CQSY/CQ2Y/CM2Y/CG1Y/CA2Y

How to Order B 20 30 D C CQSY Without auto switch F9BW S B 20 30 D C CDQSY With auto switch Courtesy of Steven Engineering, Inc.-230 Ryan Way, South San Francisco, CA 94080-6370-Main Office: (650) 588-9200-Outside Local Area: (800) 258-9200-www.stevenengineering.com Number of auto switches Built-in magnet 2 pcs. 1 pc. n pcs.

VQ7-6/7-8

98 93 82.5 56 (71) 56 (71) 56 (71) 56 (71) 16 (20) (port A) 16 (20) (port B) 16 (20) (port A) 16 (20) (port B) Manual override Manual override A B PB B A PB B 62 (72) 75 (86) 62 (72) 75 (86) 50 38 50 38 A B A Prewired connector (M12) (L approx. 500) Prewired connector (M12) (L approx. 500) PA R2 P R1 PA R2 R1 2-7.5 Mounting hole Indicator light 49 (64) 49 (64) 2-7.5 Mounting hole Indicator

5 Port Air Operated Valve

Base mounted Common EXH 2 to 20 stations 5 (R) , 3 (R) port 1/4 VPA P.1512 VFA330 VPA3 1 (P) port 1/4 VFA5000 VV5FA5-20 4 (A), 2 (B) port Common EXH 2 to 10 stations 5 (R) , 3 (R) port 3/8 1 (P) port 3/8 VFA520 VV5FA5-21 4 (A), 2 (B) port 5 (R) , 3 (R) port 1/2 Common EXH 2 to 15 stations 1 (P) port 1/2 VFA3000 VV5FA3-40 5 (R) , 3 (R) port 1/4 Common EXH 2 to 20 stations VFA340 1 (P) port

CRQ2

End of rotation Rotation starting point n io ra at n ot g R e B B e g n R ra ot B at n io io 5 5 at n ot ra R n A g e A 5 5 Rotation starting point End of rotation A Rotation starting point End of rotation Operating size 20 30 40 Operating size 20 30 40 5 5 5 5 The figure shows the view from the long shaft end. 11-8-22 Series CRQ2 (Size: 10, 15, 20, 30, 40) Made to Order Specifications: -

Rotary Actuator

CRQ2X MSQX MRQ Auto Switch Working Principle [Pressure is applied from the B port.] The auto switch B is turned ON by the magnet B in the state that the pressure is applied from the B port and the piston B moves to the left side. At this time, the auto switch A turns OFF . Magnet B Piston B A port B port Auto switch B Auto switch A [Pressure is applied from the A port.]

Compact Hydraulic Cylinder

U B A Auto Switch Proper Mounting Positions (mm) Solid state auto switch Reed auto switch D-F7/J79 D-F7V/J79C D-F7W/F7WV D-F7BA/F7BAV D-F79F/J79W D-F7NT D-A9/A9V D-A73/A80 D-A7H/A80H D-A73C/A80C D-A72 D-A79W D-M9/M9V D-M9W/M9WV D-M9A/M9AV Bore size (mm) B 10.5 23 26 27.5 31.5 33 35.5 B 9.5 20.5 23.5 25 29 30.5 33 B 14.5 25.5 28.5 30 34 35.5 38 B 6.5 19 22 23.5 27.5 29 31.5 B 9 20 23 24.5

Table of Contents - Tubing

lines in clean room environments TPH 06 04 B 20 Tube O.D.

CQM

Series Variations Series Bore size (mm) Standard stroke (mm) Cushion 5 10 15 20 25 30 35 40 45 50 75 100 12, 16 20, 25 Rubber bumper CQM 32, 40 50 7-5-1 2 Compact Cylinder: Guide Rod Type Double Acting, Single Rod Series CQM 12, 16, 20, 25, 32, 40, 50 How to Order Without auto switch B 20 10 CQM M9B S B 20 10 CDQM With auto switch With auto switch Courtesy of Steven Engineering, Inc.-230

High Purity Fluoropolymer Fittings HYPER FITTING ® Series LQ1 1

2 1 2 3 1 2 1 2 A B C A B A B A B LVA B B B B LVH LVD LVQ Note) For each body class, the second and later numbers or symbols indicate reducing.

VS 8-2/VS 8-4

Single wiring 5 6 7 8 9 10 19 20 19 20 19 20 19 20 19 20 19 20 19 20 19 20 1 2 3 4 5 6 7 8 9 10 1 2 3 4 NEW CONCEPT N.C. valve N.C. valve N.C. valve N.O. valve N.O. valve N.O. valve 5 6 7 8 9 10 1 2 3 4 R2 B R1 A P IP65 enclosure compliant kit (Lead wire) M 5 6 7 8 9 10 1 2 3 4 5 6 7 8 9 10 1 2 3 4 5 6 7 8 9 10 5 (R1) 3 (R2) 5 (R1) 3 (R2) 5 (R1) 3 (R2) 1 2 3 4 4 (A) 2 (B) 4 (A) 2 (B) 4 (A

New

B 2 x M5 Thread depth N 2 x M5 Thread depth N Terminal part Faston connector 250 Series 23 K K 11 9 6.5 J H H J 15 (mm) Conduit Faston type Dimensions Size Port size A B B1 C D E F P H J Q R Q R K N 1 1/8 1/8 1/4 3/8 1/8 1/4 3/8 14 14 19 22 14 19 22 30 30 40 48 30 40 48 15 15 20 24 15 20 24 62.5 73.5 72 75 78 76.5 79.5 30 35 35 35 40 40 40 9 9 9 20 22 22 22 24.5 24.5 24.5 8 8 9 14 8 9 14

VQ7-6/7-8

center : VQ7-8-FJG-D pressure center: VQ7-8-FIG-D 180.5 175.5 175.5 82.5 93 98 93 82.5 56(71) 56(71) 56(71) 56(71) 16(20)(B port) 16(20)(A port) 16(20)(B port) 16(20)(A port) Manual override Manual override A B PB A B PB 75(86) 62(72) 75(86) 62(72) 50 38 38 50 B B PA R1 R2 P Indicator light PA Indicator light R1 R2 P 49(64) 49(64) Mounting hole 2-6.5 Mounting hole 2-6.5 49(64) 49(64) G1/

CXS

(2) V = 400 mm/s Graph (1) V = 200 mm/s 20 50 CXSM CXSL CXSM CXSL 10 10 Weight m (kg) Weight m (kg) 32 32 25 25 1 1 20 20 0.6 10 20 30 40 50 100 5 0.6 10 20 30 40 50 100 5 Overhang l (mm) Overhang l (mm) Graph (4) V = 800 mm/s Graph (3) V = 600 mm/s 6 5 3 32 2 Weight m (kg) Weight m (kg) 32 25 25 1 1 20 20 CXSM CXSL CXSM CXSL 0.6 10 20 30 40 50 100 5 0.6 10 20 30 40 50 100 5 Overhang l (

CXS

10 to 32 Graph (3) V = 200 mm/s Graph (4) V = 400 mm/s 4 20 3 10 32 5 25 1 Weight m (kg) Weight m (kg) 32 20 25 0.5 1 20 15 0.5 15 10 CXSM CXSL CXSM CXSL 10 5 0.1 5 0.1 10 20 30 40 50 100 10 20 30 40 50 100 Overhang l (mm) Overhang l (mm) Graph (5) V = 600 mm/s Graph (6) V = 700 mm/s (800 mm/s for 10) 2 0.6 20 32 25 0.4 1 15 20 Weight m (kg) Weight m (kg) 0.5 15 0.2 10 10 CXSM CXSL CXSM

3

16.5 19.5 B 7.5 9.5 10.5 10.5 14.0 17.0 A 33.0 32.0 34.0 27.5 31.5 32.0 B 12.5 14.5 15.5 15.5 19.0 22.0 A 26.5 25.5 27.5 21.0 25.0 25.5 B 6.0 8.0 9.0 9.0 12.5 15.5 A 27.5 26.5 28.5 22.0 26.0 26.5 B 7.0 9.0 10.0 10.0 13.5 16.5 B 4.5 6.5 7.5 7.5 11.0 14.0 A 27 20.5 24.5 25 B 8.5 8.5 12 15 20 25 32 40 50 63 Note) When setting an auto switch, confirm the operation and adjust its mounting

IDU/IDF

IDU3D, 4D, IDF1D to 4D 25 Terminal board W: Water cooled condenser (IDF37C1 to 240D) Model IDF37C1 IDF55C IDF75C IDF120D IDF150D IDF190D IDF240D 74 Condenser type Shell & coil system B 247 298 123 123 173 197 A 24 20 47 55 37 45 Model IDU3D IDU4D IDF1D IDF2D IDF3D IDF4D Cooling water flow l/min Note1) 6 8 20 50 65 80 90 A 53 Cooling tower capacity RT Note 2) 2 2 3 5 7.5 7.5 7.5 B Water flow

High Vacuum Angle Valve

Inrush Current Flow Time (Reference) 200 V Current 100 V 0 5 15 10 20 25 30 Time [Second] 2 Mounting position of the heater Heater symbol XL-25-2 XL-40-2 XL-50-2 XL-63-2 XL-80-2 H4 (100C) (a) (a) (b), (c) (a), (b), (c) H5 (120C) (a) (b), (c) (b), (c) (a), (b), (c) (b), (c) (b) (a) (c) Heater (Option) 17 Aluminum High Vacuum Angle Valve: With Heat-resistant Auto Switch XLm Series Made to

3-Screen Display High-Precision Digital Pressure Switch ∗1 ® New New The ∗1  Excluding the Z/ISE20B-L compatible type has been added to the 20B series.

25 1.5 2.5 20 45 30 34.6 2 30 19 5.2 14.7 9.6 5.2 A3 Bracket C (Bottom ported) (Part no.: ZS-46-E) 50 1.5 47.7 17 12 40 4 x 4.5 6 30 30 20 20 60.5 2 15.7 1.5 30 ZSE20C(F)/ISE20C(H) Series Dimensions Panel mount adapter ZSE20C(F) ISE20C(H) Option 2 B Panel mount adapter (Rear ported) (Part no.: ZS-46-B) 43.6 (Piping specification: 02) 4.8 20.2 50.8 34.5 47.8 34.5 21 Panel thickness 0.5 to

Micro Mechanical Valve Series VM1000

OFF 45 Max. 6 ON 44 Symbol 3 port 24.5 38 (A) 2 (A) 2 12 12 1 (P) (78.5) 50.5 14.5 3 1.5 1.5 28 5 port (A) 2 (A) 2 12 12 3 (R) 3 (R) 1 (P) 14.5 47.8 37.2 17 R port (5 port only) 3 x 1/8 44 * 0.5 MPa supply F .O.F .* 20 N T.T. 45 6 A Series VM100 Series VM100/Side Ported With bracket VM120-01-A-B VM130-01-A-B VM121-01-A-B VM131-01-A-B With bottom mounting thread VM120U-01-A VM130U-01-A VM121U

5 Port Solenoid Valve Metal Seal/Rubber Seal Series SQ1000/2000 1

SQ2000 20 ms or less Cylinder Speed Chart Pressure: 0.5 MPa/Load factor: 50% Flow Characteristics Note) Series CJ2 6 10 16 20 25 32 40 Series CM2 Bore size (mm) Base mounted Average speed (mm/s) Metal seal Rubber seal C [dm3/(sbar)] b Cv C [dm3/(sbar)] b Cv 800 700 600 500 400 300 200 100 0 Perpendicular, Upward actuation Horizontal actuation SQ1000 0.63 0.11 0.14 0.80 0.20 0.19 800 700