MU (#1+#3+#11) MUF32SMU32, #3 (#1+#3+#11) MUF40SMU40, #3 (#1+#3+#11) MUF50SMU50, #3 (#1+#3+#11) MUF63SMU63, #3 (#1+#3+#11) Single clevis Double clevis Double clevis Single clevis Double clevis MUD25SMU25, #6 (#1+#6+#11) MUD32SMU32, #6 (#1+#6+#11) MUD40SMU40, #6 (#1+#6+#11) MUD50SMU50, #6 (#1+#6+#11) MUD63SMU63, #6 (#1+#6+#11) (mm) Rotation() 100 90 80 80 80 ZZ 116 130 142 173 185 Z 108 120 132
B C E G H K MM NN 5 st 10 st F 15 st R 5 st 10 st S 15 st W Q 5 st 10 st Z Bore size (mm) 6 10 15 A 15 st M3 x 0.5 3.5 3 8.5 9 41.5 26.5 34.5 19.5 27.5 12.5 3 6 32.5 13.9 25.5 12 18.5 7 M10 x 1.0 9 M4 x 0.7 3.5 5 12 46 28 39 21 32.5 14.5 4 6 34 22 27 19 20.5 10 M15 x 1.5 13 12 M5 x 0.8 4.2 6 14 50 29 43.5 22.5 37.5 16.5 5 7 36 31 29.5 27 23.5 12 M22 x 1.5 20 19 6-2-16
B C E G H K MM NN 5 st 10 st F 15 st R 5 st 10 st S 15 st W Q 5 st 10 st Z Bore size (mm) 6 10 15 A 15 st M3 x 0.5 3.5 3 8.5 9 41.5 26.5 34.5 19.5 27.5 12.5 3 6 32.5 13.9 25.5 12 18.5 7 M10 x 1.0 9 M4 x 0.7 3.5 5 12 46 28 39 21 32.5 14.5 4 6 34 22 27 19 20.5 10 M15 x 1.5 13 12 M5 x 0.8 4.2 6 14 50 29 43.5 22.5 37.5 16.5 5 7 36 31 29.5 27 23.5 12 M22 x 1.5 20 19 6-2-16
Angle adjustment range 3 Angle adjustment range 3 Angle adjustment range 3 Auto switch Key Direction indicating label Key Direction indicating label Magnet A Magnet B +4 0 +4 0 0 90 18 90 ve 00 ve o ve o 1 o ro A port B port gr o e A port B port g v o y y o e gr e o k k r f g o f y o e y g e e n e Auto switch R ra g k k n n io ra at f ot f o o n e io g at e Angle adjustment range 3 ot
(Example) For M3: L1 = 6 mm Applicable shaft types: J, K, T The maximum dimension L2 is, as a rule, twice the thread size. (Example) For M3: L2 = 6 mm Applicable shaft types: J, K, T 2. Q1 = M L2 = L2 + (3 x P) 3. L1 + (3 x P) L2 + (3 x P) 4.
(Float type normally close) ~ 0. 3 ,,-O Can be used with a compressor with capacity lower than 0.7Skw Q. ~--~--~~. Qi . .3 0.2k .
Refer to How to Order ZQ1R-1-BSB-AS ZQ1L-1-BSB-AS 1 1 End block R 2 End block L 3 ZQ13M-Note) Ejector assembly 4 ZQ-3-005 ZQ-3-009 Ejector body gasket for manifold 5 Exhaust block gasket 6 Note) Refer to page 2 for detailed description of How to Order. How to Order Hexagon Socket Head Cap Screw Working procedure Disassembly Loosen and remove the hexagon socket head cap bolts q.
Note 3) Weight without sub-plate 1.12-7 VQZ1000/2000/3000 Body Ported Construction: VQZ1000/2000/3000 Metal seal Rubber seal e w q r e w q r 2 position single 2 position single (A) 4 (B) 2 (A) 4 (B) 2 5 (R1) 1 (P) 3 (R2) 5 (R1) 1 (P) 3 (R2) e w q r e w q r 2 position double 2 position double (A) 4 (B) 2 (A) 4 (B) 2 5 (R1) 1 (P) 3 (R2) 5 (R1) 1 (P) 3 (R2) e w q e w q 4 r 3 position pressure
K J H G F E D C B A 475 432 512 472 525 482 562 522 L Booster part no. Tank model VBA2100-03 VBA2200-03 VBA4100-04 VBA4200-04 VBA2100-03 VBA2200-03 VBA4100-04 VBA4200-04 394 Rc 3/8 VBAT20 VBAT20S 305 206 674 180 200 100 400 Rc 1/2 430 Rc 1/2 444 Rc 3/8 VBAT38 VBAT38S 355 256 824 205 250 150 500 Rc 3/4 480 Rc 1/2 14-9-9
1/4" ons-lqgslr 1;a'aa 3/8 one-toucn fiftrng l0mrn one louch trh nq 12mm one-louch fin nq sv4000 Rc 38 Rc 3/8 G 1/4 G 3'l8 G 3/8 'ln case or mixed speciricatio.
Load at end of lever Position of rotational axis: Perpendicular to the plate through one end 2 1 2 2 a + K = m1 + m2 3 a Ex.) When shape of W2 is a sphere, refer to u, and 4a + b 2 1 2 4a + b 2 2 2 = m1 + m2 12 12 It becomes K = m2 2r2 5 5. Thin rectangular plate (Rectangular parallelepiped) 10.
3 @0 !7 @5 !1 #0 t u r w @3 !9 MSZAA (High precision type) $1 e $0 @7 @1 @9 !0 !2 #2 !6 !4 @4 #3 !8 #7 #8 o #6 q #9 y i $2 @3 @2 #1 @6 #4 #5 Component Parts Note Anodized Nickel plated Chromated Note No.
(Shield) 4.4-8 Stroke Reading Cylinder Series CE1 Construction 12, 20 32 @7 @4@8 @0 oi @3!0 u @8 @4 !2 r e y @4 @8 @0 !0 i @3 o @4 @8@7 u @2 r y MK/MK2 RSQ/RSG !9 #0 w #1 #0 t q e @9 #1 @1 !9 t @5@6 @1 #0 q !1 w #1 #0 @2 @9 #1 @1 RSH CE1 40 to 63 CE2 @0 @4 @8 i u o @3 !1 #1 #2 @8@4 !2 @7 !3#3 r !4 e !6 @6 ML2B ML1C #7 #6 !5 REA REC RHC !9 @5 t @6 y #0 w @1 #0 #5 !7 #4 q @9@2 !8 #1 #2 !
3 Compact hexagon nut Stainless steel Platinum silver !4 !5 !6 !7 !8 !
Bellows seal O-ring seal Standard 468 Aluminum One-touch Connection and Release High Vacuum Angle Valve Normally Closed/Bellows Seal XLAQ Series How to Order XLAQ M9N 16 A q w e r t y w Indicator/Actuator port direction q Flange size Size 16 25 40 50 Symbol Nil A F G J K L M Indicator Without indicator Actuator port direction Rear flange surface Flange side Flange side Left flange surface
3 wire (PNP) Note 3) When ordering foot brackets, order 2 pieces per cylinder.
Load voltage Wiring (Output) Pre-wired connector Applicable load DC AC Auto switch model Lead wire length (m) Indicator light Electrical entry Type Special function Perpendicular In-line 0.5 (Nil) 5 (Z) 1 (M) 3 (L) M9N M9P M9B M9NW M9PW M9BW M9NA1 M9PA1 M9BA1 P3DWA M9NV M9PV M9BV M9NWV M9PWV M9BWV M9NAV1 M9PAV1 M9BAV1 3-wire (NPN) 3-wire (PNP) 2-wire 3-wire (NPN) 3-wire (PNP) 2-wire 3-wire
RB2725 S (Stroke) RHC Model 96 115 115 134 210 229 287 478 5 6 6 7 11 12 15 25 MK(2) 3 RS Q G RS H A RZQ 4.
3000 4 4000 5 5000, 6000 Model Port Size Exh Port A B C D E F G H L O C K I N G O P T I O N NVHS2500 1/8, 1/4 1/8 60 20 12.8 40 44 33 28 7.5 0 Standard 5 Lockable NVHS3500 1/4, 3/8 1/4 73 29 12.8 53 53 42 29 7.7 NVHS4500 1/4, 3/8, 1/2 3/8 85 32 12.6 70 64 49 36 10 NVHS5500 3/4, 1 1/2 136 56 32 90 80 65 54 10 I N P U T P O R T S I Z E 01 1/8 02 1/4 03 3/8 04 1/2 06 3/4 10 1 H A N D L E C O
contact output signal . 3-25 3.3.8 RS-485 communication wiring . 3-26 3.3.9 RS-232C communication wiring . 3-27 3.4 Piping . 3-28 3.5 Circulating Fluid Supply . 3-31 3.5.1 Automatic water fill function . 3-31 3.5.2 Fluid supply without using the automatic water fill function . 3-33 3.5.3 Option K Water fill port . 3-35 3.5.4 Option M Applicable to deionized water piping . 3-35 Chapter 4 Starting