LEF-OM002xx

The INP output signal is turned on from 100[mm] 0.5[mm]=99.5[mm] Table Position[mm] c Area2[mm] j Area1[mm] j b Speed[mm/s] 100 0 AREA Output signal ON OFF INP Output conodition INP Output signal ON In pos[mm] k OFF 100.5 99.5 0 10 20 30 40 50 60 70 80 90 100 Stroke [mm] 27 - Example of step data input (2) Positioning operation Relative a b c d e f g h i j k Step data No.

LEF-OM006xx

40 50 60 70 80 90 100 [mm] [mm] c 180[mm] 290[mm] AREAON 100[mm]-0.5[mm] = 99.5[mm] INPON 2[mm] j 1[mm] j 100 b 0 [mm/s] AREA ON OFF ON [mm] k INP INP OFF 100.5 99.5 0 10 20 30 40 50 60 70 80 90 100 [mm] -23- (2 INC a b c d e f g h i j k ABS()/ / INC()// )30[mm] No.0 No.0INC No. 1 2 mm/s mm mm/s2 mm/s2 % % mm/s % mm mm mm 0 INC 100 10.00 3000 3000 0 0 0 100 10.00 20.00 0.50 1

VQZ1000/2000/3000

Red (DC) Blue 100 VAC 110 VAC 200 VAC 220 VAC Red Blue 100 VAC 110 VAC Red 200 VAC 220 VAC Push type (Tool required) Push down on the manual override button with a small screwdriver until it stops. Release the screwdriver and the manual override will return.

Compact Hydraulic Cylinder Double Acting/Single Rod Series CH
QB ø 20, ø 32, ø 40, ø 50, ø 63, ø 80, ø 100

Mounting bolt Mounting bolt diagram C D D Model C Mounting bolt Model C D Mounting bolt M5 x 55l x 60l x 65l x 70l x 75l M8 x 95l x 100l x 105l x 110l x 115l CHQB63 10D (M) 5D (M) CH QB20 55 60 65 70 75 80 85 90 95 100 70 75 80 85 90 95 100 105 110 115 140 165 75 80 85 90 95 100 105 110 115 120 145 170 90 95 100 105 110 115 120 125 130 155 180 95 100 105 110 115 120 125 130 135 160 185 100

EXxx-OMY0006CN

EX245-DX1 . 70 11.1. . 70 11.2. . 71 11.3. . 72 11.4. . 72 11.5. LED . 73 11.6. . 74 12. EX245-DY1 . 75 12.1. . 75 12.2. . 76 12.3. . 77 12.4. . 77 12.5. LED . 78 12.6. . 79 13. . 80 13.1. . 80 13.2. Y . 81 13.3. . 82 14. . 83 14.1. EX245-FPS1/2/3 . 83 14.2. . 85 15. . 86 15.1. EX245-FPS1/2/3 . 86 15.2. EX245-DX1 . 88 15.3. EX245-DY1 . 88 16. . 89 16.1. . 89 16.2.

High Vacuum L Type Valve

185 79 46 11 75 52 72 XLA-63-2 88 212 100 55 11 87 95 70 76 XLA-80-2 90 257 117 65 11 114 110 83 104 12 XL-OMS0001-B 6.

NVJ100, NVJ300, NVJ3000 3,5 Port Solenoid Valve/Rubber Seal Type

3 position 0-1OOPSl (0-7kSf ,/cm,) Operating pressure range 6 g 70 E E 60 2 position single P-100PS| (P-7ksf/cm,) P:Supply pressure 50 Pilot pressure range 2 position double 14-100 (1-7ksllcm?)

OMU0023

65 41 A 97 61 a 2 2 STX 34 22 " 66 42 B 98 62 b 3 3 ETX 35 23 # 67 43 C 99 63 c 4 4 EOT 36 24 $ 68 44 D 100 64 d 5 5 ENQ 37 25 % 69 45 E 101 65 e 6 6 ACK 38 26 & 70 46 F 102 66 f 7 7 BEL 39 27 ' 71 47 G 103 67 g 8 8 BS 40 28 ( 72 48 H 104 68 h 9 9 HT 41 29 ) 73 49 I 105 69 i 10 0A LF 42 2A * 74 4A J 106 6A j 11 0B VT 43 2B + 75 4B K 107 6B k 12 0C FF 44 2C , 76 4C L 108 6C l 13 0D CR 45 2D

o

3 position 0-1OOPSl (0-7kSf ,/cm,) Operating pressure range 6 g 70 E E 60 2 position single P-100PS| (P-7ksf/cm,) P:Supply pressure 50 Pilot pressure range 2 position double 14-100 (1-7ksllcm?)

o

3 position 0-1OOPSl (0-7kSf ,/cm,) Operating pressure range 6 g 70 E E 60 2 position single P-100PS| (P-7ksf/cm,) P:Supply pressure 50 Pilot pressure range 2 position double 14-100 (1-7ksllcm?)

CE2

Relay, PLC 100 V Reed switch Solid state switch PLC 100 V, 200 V Relay, PLC 12 V Yes Yes 24 V 2-wire Terminal conduit PLC 100 V, 200 V Relay, PLC DIN terminal Grommet Diagnostic indication (2-color indication) 3-wire (NPN) 3-wire (PNP) 5 V, 12 V 24 V IC circuit Grommet 100 V, 200 V 2-wire 12 V IC circuit 3-wire (NPN) 2-wire Terminal conduit 5 V, 12 V Relay, PLC 12 V 3-wire (NPN

Air Cylinder/End Lock Series MBB ø32, ø40, ø50, ø63, ø80, ø100

120 50 100 12 2 9 80 up to 1000 45.5 153 63 126 16 4 12 100 up to 1000 54 178 75 150 16 4 14 120 FX FE FT MB FZ C95 Rear flange(G)/Locking at head end (Hl) Hl/ Rl Wl (mm) CA1 Cushion valve Stroke range Bore size (mm) ZZ ZZ FZ FY FX FT FD B Port 4-FD CS1 32 40 50 63 80 100 up to 500 157 149 79 32 64 10 7 50 up to 500 171 158 90 36 72 10 9 55 up to 600 188 176 110 45 90 12 9 70 FY B up to

Uniaxial Electric Actuator Series LJ1

100% Horizontal load 50% Horizontal load 100% Horizontal load 50% 50 100 200 50 100 200 20 20 10 10 5 5 Lateral load 100% Lateral load 50% Lateral load 100% Lateral load 50% 1 2 1 2 0.5 0.5 Horizontal empty weight deflection Lateral empty weight deflection Horizontal empty weight deflection Lateral empty weight deflection 0.1 0.2 0.1 0.2 100 200 300 500 1000 100 200 300 500 1000 Load point

Compact Hydraulic Cylinder Double Acting/Double Rod Series CH
QWB ø 20, ø 32, ø 40, ø 50, ø 63, ø 80, ø 100

75 80 85 90 95 100 105 110 70 75 80 85 90 95 100 105 110 115 140 165 75 80 85 90 95 100 105 110 115 120 145 170 90 95 100 105 110 115 120 125 130 155 180 95 100 105 110 115 120 125 130 135 160 185 100 105 110 115 120 125 130 135 140 165 190 105 110 115 120 125 130 135 140 145 170 195 15D (M) 10D (M) 20D (M) 15D (M) 25D (M) 20D (M) 30D (M) 25D (M) 10 35D (M) 30D (M) 15.5 40D (M) 35D (M) 45D

Modular F.R.L. Unit

44.5 84 16 11 6.4 115 3.3 303 277 43 20 191 11 20 50 98 70 44.5 16 84 11 6.4 117.5 316 3.3 280 46 20 196 20 11 50 70 98 44.5 84 13 11 6.4 117.5 319 3.3 Note 1) For AC20 only, the position of the pressure gauge is above the center of the piping.

Electric Actuators

Ball screw 0.03 80 3 100 Slide screw 0.05 200 2 Guide rod type Series LXP 200 3 Slide screw 0.05 100 4 Without motor brake 30 Ball screw 0.03 6 80 Ball bushing guide 100 Slide screw 0.05 Sanyo Denki Co., Ltd. 200 2 200 3 Slide screw 0.05 100 4 With motor brake 30 Ball screw 0.03 5 80 100 Slide screw 0.05 200 3 High rigidity slide table type Series LXS 200 4.5 Slide screw

Air Cylinder/Low Friction Series MB l Q ø32, ø40, ø50, ø63, ø80, ø100

to 1000 up to 1000 up to 1000 102.5 122 1.7-28 Low Friction Series MBlQ With Mounting Bracket Front flange/(F) Front flange (mm) Port Cushion valve 4-FD Bore size (mm) Stroke range Fd FZ FY FX FT FE FD B 32 40 50 63 80 100 25 31 38.5 39.5 45.5 54 79 90 110 120 153 178 32 36 45 50 63 75 64 72 90 100 126 150 10 10 12 12 16 16 3 3 2 2 4 4 7 9 9 9 12 14 up to 700 50 55 70 80 100 120 up to 800

Mechanically Jointed Rodless Cylinder MY1H Series Linear Guide Type: ø25, ø32, ø40  Piping can be connected from 4 directions on the head cover.  Allows on-site piping to suit the MY1B installation MY1H MY1H conditions. MY1B MY1M MY1C MY

H unit Use this unit when the cylinder is operated in a load and speed range above the L unit limit line and below the H unit limit line. 100 3 5 10 20 50 100 1 2 3 4 5 10 20 30 30 100 200 40 50 MY1B m1,m2,m3 max. m1,m2,m3 max.

Compact Cylinder

Compact Cylinder 12, 16, 20, 25, 32, 40, 50, 63, 80, 100 RoHS New New Both ends tapped mounting added. Bore sizes 80, 100 added. Port thread types NPT, G added.

SFOD-OMT0005CN

Axis mode (mm/s) (mm) Selection (mm) (mm) 2) 2) (mm/s (mm/s (mm) 0 ABS 100 20.00 1000 1000 0 0 0 100 18.00 22.50 0.5 1 ABS 50 10.00 1000 1000 70 60 5 100 6.0 12.0 1.5 63 ABS 20 5.00 500 500 0 0 0 100 3.0 8.0 1.2 -41- () () (TB) No. Step No. 063 No. TB PLC 0 No.