SMC Pneumatic Clean Series

When determining particle generation grades, the 95% upper confidence limit of the average particle concentration (average value), when each specimen is operated at a specified number of cycles Note 2) is considered. The plots in the graphs indicate the 95% upper confidence limit of the average particle concentration of particles with a diameter within the horizontal axis range.

Heatless Air Dryer Series ID 1

Replace the adsorbent according to color of the indicator. 1 4 1 2 1 2 3 4 520 615 850 961 45 45 75 75 9 9 9 9 120 120 170 170 95 95 95 95 59.5 59.5 88 88 128.5 128.5 243.5 243.5 59.5 59.5 66.5 66.5 134.5 134.5 183 183 222 222 302 302 Dew point temperature (Atmospheric pressure) 30C or less 18C 10C 5C Color of indicator ID300 ID400 ID600 Dark blue Light blue Light pink air, the capillary

RLQ

Stroke 8 84.5 Retraction locking LOCK 30.5 PL Pc Thread type Rc NPT G 1/8 1/4 M5 x 0.8 Dust cover (Manual unlocking unit) PL unlocking port Unlocks when pressurized Rod end male thread M18 x 1.5 11 26 28.5 33.5 Rod end nut 9-12-16 17 Series RLQ Compact Cylinder with Air Cushion and Lock Dimensions: 63 (Emergency stop) Foot style: RLQL63 41 55 + Stroke 18 46 91.5 Special cap bolt 5 CL 3.2 95

Dedicated Controller

LC1-1-S1 PC-98 (MS-DOS) LC1-1-W1 (Windows 95 Japanese) LC1-1-W2 (Windows 95 English) and LC1-1-R (dedicated communication cable) (Refer to pages 80, 81, and 85.)

Heatless Air Dryer ID Series

95 95 95 134.5 134.5 183 183 222 222 302 302 59.5 59.5 88 88 9 9 9 9 136 ID Series Specific Product Precautions Be sure to read this before handling the products.

Compact End Lock Cylinder Series CBQ2

14.7 8 63 5 46 3.2 95 91.5 113 16.2 9 L1 Rod end nut Front flange type/CBQ2F, CDBQ2F (mm) Front flange type With rear lock With front lock Bore size (mm) FD FT FV FX FZ A B A B FV M 82.5 65.5 75 58 5.5 8 48 56 65 32 92 75 81.5 64.5 5.5 8 54 62 72 40 4FD FX FZ FT L B + Stroke A + Stroke 93.5 75.5 83.5 65.5 6.6 9 67 76 89 50 95 77 89 71 9 9 80 92 108 63 Rod end male threads Bore size (mm)

Compact Cylinder with Air Cushion and Lock Series RLQ

0.8 (Manual unlocking unit) PL unlocking port Unlocks when pressurized Dust cover Rod end male threads M14 x 1.5 8 20.5 23.5 28.5 Rod end nut 7 Compact Cylinder with Air Cushion and Lock Series RLQ Dimensions/40 (Emergency Stop) Foot/RLQL40 34 17 44 + Stroke Special cap bolt 33 64 4 64 78 4-6.6 3.2 7 7 62 + Stroke 102.2 + Stroke 11.2 11.2 Rod end nut 38.5 Front flange/RLQF40 40 54 8 17 95

VQZ100V-OMT0001

/VQZ 95 95 95 95 ,N.O. ,N.O. ,N.O. ,N.O. 3 5 3 4(A)5 4(A)2B 1 1 1 1 1 1 1 1 2 2 2 2 0 0 0 0 2 2 2 2 0 0 0 0 3 3 3 3 1 1 1 1 3 3 3 3 1 1 1 1 5 2 3 () () () (3 ) 5 3 NL R LED R 2(B),CM 10 No.VQZ100V-OMT0001 VQZ Series/ / / / DIN DIN DIN DIN DIN DIN 0.30.4Nm VQZ100 VQZ100 VQZ100 VQZ100 300 300 300 300 VQZ200 VQZ200 VQZ200 VQZ200 VQZ1000/2000 VQZ1000/2000 VQZ1000/2000 VQZ1000/2000

CQM

30, 35, 40, 45, 50, 75, 100 50 10, 15, 20, 25, 30, 35, 40, 45, 50, 75, 100 -X Manufacture of Intermediate Stroke 20Description Intermediate stroke range Data Bore size (mm) Intermediate stroke range (mm) Spacers are installed in a standard stroke cylinder. 12, 16 1 to 29 20, 25 1 to 49 Description Bore size (mm) 32 12 to 32 1 to 99 Available in 1 mm stroke increments 40, 50 40, 50 5 to 95

2–4

15, 20, 25, 30, 35, 40, 45, 50, 75, 100 50 10, 15, 20, 25, 30, 35, 40, 45, 50, 75, 100 Manufacture of Intermediate Stroke Description Intermediate stroke range Bore size (mm) Intermediate stroke range (mm) Spacers are installed in a standard stroke cylinder. 12, 16 1 to 29 20, 25 1 to 49 Description Bore size (mm) 32 12 to 32 1 to 99 Available in 1 mm stroke increments 40, 50 40, 50 5 to 95

Air Fittings & Tubing

N L1 L2 Port B Min. port size Weight (g) L3 L4 L5 L6 P Q1 Q2 M KM12-03-35-10 KM12-03-35-6 6 87 10 65 40 18 29.5 19.5 29 12 6 10.6 16 17.46 5 32 1 4 10 110 6 95 10 121 6 102 10 72 61.5 KM12-07-35-10 KM12-07-35-6 48 82 19.5 31.5 21.5 13 7 31.25 13.2 17 10 17.46 1 4 1 4 92 73.5 52.8 97 KM12-09-36-10 KM12-09-36-6 23.7 37.7 25 37.5 15 9.5 15.2 18.5 12.7 22.22 5 16 3 8 83 112 132 Kl Precautions

Dedicated Controller Series LC1 Uniaxial Type

Windows Edition Operating environment Model: LC1-1-W1 A model with a Pentium 75MHz or faster CPU, and able to fully operate Windows 95. Computer Windows 95 16MB or more 5MB of disk space required OS Memory Disk drive Windows is a registered trade mark of the Microsoft Corporation. Pentium is a domestic trade mark of the Intel Corporation.

Compact Cylinder with Air Cushion Series RQ

Mounting bolt Model C Mounting bolt M5 x 65l x 70l x 75l x 85l x 95l x 120l x 145l M6 x 85l x 95l x 105l x 130l x 155l Model C Mounting bolt M5 x 50l x 55l x 60l x 65l x 75l x 85l M5 x 55l x 60l x 65l x 70l x 80l x 90l M5 x 60l x 65l x 70l x 80l x 90l x 115l x 140l D 65 70 75 85 95 120 145 85 95 105 130 155 D 50 55 60 65 75 85 55 60 65 70 80 90 60 65 70 80 90 115 140 R(D)QB20-15 -20 -25 -

Table of Contents - Tubing

Length per roll Tube O.D. mm Tube I.D. mm Min. bending radius mm Operating fluid Max. operating pressure Burst pressure Operating temperature Material Color Tube length per roll (m) Hardness 2 3 2 3 2 3 6 4 8 4 2.5 5 15 10 20 Air Note 1) 116psi (0.8MPa) at 68F (20C) Refer to burst pressure characteristics curve. 4 to 140F (20 to 60C) (With no condensation) Polyurethane Black 10 Shore A 95

Mounting: D (Double Clevis), Bore Size: 63mm, Thread: Rc, Full Stroke: 125mm, First Stroke: 70mm, Auto Switch: M9PA--Solid State, Water Resist., 3 Wire PNP, Horizontal

Mounting: D (Double Clevis), Bore Size: 63mm, Thread: Rc, Full Stroke: 300mm, First Stroke: 260mm, Auto Switch: M9B--Solid State , Gen. Purpose, 2 Wire, Horizontal, Lead Wire or Prewired Connector: SAPC (0.5m Cord Length, M8-3 Pin Connector)

Mounting: Double Clevis, Bore Size: 63mm, Thread: Rc, Full Stroke: 300mm, First Stroke: 260mm, Auto Switch: M9B--Solid State , Gen. Purpose, 2 Wire, Horizontal, Lead Wire or Prewired Connector: 0.5m Cord Length, M8-3 Pin Connector, Number: -

Mounting: Double Clevis, Bore Size: 63mm, Thread: Rc, Full Stroke: 125mm, First Stroke: 70mm, Auto Switch: M9PA--Solid State, Water Resist., 3 Wire PNP, Horizontal, Lead Wire or Prewired Connector: -, Number: -

Mounting: Double Clevis, Bore Size: 63mm, Thread: Rc, Full Stroke: 200mm, First Stroke: 100mm, Auto Switch: F7P--Solid State, Gen. Purpose, 3 Wire PNP, Horizontal, Lead Wire or Prewired Connector: -, Number: -

Thomas Oil-less Linear Diaphragm Compressor / Vacuum Pump, 115/60/1 Flow Rate: .95 LPM , .95 LPM, Max Pressure: 8.7 PSIG / 241 in H20 / 600 mbar , 8.7 PSIG / 241 in H20 / 600 mbar, Max Vacuum: 5.9 in HgV / -200 mbar , 5.9 in HgV / -200 mbar, Voltage (50 Hz): 230, Frequency (Hz): 50, Phase: 1-phase, Item Dimensions: Length: 2.83 in / 72 mm Width: 2.09