Compact Vacuum Unit

Output (OUT2) display (Red) LED display button (UP) Brown DC (+) Main circuit Main circuit (Analog output) 1 k 12 VDC Black OUT + to 24 VDC button (DOWN) Load Blue DC () button (SET) Voltage output type: 1 to 5 V Output impedance: Approx. 1 k Vacuum Pressure Switch ZB1-ZSA-A NPN (2 outputs) ZB1-ZSB-A PNP (2 outputs) Lead wire with connector Output (OUT1) display (Green) Connector terminal

Water-cooledThermo-chiller

16 Input signal Output signal Run/Stop signal 2 4.7 k 4 DIO REMOTE signal 1 4.7 k 17 DIO REMOTE signal 2 4.7 k 6 Operation condition signal Output signal 1 19 Warning signal Output signal 2 Circuit diagram Digital 7 circuit Fault signal Output signal 3 20 Remote signal Output signal 4 8 Temp Ready signal Output signal 5 15 Contact output COM Contact output COM 5 Alarm signal Alarm signal

Valve Mounted Guide Cylinder Series MVGQ ø12, ø16, ø20, ø25, ø32, ø40, ø50, ø63, ø80, ø100 Valve, Speed Controller, and Cylinder are formed into one unit. Easy piping wiring work for Valve, Speed Controller and Cylinder can be formed into one unit, furthe

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MY1

1 u t q w e y !2 i r #3 !4 !0 !9 !8 !5 !

Mechanically Jointed Rodless Cylinder With Protective Cover Series MY1  W ø16, ø20, ø25, ø32, ø40, ø50, ø63 1

1 u t q w e y !2 i r !4 !0 MX MTS MY CY !9 !8 !5 !7 MG CX MY1WK with side seal D@5 @0 @3 @4 @2 @1 -X 20Data Component Parts No. q w e r t y u i o !0 !

Mechanically Jointed Rodless Cylinder With Protective Cover Series MY1  W ø16, ø20, ø25, ø32, ø40, ø50, ø63 1

1 u t q w e y !2 i r !4 !0 MX MTS MY CY !9 !8 !5 !7 MG Courtesy of Steven Engineering, Inc.-230 Ryan Way, South San Francisco, CA 94080-6370-Main Office: (650) 588-9200-Outside Local Area: (800) 258-9200-www.stevenengineering.com CX MY1WK with side seal D@5 @0 @3 @4 @2 @1 -X 20Data Component Parts No. q w e r t y u i o !0 !

2-Color Display ® Digital Flow Switch *1 Applicable fluid Dry air, N2, Ar, CO2

depth 6 PF2M711/721S-C8(-L) 96 2.8 depth 6.2 2.5 depth 5 PF2M711/721S-N7(-L) 92.6 2.8 depth 6.2 2.5 depth 5 2 x P Q 2 x P Q PF2M7mW-C4/C6/C8/N7(-L) A D A D 58 58 48 48 18 18 OUT1 OUT2 OUT1 OUT2 10.2 DC() DC(+) 1.4 10.2 DC() DC(+) 1.4 46.9 (Max. 53.9) 46.9 (Max. 53.9) 38.5 (30.9) 38.5 (30.9) 3 3 C 18 C OUT IN 18 2 x One-touch fitting Applicable tubing O.D.: 4, 6, 8, 1/4" 2 x 3.4 OUT IN 2

VCL

LVC DIN terminal: D Conduit terminal: T Cable 6 to 12 LVA F S Q 27.5 34 F (Q) LVH LVD LVQ LQ R C U 25 LVN C (44) R E R TI/ TIL G1/2 E PA G1/2 A H D (S) B B A H D 2-P Port size 2-P Port size PAX 2-M Thread depth N 2-M Thread depth N PB L L K K N.C.

Fieldbus system EtherCAT compatible SI Unit

010 V 4 05 V 080E 5 15 V 6 020 mA 7 420 mA 0 C(Celsius) 080F 1 F(Fahrenheit) 4 2 wires 0810 5 3 wires 6 4 wires 0 Direct(No Swap) 1 Swap 16bit 0811 2 Swap 32bit 3 Swap all 0 Deactivated 1 IOL_Manual 0812 2 IOL_Autostart 3 DI_C/Q 4 DO_C/Q 0 No Device check 1 Type compatible Device V1.0 0813 2 Type compatible Device V1.1 3 Type compatible Device V1.1 , Backup + Restore 4 Type compatible Device

End Lock Cylinder Series CBM2/ø20, ø25, ø32, ø40 Series CBA1/ø40, ø50, ø63, ø80, ø100 CL MLGC CNA CB CV/MVG Maintains the cylinder’s CXW original position even if the CXS air supply is interrupted. CXT MX

80 90 75 20 2 Same side 75 55 80 90 Caution 20+35(n2) n=2, 3, 4, 80+35(n2) n=2, 4, 6, 8, 75+35(n2) n=2, 4, 6, 8, 90+35(n2) n=2, 4, 6, 8, Dif. sides D-A44C q Socket wrench should be used when mounting bracket are replaced.

End Lock Cylinder Series CBM2/ø20, ø25, ø32, ø40 Series CBA1/ø40, ø50, ø63, ø80, ø100 CL Locking of door Prevention of dropping at the rising end MLG With front lock With rear lock CNA CNG MNB CNS Maintains the cylinder’s CLS original position even if t

80 90 75 20 2 Same side 75 55 80 90 Caution 20+35(n2) n=2, 3, 4, 80+35(n2) n=2, 4, 6, 8, 75+35(n2) n=2, 4, 6, 8, 90+35(n2) n=2, 4, 6, 8, Dif. sides D-A44C q Socket wrench should be used when mounting brackets are replaced.

CL

Description q w e r t y u i o !0 !1 !2 !3 !4 !5 !6 !7 !8 !9 @0 @1 @2 @3 @4 @5 No. Description q w e r t y u i o !0 !1 !2 !3 !4 !5 !6 !7 !8 !

4 Port Solenoid Valve Common Specifications Series SJ2000/3000

0 (B) (A) 2 4 (B) (A) 2 4 4(A) 3 5 1 3 5 1 (EB) (P) (EA) (EB) (P) (EA) 2(B) i 5(EA)/3(EB) 1(P) 2 position double with back pressure check valve 2 position double 2 position double o t r e w y q !1 u !

SMC

ZZ 121 121 121 131 146 185 238 292 344 M 83 83 83 93 108 147 200 254 306 Z 81.5 81.5 81.5 91.5 106.5 145.5 198.5 252.5 304.5 K 31 41 51 61 71 96 121 146 171 J 44 44 44 54 69 108 113 155 190 I 10 10 10 10 10 10 58 70 87 NA 2 2 2 2 2 2 4 4 4 NN 2 2 2 2 3 4 5 6 7 KA 169 223 275 H 45 45 45 55 35 35 35 38 44 HA 35 35 35 35 35 70 70 76 88 G 15 15 15 15 15 19 37 41 19 GA 25 25 25 35 50 54 107 155

PFxx-OMA1007

Signal Details 1 24 V 24VDC: Output 2 I/Q Digital Input 3 0 V 0V IO-Link 4 C/Q Digital Input (PNP) Digital Output (PNP) 1 5 NC Not Connected 1: Do not turn on the power supply. 2: Can be changed by setting parameters. Connection to wireless adapter Connect wireless adapter if wireless system required. Hub/wireless adapter: M8 4-pin A-coded (Socket) Connector Pin No.

Refrigerated Air Dryer

4 x 13 IDK Dimensions AMG (mm) A B C D E F G K L M N P Q Port size Model AFF IDFA22E IDFA37E R 1 775 600 290 623 134 405 698 93 13 25 85 340 R 11/2 855 680 AM AMD IDFA55E, IDFA75E AMH A R B AME AMF Q E ZFC D SF G SFD F LLB C AD GD M N L P K 4 x 13 Dimensions (mm) A B C D E F G K L M N P Q R Model Port size IDFA55E IDFA75E 800 (868) R 2 470 855 (128) (273) (110) 13 500 75 700 526 (110) 519

Series VCL

2 Port for Oil Dimensions (mm) (N.C.) 1in = 25.4mm Grommet: G Conduit: C Approx. 300 V D Approx. 280 D F Approx. 300 F Q Q Class H coil Broken line section C C G 1/2 R R E E A H A H B B 2-P Port size 2-P Port size 2-M, thread depth N 2-M, thread depth N L L K K DIN terminal: D Conduit terminal: T Cable 6.8 to 10 F S Q 27.5 (Q) D F 25 C R C (44) R R E G 1/2 E G 1/2 A H D (S) B B A H 2-P Port

MLGC

Connector G59W G5PW K59W G5BA P P P P P P P 3 wire (NPN) K I.C. 5V, 12V Diagnostic indication (2 color) Relay, PLC 3 wire (PNP) K 24V K 12V 2 wire Watrer resistant (2 color) Grommet K With timer 3 wire (NPN) P P K I.C. 5V, 12V G59F Latch w/ diagnostic output (2 color) P K 4 wire (PNP) Latch with diagnostic output (2 color) H7LF P P K 0.5m Ex) B80C 5m Z Ex) B80CZ 3m L Ex) B80CL

Smooth Cylinder

Dimensions/12 to 25 Standard (Through-hole/Both ends tapped)/CQSYB, CDQSYB 12 2-M5 x 0.8 Auto switch Lead wire min. bending radius 10 H thread effective depth C 2 x 4-OB counter bore depth RB 2 x 4-OA effective depth RA Note 1) Q F 16 I 4-N through D M E T Plain washer K B + Stroke L M A + Stroke E 20, 25 Rod end male thread H1 Rod end nut Note 2) C1 X L1 Rod end male thread Bore size (mm

Series VC, Series VCL, Direct Operated 2 Port Solenoid Valve for Oil

2 Port for Oil Dimensions (mm) (N.C.) 1in = 25.4mm Grommet: G Conduit: C Approx. 300 V D Approx. 280 D F Approx. 300 F Q Q Class H coil Broken line section C C G 1/2 R R E E A H A H B B 2-P Port size 2-P Port size 2-M, thread depth N 2-M, thread depth N L L K K DIN terminal: D Conduit terminal: T Cable 6.8 to 10 F S Q 27.5 (Q) D F 25 C R C (44) R R E G 1/2 E G 1/2 A H D (S) B B A H 2-P Port