Mounting: Both Ends Tapped, Bore Size: 32mm, Thread: Rc, Full Stroke: 125mm, First Stroke: 60mm, Auto Switch: -, Lead Wire or Prewired Connector: -, Number: -

Mounting: A (Both Ends Tapped), Bore Size: 32mm, Thread: Rc, Full Stroke: 250mm, First Stroke: 60mm

Mounting: A (Both Ends Tapped), Bore Size: 32mm, Thread: Rc, Full Stroke: 175mm, First Stroke: 10mm, Auto Switch: M9B--Solid State , Gen. Purpose, 2 Wire, Horizontal

Mounting: A (Both Ends Tapped), Bore Size: 32mm, Thread: Rc, Full Stroke: 175mm, First Stroke: 100mm, Auto Switch: M9B--Solid State , Gen. Purpose, 2 Wire, Horizontal, Lead Wire or Prewired Connector: M (1m)

Mounting: A (Both Ends Tapped), Bore Size: 32mm, Thread: Rc, Full Stroke: 175mm, First Stroke: 100mm, Auto Switch: M9B--Solid State , Gen. Purpose, 2 Wire, Horizontal, Lead Wire or Prewired Connector: M (1m), Number: 4 pcs.

Mounting: Both Ends Tapped, Bore Size: 32mm, Thread: Rc, Full Stroke: 175mm, First Stroke: 10mm, Auto Switch: M9B--Solid State , Gen. Purpose, 2 Wire, Horizontal, Lead Wire or Prewired Connector: -, Number: -

Mounting: Both Ends Tapped, Bore Size: 32mm, Thread: Rc, Full Stroke: 175mm, First Stroke: 100mm, Auto Switch: M9B--Solid State , Gen. Purpose, 2 Wire, Horizontal, Lead Wire or Prewired Connector: 1m, Number: -

Mounting: Both Ends Tapped, Bore Size: 32mm, Thread: Rc, Full Stroke: 175mm, First Stroke: 100mm, Auto Switch: M9B--Solid State , Gen. Purpose, 2 Wire, Horizontal, Lead Wire or Prewired Connector: 1m, Number: 4 pcs.

Mounting: A (Both Ends Tapped), Bore Size: 32mm, Thread: Rc, Full Stroke: 175mm, First Stroke: 50mm, Auto Switch: M9B--Solid State , Gen. Purpose, 2 Wire, Horizontal

Table of Contents

60 1.

7ND9071en

C -40 to +75 C -40 to +85 C ND9_E2/I02 -40 to +60 C -40 to +75 C -40 to +85 C ND9_E2/I09 -25 to +60 C -25 to +75 C -25 to +85 C ND9_E2/I32 -25 to +60 C -25 to +70 C -25 to +70 C ND9_E2/D33 -40 to +60 C -40 to +75 C -40 to +82 C ND9_E2/D44 -40 to +60 C -40 to +75 C -40 to +82 C ND9_E2/I45 -25 to +60 C -25 to +75 C -25 to +85 C ND9_E2/K05 -40 to +60 C -40 to +75 C -40 to +85 C ND9_E2/IK06

ZP

Applicable pad 04S Applicable pad 06S Applicable pad 08S Applicable pad 10S Applicable pad 15S 60 70 60 60 60 4 4 4 4 4 1.5 1.5 1.5 1.5 1.5 4.1 0.8 1.5 2.5 4.1 6.1 3.1 1.6 4.1 10.1 6.9 4.9 2.1 3.9 10.9 Refer to pages 70 and 71 for adapter applicable to the ZP2 series. 30 Series ZP2 How to Order GS ZP2 T 06 S A3 With adapter Vacuum inlet direction Mounting Direction Vertical Symbol Symbol

Series AP500

80 Flow rate (slpm, N2) 2 x 10-32 UNF depth 0.3 (7.6) (Mounting hole) AP1000HF 100 psig (0.69 MPa) 30 psig (0.21 MPa) Inlet pressure: 50 psig (0.34 MPa) 70 0.48 60 0.41 Delivery pressure (MPa) Delivery pressure (psig) 50 0.34 Connections A 40 0.28 (mm) inch FV4 MV4 TW4 FV6 MV6 TW6 (94.0) 3.70 30 0.21 2.96 (75.2) 20 0.14 4.70 (119.4) 10 0.07 2.96 (75.2) 0 0.00 0 20 40 60 80 100 120 140 160

ZP

60 50 0 to 120 30 to 200 0 to 60 0 to 250 20 to 150 X X X X The above table covers only general characteristics of subject rubber materials.

MY1

60 74 94 118 142 Z 160 200 220 280 340 400 460 PA 40 50 60 80 100 120 140 NC 13.5 17 21 26 32 43.5 56 U1 5.5 5.5 5.5 5.5 6.5 6.5 8.5 NH 27.7 33.7 40.5 50 63.5 83.5 105 PG 3.5 4.5 7 8 9 10 12 PB 40 40 50 60 80 90 110 NE 28 34 41.8 52.3 65.3 84.5 104 U2 3 3 3 3 3.8 3.8 5 Q 153 191 206 264 322 380 436 U3 2 2 2 2 2 2 2.5 QW 48 45 46 60 72 90 110 U4 3.4 3.4 3.4 3.4 4.5 4.5 5.5 W 68 72 84 102

IDG

.-230 Ryan Way, South San Francisco, CA 94080-6370-Main Office: (650) 588-9200-Outside Local Area: (800) 258-9200-www.stevenengineering.com 60 0.5 MPa 0.7 MPa 0.9 MPa 0.5 MPa 0.7 MPa 0.9 MPa 50 0.3 MPa 0.3 MPa Atmosp heric pressure Atmospheric pressure 0.1 MPa 0.1 MPa 40 30 Pressure dew point ( C) 20 10 0 10 20 30 40 50 60 50 60 40 30 20 10 0 10 20 30 Atmospheric pressure dew point ( C) 14

MY1

Y = 6.525 x 9.8 x 29.6 x 103 = 1.89 (Nm) Y Load factor 2 = M3/M3max = 1.89/60 = 0.03 MTS m4 M3 MY 5.

MQQ

W Mounting orientation: Horizontal Operating pressure: 0.5 MPa Allowable Lateral Load at Rod End Standard Type: MQQTB Anti-lateral Load Type: MQQLB/Built-in Ball Bushing Type 60 5 50 4 Maximum allowable lateral load W (N) Maximum allowable lateral load W (N) 28 40 3 28 25 30 25 2 20 20 20 16 16 1 10 10 10 30 60 75 100 30 60 75 100 Stroke (mm) Stroke (mm) Note 1) The allowable lateral load

Slider Type Ball Screw Drive/11-LEFS Series

The load factor for each direction can be obtained as follows. x = 0/400 = 0 y = 50/250 = 0.2 z = 200/1500 = 0.13 5. x + y + z = 0.33 1 2000 1000 2000 800 1500 1500 Lz 600 L1 [mm] L3 [mm] L2 [mm] 1000 1000 400 Ly 500 500 200 Lx 0 0 0 0 10 20 30 40 50 60 0 10 20 30 40 50 60 0 10 20 30 40 50 60 Work load [kg] Work load [kg] Work load [kg] 44 Model Selection LEF Series Step Motor (Servo/24

MQQ

W Mounting orientation: Horizontal Operating pressure: 0.5 MPa Allowable Lateral Load at Rod End Standard Type: MQQTB Anti-lateral Load Type: MQQLB/Built-in Ball Bushing Type 60 5 50 4 Maximum allowable lateral load W (N) Maximum allowable lateral load W (N) 28 40 3 28 25 30 25 2 20 20 20 16 16 1 10 10 10 30 60 75 100 30 60 75 100 Stroke (mm) Stroke (mm) Note 1) The allowable lateral load