Air Slide Table Long Stroke Type Series MXY ø6, ø8, ø12 1

Table deflection due to yaw moment load Displacement at A when load is applied F Table deflection due to roll moment load Displacement at A when load is applied F A A F A F F L L L L dimension mm L dimension mm L dimension mm MXY6 MXY6 MXY6 100 100 100 MXY8 MXY8 MXY8 100 100 100 MXY12 MXY12 MXY12 140 140 140 Courtesy of Steven Engineering, Inc.-230 Ryan Way, South San Francisco, CA 94080-

PSxx-OMS0006CN

MPa ZSE20 5.1 kPa ZSE20F5.0 kPa 1.5ms ON OFF -26No.PS-OMS0006CN-G [F 2] [F 3] 32 0 ms [F 4] 33 [F 5] [F 6] 35 0% [F10] 36 std() [F11] 41 1000 [F80] 42 OFF [F81] 43 OFF [F82] 45 A [F90] 46 OFF [F96] [F97] [F98] 48 () [F99] 49 OFF -27No.PS-OMS0006CN-G [F 0] (kPa/MPa) <> [F 0] [F 0] ZSE20F ZSE20 ISE20 MPa 0.001 0.001 0.001 kPa 0.1 0.1 1 2 0.001 0.001 0.01 kgf/cm bar 0.001 0.001

Brake mechanism added

30 30 30.5 30 38 72.5 80.5 40 31 38.5 31 73 69 81 69 30 32 30 35 30 34 34 34 35 34 43.5 78 86 43.5 35 42.5 35 78.5 77 86.5 77 34 36.5 34 39 34 41 41 41 42.5 41 50.5 85 93 49 42 48 42 85.5 91 93.5 91 41 43.5 41 46 41 49.5 49.5 48.5 51 48.5 59 93.5 101.5 55.5 50 54 50 94 107 102 107 49 51.5 49 54 49 57 58.5 56 59 56 69.5 104 112 63 57.5 62 57.5 104 121 112 121 56 59.5 56 62.5 56 D-A9 and

Series ARP20 to ARP40 10- 10- 21- 21- Direct Operated Precision Regulator Series ARP20K to ARP40K 10- 10- Direct Operated Precision 21- 21- Regulator with Backflow Function

Example) 10-ARP30K-03BG-1RY Clean room compliant, copperfree, fluorine-free, silicone-free Clean room compliant Symbol Description 20 30 40 Body size 20 30 40 Body size Nil K Without backflow function With backflow function With backflow function + Nil N F Thread type Rc NPT G + 01 02 03 04 1/8 1/4 3/8 1/2 Port size + Nil B Note 2) H a Without mounting option With bracket With set nut (For

Series 10-, 21- ARP20 to 10-, 21- ARP40 Direct Operated Precision

Example) 10-ARP30K-03BG-1RY Clean room compliant, copperfree, fluorine-free, silicone-free Clean room compliant Symbol Description 20 30 40 Body size 20 30 40 Body size Nil K Without backflow function With backflow function With backflow function + Nil N F Thread type Rc NPT G + 01 02 03 04 1/8 1/4 3/8 1/2 Port size + Nil B Note 2) H a Without mounting option With bracket With set nut (For

IZ-OMU0031-CN

, <> [F 2] [F 1] OUT1(2021) [F 3] 0.4 kV1050 mm20 kV2575 mm 1 mm [kv] 0.4 kV <> [F 3] [F 3] -22No.IZ*-OMU0031 [F 4] <> [F 4] [F 4] -23No.IZ*-OMU0031 [F 5] <> [F 5] (1.5s) (200ms) [F 5] -24No.IZ*-OMU0031 [F 6] <> [F 6] [F 6] 000 30 -25No.IZ*-OMU0031 [F98] (F) OUT1 OUT2 OUT2 <> [F98] [on] [oFF] [oFF]() 2 [F90] -26No.IZ*-OMU0031 [F99] <> [F99] ON 5 [F99]

VQ5000

(for F, L, S & T1 kits) VVQ5000 3A 1 VVQ5000 2A 1 Electrical entry Electrical entry T1, F, L, T, S kits F kit (connector side) C kit (plug lead type) T1, F, L, T, S kits F kit (connector side) C kit (plug lead type) L F Note1) L F Note1) C C Option Option Nil W Note 2) Standard IP65 enclosure Exhaust cleaner mounting Rc1 Exhaust cleaner mounting Rc1 1/2 Direct exhaust with silencer box Standard

Digital pressure switch for energy-saving control ejector

ZQ-OM01501 tem Page Default setting [F 3] Response time See page 27 2.5 ms [F 4] Auto-preset See page 28 Manual [F 6] Fine adjustment of display value See page 30 0 [F11] Display resolution See page 31 1000-split [F80] Power saving mode See page 32 OFF [F81] Security code See page 33 OFF [F90] Setting of all functions See page 33 OFF [F96] Check of suction command condition See page 34 OFF

Digital Flow Switches

Pin description 40 2-Port size 44.5 30 1 DC(+) 50 2 OUT2 3 DC() 4 OUT1 (41.5) 73 Flow direction 6 Series PF2A to are terminal numbers.

VCB

OR-1860-120F F: FKM E: EPDM For VCB30 OR-2380-130F F: FKM E: EPDM For VCB40 OR-2600-180F F: FKM E: EPDM e When external leakage occurs after disassembling a valve, replace the above seals.

Series 10-, 21- AW-B Filter Regulator

K F 10 AW B 30 03 BG JN K F 21 AW B 30 03 BG JN Copper, fluorine and silicone-free + Low particle generation q r t y w e Filter regulator Option/Semi-standard: Select one each for a to g.

Process Pump Series PA3000/5000/PAX1000 Series PB1000

N T, F, N are order made specifications.

4/5 Port Air Operated Valve Series SYJA3000

4/5 Port Air Operated Valve Series SYJA3000 How to Order SA VA Bracket With bracket F Nil Without bracket SA SYJA3 20 1 M3 Body ported VA VM Base mounted (4 port) VR (Manifold use only) SYJA3 30 2 VH VHS Base mounted (5 port) SYJA3 40 2 Port size Type of actuation Nil Without sub-plate 4 3 2 position double 2 position single 2 1 M5 port with sub-plate M5 3 position closed center JIS Symbol

Compact Cylinder

Mounting Bolt for C55 Model C D Mounting bolt Model C D Mounting bolt Model C D Mounting bolt C(D)55B20-5 -10 -15 -20 -25 -30 -35 -40 -45 -50 -60 -80 -100 -125 -150 C(D)55B25-5 -10 -15 -20 -25 -30 -35 -40 -45 -50 -60 -80 -100 -125 -150 C(D)55B50-5 -10 -15 -20 -25 -30 -35 -40 -45 -50 -60 -80 -100 -125 -150 C(D)55B63-5 -10 -15 -20 -25 -30 -35 -40 -45 -50 -60 -80 -100 -125 -150 C(D)55B32-5 -

AC

How To Order Filter Regulator Series AW20 to 40 AW 30 N 03 D 8 Z X48 Filter Regulator With External Epoxy Coating Stainless Fasteners Body Size Symbol 20 30 40 Name Plate in imperial Units (psi, F) Size 1/8 3/8 1/2 Bowl NPT Threads Description Metal Bowl Metal Bowl with Sight Glass Symbol 2 8 Applicable Body Size 20 30, 40 Accessories Port Size Applicable Body Size 20 30 40 Symbol Nil B

Series AC Epoxy Coated F.R.L.

How To Order Filter Regulator Series AW20 to 40 AW 30 N 03 D 8 Z X48 Filter Regulator With External Epoxy Coating Stainless Fasteners Body Size Symbol 20 30 40 Name Plate in imperial Units (psi, F) Size 1/8 3/8 1/2 Bowl NPT Threads Description Metal Bowl Metal Bowl with Sight Glass Symbol 2 8 Applicable Body Size 20 30, 40 Accessories Port Size Applicable Body Size 20 30 40 Symbol Nil B

Bernoulli Gripper

Body Mounting Model Body material Screw size Max. screw-in depth [mm] Tightening torque [Nm] ZNC(20, 30) Aluminum 0.63 ZNC(20, 30)P Resin 0.32 ZNC(20, 30)S Stainless steel 0.63 ZNC(40, 60) Aluminum No restraining force in the horizontal direction Restrain horizontal movement with a guide. M3 x 0.5 6 2.

CQM

Mounting Bolt for CQM/Without Auto Switch Model C D Mounting bolt Model C D Mounting bolt Model C D Mounting bolt CQMB12-5 -10 -15 -20 -25 -30 CQMB16-5 -10 -15 -20 -25 -30 CQMB20-5 -10 -15 -20 -25 -30 -35 -40 -45 -50 CQMB40-5 -10 -15 -20 -25 -30 -35 -40 -45 -50 -75 -100 CQMB50-10 -15 -20 -25 -30 -35 -40 -45 -50 -75 -100 CQMB25-5 -10 -15 -20 -25 -30 -35 -40 -45 -50 CQMB32-5 -10 -15 -20 -25

HRX-OM-W038

This produuct Your system Circulating fluid temperature 30 Serial communication Discharge temperature 30 Heat radiation Circulating fluid display 1 temperature 30 Circulating fluid set temperature 29 30 MODE Explanation Control the temperature so that the discharge temperature of the circulating fluid is circulating fluid set temperature + offset temperature.

Digital Flow Switch

30 s, 40 s, 50 s, or 60 s.