ASR

rotations Number of needle rotations Flow Valve: Series ASQ Meter-out Type (Inlet pressure: 0.3 MPa) ASQ430F ASQ530F ASQ630F 20 10 Flow rate l/min (ANR) Flow rate l/min (ANR) Flow rate l/min (ANR) Effective area mm2 Effective area mm2 Effective area mm2 400 6 200 15 300 4 500 10 5 200 100 2 5 100 10 5 0 10 5 0 10 5 0 Number of needle rotations Number of needle rotations Number of needle

AS-FG/ASD-FG

Speed controller Cylinder Solenoid valve Tube Silencer Maximum return speed mm/s 100 200 300 6 ASD230FG CJ2 VJ500 TU0604 1m AN11001 10 16 Cylinder size 20 ASD330FG CM2 VZ500 TU0604 1m AN11001 25 Cylinder size 32 Values for pressure of 0.5MPa and temperature of 20C.

ZP

, 340 Reinforced pad to prevent deformation when transferring heavy or large work pieces How to Order ZP2 32 H N Pad unit Pad diameter Pad material Symbol Pad diameter 32 150 250 300 340 Symbol Material NBR Silicone rubber FKM CR N S F C 32 150 250 300 340 Note) Silicone rubber is only applicable to the 32 pad.

3 Port Solenoid Valve, VQ100 Series, Base Mounted Type

Connector Series VQ100 VQ110-M-M5 46.3 About 300 (In case of latching) 35.3 Manual override (Lead wire length) About 300 (Lead wire length) 4.9 4.9 12.4 15 E Lead wire color : Red 12 2.5 17 Lead wire color : Black 22.7(Mounting hole) In case of latching type In case of locking knob type SMC VQ110 -*M 34.8 30.7 JAPAN (5.9) 5 (5.9) 5 (4.1) 5 11 7 P A 4.9 8.5 4.9 3-M5 (M3) 30.2 36.6 ( ) :

Brake mechanism added

100 200 300 400 500 100 200 300 400 500 Piston speed (mm/s) Horizontal mounting Piston speed (mm/s) Vertical mounting Selection O.K. NO NO YES Is it possible for cable of stroke reading cylinder to be wired separately from the power line? Is there any influence of noise? YES NO YES NO Can the system be operated below 14.5 mT? Do not use it since it will result in a miscount.

3 Port Air Operated Valve Series SYJA300

53 M8 x 1 Approx. 300 (Lead wire length) 33.1 48.5 [55.5] Refer to page 4-4-61 for dimensions with connector cable.

Compact Guide Cylinder

mm/s or less L = 100 mm, V = 200 mm/s or less 10 10 Load mass m [kg] Load mass m [kg] 1 1 0.3 0.3 10 30 31 101 200 100 10 30 31 100 101 200 Stroke [mm] Stroke [mm] MGPKL32 L = 50 mm, V = 200 mm/s or less L = 100 mm, V = 200 mm/s or less 50 50 Load mass m [kg] Load mass m [kg] 10 10 3 3 10 50 51 100 101 200 100 101 200 10 50 51 Stroke [mm] Stroke [mm] 21 Model Selection MGPK Series L L Plate

Cylinder with Lock Series MNB

l 151 to 200 h Bore size (mm) e f 1 to 50 25 25 25 25 25 25 51 to 100 37.5 37.5 37.5 37.5 37.5 37.5 101 to 150 50 50 50 50 50 50 201 to 300 100 100 100 100 100 100 301 to 400 125 125 125 125 125 125 401 to 500 150 150 150 150 501 to 600 175 175 601 to 700 187.5 187.5 701 to 750 73 81 89 89 101 101 1 to 50 86 94 102 102 114 114 51 to 100 98 106 114 114 126 126 101 to 150 111 119 127 127

VEX1

Condition: Pressure 0.5MPa, Load 50%, Piping length 5m Effective area mm 2(Cv ) Cylinder speed (mm/s) 50 63 80 100 125 140 Bore size (mm) 160 180 200 250 300 Port size Rc(PT) 40 250 25(1.4) VEX312 -01, 02 500 750 02 ( 1 4) 60(3.3) 250 500 750 250 500 750 500 750 1000 500 750 1000 250 500 750 250 500 750 VEX332 -02, 03, 04 Body ported Base mounted 03 (3 8) 160(8.9) VEX350 -04, 06, 10 06 (3

7.4

Symbol Length Nil 150 mm 3 300 mm 6 600 mm 10 1000 mm Base Mounted Part no. Type S0700-S-M5 For internal pilot S0700-S-M5-R For external pilot Note) Standard wire length of valve with plug connector is 300 mm. When ordering a lead wire length of 600 mm or longer, list the part numbers for the valve without connector and the connector assembly.

Speed Controller with Indicator In-line Brass Stainless steel Electroless nickel plated In-line Type “Made to Order” “Made to Order” section has been added. Pages 3, 8 section has been added. ¡Lubricant: Vaseline -X12 The numerical indication of ¡Greas

Made to Order How to Order 2 1 F 06 200 AS S Lubricant: Vaseline -X12 Example) AS2002FS-04-X12 Made to Order Body size Grease-free (Seal: Fluorine-coated) + Restrictor (Without check valve) -X21 100 M5 standard 200 1/8 standard 205 1/4 standard 300 3/8 standard 400 1/2 standard Applicable tubing O.D.1 Example) AS2002FS-04-X21 * Not particle-free Metric size Inch size 23 3.22 04 4 06 6 08

Speed Controller with

Made to Order How to Order 2 F 06 A 200 AS Lubricant: Vaseline -X12 Example) AS2002F-04A-X12 Body size Made to Order Grease-free (Seal: Fluorine-coated) + Restrictor (Without check valve) -X21 100 M5 standard 200 1/8 standard 205 1/4 standard 300 3/8 standard 400 1/2 standard Push-lock type Example) AS2002F-04A-X21 * Not particle-free Applicable tubing O.D.1 Metric size Inch size 23 3.22

HRX-OM-R005

Table 8-1 Quality standard for fresh water (tap water) Item Product Standard value For circulating fluid For facility water pH (at 25oC) 6.0 to 8.0 6.5 to 8.2 Electric conductance (at 25oC) [S/cm] 100 to 300 100 to 800 Chloride ion [mg/L] 50 or less 200 or less Standard Sulfuric acid ion [mg/L] 50 or less 200 or less item Acid consumption (at pH 4.8) [mg/L] 50 or less 100 or less Total hardness

Rotary Table/

100 MSQB20 (Basic type) Displacement m Displacement m 250 80 10 20 30 40 190 200 60 MSQA20 (High precision type) 40 0 0 10 20 30 40 50 10 8 6 4 2 Load N Load N MSQ30 MSQB3A MSQB30 (Basic type) 300 100 Displacement m Displacement m 250 90 200 80 50 130 150 MSQA30 (High precision type) 70 60 0 0 10 20 30 40 50 60 70 12 10 8 6 4 2 Load N Load N MSQ50 MSQB7A MSQB50 (Basic type) 100 200 Displacement

Speed Controller with One-touch Fitting

: 0.5 MPa Inlet pressure: 0.5 MPa Inlet pressure: 0.5 MPa 100 01, 23, 03, 04, 06, 07 500 06, 07, 08, 09, 10 08, 09, 10, 11 Flow rate L/min (ANR) Flow rate L/min (ANR) Flow rate L/min (ANR) 03, 04 400 200 06, 07 02 01, 23 300 50 03, 04 200 100 01, 23 100 0 0 0 5 0 10 5 0 10 5 0 10 Number of needle rotations Number of needle rotations Number of needle rotations Note) -U10/32 has the same specification

Miniature Regulator

300 400 500 600 0 100 200 300 400 500 600 0 100 200 300 400 500 600 Flow rate (L/min (ANR)) Flow rate (L/min (ANR)) Flow rate (L/min (ANR)) ARP Pressure Characteristics (Representative Values) IR-A IR Conditions: Inlet pressure 0.7 MPa Outlet pressure 0.2 MPa Flow rate Q = 20 L/min (ANR) 0.30 IRV Outlet pressure (MPa) 0.25 Set point VEX 0.20 SRH SRP 0.15 SRF 0.10 0.2 0.3 0.4 0.5 0.6 0.7

CEU1

No.CE*-OMP0002-A 3 CEU1 SMC FG 0~50 35~85%RH 3 CEU1CE10.1mm 3 CE1-R** CE1** 3 CEU1** FG 3 DIN 3 2m/s 3 (100ms) 2 2 2 2-1 1 1 1 CEU1 4 2 2 2 2-2 2 2 2 3 3 3 3-1 1 1 1 : : 1 1 (mm) (mm) 25 25 25 25 50 50 50 50 75 75 75 75 100 100 100 100 125 125 125 125 150 150 150 150 175 175 175 175 200 200 200 200 250 250 250 250 300 300 300 300 400 400 400 400 500 500 500 500 12 12 12 12

ARJ310

300 400 500 600 0 100 200 300 400 500 600 0 100 200 300 400 500 600 Flow rate l/min (ANR) Flow rate l/min (ANR) Flow rate l/min (ANR) Pressure Characteristics Conditions: Upstream pressure 0.7MPa Downstream pressure 0.2MPa Flow rate Q = 20l/min (ANR) 0.30 Downstream pressure MPa 0.25 Starting point 0.20 0.15 0.10 0.2 0.3 0.4 0.5 0.6 0.7 0.8 0.9 Upstream pressure MPa Construction ARJ310-01

Regulator for 2 MPa ARX 20

300 400 500 600 700 800 900 1000 0 0 100 200 300 400 500 600 700 800 900 1000 Flow rate l/min(ANR) Flow rate l/min(ANR) ARX21-01 ARX21-02 0.35 0.35 0.30 0.30 Downstream pressure MPa Downstream pressure MPa 0.25 0.25 0.20 0.20 0.15 0.15 0.10 0.10 0.05 0.05 0 0 50 100 150 200 250 300 350 400 450 500 0 0 50 100 150 200 250 300 350 400 450 500 Flow rate l/min(ANR) Flow rate l/min(ANR) Pressure

Miniature Regulator Series ARJ310

300 400 500 600 0 100 200 300 400 500 600 0 100 200 300 400 500 600 Flow rate l/min (ANR) Flow rate l/min (ANR) Flow rate l/min (ANR) Pressure Characteristics Conditions: Upstream pressure 0.7MPa Downstream pressure 0.2MPa Flow rate Q = 20l/min (ANR) 0.30 Downstream pressure MPa 0.25 Starting point 0.20 0.15 0.10 0.2 0.3 0.4 0.5 0.6 0.7 0.8 0.9 Upstream pressure MPa Construction ARJ310-01