LJ1H10 Vacuuming flow characteristics Particle concentration (Particles/ft3) Particle concentration (Particles/ft3) 10 Speed: 400mm/s Dust seal 10 Speed: 600mm/s 10 Side cover 200 150 100 50 25 Vacuuming flow (l/min ANR) LJ1H20 Vacuuming flow characteristics 10 Speed: 500mm/s 10 Speed: 1000mm/s 10 200 150 100 50 25 Vacuuming flow (l/min ANR) Particulate

Rotary Cylinder Series MRQ Size: 32, 40 1

C + D = 3.5 + 24.3 = 27.8 l/min B C CRQ2 Rotary motion parts MSQ A D Linear motion parts MRQ 0 1 2 DOperating time (S) 2011-10-7 8 Rotary Cylinder Series MRQ Size: 32, 40 How to Order SO MRQ B S 32 50 C A J79W Number of auto switches Mounting style F: Flange on the rod side B: Basic style Rotation 0 1 2 Linear motion Courtesy of Steven Engineering, Inc.-230 Ryan Way, South San Francisco,

Air Slide Table Long Stroke Type Series MXY ø6, ø8, ø12 1

0 100 200 300 400 500 280 560 Data 10 4 8 7 6 5 MXY12 3 2.0 Shock absorber Rubber stopper screw 2 4 Load weight W kg 1.5 Metal stopper screw 3 1.0 1 100 50 200 300 400 560 2 100 50 200 300 400 500 Average speed Va mm/s Collision speed V mm/s 0.5 Average speed Va mm/s 0.0 Collision speed V mm/s 0 100 200 300 400 500 280 560 Note) Use the average speed when calculating static moment.

Dual Rod Cylinder/High Speed Specification Type Series CXS-XB19

Standard stroke (mm) 10, 20, 30, 40, 50 10, 15, 20, 25, 30, 35, 40, 45, 50, 60, 70, 75 Bore size (mm) Nil S 6 10 10, 15, 20, 25, 30, 35, 40, 45, 50, 60, 70, 75, 80, 90, 100 15, 20, 25, 32 Auto switch type Nil Without auto switch (built-in magnet) Note) Refer to the table below for auto switch part numbers. Applicable auto switches Load voltage Auto switch part no.

100

(Tank capacity: 1 L) (Tank capacity: 1 L) 100 90 80 70 60 50 40 30 20 10 0 100 90 80 70 60 50 40 30 20 10 0 Vacuum pressure in tank [kPa] Vacuum pressure in tank [kPa] ZL6H ZL6M ZL3H ZL3M Time to reach vacuum [S] 1 2 3 4 5 6 0 Time to reach vacuum [S] 1 2 3 4 5 6 7 8 9 10 0 Break Flow Rate Characteristics (Representative value) Vacuum Breaking Time (Representative value) Break flow rate

SQ1000/2000

CAT.ES11-79 A 5 Port Solenoid Valve Series SQ1000/2000 SQ2000 Plug lead SQ2000 Plug-in SQ1000 Plug-in SQ1000 Plug lead Low profile compact manifold Compact with high capacity Pressure: 0.5MPa/Load factor: 50% Cylinder bore size (mm) Cv factor Series CJ2 Base mounted (with sub-plate) Cylinder speed (mm/s) Series CM2 Series MB/CA1 Rubber seal Metal seal 40 32 40 50 63 80 100 20 25 32 16 6 10

LECP6_C

50% 5mm (INPON )50mm/s 50mm (No.2 ) No. 1 2 2 2 mm/s mm mm/s mm/s mm mm mm mm/s 0 1 ABS 100 100.00 1000 1000 50 40 10 100 0 0 5 2 ABS 50 50.00 1000 1000 0 0 0 100 0 0 0.1 No.1(IN0ON) / DRIVEON No.1 DRIVE No.OUT05OFF IN0 INPOFF PLC BUSYON IN1 DRIVEOFF OUT0 No.1 OUT1 INP INPON BUSY No.1 ON OUT0ON BUSYOFF No.1 No.1 No.2(IN0OFF IN1ON) DRIVEON No.2 0mm 100mm No.OUT05OFF