Compact 5-Port Solenoid Valve

Refer to the cylinder catalog for details. 10 Optimum Actuation Size Chart of Air Cylinder For JSY3000, A, B port: 8 Horizontal Vertical (Upward) Average speed [mm/s] 0 100 200 300 400 500 600 700 800 32 CM2 series Pressure: 0.5 MPa Load ratio: 50% Stroke: 300 mm 40 50 63 CA2 series Pressure: 0.5 MPa Load ratio: 50% Stroke: 500 mm 80 100 125 CS1 series Pressure: 0.5 MPa Load ratio: 50% Stroke

Vacuum Pad

13UM: ZP3-16UM: ZP3-10B: ZP3-13B: ZP3-16B: ZP3B-T2BK20-B5 P.50 ZP3B-T2BJ10-B5 P.50 Lateral With Adapter: Vacuum Inlet ZP3-10UM: ZP3-13UM: ZP3-16UM: ZP3-10B: ZP3-13B: ZP3-16B: ZP3B-T2BK3-B5 P.50 Lateral P.51 ZP3-015U: ZP3-02U: ZP3-035U: ZP3B-Y1J3-B3 With Buffer: Vacuum Inlet Construction Adapter Applicable Pad List ZP3-10UM: ZP3-13UM: ZP3-16UM: ZP3-10B: ZP3-13B: ZP3-16B: ZP3B-T2BK6-B5 P.50

3 Port Solenoid Valve Metal Seal/Rubber Seal Body Ported VQZ100/200/300

With (1) Without (1) Coil voltage 100V AC (50/60Hz) 200V AC (50/60Hz) 110V AC (50/60Hz) 220V AC (50/60Hz) 24V DC 12V DC Others (1) With With (Without light) 1 (1) 2 Note 1) DIN is applicable to VQZ 200 and 300.

IDX-OM-W010

/60Hz) AC100/100,110V (50/60Hz) AC100/100,110V PC PC ILS ILS ILS ILS OLR PTC OLR PTC C01 CM CM FM FM PRS PRS P P IDF1E/2E/3E/4E/6E/8E-20 IDF1 1E-20 N PE L (50/60Hz) AC200/200,220V AC200/200,220V TB L (50/60Hz) N PE TB ILS ILS OLR PTC OLR PTC CM CM FM PRS 11 FM PRS P P SYMBOL DESCRIPTION CM Compressor Motor FM Fan Motor PTC Overload Relay PTC Starter Switch with Lamp OLR ILS Pressure Switch

IDX-OM-W013

/60Hz) Single phase AC100/100 , 110VVoltage fluctuations10% Power source 200V AC(50/60Hz) Single phase AC200/200 , 220V Electrical Specification Voltage fluctuations10% 100V AC(50/60Hz) 2.4/2.5 3.0/3.1 5.7/5.7 Operating current (Note 2) A 200V AC(50/60Hz) 1.2/1.3 1.5/1.5 3.4/3.0 Power consumption (Note 2) W 100V AC,200V AC (50/60Hz) 180/202 208/236 385/440 100V AC 10A Circuit Breaker (Note

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lo switches Bore sizel E--6,"'"-l IE ro.m I IE re '. 1 Port location on head cover stroke (l00ihs o Standard 50, 100, 150,200 50, 100, 150, 200, 300.400, 500,600 50, 100, 150. 200,300,400, 500,600,700,400 Doub e actino Sinole aclino sorinq relurn Sinale aclinq sprinq extend Se Caralog N301 ior slandard stroke Lenglhs on lypes otherrhan single rod 'lnrermedate shkes can b nanufacrured upon

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Pilot Pressure Range NVJA3(1)2-M3 90 80 70 60 50 Type of actuation Port size tu 40 1G3U Ndn.

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Pilot Pressure Range NVJA3(1)2-M3 90 80 70 60 50 Type of actuation Port size tu 40 1G3U Ndn.

NVJ100, NVJ300, NVJ3000 3,5 Port Solenoid Valve/Rubber Seal Type

Pilot Pressure Range NVJA3(1)2-M3 90 80 70 60 tu 50 Type of actuation Port size 40 1G3U Ndn.

Round Type Low Pressure Hydraulic Cylinder Series CH
M

Different sides Same side Different sides Same side D-C7 D-C8 15 50 10 50 + 45 (n 2) 15 + 45 n 2 2 D-H7 D-H7W D-H7BAL D-H7NF (n = 2, 4, 6 ) 60 + 45 (n 2) 15 60 10 Air Release D-C73C D-C80C D-H7C 15 + 50 n 2 2 Caution 15 65 10 (n = 2, 4, 6 ) 65 + 50 (n 2) 1.

Title not found

Protective ON/OFF, 11.5 Power supply with/without load Three phase AC200/200-280V10% (50/60Hz) 5.2 54.8% (50%/50%) Dimensions 700 (450) W x 845D x 1705H ( ): in case single type Conventional type: INR-499 Safety EMI S2, EU EMC directive conformity Circulating fluid gauge, Back flow prevention of circulating fluid, etc.

Direct Solenoid

Voltage to Operaie (on 60 cycles) DC 8090 B70h 13.2 13.2 OIRECT SOLEI{OIO OPERA'ED: The solenoid operates tho spool directly, and a spring returns the spool and solenoid plunger when the solenoid is de-enrgized RESFO SE Time to Energizq (Sconds) 0.018 0.017 o.ga 0.025 0.012 0.012 0.018 0.018 0.015 0.015 0.025 0.025 0.0r7 0.016 0.023 0.023 1r5/50 1n/@ 1 15/50 120r'@ The sOool has no seals,

IDX-OM-W023

R T 600mm 1 10% () ( 60cm 1 ) 10% 3 IDU Series 5-1 5 1 IDX-OM-W023 5 () 60cm 1 2 INOUT INOUT () IDU Series 5-1 5 2 IDX-OM-W023 6 6-1 IDU8E-10/20 IDU11E-10/20 IDU15E1-10/20 50Hz 1.1 1.5 2.6 3/min (ANR)1 m 60Hz 1.2 1.7 2.8 0.7MPa 55 32 10 580 0.151.0MPa 240 (85%) AC100V 50/60Hz AC100/100110V10%(4) AC200V 50/60Hz AC200/200220V 10%(4) AC100V 50/60Hz 3.4/3.5 5.7/6.0 4.6

Digital Pressure Switch

Panel mount adapter ZS-46-B Panel mount adapter + Front protective cover ZS-46-D Lead wire with connector ZS-46-5L 5 cores, 2 m Front protective cover ZS-27-01 R1/8 piping adapter ZS-46-N1 NPT1/8 piping adapter ZS-46-N2 -9No.PS-OMX1005 Summary of Product parts Names of individual parts Operation light: Displays the switch operating condition.

Digital Pressure Switch

, 100, 500, 1000, 5000 ms Enclosure IP65 Environment Withstand voltage 250 VAC for 1 minute between terminals and housing Insulation resistance 2 M or more between terminals and housing (with 50 VDC megger) Ambient temperature range Operation: -5 to 50 oC, Storage: -10 to 60 oC (No condensation or freezing) Operating humidity range Operation, Storage: 35 to 85%RH (No condensation) Standard

Suction Guard (Produced upon receipt of order) FHG Series

L-type block (75) (50) W R P Q Port size Weight (kg) d K W Y AE (mm) (75) (50) W J W (mm) 1/2B (04) 3/4B (06) 1B (08) 1 1/4B (10) 1 1/2B (12) 2B (16) 2 1/2B (20) 3B (24) 22.2 27.7 34.5 43.9 49.1 61.1 77.1 90.0 47 47 47 50 50 50 50 50 70 70 70 85 85 85 105 105 9 9 9 9 9 9 9 9 62 62 62 65 65 65 65 65 3.5 3.5 3.5 6.2 6.2 6.1 11.9 11.9 Port size Weight (kg) E J P Q Port size Weight (kg) E 69

Digital Pressure Switch

X576 X577 X578 X579 X580 Enclosure IP40 Environment Ambient temperature range Operation: 0 to 50 C, Storage: -10 to 60 C (no condensation or freezing) Ambient humidity range Operation, Storage: 35 to 85%RH (no condensation) Withstand voltage 1000 VAC, 1 minute between terminals and housing Insulation resistance 50 M or more at 500 VDC between terminals and housing Temperature characteristics

PSE540/560

The tensile strength of the power supply/output connection cable is 50 N; that of the pressure sensor lead wire with connector is 25 N. Applying a greater pulling force than the applicable specified tensile strength to either of these components can lead to malfunction.

PF2D

A quick recovery time indicates little liquid pool. 50 Ratio of resistance [k m] Particle ratio [number/cc] PFMC 100 2 or 3 particles/cc PFMV 10 00 10 20 30 40 50 60 70 PF2A 1 0 5 10 15 20 25 30 Duration of flow [min] Duration of flow [hour] PF3W The data was obtained by performing an actual 10 minutes supersonic cleaning using an average 16 Mcm of deionized water at class 10 clean room

VDW30/40-XF

Refer to back page 50 for Safety Instructions, pages 17 to 19 for Fluids Control 2 Port Valves Precautions, and pages 467 to 470 for VDW Series/Specific Product Precautions. Selection Mounting Warning Warning 1.