Symbol: 10R1 (Body Ported, 2 Port, N.C., Port 1 IN, Port 2 OUT, Tubing Type), Function: Standard, Voltage: 5 (24 VDC), Wetted Part Material: C (Plate: PEEK; Diaphragm: Kalrez®), Sub-plate Material, Port Size, Reverse Mounting Prevention Pin: w/o Sub-plate, Option: 3 (Bracket + Manual Override), Lead Wire Length: 300mm, CE Compliant: Q (CE Compliant)

Symbol: 10R1 (Body Ported, 2 Port, N.C., Port 1 IN, Port 2 OUT, Tubing Type), Function: Standard, Voltage: 5 (24 VDC), Wetted Part Material: B (Plate: PEEK; Diaphragm: FKM), Sub-plate Material, Port Size, Reverse Mounting Prevention Pin: w/o Sub-plate, Option: 3 (Bracket + Manual Override), Lead Wire Length: 300mm, CE Compliant: Q (CE Compliant)

Symbol: 10R1 (Body Ported, 2 Port, N.C., Port 1 IN, Port 2 OUT, Tubing Type), Function: Standard, Voltage: 6 (12 VDC), Wetted Part Material: B (Plate: PEEK; Diaphragm: FKM), Sub-plate Material, Port Size, Reverse Mounting Prevention Pin: w/o Sub-plate, Option: 3 (Bracket + Manual Override), Lead Wire Length: 300mm, CE Compliant: Q (CE Compliant)

Symbol: 10R1 (Body Ported, 2 Port, N.C., Port 1 IN, Port 2 OUT, Tubing Type), Function: Standard, Voltage: 6 (12 VDC), Wetted Part Material: C (Plate: PEEK; Diaphragm: Kalrez®), Sub-plate Material, Port Size, Reverse Mounting Prevention Pin: w/o Sub-plate, Option: 3 (Bracket + Manual Override), Lead Wire Length: 300mm, CE Compliant: Q (CE Compliant)

Symbol: Body Ported, 2 Port, N.C., Port 1 IN, Port 2 OUT, Tubing Type, Function: Standard, Voltage: 24 VDC, Wetted Part Material: Plate: PEEK; Diaphragm: EPDM, Sub-plate Material, Port Size, Reverse Mounting Prevention Pin: w/o Sub-plate, Option: Bracket + Manual Override, Lead Wire Length: 300mm, CE Compliant: CE Compliant

Symbol: Body Ported, 2 Port, N.C., Port 1 IN, Port 2 OUT, Tubing Type, Function: Standard, Voltage: 24 VDC, Wetted Part Material: Plate: PEEK; Diaphragm: FKM, Sub-plate Material, Port Size, Reverse Mounting Prevention Pin: w/o Sub-plate, Option: Bracket + Manual Override, Lead Wire Length: 300mm, CE Compliant: CE Compliant

Symbol: Body Ported, 2 Port, N.C., Port 1 IN, Port 2 OUT, Tubing Type, Function: Standard, Voltage: 12 VDC, Wetted Part Material: Plate: PEEK; Diaphragm: FKM, Sub-plate Material, Port Size, Reverse Mounting Prevention Pin: w/o Sub-plate, Option: Bracket + Manual Override, Lead Wire Length: 300mm, CE Compliant: CE Compliant

Symbol: Body Ported, 2 Port, N.C., Port 1 IN, Port 2 OUT, Tubing Type, Function: Standard, Voltage: 12 VDC, Wetted Part Material: Plate: PEEK; Diaphragm: Kalrez®, Sub-plate Material, Port Size, Reverse Mounting Prevention Pin: w/o Sub-plate, Option: Bracket + Manual Override, Lead Wire Length: 300mm, CE Compliant: CE Compliant

Compatible Fluid: Air / Water / Chemical, Operating Environment: Standard, Type: Electromagnetic Type, Switching Type: Normally Closed, Body Material: Resin, Connection Type: Tube Connection, Plumbing Thread Nominal: -, Tube Diameter: φ2.8, Operating Temperature Range(°C): 0～50, Driving Type: Linear Motion Type, Orifice Diameter(Ø): 1.4, Insulation Class: B, Pipe opening type (details): Body

Max. operating pressure differential (MPa)Flow characteristicsMax. system pressure (MPa)Mass (kg) Av x 10-6 (m2)Cv convertedVCS221/8 ( 6A)1/4 ( 8A)21.03.80.161.01/8: 0.211/4: 0.24

Max. operating pressure differential (MPa)Flow characteristicsMax. system pressure (MPa)Mass (kg) Av x 10-6 (m2)Cv convertedVCS221/8 ( 6A)1/4 ( 8A)21.03.80.161.01/8: 0.211/4: 0.24

Max. operating pressure differential (MPa)Flow characteristicsMax. system pressure (MPa)Mass (kg) Av x 10-6 (m2)Cv convertedVCS221/8 ( 6A)1/4 ( 8A)21.03.80.161.01/8: 0.211/4: 0.24

Max. operating pressure differential (MPa)Flow characteristicsMax. system pressure (MPa)Mass (kg) Av x 10-6 (m2)Cv convertedVCS221/8 ( 6A)1/4 ( 8A)21.03.80.161.01/8: 0.211/4: 0.24

70pvpump

: Variable Variable 1 to 10% Fixed 3% F.S. or less Fixed 3% F.S. or less Hysteresis mode: Variable Window comparator mode: Fixed (3 digits) Digit is min. calibration unit.

Pressure Gauge Guide

Note) Use M5 female thread when piping onto a panel. 14-11-10 10 Pressure Gauge Guide Pressure Gauge for Clean Series (10-series) O.D: 44 G49 Installation of a filter on the breathing hole (filtration 3 m) enables an unit to curb particle generation from the pressure gauge inside. Standard Specifications G49 Back side thread R Air 3% F.S.

5 Port Solenoid Valve/Body Ported, Cassette Type Manifold, Series SY3000/5000/7000

position Types R, U Types S, Z Maximum 50 12 or less 12 or less 15 or less 2 position single 2 position single/double 10 5 5 Max. operating frequency Hz 10 or less 10 or less 13 or less 2 position double 3 position 3 3 3 15 or less 16 or less 20 or less 3 position Non-locking push type, Slotted locking type, Knob locking type SY5000 Manual override Response time ms (at 0.5MPa) Main valve/

Brake mechanism added

Applicable bore size Dd9 L1 L2 m d Drill through Included split pin Included flat washer Clevis Knuckle 2 x d Dd9 CDP-2A 40 10 0.040 0.076 46 38 4 3 3 x 18 L Polished round 10 L1 L2 m L1 L2 m CDP-3A 50 40, 50, 63 12 0.050 0.093 55.5 47.5 4 3 3 x 18 L Polished round 12 2 x d Dd9 CDP-4A 63 16 0.050 0.093 71 61 5 4 4 x 25 L Polished round 16 L1 L2 m CDP-5A 80 18 0.050 0.093 76.5 66.5 5 4

Compact manifold regulator ARM5 Series

IN side OUT side Fitting size Straight Elbow Elbow Elbow Straight Elbow Elbow Elbow R S T U V W X Y 4, 5/32 2.5 6 11 35.5 6 3 12.5 19 35.5 3 6.5 11 36 1/4 3 12.5 19 35.5 6.5 6 11.5 38.5 8, 5/16 5 13.5 21 38.5 ARM5AB Centralized supply type (DIN rail mount) n = Number of stations for regulator block L2 L2-10.5 L1=(14 x n)+56 11.5 Y Pressure gauge (Accessory) 10 10 14 14 16 10 10 5.3 W V T

PA3000/5000/PAX1000

10 0 0 10 30 40 50 20 60 10 20 Discharge rate l/min Discharge rate l/min Selection from flow rate characteristic graphs (PA3000) Required specification example: 3.

Process Pump Series PA3000/5000/PAX1000 Series PB1000

10 0 0 10 30 40 50 20 60 10 20 Discharge rate l/min Discharge rate l/min 1m = 3.28ft 1l/min = 0.035SCFM Selection from flow rate characteristic graphs (PA3000) Required specification example: 3.