MRQ

3 Compact hexagon nut Stainless steel Platinum silver !4 !5 !6 !7 !8 !

XLAQ/XLDQ

Bellows seal O-ring seal Standard 468 Aluminum One-touch Connection and Release High Vacuum Angle Valve Normally Closed/Bellows Seal XLAQ Series How to Order XLAQ M9N 16 A q w e r t y w Indicator/Actuator port direction q Flange size Size 16 25 40 50 Symbol Nil A F G J K L M Indicator Without indicator Actuator port direction Rear flange surface Flange side Flange side Left flange surface

Compact Cylinder with Air Cushion Series RQ

3 wire (PNP) Note 3) When ordering foot brackets, order 2 pieces per cylinder.

1.63

Load voltage Wiring (Output) Pre-wired connector Applicable load DC AC Auto switch model Lead wire length (m) Indicator light Electrical entry Type Special function Perpendicular In-line 0.5 (Nil) 5 (Z) 1 (M) 3 (L) M9N M9P M9B M9NW M9PW M9BW M9NA1 M9PA1 M9BA1 P3DWA M9NV M9PV M9BV M9NWV M9PWV M9BWV M9NAV1 M9PAV1 M9BAV1 3-wire (NPN) 3-wire (PNP) 2-wire 3-wire (NPN) 3-wire (PNP) 2-wire 3-wire

RB/RBL/RBQ

RB2725 S (Stroke) RHC Model 96 115 115 134 210 229 287 478 5 6 6 7 11 12 15 25 MK(2) 3 RS Q G RS H A RZQ 4.

Symbol: 10R4 (Base Mounted, 2 Port, N.O., Port 3 IN, Port 2 OUT), Function: Y (Power-saving Circuit), Voltage: 6 (12 VDC), Wetted Part Material: B (Plate: PEEK; Diaphragm: FKM), Sub-plate Material, Port Size, Reverse Mounting Prevention Pin: 1 (PVDF, M6), Option: 3 (Bracket + Manual Override), Lead Wire Length: 10 (1000mm)

Symbol: 10R4 (Base Mounted, 2 Port, N.O., Port 3 IN, Port 2 OUT), Function: Y (Power-saving Circuit), Voltage: 6 (12 VDC), Wetted Part Material: B (Plate: PEEK; Diaphragm: FKM), Sub-plate Material, Port Size, Reverse Mounting Prevention Pin: 1 (PVDF, M6), Option: 3 (Bracket + Manual Override), Lead Wire Length: 6 (600mm)

Symbol: 10R4 (Base Mounted, 2 Port, N.O., Port 3 IN, Port 2 OUT), Function: Y (Power-saving Circuit), Voltage: 6 (12 VDC), Wetted Part Material: B (Plate: PEEK; Diaphragm: FKM), Sub-plate Material, Port Size, Reverse Mounting Prevention Pin: 1 (PVDF, M6), Option: 3 (Bracket + Manual Override), Lead Wire Length: KO (Plug Connector, w/o Connector)

Symbol: 10R4 (Base Mounted, 2 Port, N.O., Port 3 IN, Port 2 OUT), Function: Y (Power-saving Circuit), Voltage: 6 (12 VDC), Wetted Part Material: B (Plate: PEEK; Diaphragm: FKM), Sub-plate Material, Port Size, Reverse Mounting Prevention Pin: 1 (PVDF, M6), Option: 3 (Bracket + Manual Override), Lead Wire Length: KZ (Plug Connector, 300mm)

Symbol: Base Mounted, 2 Port, N.O., Port 3 IN, Port 2 OUT, Function: Power-saving Circuit, Voltage: 12 VDC, Wetted Part Material: Plate: PEEK; Diaphragm: FKM, Sub-plate Material, Port Size, Reverse Mounting Prevention Pin: PVDF, M6, Option: Bracket + Manual Override, Lead Wire Length: 1000mm, CE Compliant: -

Symbol: Base Mounted, 2 Port, N.O., Port 3 IN, Port 2 OUT, Function: Power-saving Circuit, Voltage: 12 VDC, Wetted Part Material: Plate: PEEK; Diaphragm: FKM, Sub-plate Material, Port Size, Reverse Mounting Prevention Pin: PVDF, M6, Option: Bracket + Manual Override, Lead Wire Length: 600mm, CE Compliant: -

Symbol: Base Mounted, 2 Port, N.O., Port 3 IN, Port 2 OUT, Function: Power-saving Circuit, Voltage: 12 VDC, Wetted Part Material: Plate: PEEK; Diaphragm: FKM, Sub-plate Material, Port Size, Reverse Mounting Prevention Pin: PVDF, M6, Option: Bracket + Manual Override, Lead Wire Length: Plug Connector, w/o Connector, CE Compliant: -

Symbol: Base Mounted, 2 Port, N.O., Port 3 IN, Port 2 OUT, Function: Power-saving Circuit, Voltage: 12 VDC, Wetted Part Material: Plate: PEEK; Diaphragm: FKM, Sub-plate Material, Port Size, Reverse Mounting Prevention Pin: PVDF, M6, Option: Bracket + Manual Override, Lead Wire Length: Plug Connector, 300mm, CE Compliant: -

A

3000 4 4000 5 5000, 6000 Model Port Size Exh Port A B C D E F G H L O C K I N G O P T I O N NVHS2500 1/8, 1/4 1/8 60 20 12.8 40 44 33 28 7.5 0 Standard 5 Lockable NVHS3500 1/4, 3/8 1/4 73 29 12.8 53 53 42 29 7.7 NVHS4500 1/4, 3/8, 1/2 3/8 85 32 12.6 70 64 49 36 10 NVHS5500 3/4, 1 1/2 136 56 32 90 80 65 54 10 I N P U T P O R T S I Z E 01 1/8 02 1/4 03 3/8 04 1/2 06 3/4 10 1 H A N D L E C O

HRX-OM-Q026

contact output signal . 3-25 3.3.8 RS-485 communication wiring . 3-26 3.3.9 RS-232C communication wiring . 3-27 3.4 Piping . 3-28 3.5 Circulating Fluid Supply . 3-31 3.5.1 Automatic water fill function . 3-31 3.5.2 Fluid supply without using the automatic water fill function . 3-33 3.5.3 Option K Water fill port . 3-35 3.5.4 Option M Applicable to deionized water piping . 3-35 Chapter 4 Starting

2 Finger, 3 Finger, 4 Finger Air Gripper Parallel Type Series MHS

Open EO Closed EC K L J M5 x 0.8 (finger closing port) G I M (mm) I 9 11 Model MHS2-50D MHS2-63D G 37.5 44 FZ 6 7 FX 31 38 FY 28 34.5 EC 22 30 EO 34 46 DC 70 86 DO 82 102 M 2 3 B 70 86 K 10 11 AC 3 4 J 24 28 AA 55 66 AB 52 62 NA 18 24 L 4H9 6H9 NB 10h9 12h9 CA 9 12 CB 20 22 0 -0.036 0 -0.043 +0.030 0 +0.030 0 Model MHS2-50D MHS2-63D SC 12 14 RB 34 38 O 5 5.5 4H9 5H9 VA Q 14 17 RA 52 66 VB

3 Port Solenoid Valve/

M12 connector pin number Wiring specication w r q e w w q e e r q r VG342(R)-X87 Internal pilot External pilot External pilot/With check valve 2(A) 2(A) 2(A) w r w r w r q e q e q e 3(R) 3(R) 3(R) w r w r w r q e q e q e 3(R) 3(R) 3(R) 1(P) X X Safety limit switch terminal [N.C.]

CE

7 w @5 q y !3 @3 r t @5 e !1 @1 @1 @4 @6 !4 @6 !4 u @8 !5 @0 !8 !9 i Parts list Parts list Description Material Note Description Material Note No. No.

Slider Type/Ball Bushing Bearing

9 @0 q !6 !5 i y !7 e !0 u !8 !3 !4 #0 !1 o !2 t r @2 @1 #3 #4 @9 #1 #2 @5 @7 @4 @6 CY1H10 CY1H10-B CY1H10-BS CY1H10@3 @8 #0 t Material Note Component Parts No. 1 2 3 4 5 6 7 8 9 10 11 12 13 14 15 16 17 18 19 20 21 22 23 24 25 26 No.

7

9 t q @1 w e @0!4 @3 y !6 o u !7 @2 CK1C (Clevis width 12.5) @4 i !2 !0 !1 !3 !5 Component Parts MK No.