Mounting: Both Ends Tapped, Bore Size: 63mm, Thread: NPT Thread, Full Stroke: 250mm, First Stroke: 80mm, Auto Switch: M9PW--Solid State, 2-color Indication, 3 Wire PNP, Horizontal, Lead Wire or Prewired Connector: 3m, Number: -

Mounting: Both Ends Tapped, Bore Size: 63mm, Thread: NPT Thread, Full Stroke: 75mm, First Stroke: 40mm, Auto Switch: M9N--Solid State , Gen. Purpose, 3 Wire NPN, Horizontal, Lead Wire or Prewired Connector: 1.0m Cord Length, M8-3 Pin Connector, Number: 3 pcs.

Mounting: Both Ends Tapped, Bore Size: 63mm, Thread: NPT Thread, Full Stroke: 125mm, First Stroke: 60mm, Auto Switch: A93V--Reed, DC Volt, AC Volt, LED, Vertical, Lead Wire or Prewired Connector: 5m, Number: -

Mounting: Both Ends Tapped, Bore Size: 63mm, Thread: NPT Thread, Full Stroke: 300mm, First Stroke: 150mm, Auto Switch: M9PV--Solid State, Gen. Purpose, 3 Wire PNP, Vertical, Lead Wire or Prewired Connector: 0.5m Cord Length, M12-4 Pin Connector, Number: -

CL

Additional weight with air cushion 0.01 0.01 0.02 0.02 Additional weight for long stroke 0.01 0.01 0.02 0.03 No. of auto switches mounted Auto switch model Calculation: (Example) CLG1LA20-100 (Foot, 20, 100 st) Basic weight Additional weight Air cylinder stroke Additional weight of air cushion 0.72 + 0.05 x 100/50 + 0.01 = 0.83 kg 1 2 D-B5/B64 D-C7/C80 D-H7 D-G5/K5 0.72 0.05/50 st 100

CE

to 240VAC (10%) 100 to 240VAC (10%) 100 to 240VAC (10%) 24VDC (10%) 100 to 240VAC (10%) Power consumption 20VA or less 10W or less 20VA or less 10W or less 20VA or less 10W or less 10W or less 20VA or less Between case and AC line: 1500VAC for 1 min.

MHZ2/MHZJ2

Weight table Unit: g End boss type (symbol) Model W K M E MHZJ2-10 70 70 70 70 MHZJ2-16 165 165 165 165 MHZJ2-20 290 290 290 290 MHZJ2-25 525 525 525 525 19 Series MHZ2/MHZJ2 Auto Switch Common Specifications Auto Switch Common Specifications Solid state switch Type 1ms or less Operating time 1000m/s Impact resistance 50M or more at 500VDC (between lead wire and case) Insulation resistance

XL-OMV0002

183 80 31 10.5 75 52 77 29 10.5 XLC-63 88 209 100 39 11 87 95 70 76.5 36 9 XLC-80 90 250 117 45.5 11 114 110 83 105 44 9 XLC-100 108 317.5 154 55 11 134 130 102 139 58 9 XLC-160 138 339 200 65 11 190 180 153 124 62 12.5 10 XL-OMV0002 5. 200 1680 100 100,160[ ]18 12 Assy O XLC-16,XLC-25,XLC-40,XLC-50,XLC-63,XLC-8 200 XLC-100,XLC-160 100 FKM 110 Pa 11 XL-OMV0002 . 6-1. 1 1 Assy Assy Assy

PA3000/5000/PAX1000

The result is approximately 50l/min. 100 50 1 0 2 3 4 5 6 7 Cycle (Hz) Viscosity characteristics (flow rate correction for viscous fluids) Caution 100 1. These flow rate characteristics are for fresh water (viscosity 1mPas, specific gravity 1.0). 2.

PF-OMM0004_C

+100 OFF GND 30 msec. 1 [ooo] 1 [ooo] [F20] [iNP] [iNP][-] [-] [F20] -47No.PF-OMM0004-D [F22] 5 V20 mA [F22] [AnA] [AnA][-] [F22] -48No.PF-OMM0004-D OFF ON 5 V 20 mA 10% [F22] -49No.PF-OMM0004-D [F30] OFF 2 5 100 24 5 5 100 500 9.5 2 2 100 200 3.8 [F30] [SAVE] [F30] 2 5 OFF OFF 2 5 B -50No.PF-OMM0004-D [F80] 12% 30 ON [F80] [dSP] [F80] ON 30 OFF -51No.PF-OMM0004-D [

Process Pump Series PA3000/5000/PAX1000 Series PB1000

The result is approximately 50l/min. 100 50 1 0 2 3 4 5 6 7 Cycle (Hz) Viscosity characteristics (flow rate correction for viscous fluids) Caution 100 1. These flow rate characteristics are for fresh water (viscosity 1mPas, specific gravity 1.0). 2.

Process Pump Series PA3000/5000/PAX1000 Series PB1000

The result is approximately 50l/min. 100 50 1 0 2 3 4 5 6 7 Cycle (Hz) Viscosity characteristics (flow rate correction for viscous fluids) Caution 100 1. These flow rate characteristics are for fresh water (viscosity 1mPas, specific gravity 1.0). 2.

ZR

ZL Operation Solenoid valve (Double, Single)/Air operated valve Power supply voltage 3, 5, 6, 12, 24 VDC, 100, 110 VAC (50/60Hz) ZY Vacuum pressure switch ZQ 0 to 101 kPa Set pressure range ZSE2-0R-15 ZSE4-00---X105 3% or less Hysteresis ZF 12 to 24 VDC (Ripple 10% or less ) Operating voltage ZP Suction filter unit ZR1-F Vacuum to 100 kPa Operating pressure range ZCU 30 m Filtration degree

Thermo-chiller

. * The ambient temperatures of 40C and 45C are at 100% fan output. (The noise level rises by approx. 3 dB(A) from the rated condition.)

CU

If operated beyond the limiting ranges, excessive impact will occur and this may cause damage to equipment. 2.00 25 1.50 20 1.00 0.50 0.00 20 30 40 50 60 70 80 90 100 Stroke (mm) Cushion Needle Adjustment Caution : Operating pressure 0.5MPa : Operating pressure 0.4MPa Graph 1 1.

LVQ

T) View Z (mm) Dimensions A B C D M N T U V Model LVQ20-S-2 LVQ30-S-2 LVQ40-S-2 LVQ50-S-2 LVQ60-S-2 25.5 46 31.5 58 7 15 35.3 10.6 7 23.5 47 29.5 59 7 15 36.9 16.5 10 23.5 47 29.5 59 7 20 37.9 22 35 70 41 82 7 20 64 25 17 35 70 41 82 7 20 66 32 17-5-69 8 Series LVQ Dimensions With flow rate adjustment & by-pass High back pressure spec. with flow rate adjustment & by-pass N.C. valve M N

HRX-OM-W038

Table 8-1 Quality standard for fresh water (tap water) Item Product Standard value For circulating fluid For facility water pH (at 25oC) 6.0 to 8.0 6.5 to 8.2 Electric conductance (at 25oC) [S/cm] 100 to 300 100 to 800 Chloride ion [mg/L] 50 or less 200 or less Standard Sulfuric acid ion [mg/L] 50 or less 200 or less item Acid consumption (at pH 4.8) [mg/L] 50 or less 100 or less Total hardness

PFxx-OMJ0005CN

(50) PFM711--D/F 100(50) ( )CO2 ( ) CO2 () 25[L/min] 10[L/min] [L/min] [L/min] 50[L/min] 100[L/min] [L/min] [L/min] -57No.PF-OMJ0005CN-I (350[kPa]) 25[L/min] 10[L/min] [kPa] [kPa] [L/min] [L/min] 100[L/min] 50[L/min] [kPa] [kPa] [L/min] [L/min] -58No.PF-OMJ0005CN-I PFM7-(N)01/(N)02/F01 17 2 -59No.PF-OMJ0005CN-I PFM7-(N)01L/(N)02L/F01L 2 17 -60No.PF-OMJ0005CN-I PFM7S-(N)01/(N)02/F01

HRX-OM-W060

Table 7.1-1 Quality criteria for clean water (tap water) Item Unit Criterion Circulating fluid Facility water pH (at 25 oC) 6.0 to 8.0 6.5 to 8.2 Electric conductance (at 25 oC) [S/cm] 100 to 300 100 to 800 Chloride ion [mg/L] 50 or less 200 or less Standard Sulphate ion [mg/L] 50 or less 200 or less item Acid consumption (at pH 4.8) [mg/L] 50 or less 100 or less Total hardness [mg/L] 70

HRX-OM-X084

Table 8-1 Quality criteria for clean water (tap water) Item Unit Criterion Circulating fluid Facility water pH (at 25 oC) 6.0 to 8.0 6.5 to 8.2 Electric conductance (at 25 oC) [S/cm] 100 to 300 100 to 800 Chloride ion [mg/L] 50 or less 200 or less Standard Sulfuric acid ion [mg/L] 50 or less 200 or less item Acid consumption (at pH 4.8) [mg/L] 50 or less 100 or less Total hardness [mg/L]