VDW Series, Compact Direct Operated 2/3 Port Solenoid Valve for Water and Air

(the value under the prescribed conditions) 0.8 0.7 0.6 Subsonic Critical pressure 0.5 0.4 0.45 0.45 Sonic 0.4 0.4 0.35 0.35 0.3 0.3 0.3 0.25 0.2 0.25 0.2 0.2 0.15 0.15 0.1 0.05 0.1 0.1 0.05 S = 0.54 VDW101 10 60 50 40 30 20 10 20 VDW 1.6 S = 1.2 125 100 75 50 S = 3.2 VDW202.3 350 300 250 200 150 100 50 S = 5.8 VDW203.2 600 500 400 300 200 100 S = 2.8 VDW302 300 250 200 150 100 50 VDW303

VDW Series

(the value under the prescribed conditions) 0.8 0.7 0.6 Subsonic Critical pressure 0.5 0.4 0.45 0.45 Sonic 0.4 0.4 0.35 0.35 0.3 0.3 0.3 0.25 0.2 0.25 0.2 0.2 0.15 0.15 0.1 0.05 0.1 0.1 0.05 S = 0.54 VDW101 10 60 50 40 30 20 10 20 VDW 1.6 S = 1.2 125 100 75 50 S = 3.2 VDW202.3 350 300 250 200 150 100 50 S = 5.8 VDW203.2 600 500 400 300 200 100 S = 2.8 VDW302 300 250 200 150 100 50 VDW303

PF3A8xxH.eng

S S S Flow direction (1) Press the SET button once when the item to be changed is displayed on the display. The set value on the sub display (right) will start flashing. The output will not operate for 3 seconds after supplying power. The identification code of the product is displayed.

VXA21/22

OUT Standard specification Option Note) Water (Standard, up to 40C) Air (Standard, Dry) Turbine oil Vacuum (up to 1.3 x102 Pa) Carbon dioxide (CO2), Nitrogen gas (N2) Vacuum (up to 1.3 x101 Pa) (V, M) Non-leak (106 Pa m3/s or less) (V, M) IN N.O.

2–4

mm/s This product should not be used as a stopper.

Auto Switch Guide Reed Switches/Solid State Switches For Air Grippers (Rotary Actuators) 1

light 8 3.2 DC (+) Brown 2.6 2 4.6 4 2.7 4 2.8 Most sensitive position 6 2.8 22 500 (3000) 20 2.7 OUT Black 3.2 2.6 DC () Blue 9.5 6 Most sensitive position 22 500 (3000) 4 D-M9B, D-M9BV Precautions OUT (+) Brown Be sure to read before handling.

Auto Switch Guide Reed Switches/Solid State Switches For Air Grippers (Rotary Actuators) 1

light 8 3.2 DC (+) Brown 2.6 2 4.6 4 2.7 4 2.8 Most sensitive position 6 2.8 22 500 (3000) 20 2.7 OUT Black 3.2 2.6 DC () Blue 9.5 6 Most sensitive position 22 500 (3000) 4 D-M9B, D-M9BV Precautions OUT (+) Brown Be sure to read before handling.

RSH

Option (1) D C S Without option With locking mechanism With cancel cap With lever detection switch Action (2) D B T Double acting (1) The options can be combined, provided that the priority order is indicated as D, C, S.

Rodless Cylinder for Vacuum Series CYV ø15, ø32 1

u s d Particulate generation has been reduced at the stroke ends by reducing impact using a sine cushion and by stopping the stroke using an internal stopper. i e Reduction of outgassing due to surface treatment n Impact acceleration [m/s2] o u d t R g g e a c 1 s u s d 5 i e n R g All the external parts (made of aluminum alloy) such as the body and slide table are electroless nickel plated

ZSE30/ISE30

-color display (Red and green) Sampling cycle: 5 times/s Display PF2 2% F .S. 2 digit (at 25C ambient temperature) 2% F .S. 1 digit (at 25C ambient temperature) Display accuracy IF Light up when output is ON (Green) 2% F .S. or less (based on 25C) IP40 Operating: 0 to 50C, Stored: 10 to 60C (No freezing or condensation) Operating and stored: 35 to 85% RH (No condensation) 1000 VAC for 1 min

VXA31/32

Fluid Standard specifications Option Note) Water (Standard, up to 40C) Air (Standard, Dry) Turbine oil Vacuum (up to 1.3 x 102 Pa) Carbon dioxide (CO2), Nitrogen gas (N2) Vacuum (up to 1.3 x 10-1 Pa) (V, M) Non-leak (106 Pam3/s or less) (V, M) JIS Symbol A C.O.

ZSE40/ISE40

IP65 Operating: 0 to 50C, Stored: 10 to 60C (No condensation or freezing) Operating/Stored: 35 to 85% RH (No condensation) 1000 VAC for 1 min. between lead wires and body 50 M or more (at 500 VDC) between lead wires and body Display accuracy Indicator light Output voltage: 1 to 5 V 2.5% F .S. or less (in rated pressure range) Linearity: 1% F .S. or less Output impedance: Approx. 1 k Analog

Electric Actuator with Integrated Guide Series LTF

800 900 1000 36 LTF6EPH 4 to 500 to 390 40 LTF6ENH 8 to 500 to 390 44 LTF8FPL 12 to 1000 to 890 to 710 to 580 to 480 48 LTF8FNL 16 to 890 to 710 to 580 to 480 to 1000 71 34 LTF6EPF 2 to 300 to 230 38 LTF6ENF 6 to 300 to 230 42 LTF8FPH 10 to 500 to 440 to 350 to 290 to 240 46 LTF8FNH 14 to 500 to 440 to 350 to 290 to 240 52 LTF6EPH-K 20 to 500 to 390 56 24 LTF6ENH-K to 500 to 390 60 28 LTF8FPL-K

Fieldbus system EtherNet/IP TM compatible SI Unit IO-Link Master Unit

(No condensation) Withstand voltage 500 VAC for 1 minute between external terminals and F.E. Insulation resistance 500 VDC, 10 M min. between external terminals and F.E.

Modular Type Regulator Series AR

Outlet pressure MPa Outlet pressure MPa 0.4 0.4 0.3 0.3 0.2 0.2 0.1 0.1 0 0 5000 10 0 0 500 1000 1500 Flow rate L/min (ANR) Flow rate L/min (ANR) 37 Regulator AR10 to 60 Conditions: Inlet pressure 0.7MPa Outlet pressure 0.2MPa Flow rate 20L/min (ANR) Pressure Characteristics (Representative values) AR10 AR40 0.3 0.25 Set point 0.25 Set point Outlet pressure MPa Outlet pressure MPa 0.2 0.2

HRX-OM-W038

Configuration 1 master : 1 thermo-chiller 2 2 R D R D 3 3 S D S D 5 5 S G S G Master This product Fig. 3-11 Connection of RS-232C 3.3 Installation HRS Series 3-16 HRX-OM-W038 Chapter 3 Transport and Setting Up 3.4 Piping Connect piping firmly. Incorrect piping might cause leakage of supplied or drained leakage and wet surrounding area and facility.

AS-FG/ASD-FG

Cylinder extension speed: 100mm/s Meter-out needle fully open 100mm/s Return speed (Reference) Recommended circuit for high return speed When low extension speed and high return speed are desired, the following circuit using 3 ports is recommended. Tightening Torque Caution 1. The proper tightening torque for pipe fittings is as shown in the table.

Series PF2D Digital Flow Switch For Deionized Water and Chemicals

(de-energized) 980 m/s2 in X, Y, Z directions 3 times each (de-energized) 500 Vp-p, Pulse width 1 s, Rise time 1 ns Connection Material Weight Power supply / Output connection: 8P connector, Sensor connection: 4P connector (e-con) Housing: PBT, Display: PET, Backside rubber: CR 60 g (Except for any accessories that are shipped together.

Auto Switch Guide

Conformed standard JIS C 4524, JIS C 4525, IEC 947-5-2, NECA 0402 Cable length Connector model Impact resistance 300 m/s2 S M L A B D 0.5 m 1.0 m 3.0 m M83 pin M84 pin M124 pin Enclosure IP-67 (IEC529 standard) Insulation resistance 100 M or more at 500 M VDC Note) Type D is available for the D-P5DW type only. Note) L is available for the D-P5DW type only.

Speed Controller: Standard Type Elbow Type (Metal Body) Series AS

N Symbol Electroless nickel plated Control type If more than one option is required, write option part numbers in the order of S, N.