JA/JAH/JB/JS

83 7 7 8 9 13 15 18 24 38 42 3 4.5 5 6 8.5 10 16 21 18 20 0.5 0.7 0.8 1 1.25 1.5 2 2.5 2.5 3 4 6 6.5 8 11 13 20 26 22 26 16 16 21 24 31 41 50 59.5 79 96 2 2 4.5 5 6 7.5 9.5 11.5 14 16 0.02 0.02 0.04 0.07 0.15 0.29 0.56 1.04 2.6 4.5 6 6 7 8 11 14 19 24 30 36 5 5 7 8 11 13.5 16 20 22 24 10 10 13 17 22 27 32 41 46 55 0.5 0.5 0.5 0.5 0.75 1 1.25 2 2.5 3 112 200 300 500 1300 3100 5000 7900 15300

JA/JAH/JB/JS

63 80 100 140 160 3-050 4-070 5-080 6-100 8-125 10-150 16-200 20-250 22-250 24-300 Precautions 2.

Direct Operated, 2 Port Solenoid Valve, For Water, Oil, Steam, Air, Series VX

[660] (164) 0.6 0.7 Critical pressure 0.65 [658] (158) 0.5 0.6 0.55 Sonic [656] (151) 0.5 0.4 0.45 [654] (143) 0.4 0.3 0.35 0.3 [650] (133) 0.2 0.25 0.2 [646] (120) 0.15 0.1 0.1 0.05 2 2 2 2 3 2 3 2 3 2 03 04 VX211 VX22 VX23 VX2 4 VX2 50 VX2 60-02 VX2 602 10 15 5 3 5 10 15 20 25 30 4.5 10 15 20 30 40 50 60 3 2 6 30 60 8 25 35 10 20 40 10 35 Flow rate Q kg/h Figures inside [ ] indicate

Series VC, Direct Operated, 2 Port Solenoid Valve for Water, Series VCW

0.40 1/2: 0.49 5 3 VCW3 0.5 0.23 14.4 (0.80) 3.0 7 0.2 0.13 24.8 (1.38) 10 0.1 37.8 (2.10) 3 3.0 1.2 6.3 (0.35) 4 1/4 (8A) 3/8 (10A) 1/2 (15A) 3/4 (20A) 1/4: 0.58 3/8: 0.55 1/2: 0.62 3/4: 0.78 1.3 0.73 10.8 (0.60) 5 0.7 0.47 15.3 (0.85) 3.0 4 VCW4 7 0.3 0.22 24.8 (1.38) 10 0.12 37.8 (2.10) Note 1) Refer to model selection on page 9 regarding port size and orifice size combinations.

Rotary Table Rack & Pinion Style Series MSQ Size: 1, 2, 3, 7, 10, 20, 30, 50, 70, 100, 200 1

75.4 70 10.6 29 18.5 14 5 12 50 32 84 37 6.5 33.5 65h9 67h9 32H9 9 22H9 10 4.5 3 6.5 17 8.6 14 8.5 85.4 80 14 38 22 19 6 15.5 63 37.5 100 50 10 37.5 75h9 77h9 35H9 10 26H9 12 5 3 7.5 20 10.5 18 10.5 (mm) JC JD JJ JU P Q S SD SE SF SU UU WA WB WC WD WE WF XA XB XC YA YB YC Size 10 20 30 50 M8 x 1.25 12 M5 x 0.8 M8 x 1 M5 x 0.8 34 92 9 13 45 17.7 47 15 3H9 3.5 M5 x 0.8 8 32 27 3H9 3.5 19 3H9

CQS

2 6 7 Long stroke 5[-2.5] 4.5[-2] 10[-7.5] 12[-9.5] 5 5.5 9 10 5 5.5 9 10 7 6 11.5 13.5 9 9.5 13 14 11 10.5 16 18 9 9.5 13 14 12 16 20 25 11 10.5 16 18 19.5 21.5 25 27 1 0.5 6 8 17 19 22.5 24.5 7 6 11.5 13.5 Bore size (mm) Anti-lateral load 1[3.5] 0.5[3] 3.5[-1] 5.5[-3] 6 5.5 9 10 12 16 20 25 0.5 1 5 7 6 5.5 9 10 0.5 1 5 7 17 19 22.5 24.5 10 9.5 13 14 5 5.5 9.5 11.5 5 4.5 0.5 1.5 10 9.5

1 High Purity Chemical Valve Compact Type Series LVD VC
Space saving, compact type is available. Space saving, compact type is available. VDW Compact type is introduced as a new series to complement VQ Body: New PFA Body: New PFA Body: New PFA conventio

PAX PB Tubing size Symbol 03 04 03 04 05 06 07 06 08 10 07 11 10 12 11 13 12 13 19 Body class Tubing O.D. 1/8", 3 4 1/8" 4 3/16" 6 1/4" 6 8 10 1/4" 3/8" 10 12 3/8" 1/2" 12 1/2" 3/4", 19 Body class 1 Symbol 1 2 3 4 5 Body class 1 2 3 4 5 Type of part Symbol U B N Type of part Nut & Insert bushing Insert bushing Nut 2 3 4 5 17-5-53 12 Series LVD Special Tools How to order fitting jigs LQ G

Basic Type/Direct Mount Type

0 i q o u y !7 r !9 w !4 CY3B10, 15 !4 !8 !7 !6 !5 !0 i o q u y t r !2 w !1 The above drawing is 15. (3 magnets are used in 10.) CY3B20 to 40 !3 !4 !1 !8 !6 !5 !7 !0 i q o u t y r e w !2 CY3B50, 63 !4 !8 !6 !5 !0 !7 i o q u y t !3 r !2 w !1 Component Parts Replacement Parts/Seal Kit Bore size (mm) 6 10 15 20 25 32 40 50 63 Kit no.

CKZ2N

3 20 0.03 30 0.025 30 0.025 10 H 9 through 30 0.025 30 0.025 I 9 through M6 x 1.0 H I 15 0.03 15 0.03 30 3 25 0.05 R45 50 0.05 6.5 6.5 18 10 10 18 R25 19 R6 R6 R25 19 19 19 NAAMS code A Weight kg (lbs) NAAMS code A Weight kg (lbs) B C D E F G H I B C D E F G H I Part no.

Sine Rodless Cylinder Series REA/REB

REAL40 REAL25 REAL32 Model 10 (2.48 1.3 x 10-3 x ST) 30 10 (1.98 1.3 x 10-3 x ST) 10 (2.26 1.3 x 10-3 x ST) = 50 20 2.

MHZ

10 12 16 2 2.5 3 4 5 6 3.5 6 8 10 12 20 24 7.2 5.2 8.3 10.5 13.1 18 22 7.5 10.9 14.1 17.9 21.8 34.6 41.4 2 2.45 3.05 3.95 4.9 7.3 8.7 5 1 1.4 1.4 1.6 2 3 3 4 5 8 10 12 15 18 MHZ2-103 (2)(3) 0 0.2 +0.025 0 +2.2 0 +2.2 0 +2.3 0 +2.5 0 +2.7 0 +2.9 0 5.4 MHZ2-163 (2)(3) 0 0.2 0 0.2 0 0.2 0 0.2 0 0.2 +0.025 0 +0.025 0 +0.030 0 +0.030 0 +0.030 0 7.4 MHZ2-203 (2)(3) 11.6 MHZ2-253 (2)(3) 16 MHZ2

MHZ

5@0@2@3 MHZ2-6C 12-2-30 30 Parallel Style Air Gripper Standard Type Series MHZ2 Construction: MHZ2-10 to 40 Double acting/With fingers open Single acting/Normally open !1 e !9 w @0 @1 !4 MHZ MHF MHL i !7 !6 !5 !0 o q u !2 r t y !3 Single acting/Normally closed MHR !

CJ5-S

35 5 31 M4 x 0.7 depth 7 5 6 3 M8 x 1.25 29 M5 x 0.8 83 25 CC Up to 400 22 19.5 17 8 M5 x 0.8 9.5 18.5 10 17 3 18 12 40 6 33 M5 x 0.8 depth 8 5.5 8 3.5 M10 x 1.25 29 M5 x 0.8 83 32 Up to 450 22 19.5 17 8 M5 x 0.8 9.5 20 12 19 3 18 12 40 6 38 M5 x 0.8 depth 8 5.5 10 3.5 M10 x 1.25 35.5 Rc 1/8 85 40 RB Up to 800 30 27 19 10 M6 x 1.0 12 26 16 23 3 19 13 50 8 47 M6 x 1.0 depth 12 6 14 4 M14 x

CJ5-S

x 1.5 55 1/4 109 167 63 Up to 1200 35 32 27 17 M10 x 1.5 19 38 20 28 3 21 14 58 11 72 M10 x 1.5 depth 16 7 18 7 M18 x 1.5 69 1/4 109 167 RS Q G 80 Up to 1400 40 37 32 17 M10 x 1.5 19 50 25 33 3 28 20 71 13 89 M10 x 1.5 depth 22 10 22 7 M22 x 1.5 80 3/8 130 201 100 Up to 1500 110 40 37 41 19 M12 x 1.75 24 60 30 38 3 29 20 71 16 M12 x 1.75 depth 23 10 26 8 M26 x 1.5 100 1/2 131 202 RS H A

Pulse Valve

fitting type 470 910 1850 Direct piping type 290 500 1230 Port size: 3/4, 1 The figure shows the JSXFAE. *1 No condensation 3 Pulse Valve Valve for Dust Collector JSXFAH Series Immersion Type RoHS How to Order JSXFA H 6 10 R B e r u t y q w Immersion type q Piping 10 1 (25A) w Tank size e IN/OUT port size r Thread type H Immersion type 6 6 inch Nil None R Rc N NPT F G y Fluid and ambient

48

Note 3) 10 to 15 in decimal number are displayed as follows in the 7-segment LED.

VQZ1000/2000/3000

3 (R2) 1 (P) 5 (R1) 3 (R2) 1 (P) 5 (R1) e w q r e w q r 2 position double 2 position double (A) 4 (B) 2 (A) 4 (B) 2 3 (R2) 1 (P) 5 (R1) 3 (R2) 1 (P) 5 (R1) e w q e w q r r Note) 3 position pressure center 3 position exhaust center 3 position closed center 3 position pressure center 3 position exhaust center 3 position closed center (A) 4 (B) 2 (A) 4 (B) 2 (A) 4 (B) 2 (A) 4 (B) 2 (A) 4 (B

CQSY/CQ2Y/CM2Y/CG1Y/CA2Y

16 20 20 25 30 32 40 40 52 52 10 10 10 14 14 15 17 17 21 21 51 58 58 71 72 8 11 11 13 16 M8 x 1.25 M8 x 1.25 M10 x 1.25 M12 x 1.75 M12 x 1.75 6 7 7 10 10 14 18 18 22 26 11 11 14 17 17 M14 x 1.5 M18 x 1.5 M18 x 1.5 M22 x 1.5 M26 x 1.5 27 30 31 37 40 1/4 3/8 3/8 1/2 1/2 84 90 98 116 126 146 159 170 204 215 RZQ MI W S CEP1 CE1 CE2 ML2B C J G5-S CV MVGQ CC RB J D-X 20Data 10-4-17

CQSY/CQ2Y/CM2Y/CG1Y/CA2Y

range (mm) C D E F H I J K L M N O P Q S U Z A B A B 46 10 to 50 54 14 depth 10.5 63 64 56 15 20 77 10.5 M10 x 1.5 103 7 17 8 60 9 1/4 15 93 47.5 19 56 75, 100 64 53.5 10 to 50 63.5 17.5 depth 13.5 80 73.5 63.5 21 25 98 12.5 M16 x 2.0 132 6 22 10 77 11 3/8 16 112.5 57.5 26 63.5 75, 100 73.5 63 10 to 50 75 17.5 depth 13.5 100 85 73 27 30 117 13 M20 x 2.5 156 6.5 27 12 94 11 3/8 23 132.5 67.5

Series AP3100

It is illustrated with an arrow pointing away from the valve body or a "filled" triangle on the schematic. f INLET E OUTLET Mounting hole Outlet (Downstream) Bottom port (Upstream) Inlet (Upstream) Porting Symbols Top view (Mounting hole on bottom) 2PW 2PWA 2PWB 2PWC q q q w 2 Ports 3 Ports 4 Ports q w w w 3PWD 3PWE 3PWG 3PWH 3PWF 3PWJ q q q q q q e e e e e e w w w w w w 4PWK 4PWL 4PWM 4PWN