VCW

How to Replace the Solenoid Coil Caution Replacement Parts Solenoid coil part number Clip VCW 20 1 G Series Lead wire length Flat head screw driver 20 30 40 Class 2 Class 3 Class 4 300mm 600mm 1000mm 1500mm 3000mm Nil L1 L2 L3 L4 Solenoid coil Voltage Insert a flat head screw driver into the hook section of the clip groove. 1 2 3 4 5 6 100VAC 200VAC 110VAC 220VAC 24VDC 12VDC Electrical entry

-fl Seies

Model Position /No. of solenoid Type Port size {NPTD Cv factor MaKOperating cycle CPM Response time (ms) Weight lbs (ks0 Plug-in Non Piug-in 2 position Single wFR2100 NVFR2110 Va 300 20 or less 0.75 (0.34) V1 Double wFR2200 NVFR2210 la 0.9 300 20 or less o.92 (0.421 Y.

Peltier-type Chiller Thermo-con/ Compact Type

) 148 40 185 163 Air Air Dustproof filter Model no. label NRTL label 90 20 20 110 Rubber legs (4 pcs.)

Pin Clamp Cylinder Series CKQ/CLKQ

Dimensions Auto Switch Internal Circuit Indicator light 6 14 Main circuit of switch NO.4 8.8 9.2 NO.3 32 4 300 44 2-3.5 mounting hole 6 1 Indicator light/Display method 6 20 ON Operating range OFF 13 Most sensitive position Indication Green Red Red Optimum operating position 1 2 3 4 Connector pin 19

Slit Valve

1 OPEN o e CLOSE OPEN For 200 mm wafer For 300 mm wafer XGT22 XGT31 XGT22 (200 mm wafer type) Component Parts XLA No.

Precision Regulator

350 Flow rate (L/min (ANR)) Supply pressure P1 (MPa) Relief flow rate (L/min (ANR)) IR1020-01 IR1020-01 IR1020-01 Back pressure: 1.0 MPa Supply pressure: 1.0 MPa 1.0 0.8 0.204 0.9 0.7 Set pressure (MPa) Set pressure (MPa) 0.8 0.202 0.6 0.7 Set point 0.5 0.6 0.200 0.5 0.4 0.4 0.3 0.198 0.3 0.2 0.2 0.1 0.196 0.1 0 100 200 300 400 500 0 0.2 0.1 0.3 0.4 0.6 0.5 0.8 0.7 0.9 300 0 100 200 1.0

IR1000/2000/3000

Conditions: Supply pressure 0.7MPa Set pressure 0.2MPa Flow rate 0 l/min (ANR) Conditions: Back pressure 0.5MPa Conditions: Supply pressure 0.5MPa IR2000-02 IR2000-02 IR2000-02 0.204 0.5 0.2 Set pressure MPa Set pressure MPa Set pressure P2 MPa 0.4 0.202 Setting point 0.15 0.3 0.200 0.1 0.2 0.198 0.05 0.1 0.196 0 0.2 0.1 0.4 0.3 0.6 0.5 0.8 0.7 0.9 1.0 0 100 200 300 400 0 100 200 300 400

Refrigerated Air Dryer

Applicable dryer Weight lb [g] A B A 0.8 [20] 0.8 [20] AME 8.7 [220] 9.4 [240] 0.08 [35] IDF-FL209 IDFB3E AMF IDFB4E 14.8 [375] 7.7 [195] 0.12 [55] IDF-FL203 B IDFB6E ZFC 13.3 [340] 0.15 [70] IDF-FL204 IDFB8E 10.4 [265] SF 14.8 [375] 0.17 [75] IDF-FL205 IDFB11E 0.4 [10] SFD [17.3] 440 [14.5] 370 [0.26] 120 IDF-FL206 IDFB15E LLB (IDF-FL209) (IDF-FL203 to 208, 213, 214) IDFB22E 21.7 [550] 14.4

Clean Gas Filter

(Refer to page 300.)

Low Friction: Double Acting Single Rod Series CM2Q ø20, ø25, ø32, ø40

Description Material 20 PDU-8Z 25 PDU-10Z 32 PDU-12LZ 40 PDU-14LZ !

MHZ

0.6 MPa 100 50 Overhang H (mm) Overhang H (mm) 80 0.3 MPa 0.3 MPa Pressure 0.2 MPa Pressure 0.2 MPa 0.3 MPa 40 0.4 MPa 0.4 MPa 60 0.5 MPa 0.5 MPa 30 0.3 MPa 0.7 MPa 0.7 MPa 0.6 MPa, 0.7 MPa 0.6 MPa, 0.7 MPa 0.4 MPa 0.5 MPa 0.6 MPa, 0.7 MPa 0.4 MPa 40 20 0.5 MPa 20 10 0 10 20 30 40 50 60 0 20 40 60 80 100 120 Gripping point L (mm) Gripping point L (mm) MHZ2-20/11-MHZ2-20 80 Pressure 0.2 MPa

MHZ

0.6 MPa 0.5MPa 400 0.6 MPa 0.6 MPa Gripping force (N) 50 Gripping force (N) 0.5 MPa 0.5 MPa 300 40 0.4 MPa 0.4 MPa 0.4 MPa 0.4 MPa 0.3 MPa 0.3 MPa 30 0.3 MPa 0.3 MPa 200 0.2 MPa 0.2 MPa 0.2 MPa 0.2 MPa 20 100 10 0 10 20 30 40 50 60 0 20 40 60 80 100 120 Gripping point L (mm) Gripping point L (mm) MHZ2-20D/MHZL2-20D 100 Pressure 0.7 MPa Pressure 0.7 MPa Gripping force (N) 0.6 MPa 0.6 MPa

Possible to transfer a workpiece at low-speed.

400 Displacement (m) Displacement (m) 250 350 200 300 40 30 20 10 0 30 25 20 15 10 5 0 Load (N) Load (N) MSQXB30A MSQXB50A 350 300 300 250 Displacement (m) Displacement (m) 250 200 200 150 150 100 100 50 40 30 20 10 0 100 80 60 40 20 0 Load (N) Load (N) 336 MSQX Series Low-Speed Rotary Table Rack & Pinion Type Construction CRB2 CRB1 MSU CRJ CRA1 o i @5 @6 t y !

HRX-OM-M090

--20, HRS024--20 . 9-11 9.6 Pump capacity . 9-12 9.6.1 HRS012--10-(BJM), HRS018--10-(BJM) . 9-12 9.6.2 HRS012--20-(BGJM), HRS018--20-(BGJM), HRS024--20-(BGJM) . 9-12 9.6.3 HRS012--10-T, HRS018--10-T, HRS012--10-MT, HRS018--10-MT . 9-13 9.6.4 HRS012--20-T, HRS018--20-T, HRS024--20-T . 9-13 9.6.5 HRS012--20-MT, HRS018--20-MT, HRS024--20-MT . 9-14 9.7 Required facility water flow (for water-cooled

MTS

20 0.5 0.4 0.3 0.2 0.5 0.4 0.3 0.2 25 20 16 16 12 12 0.1 0.1 0 40 60 80 100 120 140 160 180 200 20 20 0 40 60 80 100 120 140 160 180 200 Overhang L (mm) Overhang L (mm) Graph (20) Stroke: Up to 150 stroke Graph (16) Stroke: Up to 150 stroke 10 20 10 20 2 3 4 5 2 3 4 5 Weight W (kg) Weight W (kg) 40 40 32 32 1 1 0.5 0.4 0.3 0.2 0.5 0.4 0.3 0.2 25 25 20 20 0.1 0 40 60 80 100 120 140 160 180

MXH

Eccentricity 200 mm 1 10 10 0.1 Weight m (kg) Weight m (kg) Weight m (kg) 1 1 20 16 20 16 10 6 20 16 10 6 0.01 0.1 0.1 10 6 0.01 0.001 0.01 80 100 0 20 40 60 80 100 0 20 40 60 80 100 0 20 40 60 Overhang L (mm) Overhang L (mm) Overhang L (mm) Selection Example 1.

Thermo-chiller

x Width 925 x Depth 955] HRS150-W -20-A 459 [208] HRS150-A-20 4.

HRX-OM-R016

-(BJMT) . 9-5 9.3.2 HRS030-W-20-(BJMT) . 9-5 9.4 Cooling capacity . 9-6 9.4.1 HRS030--20-(BJMT) . 9-6 9.5 Heating capacity . 9-6 9.5.1 HRS030-A-20-(BJMT) . 9-6 9.5.2 HRS030-W-20-(BJMT) . 9-6 9.6 Pump capacity. 9-7 9.6.1 HRS030--20-(BJM) . 9-7 9.6.2 HRS030--20-T . 9-7 HRS Series HRX-OM-R016 Contents 9.6.3 HRS030--20-MT . 9-8 9.7 Required facility water flow (for water-cooled type) . 9-8 9.8

240

20 40 60 80 100 0 0 20 40 60 80 100 Overhang L (mm) Overhang L (mm) Graph x Maximum Speed 300 mm/s or Less 10 Selection Example (Vertical Mounting) 1.

HRS100/150

HRS100-A/W-20/40, HRS150-A/W-40 4 h 2 h 1 h 4 min 6 min 10 min 14 min 20 min 30 min 2 min 1 min Operating time 20 s 30 s 10 s Max. 5 s 2 s 1 s Min. 0.5 s 0.2 s 0.1 s 0.05 s 0.02 s 0.01 s 100 125 200 300 500 400 600 700 1000 2000 3000 4000 5000 6000 7000 10 1500 Current (% for chiller main breaker volume) 123 HRS100/150 Series Specific Product Precautions 5 Be sure to read this before handling