Air-hydro Unit

0 1 2 3 0 1 2 3 0 1 2 3 2 0 1 2 3 0 1 2 3 0 1 2 3 2 0 1 2 3 0 1 2 3 2 0 1 2 3 0 1 2 3 2.9 3.4 3.6 3.5 3.5 3.4 3.6 3.5 3.5 3.4 3.6 3.5 3.5 4.5 5.0 5.2 5.1 5.1 5.0 5.2 5.1 5.1 5.0 5.2 5.1 5.1 5.6 6.8 7.2 7.0 7.0 6.8 7.2 7.0 7.0 23.4 24.6 25.0 24.8 24.8 24.6 25.0 24.8 24.8 1 63 S 2 3 0 1 S 2 100 3 0 1 L 2 0 1 160 L 2 Air-hydro Converter Weight (kg) Effective oil level stroke CCT40 CCT63 CCT100

CC

98 57 1/2 148.5 121.8 101 M5 x 0.8 5.4 to 7.5 C J G5-S CCVS2-G-S 45 80 86 35 18 35 25 1 36 17.5 88.2 72 98 57 1/2 148.5 103.9 101 CCVS3-G-S 45 80 86 35 18 35 25 1 36 17.5 88.2 72 98 57 1/2 148.5 103.9 101 CV CCVS0-S 45 80 86 35 25 36 17.5 88.2 72 98 57 1/2 CCVL02-G-S 66 107 116 50 24 40 28 1 40 27 115 100 62 3/4 180.5 124.9 135 MVGQ CCVL1-G-S 66 107 116 50 24 40 28 2 40 27

For Dry Air, Pilot Operated Series VQ20/30 2 Port Solenoid Valve

A( ) A 24V 12V 100V SY100-82-3-05 SY100-82-3-06 SY100-82-2-01 24V DC 12V DC 100V AC SOL SOL C(+) C ZNR Light DIN connector circuit with light AC circuit DC circuit 1 2 1 2 NL R R LED NL: Neon light R: Resistor LED: Emitting diode R: Resistor 4.3-2 Series VQ20/30 Manifold Caution Caution Valve Mounting How to Mount/Remove from DIN Rail After confirming the gasket is correctly placed under

CC

1/2 45 80 86 101 35 18 35 36 25 72 17.5 1 88.2 148.5 103.9 45 CCVS02-lG-S 1/2 45 80 86 101 35 18 35 36 25 72 17.5 2 98 148.5 121.8 57 CCVSl1-lG-S M5 X 0.8 5.4 to 7.5 1/2 45 80 86 101 35 18 35 36 25 72 17.5 1 98 148.5 57 88.2 103.9 CCVSl2-lG-S 1/2 45 80 86 101 35 18 35 36 25 72 17.5 1 98 148.5 57 88.2 103.9 CCVSl3-lG-S 1/2 45 80 86 35 36 25 72 17.5 98 57 88.2 CCVSl0-S 3/4

Body Size: 2 (1/8, 1/4), Type: 3 (Universal), Control Type: 0 (Meter-out), Control Range: FM (1 to 50 mm/s), Indicator Window Direction: 0° , or None for FC, FM, Thread: N (NPT), Port Size: 01 (1/8), Width Across Flats [H]: 9mm or None for Body Size 2, Tube Size: 01 (ø1/8), Sealant: S (with Sealant)

Body Size: 2 (1/8, 1/4), Type: 3 (Universal), Control Type: 1 (Meter-in), Control Range: FM (1 to 50 mm/s), Indicator Window Direction: 0° , or None for FC, FM, Thread: N (NPT), Port Size: 01 (1/8), Width Across Flats [H]: 9mm or None for Body Size 2, Tube Size: 01 (ø1/8), Sealant: S (with Sealant)

Metering Valve with Silencer Series ASN2 1

ASN How to Order AQ ASN2 03 ASV JIS Symbol AK Option Nil S None With seal ASS Port size ASR M5 U10/32 01 02 03 04 M5 x 0.8 10-32 UNF 1/8 1/4 3/8 1/2 ASF Thread type Metric thread (M5) Unified thread (10-32 UNF) R NPT Nil N Needle Valve/Flow Characteristics Inlet pressure: 0.5 MPa Flow rate (l/min (ANR)) Effective area (mm2) Number of needle rotations 15-11-1 2 Series ASN Construction Component

ASD

Dual Speed Controller with One-touch Fitting Series ASD How to Order ASD 3 30F 01 06 S K Option Body size Nil K None Hexagonal lock nut M5 standard 1/8 standard 1/4 standard 3/8 standard 1/2 standard 2 3 4 5 6 With seal Type 3 Universal Applicable tubing O.D.

Soft Start-up Valve AV2000/3000/4000/5000

Quick exhaust Normal operation High speed supply B 1/2 PP PA C D PP PA 1(P) 2 2(A) 1 1/2 PP = approx.

JXCx-OMT0034CN

2 JOG 1mm/s 2 JOG 1mm/s JOG 1% () 0.01mm 37 - Bit/Byte / ID No. 0 1 Bit[70] 1 RWwn 1) 063 1ABS() Bit[F8] 1 2) 2INC() Bit[70] H RWwn+1 1) 2 065500 mm/s Bit[F8] L Bit[70] 3 RWwn+2 1) Bit[F8] 2 4 2147483647 0.01mm Bit[70] 1 RWwn+3 1) Bit[F8] 0 Bit[70] H RWwn+4 1) 2 065500 mm/s2 Bit[F8] L Bit[70] H RWwn+5 1) 2 065500 mm/s2 Bit[F8] L Bit[70] 1 030 10% RWwn+6 1) Bit[F8]

AMH

M Dimensions with mounting bracket Model Port size (Nominal size B) A B C D E F G S 6.0 , 2 1 H 463.5 I 180 J 30 K 15 L 24 N 120 O 184 P 220 Q 110 R 18 460.5 AMH850 1 2 13 42 348 220 57.5 220 10 Please refer to Made to Order Specifications of Series AMH on pages 14-20-55 to 14-20-57. 14-20-35

AMF

550 3 4 650 1 850 11 2 1 4 3 8 04 1 2 06 10 14 None B With bracket Port size (Dimension B) 01 B 1 8 02 03 B B Thread B Rc(PT) F G(PF) N NPT 3 4 1B B Note) Refer to p.4.7-7 regarding How to Order of case assembly. 1 1 2 20 2B B AMF800 to AMF1000 (Standing style) AMF801/901 (Piping support style) 20 80 AMF 0 20 80 AMF 1 Body size Body size 80 90 80 90 Port size Port size 100 With bracket

AME

size 01 B 1 8 B 1 4 B 3 8 04 B 1 2 06 B AFF 1 Standard 11 2 Standard Nil Rc Thread type 02 03 JIS Symbol AME AM F G N NPT P . 14-20-57 3 4 1B Misc. 10 14 1 B 1 2 20 2B Caution Note) Refer to How to Order Bowl Assembly on page 14-20-59.

AMF

P . 14-20-57 14-20-42 2 Odor Removal Filter Series AMF How to Order AMF150 to AMF850 AMF 250 03 R B Option R IN-OUT reversal direction Body size Bracket Accessory (Option) 150 Standard 1 8 250 Standard 1 4 350 Standard 3 8 450 Standard 1 2 550 Standard 3 4 650 850 B 1 4 B 3 8 04 B 1 2 06 B Nil Nil B Piping port (B dimension) 1 Standard 11 2 Standard 01 B 1 8 02 03 Thread type Nil Rc F G N

Flow Rate Range: 10 [0.2 to 10 (5 for CO2) â„“/min], Flow Adjustment Valve: S (Yes), Port Size: N01 (NPT1/8), Piping Entry Direction: Straight, Output Specification: 2 [Analog Output (4 to 20 mA)], Instruction Manual: With Instruction Manual, Calibration Certificate: None, Connector: Lead Wire w/Connector (2 m), Option: S (Bracket for w/Flow Adjustment Valve)

Flow Rate Range: 10 [0.2 to 10 (5 for CO2) â„“/min], Flow Adjustment Valve: S (Yes), Port Size: F01 (G1/8), Piping Entry Direction: Straight, Output Specification: 2 [Analog Output (4 to 20 mA)], Instruction Manual: With Instruction Manual, Calibration Certificate: None, Connector: Lead Wire w/Connector (2 m), Option: S (Bracket for w/Flow Adjustment Valve)

Flow Rate Range: 10 [0.2 to 10 (5 for CO2) â„“/min], Flow Adjustment Valve: S (Yes), Port Size: C6 (ø6 One-touch Fitting), Piping Entry Direction: Straight, Output Specification: 2 [Analog Output (4 to 20 mA)], Instruction Manual: With Instruction Manual, Calibration Certificate: None, Connector: Lead Wire w/Connector (2 m), Option: S (Bracket for w/Flow Adjustment Valve)

[Separate Type Connector Connection] Separated sensor, Output Method: Analog, Analog Output Specification: Current, Pipe Port Type: [One-Touch Couplings] One-Touch Couplings (Straight), Plumbing Thread Type: -, Plumbing Thread Nominal: -, Pressure Resistance(MPa): 1, Flow Rate Type: Standard, Operating Temperature Range(°C): -10～60, Operating Humidity Range(%): 35～85, Number of Inputs: 2,

Sensor, Monitor Structure: [Separate Type Connector Connection] Separated sensor, Output Method: Analog, Analog Output Specification: Current, Pipe Port Type: Female Thread, Plumbing Thread Type: [G] G, Plumbing Thread Nominal: [1/8] 1/8, Pressure Resistance(MPa): 1, Flow Rate Type: Standard, Operating Temperature Range(°C): -10～60, Operating Humidity Range(%): 35～85, Number of Inputs: 2,

Sensor, Monitor Structure: [Separate Type Connector Connection] Separated sensor, Output Method: Analog, Analog Output Specification: Current, Pipe Port Type: Female Thread, Plumbing Thread Type: [NPT] NPT, Plumbing Thread Nominal: [1/8] 1/8, Pressure Resistance(MPa): 1, Flow Rate Type: Standard, Operating Temperature Range(°C): -10～60, Operating Humidity Range(%): 35～85, Number of Inputs: 2,