Precision Air Slide Table Series MXP ø6, ø10, ø12, ø16, (ø8: new addition, see 8-8-23 ) 1

100 150 Load (N) 0 50 100 150 Load (N) 0 50 100 150 Load (N) 200 16 16 16 L = 120 mm L = 120 mm L = 120 mm MXP16-20 MXP16-30 MXP16-20 MXP16-30 Table displacement amount (mm) Table displacement amount (mm) Table displacement amount (mm) 0.08 0.12 0.06 MXP16-20 MXP16-30 MXP16-20 MXP16-30 MXP16-20 MXP16-30 MXP16-20 MXP16-30 0.10 0.06 0.04 0.08 0.04 0.06 0.04 0.02 0.02 0.02 0 0 0 50 200 250

Gun Type Ionizer

0.5 s 1 s 1.5 s 2 s 2.5 s 50 50 100 100 150 150 200 200 1500 0 150 300 450 600 750 900 1050 1200 1350 1500 0 150 300 450 600 750 900 1050 1200 1350 Distance [mm] Distance [mm] 3) Supply pressure: 0.2 MPa Flow rate consumption: 188 L/min (ANR) 4) Supply pressure: 0.3 MPa Flow rate consumption: 253 L/min (ANR) 200 200 150 150 2.5 s 2 s 100 100 50 50 0.5 s 1 s 1.5 s 2 s 0.5 s 1 s 1.5 s 50 50

Rubber seal 5 Port Solenoid Valve Series SYJ5000

50 5000 mm 3 M With lead wire [115 VAC 50/60 Hz] M plug MN Without lead wire 220 VAC 50/60 Hz connector 4 MO Without connector [230 VAC 50/60 Hz] W0 Without connector cable M8 connector For type W, DC voltage is only available.

ZSE F/ISE

YES Hysteresis mode OFF n_1 n_2 Large pressure and vacuum pressure [n] H (Fix hysteresis) = 3 digits H H ON Window comparator mode NO OFF n_1 n_2 Large pressure and vacuum pressure 16-2-30 7 Series ZSE50F/ISE50 High Precision, Digital Pressure Switch for General Fluids Example of Internal Circuit and Wiring ZSE F/ISE --22(L)-(M) 50 60 50 60 ZSE F/ISE --30(L)-(M) 50 60 50 60 With analog

Vacuum Pad

SMC vacuum pad Search http://www.smcworld.com Catalogs ZP2 ES100-76 ZP3 ES100-100 Best Pneumatics Pad diameter Symbol 16 18 20 25 30 32 40 46 50 63 80 100 125 150 250 300 340 U C C C C C C MU EU AU C C C C C C C UM UT C ( ( CT C C B C C C C C Note) Note) J ( ( ( MB ( ZJ ( ( D C C C AN Note) Note) Note) MT ( ( ( W U H C C C C C C ( ( ( HT ( ( HB C C C C ( C C ( 30 x 50 ( HW U ( ( ( (

1

Standard Strokes Bore size [mm] Standard stroke [mm] *1 20 25, 50, 75, 100, 125, 150, 200, 250, 300 25 32 40 *1 Intermediate strokes not listed above are produced upon receipt of order. The minimum stroke is 25 mm. Mounting Brackets/Part No.

3 Port Solenoid Valve Metal Seal/Rubber Seal, Body Ported Series VQZ100/200/300 1

Coil voltage 1 2 3 4 5 6 9 100 VAC (50/60 Hz) 200 VAC (50/60 Hz) 110 VAC (50/60 Hz) 220 VAC (50/60 Hz) 24 VDC 12 VDC Other Note) For the special voltages, please consult with SMC.

Prevents Micro-Bubbles

50 33.5 56 M6 7.5 75 106 137 168 146 177 208 239 73 109.5 146 182.5 LLH3A 84 120.5 157 193.5 183 219.5 256 292.5 94 141 188 235 LLH4A 109 156 203 250 219 266 313 360 17-5-32 30 Series LVH/Threaded Type Manifolds Manifold Specifications LLH4A LLH3A Model LLH2A Manifold type Stacking type VC P (IN), A (OUT) type Common IN/Individual OUT Valve stations 2 to 5 stations VDW 1/2 3/8 1/4 Port size

3 Port Solenoid Valve Metal Seal/Rubber Seal Body Ported VQZ100/200/300

With (1) Without (1) Coil voltage 100V AC (50/60Hz) 200V AC (50/60Hz) 110V AC (50/60Hz) 220V AC (50/60Hz) 24V DC 12V DC Others (1) With With (Without light) 1 (1) 2 Note 1) DIN is applicable to VQZ 200 and 300.

Fluoropolymer Tubing Variations

Note 6) Figures shown in tables are representative values, not guaranteed values. 502 Fluoropolymer Tubing PFA TLM/TILM Series RoHS Max. operating temperature: 260c KQ2 KQB2 KS KX 22 size variations 22 size variations KM Metric size 1/8" to 1 1/4" (9 sizes) 2 to 25 (13 sizes) KF Inch size M Length per roll 10 m, 20 m, 50 m, 100 m 10 m, 20 m, 50 m, 100 m 16 m (50 ft), 33 m (100 ft) Length

Modular Type Lubricators Series AL

N 51 64 81 Q 24 35 40 U 5 7 7 V 33 45 50 W 34.5 41 AC21 AC31 AC41 * Without relief valve option ** With relief valve option mm AC-A A* 90 117 154 AA** 140 181 238 B 160 220 239 C 73 86 92 E 30 38 F 45.5 58.5 75.5 G 40 55 80 J 26 29.5 37.5 K 5 3.5 1.5 M 30 41 50 N 51 64 81 Q 24 35 40 U 5 7 7 V 33 45 50 W 34.5 41 AC21A AC31A AC41A * Without relief valve option ** With relief valve option

MRQ

32 0.64 0.85 1.27 1.7 2.12 2.54 2.97 200 250 300 20 25 30 Graph of effective output CRB1 Operating pressure [MPa] Cylinder output F[N] Load weight [kg] 3 150 15 CRBU 2.5 100 10 Effective torque (N/m) MRQBS40 2 CRA1 40 40 50 4 5 1.5 32 CRQ 20 25 30 2 2.5 3 1 MRQBS32 MRQ 0.5 15 1.5 0 MSQ 0.4 0.5 0.6 0.7 10 1 0.1 0.2 0.3 0.4 0.5 0.6 0.7 Operating pressure (MPa) MSUB m The allowable lateral

KJ

K M H D Plug Insertion Force in Pressurized Condition MS Courtesy of Steven Engineering, Inc.-230 Ryan Way, South San Francisco, CA 94080-6370-Main Office: (650) 588-9200-Outside Local Area: (800) 258-9200-www.stevenengineering.com Insertion Force of Series KK T 350 300 VMG 250 Insertion force N Series KK6 200 Series KK4 150 100 Series KK3 Series KK2 50 0 0 0.1 0.2 0.3 0.4 0.5 0.6 0.7 0.8

Title not found

Size SCFM 50 PSI 60 PSI 70 PSI 80 PSI 90 PSI 100 PSI 110 PSI 1/2" ID 20 1.8 1.3 1 0.9 0.8 0.7 0.6 30 5 4 3.4 2.8 2.4 2.3 2 40 10.1 8.4 7 6 5.4 4.8 4.3 50 18.1 14.8 12.4 10.8 9.5 8.4 7.6 60 23.4 20 17.4 14.8 13.3 12 70 28.4 25.2 22 19.3 17.6 80 34.6 30.5 27.2 24.6 3/4" ID 20 0.4 0.3 0.2 0.2 0.2 0.2 0.1 30 0.8 0.6 0.5 0.5 0.4 0.4 0.3 40 1.5 1.2 0.9 0.8 0.7 0.6 0.5 50 2.4 1.9 1.5 1.3 1.1 1 0.9

Title not found

Size SCFM 50 PSI 60 PSI 70 PSI 80 PSI 90 PSI 100 PSI 110 PSI 1/2" ID 20 1.8 1.3 1 0.9 0.8 0.7 0.6 30 5 4 3.4 2.8 2.4 2.3 2 40 10.1 8.4 7 6 5.4 4.8 4.3 50 18.1 14.8 12.4 10.8 9.5 8.4 7.6 60 23.4 20 17.4 14.8 13.3 12 70 28.4 25.2 22 19.3 17.6 80 34.6 30.5 27.2 24.6 3/4" ID 20 0.4 0.3 0.2 0.2 0.2 0.2 0.1 30 0.8 0.6 0.5 0.5 0.4 0.4 0.3 40 1.5 1.2 0.9 0.8 0.7 0.6 0.5 50 2.4 1.9 1.5 1.3 1.1 1 0.9

Rotary Cylinder Series MRQ Size: 32, 40 1

DGraph (2) Cylinder Output on the Retracting Side (Double acting) 20150 1500 Tube bore size [mm] 100 1000 40 Side load Balance weight 40 50 400 500 32 20 25 30 200 250 300 Operating pressure [MPa] Cylinder output F[N] Load weight [kg] 15 150 Allowable Side Load on the Piston End (Nm) 10 100 Stroke of linear part Size 40 5 10 15 20 25 30 40 50 75 100 4 5 40 50 32 40 14 14 13 13 13 12 12 11

Process Pump Series PA3000/5000/PAX1000 Series PB1000

(23 to 122) 5 to 55 (23 to 131) 5 to 50 (23 to 122) Outlet air atmospheric pressure dew point C (F) Standard performance 20 (-4) Inlet air flow rate l/min (ANR) (SCFM) Note 2) 625 (22.0) 62 (2.19) 125 (4.41) 250 (8.82) 375 (13.24) Outlet air flow rate l/min (ANR) (SCFM) 50 (1.8) 100 (3.5) 200 (7.1) 300 (10.6) 500 (1.77) Purge air flow rate l/min (ANR) (SCFM) Note 3) 12 (0.42) 25 (0.88) 50

Process Pump Series PA3000/5000/PAX1000 Series PB1000

5 to 55 5 to 50 Outlet air atmospheric pressure dew point C Standard performance 20 Inlet air flow rate l/min (ANR) Note 2) 625 62 125 250 375 Outlet air flow rate l/min (ANR) 50 100 200 300 500 Purge air flow rate l/min (ANR) Note 3) 12 25 50 75 125 Inlet air pressure MPa 0.7 Inlet air temperature C 25 25 25 1l/min (ANR) {inlet air pressure at 0.7MPa} Inlet air saturation temperature C

PF-OMM0004_C

5% ON OFF [F 2] OUT2 36 ON OFF 50% 5% OUT1 ON OFF 50 5 -26No.PF-OMM0004-D / [F3] 42 1 [F10] 43 [F20] 47 [F22] 48 OFF [F30] 50 OFF[] [F80] 51 [] [F81] 52 OFF [F82] 53 [*] [F90] 54 OFF [F98] 55 OFF [F99] 56 OFF 30 [F10](43 ) (4 L/min ) OUT2 -27No.PF-OMM0004-D [F 1] OUT1 OUT1 1.

Precision Air Slide Table Series MXP ø6, ø10, ø12, ø16

100 150 Load N 0 50 100 150 Load N 0 50 100 150 Load N 200 16 16 16 L = 120mm L = 120mm L = 120mm MXP16-20 MXP16-30 MXP16-20 MXP16-30 0.08 0.12 0.06 MXP16-20 MXP16-30 MXP16-20 MXP16-30 MXP16-20 MXP16-30 MXP16-20 MXP16-30 0.10 Table displacement mm Table displacement mm Table displacement mm 0.06 0.04 0.08 0.04 0.06 0.04 0.02 0.02 0.02 0 0 0 50 200 250 Load N 150 100 50 200 250 Load N 150