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L o a d F ' t _ .

Cylinder

(mm) F F' GA I GS H J 5 ,~t' , 10st I 1&$\ 49'S\ ;p~" K I MM NN 8 I M3XO .5 MlOX 1.0 7 30.5 35.5 40.5 45.5 6 7 9 14 ,4 3 8 6.5 6 6 17 6 I 8 ;lOS 35.5 40.5 4!to. : 5.5,5 1 10 '0 '2 '5 ,7 I 5 8 I M4 XO.7 M'2XlO 8 1 6.5 6 J 7 20 7 '0 I 8.5 6 I 7 I 24 9 110 30.5 35.5 40.5 45.5 55.5 I 15 '2 14 20 _' 9 i 6 -8 I MS X: O.8 M14xtO -Flange Mount : CO JPF z H s p A' F GA 2-M3 GB ~-IJ~J I A ~ u: > !

energy saving effect

G1, Symbol N: NPT1) Tank drain port Rc3/4 (Symbol F: G3/4, Symbol N: NPT3/4) Automatic fluid fill system (Standard) Circulating fluid system Pump capacity Supply side pressure range MPa 0.2 to 0.5 Supply side fluid temperature C 5 to 35 Automatic fluid fill port Rc1/2 (Symbol F: G1/2, Symbol N: NPT1/2) Overflow port Rc1 (Symbol F: G1, Symbol N: NPT1) Fluid contact material Metal Stainless

Compact

circuit verro*,14\ I Y"tto*ld Without brake Nole) Conlact protecUon circuit i5 rcquired when connecting F-Ms Thread 10 Deep F/2 l)xc 25 t\rotor Photo micro sensor wire(3oomm) [ ] shows lhe localion al which ongtn pornr sw cn operates. o+ts *!

LX Series Compact Electric Actuators

electrical circuit verro*,14\ I Y"tto*ld Without brake Nole) Conlact protecUon circuit i5 rcquired when connecting F-Ms Thread 10 Deep F/2 l)xc 25 t\rotor Photo micro sensor wire(3oomm) [ ] shows lhe localion al which ongtn pornr sw cn operates. o+ts *!

JXCx-OMT0001CN

() MS LED NS LED IP 5.1 (IP ) (1)PLC (2)PLC (3) NS LED (1)PLC (2)PLC (3) NS LED NS LED IP 5.1 (IP ) -104No.JXC-OMT0001CN-C 2.3 6. 13.

XL

Valve Body (for Swagelok) Body (for VCR) Spacer (optional) P 33 Series XSA High Vacuum Angle Valve Dimensions (mm) 1in=25.4mm Electrical entry Grommet (G) Electrical entry Conduit (C) F G 27010 F G D 29010 H C G(PF)1/2 DIN terminal (D) F G J C H 29.5 39 H C OUT IN A P G(PF)1/2 6 to 9 22 E B (body dimension) P (fitting size) 2-M5 Thread depth M A Terminal (T) F G2 (Bs) J (XSA S) 25 33 H K

High Vacuum Angle Valve, XL Series

Valve Body (for Swagelok) Body (for VCR) Spacer (optional) P 33 Series XSA High Vacuum Angle Valve Dimensions (mm) 1in=25.4mm Electrical entry Grommet (G) Electrical entry Conduit (C) F G 27010 F G D 29010 H C G(PF)1/2 DIN terminal (D) F G J C H 29.5 39 H C OUT IN A P G(PF)1/2 6 to 9 22 E B (body dimension) P (fitting size) 2-M5 Thread depth M A Terminal (T) F G2 (Bs) J (XSA S) 25 33 H K

ZISE20A.eng

Item Default setting Item Default setting [F 3] Digital filter setting 0 ms [F81] Security code OFF Panel [F 4] Auto-preset function Not used [F82] Input of line name A Press the button between 1 and 3 sec. Press the button between 3 and 5 sec. CAUTION indicates a hazard with a low level of risk which, if not avoided, could result in minor or moderate injury.

ZISE20B.eng

MPa ISE20B ISE20B: 0.050 MPa/ZSE20B: 5.1 kPa/ ZSE20BF: 5.0 kPa "Nil" or M Hysteresis kPa ZSE20B(F) Safety Instructions Bracket A ISE20B Delay time 1.5 ms or less Bracket B psi P ZSE20B(F) Display color OUT1 ON: Green/OUT1 OFF: Red : Arbitrary display These safety instructions are intended to prevent hazardous situations and/or equipment damage.

ZISE20C.eng

Item Default setting Item Default setting [F 3] Digital filter setting 0 ms [F81] Security code OFF [F 4] Auto-preset function Not used [F82] Input of line name A Press the button between 1 and 3 sec. Press the button between 3 and 5 sec. CAUTION indicates a hazard with a low level of risk which, if not avoided, could result in minor or moderate injury. Caution: Press the button once.

S070

V100 2) Keep the voltage fluctuations within 24 VDC 5%. 3) The power consumption is 0.35 W DC at inrush (20 ms) and 0.1 W DC at holding. SY SOL. SYJ VK With light/surge voltage suppressor (This solenoid valve has no polarity.)

3 Port Solenoid Valve

MPa 0.1 MPa 0.3 MPa 0.1 MPa 0.5 W DC 0.35 W DC 0.1 W DC (at holding) with power saving circuit Note 1) Note 1) With the 0.1 W DC specification, keep the vibration/impact within10/50 m/s2. 0.35 W DC at inrush (20 ms) and 0.1 W DC at holding.

ZR

ZH ZU Courtesy of Steven Engineering, Inc.-230 Ryan Way, South San Francisco, CA 94080-6370-Main Office: (650) 588-9200-Outside Local Area: (800) 258-9200-www.stevenengineering.com ZL Vacuum Switch/Suction Filter Unit: ZR1-F ZY Specifications ZQ Unit no. ZR1-F Vacuum to 0.5 MPa 5 to 50C 30 m PVF Refer to page 13-3-13 regarding vacuum switch.

PSE3xxA.eng

Item Default setting Item Default setting Measurement mode (Initial setting is completed) Specifications/Outline with Dimensions (in mm) [F80] Power saving mode OFF [F 3] Digital filter setting [F 4] Auto-preset function 0 ms [F81] Security code OFF Not used [3 step setting mode] Set either of set value or hysteresis.

PSE3xAC.eng

(The default setting does not include arbitrary display.) 6 Display colour Output ON: Green/ Output OFF: Red (Linked to OUT1) 9 8 8 [F 0] Setting of the switching function of the pressure range, display unit and switch output specifications is completed. 4.5 4.5 [F 2] Setting of OUT2 Same setting as [F 1] OUT1. 28 Press the button between 1 and 3 sec.

ZISE20.eng

[F82] Input of line name A [F 3] Digital filter setting 0 ms [F90] Setting of all functions OFF [F 4] Auto-preset function Not used CAUTION indicates a hazard with a low level of risk which, if not avoided, could result in minor or moderate injury.

Series 10-, 21- AW-B Filter Regulator

K F 10 AW B 30 03 BG JN K F 21 AW B 30 03 BG JN Copper, fluorine and silicone-free + Low particle generation q r t y w e Filter regulator Option/Semi-standard: Select one each for a to g.

VXF

Start-up speed = PM x 0.9 t MPa/ms 17-3-74 5 The VX series will be revised shortly.

Series 10-, 21- AR-B Regulator, Series 10-, 21- ARK-B Regulator with Backflow Function

-MS-X3 0.02 to 0.2 MPa setting Note 1) Assembly of a bracket and set nuts.