F/ISE direction None Nil TSJ 1/4, Piping in the backward direction Bracket A URJ 1/4 and TSJ 1/4 are special fittings for semiconductor manufacturing equipment.
A B Qty. 1 Disassembly and Maintenance Caution A Section AA Bolt holder (movable) B Section BB 1. Never use a cylinder with its plate removed. When removing the hexagon socket head cap screw on the end plate, the piston rod must be secured to prevent from rotating. However, if the sliding parts of the piston rod are scratched and gouged, a malfunction may occur. 2.
Fs(a) Fs(b) Allowable thrust load (N) Allowable radial load Fr (N) Size Fs(a) Fs(b) 05 1 25 20 20 30 25 25 Features 4 Series CRJ Inertial Moment Formulas I: Inertial moment kgm, m: Load mass kg 1. Thin shaft 6.
occurred. 1: A warning has occurred. 7 W 8 The value at reading is undefined.
Type 40/Type 41 How to Order SS3YJ7-40 -05 --01 Applicable solenoid valve SYJ714SYJ714MSYJ724SYJ724MApplicable blanking plate assembly SYJ700-10-2A R port 1/4 R port 1/8 P, R port thread type Manifold type Stations 40 41 Type 40 Type 41 Nil Rc G NPT NPTF 2 stations : 20 stations 02 : 20 F N T A A A A 01 1/8 A port size P port 1/8 P port 1/4 A port 1/8 Note) If there are more than 6 stations
standard stroke cylinder. 12, 16 1 to 29 20, 25 1 to 49 Description Bore size (mm) 32 12 to 32 1 to 99 Available in 1 mm stroke increments 40, 50 40, 50 5 to 95 Available in 5 mm stroke increments Example) Part number: CQMB3257 It is produced by installing a 18 mm spacer in a standard stroke cylinder CQMB32-75.
SUP. 3 1 2 3 1 2 3 1 2 E Padlock mounting position D C SUP J 2 2 x K A T IN OUT AA 3 L 2 x P1 (Port size) B V BB U Built-in silencer (Option) M (Width across flats) 3 N P2 (Port size) Q EXH Y Bracket (Option) R S X W Dimensions (mm) Standard specifications Model P1 P2 A B C D E F G H I J K L M 1/8, 1/4 1/4, 3/8 1/8 1/4 3/8 1/2 1/2 66.4 80.3 104.9 110.4 134.3 22.3 29.4 38.5 42 53 40 53 70
(A) (A) (A) 2 (A) 2 2 2 1 (P) 3 (R) 1 (P) 3 (R) h h 1 (P) 3 (R) 1 (P) 3 (R) g g Component parts Replacement parts Description Body Piston plate End cover Piston Spool valve assembly Spool spring Material Aluminum die-casted Resin Aluminum die-casted Resin Stainless steel Note Zinc die-casted No.
With Bracket Individual pilot exhaust Common exhaust for main & pilot valve (noE) Bracker part numbr (tur douue solenoid lype): VJ3O00-13-1 lf a ctouble solenob lype bracksl is desired for single !,olenoid vslvs, order ths double solsnoid valvs type bracksl and singl solenoid vl' without a b.acket. E mple) NVJ3120-5M-M3 vJ300Gl3-1 @ . . : , , t i ' I 1 ' . r , a .
With Bracket Individual pilot exhaust Common exhaust for main & pilot valve (noE) Bracker part numbr (tur douue solenoid lype): VJ3O00-13-1 lf a ctouble solenob lype bracksl is desired for single !,olenoid vslvs, order ths double solsnoid valvs type bracksl and singl solenoid vl' without a b.acket. E mple) NVJ3120-5M-M3 vJ300Gl3-1 @ . . : , , t i ' I 1 ' . r , a .
E = mV 2 1 Formula (1) : Kinetic energy : Load mass : Speed Figure 1. Linear motion E m V Rotary actuator I = mr m: Mass (kg) (However, the weight of the L section is ignored) E= I Formula (2) 2 1 = mr 2 1 This indicates the moment of inertia with respect to the rotation axis of a mass "m" which is a distance "r" from the rotational axis.
20 stations (1) VO317-(-Q) (3) Port location (Direction)/Port size A Exhaust port Symbol Type R P Base (Side) Base (Side) Base (Side) ( ) 1 4 3 8 1 Common (2) ( ) 1 4 3 8 1 4 Base (Side) Base (Side) Base (Side) 3 Individual 1 4 1 4 1 4 Note 1) For more than 3 stations, supply air both sides of P port.
With Bracket Individual pilot exhaust Common exhaust for main & pilot valve (noE) Bracker part numbr (tur douue solenoid lype): VJ3O00-13-1 lf a ctouble solenob lype bracksl is desired for single !,olenoid vslvs, order ths double solsnoid valvs type bracksl and singl solenoid vl' without a b.acket. E mple) NVJ3120-5M-M3 vJ300Gl3-1 @ . . : , , t i ' I 1 ' . r , a .
N.O. 1 (P) 3 (R) 1 (P) 3 (R) a c e d a c e d (A) (A) 2 2 g g 3 (R) 1 (P) 3 (R) 1 (P) b b f f Component parts Replacement parts Note Zinc die-casted No.
Set point A input otf, and point A output turns otf. 3 Load 4 work pieces. 4 Move from home to point A (800 pulses) 1. Set bank 1 input on,2 & 3 off. 2. Set point A input on. 3. Busy output is on while actuator moves. 4. Busy output turns off; point A output turns on. 5.
V V V Detection combinations A V V B V V C V V Two auto switches Two positions of q, w and e can be detected. Pattern Step 1) Fully close the fingers. Step 1) Position fingers for gripping a workpiece. Step 1) Fully open the fingers.
Example 1) When the pressure in the rear and the front of the cylinder differs: Example 2) When the air supply is cut off and releasing the inlet pressure to the atmosphere, the residual pressure release of the outlet side can be ensured for a safety purpose. 1 1 2 12 2 1 2 1 3 1 2 1 14 2 4 12 L 10 5 1 3 How to Order ARP 30 03 BE K Option / Semi-standard: Select one each for a to f.
Unit: Nm Recommended Torque Connection thread 1/8 1/4 3/8 1/2 3/4 1 1 1/2 2 Torque 7 to 9 12 to 14 22 to 24 28 to 30 28 to 30 36 to 38 48 to 50 48 to 50 * After tightening by hand, use a tightening tool to tighten an additional 1/6 turn. 2. Select according to the maximum flow rate of the system. 2.
Fitting Caution 1. A fitting with an O-ring is used for a high vacuum rodless cylinder. Use a fitting that conforms to the dimensions below, and install it so that there is no air leakage. P (Port size) Operation P (Port size) Model CYV15 CYV32 Caution 5/16-24 UNF 7/16-20 UNF 1.