Bearing Type: Ball bushing, Bore Size: 20mm, Port Thread Type: NPT, Cylinder Stroke: 150mm, Auto Switch: M9BWV--Solid State, 2-color Indication, 2 Wire, Vertical, Lead Wire or Prewired Connector: 5m, Number: -

Thermo-chiller/Rack Mount Type

Required ventilation rate [m3/min] Model Heat radiation amount [kW] Differential temp. of 3C between inside Differential temp. of 6C between inside and outside of installation area HRR010-A Approx. 2 40 20 HRR012-A Approx. 2 40 20 HRR018-A Approx. 4 70 40 HRR024-A Approx. 5 90 50 HRR030-A Approx. 6 100 60 HRR050-A Approx. 10 140 70 and outside of installation area Voltage dV dt = Voltage

Pin Clamp Cylinder Series CKQ/CLKQ

Adjustable from 0.5 to 2 mm 70 70 Shim Mounting tap: M10 x 1.5 Pin hole: 8H7 Mounting tap: M10 x 1.5 Pin hole: 8H7 66 66 One 1 mm and two 0.5 mm shims are attached.

HRX-OM-M090

PV SV 5.19 Communication function HRS Series 5-70 HRX-OM-M090 Chapter 6 OptionOptional Accessories Chapter 6 OptionOptional Accessories 6.1 Option J [Automatic fluid filling] 6.1.1 Option J [Automatic fluid filling] This function is available for customers who selected automatic fluid filling.

Modular Type Regulator Series AR

75 90 95 J 25 30 30 41 50 50 70 70 B 58 94 101 116 128 129 169 176 K 28 34 34 40 54 54 66 66 C 11 26.5 28 31 36 36 43 46 L 30 44 44 46 54 56 65.8 65.8 D 25 57 55 59 68 68 87 87 M 4.5 5.4 5.4 6.5 8.5 8.5 11 11 E 26 65 64 66 74 74 84 84 N 6.5 15.4 15.4 8 10.5 10.5 13 13 F 29.5 28.5 30.5 35 35 44.5 44.5 P 40 55 55 53 70 70 90 90 G 0 2 Note) V 6 6 7 7 7 Q 2 2.3 2.3 2.3 2.3 2.3 3.2 3.2 S

•

(psi) Nominal ~upport bracket nominal ~ymbo l symbol ~nd~cJjemallc diagram " Rod f1ang~: Head flange: --i '< "C II> 92 113 103 Fooi: L 44 G .F. " [I" , , III 1 L,F 73 79 70 86 :.T w~ 102 58 66 72 44 45 47 38 en 3 0 0 ~ "'i f" 27 73 34 33 G 22 102 27 26 (') 'cS. ,j" C. r '\ ~ T .

Coolant Valve

(mm) Model Conversion Cv 1.2 1.3 1.5 3.9 5.0 4.5 5.8 7.0 11 9.1 15 17 23 17 23 26 34 30 40 41 62 41 66 49 70 73 100 Threaded Note) Flange Kv VNC1-6A VNC1-8A VNC1-10A VNC24-10A VNC2-10A VNC24-15A VNC2-15A VNC34-20A VNC3-20A VNC44-25A VNC4-25A VNC54-32A VNC5-32A VNC54-32F VNC5-32F VNC64-40A VNC6-40A VNC64-40F VNC6-40F VNC74-50A VNC7-50A VNC74-50F VNC7-50F 1 8 1 4 1.1 1.1 1.3 3.4 4.3 3.9 5.0

3

200 10 50 100 150 200 250 15 600 500 400 300 200 100 20 200 400 600 800 1000 25 200 400 600 800 1000 1200 1400 Flow rate Q [kg/h] ( ): Saturated steam holding heat (kcal/kg) ( ): Saturation temperature (C) For Water How to read the graph The pressure differential to generate a flow rate of 25 L/min water is as follows.

High Power Cylinder:

Cushion adjustment (Relief adjustment) man-hours are the same as the adjustment (cushion needle adjustment) for general purpose cylinders. 350 High power cylinder 300 General purpose cylinder (SMC Series CG1) Buffer capacity [kgf cm] Quality of cushioning (RHCF40-500, Load weight 5kg, Supply pressure 0.5MPa, Horizontal operation) 250 500 3000mm/s 1000mm/s 2000mm/s 200 500mm/s 400 150 Deflection

Guide Table Series MGF ø40, ø63, ø100 1

kg, eccentric distance is 60 mm, and the maximum speed is 150 mm/s Select MGF100 from Graph (7). 2) When MGF63 is operated with a load weight 30 kg and 100 mm eccentric distance From Graph (6), the cylinder can be used at a maximum speed of 100 mm/s or less. 8-23-5 6 Guide Table Series MGF 40, 63, 100 How to Order MGF Y7BW 30 63 Number of auto switches Nil 2 pcs.

High Speed Pilot Operated

frequency [Hz] 70 50 150 100 Valve Construction 2-position single 2-position single Standard 5-port specification Made to Order 3-port specification (-X1) q w 3 (EB) 1 (P) 5 (EA) 3 5 1 3 5 1 2 4 2 4 Component Parts No.

rep-modular-e

(AWG20 to 40) AWG20 AWG30 AWG40 AWG20/30/40 Hook spanner Nominal AWG20 AWG30 AWG40 Tightening torque 2.0 0.2 Nm 3.5 0.3 Nm 4.0 0.4 Nm AWG20 AWG30 AWG40 52/55 58/65 65/70 Actuators Modular F.R.L.

P-E00-1A Models to accommodate a wide variety of applications Electric Actuators CAT. E101 A

122 151 70 122 151 48 374 836 52 402 1000 Slide screw + Linear guide: 53dB (LJ1H) Low profile/non-coupling type with reduced height and length Low Profile Electric Actuator Series LG1 Series with coupling available Mounting of a non-standard motor is possible.

VZ100/300/500

Weight (g) Port size Body ported VZ110 VZ120 70 M5 x 0.8 0 to 0.5 Note ) Weight stands for grommet type Flow Characteristics Flow characteristics Type of actuation Port size N.C.: 1 2 (P A) N.O.: 3 2 (R A) N.C.: 2 3 (A R) N.O.: 2 1(A P) Supply side Exhaust side Model C [dm3/(sbar)] C [dm3/(sbar)] b Cv b Cv Body ported VZ110 VZ120 N.C. 0.11 0.19 0.026 0.071 0.023 0.042 0.19 0.13 0.071

Compact Low Friction Cylinder Series MQQ ø10, ø16, ø20, ø25, ø30, ø40

Air Proof pressure 1.05 MPa Maximum operating pressure 0.5 MPa Minimum operating pressure Note 1) 0.005 MPa 10 to 80C Ambient and fluid temperature Cushion Rubber bumper (Provided as standard) Lubrication Note 2) Not required (Non-lube) Rod end thread Female thread Rod end thread tolerance JIS class 2 +1.0 0 Stroke length tolerance Piston speed Note 3) 0.3 to 300 mm/s (Refer to page 19.) 150

Single Axis Electric Actuator Series LJ1

122 151 70 122 151 48 374 836 52 402 1000 Slide screw + Linear guide: 53dB (LJ1H) Low profile/non-coupling type with reduced height and length Low Profile Electric Actuator Series LG1 Series with coupling available Mounting of a non-standard motor is possible.

Modular Pressure Control Equipment F.R.L. Replacement Procedure

(AWG20 to 40) AWG20 AWG30 AWG40 AWG20/30/40 Hook spanner Nominal AWG20 AWG30 AWG40 Tightening torque 2.0 0.2 Nm 3.5 0.3 Nm 4.0 0.4 Nm AWG20 AWG30 AWG40 52/55 58/65 65/70 Actuators Modular F.R.L.

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122 151 70 122 151 48 374 836 52 402 1000 Slide screw + Linear guide: 53dB (LJ1H) Low profile/non-coupling type with reduced height and length Low Profile Electric Actuator Series LG1 Series with coupling available Mounting of a non-standard motor is possible.

Vacuum System Peripherals:

4 to 20 mA DC Current type 0 to 20 mA DC Voltage type 0 to 5 VDC Voltage type 0 to 10 VDC Preset input 20 Output pressure (kPa) Nil B Without bracket Flat bracket L-bracket 30 40 C Option 50 Monitor output Thread type Port size Option 60 2 1/4 0 Without (In the case of preset input) Analog output 1 to 5 VDC Switch output/NPN output Switch output/PNP output Analog output 4 to 20 mA DC 70

Series CE1

7 NBR Valve retainer seal #7 * Since ther is a possibility of improper operation, contact SMC regarding the replacement of seals. 4.4-9 Series CE1 Dimensions 12, 20 Both ends tapped CE1B Bore size Stroke (mm) A B C D E G H I K L M Bore (mm) 12 20 Standard stroke 25, 50, 75, 100, 125, 150 94 M5 X 0.8 16 5.2 25 15.5 69 15 6 25 42.5 25, 50, 75, 100, 125, 150, 175, 200 106 78 15.5 10 36 53.5