Clean Gas Filter

(Refer to page 300.)

Low Friction: Double Acting Single Rod Series CM2Q ø20, ø25, ø32, ø40

Description Material 20 PDU-8Z 25 PDU-10Z 32 PDU-12LZ 40 PDU-14LZ !

MHZ

0.6 MPa 100 50 Overhang H (mm) Overhang H (mm) 80 0.3 MPa 0.3 MPa Pressure 0.2 MPa Pressure 0.2 MPa 0.3 MPa 40 0.4 MPa 0.4 MPa 60 0.5 MPa 0.5 MPa 30 0.3 MPa 0.7 MPa 0.7 MPa 0.6 MPa, 0.7 MPa 0.6 MPa, 0.7 MPa 0.4 MPa 0.5 MPa 0.6 MPa, 0.7 MPa 0.4 MPa 40 20 0.5 MPa 20 10 0 10 20 30 40 50 60 0 20 40 60 80 100 120 Gripping point L (mm) Gripping point L (mm) MHZ2-20/11-MHZ2-20 80 Pressure 0.2 MPa

MHZ

0.6 MPa 0.5MPa 400 0.6 MPa 0.6 MPa Gripping force (N) 50 Gripping force (N) 0.5 MPa 0.5 MPa 300 40 0.4 MPa 0.4 MPa 0.4 MPa 0.4 MPa 0.3 MPa 0.3 MPa 30 0.3 MPa 0.3 MPa 200 0.2 MPa 0.2 MPa 0.2 MPa 0.2 MPa 20 100 10 0 10 20 30 40 50 60 0 20 40 60 80 100 120 Gripping point L (mm) Gripping point L (mm) MHZ2-20D/MHZL2-20D 100 Pressure 0.7 MPa Pressure 0.7 MPa Gripping force (N) 0.6 MPa 0.6 MPa

Possible to transfer a workpiece at low-speed.

400 Displacement (m) Displacement (m) 250 350 200 300 40 30 20 10 0 30 25 20 15 10 5 0 Load (N) Load (N) MSQXB30A MSQXB50A 350 300 300 250 Displacement (m) Displacement (m) 250 200 200 150 150 100 100 50 40 30 20 10 0 100 80 60 40 20 0 Load (N) Load (N) 336 MSQX Series Low-Speed Rotary Table Rack & Pinion Type Construction CRB2 CRB1 MSU CRJ CRA1 o i @5 @6 t y !

HRX-OM-M090

--20, HRS024--20 . 9-11 9.6 Pump capacity . 9-12 9.6.1 HRS012--10-(BJM), HRS018--10-(BJM) . 9-12 9.6.2 HRS012--20-(BGJM), HRS018--20-(BGJM), HRS024--20-(BGJM) . 9-12 9.6.3 HRS012--10-T, HRS018--10-T, HRS012--10-MT, HRS018--10-MT . 9-13 9.6.4 HRS012--20-T, HRS018--20-T, HRS024--20-T . 9-13 9.6.5 HRS012--20-MT, HRS018--20-MT, HRS024--20-MT . 9-14 9.7 Required facility water flow (for water-cooled

MTS

20 0.5 0.4 0.3 0.2 0.5 0.4 0.3 0.2 25 20 16 16 12 12 0.1 0.1 0 40 60 80 100 120 140 160 180 200 20 20 0 40 60 80 100 120 140 160 180 200 Overhang L (mm) Overhang L (mm) Graph (20) Stroke: Up to 150 stroke Graph (16) Stroke: Up to 150 stroke 10 20 10 20 2 3 4 5 2 3 4 5 Weight W (kg) Weight W (kg) 40 40 32 32 1 1 0.5 0.4 0.3 0.2 0.5 0.4 0.3 0.2 25 25 20 20 0.1 0 40 60 80 100 120 140 160 180

MXH

Eccentricity 200 mm 1 10 10 0.1 Weight m (kg) Weight m (kg) Weight m (kg) 1 1 20 16 20 16 10 6 20 16 10 6 0.01 0.1 0.1 10 6 0.01 0.001 0.01 80 100 0 20 40 60 80 100 0 20 40 60 80 100 0 20 40 60 Overhang L (mm) Overhang L (mm) Overhang L (mm) Selection Example 1.

Thermo-chiller

x Width 925 x Depth 955] HRS150-W -20-A 459 [208] HRS150-A-20 4.

HRX-OM-R016

-(BJMT) . 9-5 9.3.2 HRS030-W-20-(BJMT) . 9-5 9.4 Cooling capacity . 9-6 9.4.1 HRS030--20-(BJMT) . 9-6 9.5 Heating capacity . 9-6 9.5.1 HRS030-A-20-(BJMT) . 9-6 9.5.2 HRS030-W-20-(BJMT) . 9-6 9.6 Pump capacity. 9-7 9.6.1 HRS030--20-(BJM) . 9-7 9.6.2 HRS030--20-T . 9-7 HRS Series HRX-OM-R016 Contents 9.6.3 HRS030--20-MT . 9-8 9.7 Required facility water flow (for water-cooled type) . 9-8 9.8

240

20 40 60 80 100 0 0 20 40 60 80 100 Overhang L (mm) Overhang L (mm) Graph x Maximum Speed 300 mm/s or Less 10 Selection Example (Vertical Mounting) 1.

HRS100/150

HRS100-A/W-20/40, HRS150-A/W-40 4 h 2 h 1 h 4 min 6 min 10 min 14 min 20 min 30 min 2 min 1 min Operating time 20 s 30 s 10 s Max. 5 s 2 s 1 s Min. 0.5 s 0.2 s 0.1 s 0.05 s 0.02 s 0.01 s 100 125 200 300 500 400 600 700 1000 2000 3000 4000 5000 6000 7000 10 1500 Current (% for chiller main breaker volume) 123 HRS100/150 Series Specific Product Precautions 5 Be sure to read this before handling

Clean Air Module

mA Allowable load resistance 300 or less (12 VDC), 600 or less (24 VDC) P2: Analog output 1 to 5 V Allowable load resistance 100 k or more P6: Analog output 4 to 20 mA Allowable load resistance 300 or less (12 VDC), 600 or less (24 VDC) 339 LLB Series Refer to the operation manual for how to set and to operate.

Table of Contents

AS3201F -03-10 200 400 200 100 0 0 SV400 AN300 -KM12 T1209 SV300 ANA1 -C12 T1075 800 400 MB 100 MB 80 600 300 Stroke (mm) AS5000-02 AS420-02 AS4000-03 400 200 200 100 0 0 400 800 CS1 125 MB 100 600 300 Stroke (mm) AS5000-02 AS420-02 200 400 AS4000-04 200 100 0 0 Solenoid valve Silencer Tubing Speed controller Solenoid valve Silencer Tubing Speed controller 200 300 400 500 600 700 800 900

REC

Refer to p.1.4-19 and 1.4-20.

LEC-OM02704CN

DC24V 2. 20 3. 4. 5. 6. 7. 8.

Series MXP Precision Air Slide Table

L=100mm L=100mm MXP10-10 MXP10-20 MXP10-10 MXP10-20 0.04 0.03 0.08 MXP10-10 MXP10-20 MXP10-10 MXP10-20 MXP10-10 MXP10-20 MXP10-10 MXP10-20 Table deflection (mm) Table deflection (mm) Table deflection (mm) 0.03 0.06 0.02 0.02 0.04 0.01 0.01 0.02 0 0 0 80 20 40 60 80 Load (N) 20 40 60 80 Load (N) 20 40 60 100 Load (N) 12 12 12 L=100mm L=100mm L=100mm MXP12-15 MXP12-25 MXP12-15 MXP12-25 0.05

180
Angular Style Air Gripper Series MHY2/MHW2 Cam Style Rack & Pinion Style 1

60 20 0.3 0.3 15 40 0.2 0.2 10 20 0.1 0.1 5 L L 0 20 30 50 60 Gripping point L (mm) 40 70 0 30 40 60 70 Gripping point L (mm) 50 80 90 12-10-4 4 Series MHY2/MHW2 180 Angular Style Air Gripper MHZ MHW2-32D MHW2-50D MHW2-20D MHF 300 25 100 Pressure 0.7 MPa Pressure 0.7 MPa Pressure 0.7 MPa MHL 250 20 0.6 80 0.6 Gripping force (N) Gripping force (N) Gripping force (N) 0.6 MHR 200 0.5 0.5 0.5

180
Angular Style Air Gripper Series MHY2/MHW2 Cam Style Rack & Pinion Style 1

60 20 0.3 0.3 15 40 0.2 0.2 10 20 0.1 0.1 5 L L 0 20 30 50 60 Gripping point L (mm) 40 70 0 30 40 60 70 Gripping point L (mm) 50 80 90 12-10-4 4 Series MHY2/MHW2 180 Angular Style Air Gripper MHZ MHW2-32D MHW2-50D MHW2-20D MHF 300 25 100 Pressure 0.7 MPa Pressure 0.7 MPa Pressure 0.7 MPa MHL 250 20 0.6 80 0.6 Gripping force (N) Gripping force (N) Gripping force (N) 0.6 MHR 200 0.5 0.5 0.5

CYV

Table 1 100 Total operation cycles (10,000) 50 40 30 20 10 100 200 300 400 500 700 1000 Stroke (mm) Inner cover holding screw tightening torques [Nm] Tightening torque Model Screw size CYV15 0.3 M3 x 0.5 CYV32 2.45 M6 x 1 Plate Stroke adjustment screw (inner cover) Hexagon wrench Inner cover holding screw direction + direction 11 SMC'S GLOBAL MANUFACTURING, DISTRIBUTION AND SERVICE NETWORK