MGP

20 22 22 M8 X 1.25 6.6 6.6 8.6 8.6 15 34 38 47 55 16 16 20 20 9 M6 M6 M8 24 27 32 39 11 11 14 14 30 30 40 50 34 40 46 58 7.5 7.5 9 9 Rc1/8 Rc1/8 Rc1/4 Rc1/4 7 13 9 14 32 40 50 63 25, 50, 75, 100, 125, 150, 175, 200 250, 300, 350, 400 66 44 14 14 M8 X 1.25 M8 X 1.25 18 10 72 44 14 12 M10 X 1.5 M10 X 1.5 21.5 11 M10 77 49 16.5 16.5 M10 X 1.5 M10 X 1.5 28 13.5 WA R S T U VA VB WB Bore (mm)

Compact Cylinder with Air Cushion Series RQ

A A1 E1 L1 MM U1 L M8 x 1.25 M10 x 1.25 M14 x 1.5 M18 x 1.5 16 Y-G02 Y-G03 Y-G04 Y-G05 34 41 42 56 8.5 10.5 14 18 16 20 22 28 25 30 30 40 10.3 12.8 12 16 11.5 14 14 20 34 41 42 56 8.5 16 25 30 30 40 M8 x 1.25 10.3 11.5 21 I-G02 I-G03 I-G04 I-G05 8 10 18 22 8 10 10 14 8 10 18 22 8 10 10 14 IY-G02 IY-G03 IY-G04 IY-G05 +0.058 0 +0.4 +0.2 0.2 0.4 +0.058 0 20 10.5 12.8 14 25.6 20 M10 x 1.25 +0.058

Non-rotating Double Power Cylinder/ Double Power Cylinder (without non-rotating mechanism) Series MGZ/MGZR ø20, ø25, ø32, ø40, ø50, ø63, ø80, ø100 1

CDH10 U L CX CZ ZZ + Stroke Z + Stroke RR (mm) Stroke range Bore size (mm) U RR +0.3 +0.1 L CDH10 CX CZ Z ZZ 20 25 32 40 50 63 80 Up to 250 Up to 350 Up to 600 Up to 600 Up to 700 Up to 900 Up to 900 14 14 17 17 26 26 30 10 10 14 14 22 22 25 14 14 20 20 30 30 32 28 28 40 40 60 60 64 8.5 11 12 15 18 23 28 23 23 30 30 42 42 50 129 151 185 208 237 263 298 137.5 162 197 223 255 286 326 8-25-24

SFOD-OMT0009CN

1000 1100 1200 1000 1100 1200 [mm/s] 500 500 410 340 250 200 170 [mm/s] 30 20 10 () [mm/s] 49 33 17 () 1.3 LES(H) LES(H)8 LES(H)16 LES(H)25 J K J K J K [mm] 8 4 10 5 16 8 [mm/s] 400 200 400 200 400 200 [mm/s] 20 10 20 10 20 10 () [mm/s] 25 13 27 14 30 15 () 1.4 LEP LEP*8 LEP*16 J K J K [mm] 8 4 10 5 [mm] 25 25 [mm/s] 300 250 150 350 250 200 [mm/s] 20 10 20 10 () [mm/s] 25 13 27 14

Compact

LEMB25 LEMB32 0 2 4 6 8 10 12 14 16 18 20 22 12 Combining with external guide 10 Combining with external guide Work load [kg] Work load [kg] 8 6 External guide unused External guide unused 4 2 0 0 500 1000 1000 500 0 Speed [mm/s] Speed [mm/s] LEMC25 LEMC32 0 2 4 6 8 10 12 14 16 18 20 22 12 10 Work load [kg] Work load [kg] 8 6 4 2 0 0 500 1000 0 500 1000 Speed [mm/s] Speed [mm/s] LEMH/HT25

Air Cylinder: Standard/Non-rotating Rod Double Acting/Single Acting, Single Rod/Double Rod Series NCM ø3/4", ø7/8", ø1 1/16", ø1 1/4", ø1 1/2", ø2" 1

Applicable bore A 0.51 D C 1/4-28 UNF B 0.16 JM-025 0.44 3/4", 7/8" JM-03 0.50 0.19 5/16-24 UNF 0.50 1 1/16" JM-045 0.69 0.79 0.26 7/16-20 UNF 1 1/4", 1 1/2" JM-04 0.56 3/8-24 UNF 0.65 0.23 1 1/4", 1 1/2" (Non-rotating) JM-05 0.75 1/2-20 UNF 0.32 0.87 2" 6-14-20 21 Series NCM Mounting Bracket Accessory Material: Rolled steel P dia.

KP/KPQ/KPG

1/8 1/4 19.5 17 7 12 M A L H Connection threads 8 M5 23 12 5 6 10 10 19.5 (R) 12 14 1/8 1/4 1/8 1/4 1/4 3/8 3/8 1/2 19.5 20 26.5 24.5 31.5 26.5 27.5 26 7 14 14 13 24 23 23 46 (R) Applicable tubing 8 14 18 26 21.5 10 17 29 41 24 19 22 M L A 12 46 58 25 H Reference dimension for R threads after installation Connection threads Male Elbow: KPQL, KPGL Applicable tubing (M5) Effective area

Pin Clamp Cylinders

176 17.7 177 17.8 178 17.9 179 18.0 180 8.5 085 8.6 086 8.7 087 8.8 088 8.9 089 9.0 090 12.5 17.5 9 6.5 20 13 8.5 20 18 13 27 4 4 5 5.5 11.6 6 7.5 16.4 9.5 095 9.6 096 9.7 097 9.8 098 9.9 099 10.0 100 13.5 19.5 135 13.6 136 13.7 137 13.8 138 13.9 139 14.0 140 195 19.6 196 19.7 197 19.8 198 19.9 199 20.0 200 10 7.5 20 14 10.5 25 20 13 27 4 4.5 9.2 6 5.5 12.6 6 8 17.2 145 14.6 146 14.7 147

SMC Pneumatic Clean Series

S + Stroke FX FZ Relief port 20, 25 F T H ZZ + Stroke Z + Stroke Standard port 20 to 32 FY 45 4-FD Relief port (32, 40) 40 (mm) FX 66 52 40 40 34 B 10.7 7.5 7.5 7.5 DL FT 22 17 17 13 B1 FD F AL FZ G H1 H2 E C2 K I HC H FY D B2 A MM Bore size 0 41 32 32 26 20-0.033 40 32 25 20 60 60 60 4 4 4 16 13 13 13 7 7 7 5 24 46.5 37.5 33.5 28 21 19.5 19.5 15.5 24 22 22 18 14 12 10 8 47.3 37 37 30 10

Sine Cylinder Series REC

I-020B I-032B I-040B 0.058 0 0.1 0.2 0.058 0 0.1 0.2 9 9 9 9 18 41 M8 x 1.25 14 10 11 66 46 16 20 36 M8 x 1.25 10 14 0.058 0 0.1 0.2 0.058 0 0.1 0.2 9 9 9 9 22 45 14 10 14 69 48 18 20 38 10 14 M10 x 1.25 M10 x 1.25 0.070 0 0.1 0.3 0.070 0 0.1 0.3 12 16 12 16 24 50 20 14 13 92 69 22 24 55 20 M14 x 1.5 M14 x 1.5 15.5 Double Knuckle Joint Mounting Y (Max.) hole H10 Shaft (mm) H L MM ND NX2

Sine Cylinder Series REC

I-020B I-032B I-040B 0.058 0 0.1 0.2 0.058 0 0.1 0.2 9 9 9 9 18 41 M8 x 1.25 14 10 11 66 46 16 20 36 M8 x 1.25 10 14 0.058 0 0.1 0.2 0.058 0 0.1 0.2 9 9 9 9 22 45 14 10 14 69 48 18 20 38 10 14 M10 x 1.25 M10 x 1.25 0.070 0 0.1 0.3 0.070 0 0.1 0.3 12 16 12 16 24 50 20 14 13 92 69 22 24 55 20 M14 x 1.5 M14 x 1.5 15.5 Double Knuckle Joint Mounting Y (Max.) hole H10 Shaft (mm) H L MM ND NX2

CXS

B Model A B C D E F G CXS6 9 2.1 3.25 6.5 7 1.2 x 12 10 CXS10 9 2.1 5 10 7 2.5 x 14 10 G CXS15 12 2.1 6 12 7 3 x 16 13 CXS20 15 3.1 7 14 10 4 x 20 16 CXS25 20 3.1 7 14 10 5 x 22 21 CXS32 26 4.1 9 18 12 6 x 32 27 Dimensions other than those listed above are the same as for the standard type. 6 -XC18 NPT finish piping port Specifications CXS XC18 Bore size Stroke Auto switch Slide bearing

2-Color Display ® Digital Flow Switch *1 Applicable fluid Dry air, N2, Ar, CO2

across flats B 2 x Port size Port size: 1, 2 OUT IN 68 [mm] 28 Model A C B D P PF2M705/710/725/750W -01(-L) 86.2 11 14 18.2 2.8 depth 8.4 PF2M705/710/725/750W -N1(-L) 86.2 12 14 18.2 2.8 depth 8.4 8 PF2M705/710/725/750W -F1(-L) 86.2 13 14 18.2 2.8 depth 8.4 2 x P PF2M711/721W-02(-L) 88 13 17 20 2.8 depth 6.2 PF2M711/721W-N2(-L) 88 13 17 20 2.8 depth 6.2 PF2M711/721W-F2(-L) 88 17 21 20 2.8

OMU0023

INP = 1 indicates that the target location has been reached. 12 Repeat steps 9-10 After settling time, the operation of step data No.20 is 13 completed. 14 01 10 9103 0002 04 0 2710 01 10 9103 0002 Step Data No. 20 target position changed to 10 mm.

0.4

15 16 17 18 19 20 21 22 23 24 VF Station 1 Station 2 15 14 3 2 1 VP4 VV5Q21 17 16 25 24 13 Station 3 23 18 12 4 VQ 1/2 VQ 1/2 26 22 19 Station 4 11 5 21 20 10 9 8 7 6 Station 5 VQ 4/5 The total number of stations is tabulated starting from station one on the D-side.

Direct Operated Pilot Operated 2-Port Solenoid Valve Refer to pages 7, 9, 11, 25, 35, and 39 for details.

Body Material Stainless Steel, Brass 14 2 x 3.4 14 2 x 3.4 33 4 33 4 1/8 1/8 1 20 39 1 20 39 JSX20, 30 JSX20U, 30U The grommet type is only available for the JSX20 and 30. JSX20, 30 JSX20U, 30U The grommet type is only available for the JSX20 and 30.

Series KP/KPQ/KPG

1/8 1/4 19.5 17 7 12 M A L H Connection threads 8 M5 23 12 5 6 10 10 19.5 (R) 12 14 1/8 1/4 1/8 1/4 1/4 3/8 3/8 1/2 19.5 20 26.5 24.5 31.5 26.5 27.5 26 7 14 14 13 24 23 23 46 (R) Applicable tubing 8 18 26 21.5 14 10 29 41 24 17 19 22 M 46 58 25 L A 12 H Connection threads Reference dimension for R threads after installation Male Elbow: KPQL, KPGL Applicable tubing (M5) Effective area

Series KP/KPQ/KPG

1/8 1/4 19.5 17 7 12 M A L H Connection threads 8 M5 23 12 5 6 10 10 19.5 (R) 12 14 1/8 1/4 1/8 1/4 1/4 3/8 3/8 1/2 19.5 20 26.5 24.5 31.5 26.5 27.5 26 7 14 14 13 24 23 23 46 (R) Applicable tubing 8 18 26 21.5 14 10 29 41 24 17 19 22 M 46 58 25 L A 12 H Connection threads Reference dimension for R threads after installation Male Elbow: KPQL, KPGL Applicable tubing (M5) Effective area

HRX-OM-W060

140 160 180 Circulating fluid flow [L/min] Fig. 8-11 Pump capacity(HRL300-A-20 CH1) 8.5.4 HRL-A-20 CH2 0.6 0.5 Pressure [MPa] 0.4 Circulating fluid outlet 0.3 Usable flow rate range 0.2 Circulating fluid return 0.1 0.0 0 2 4 6 8 10 12 14 16 18 Circulating fluid flow[L/min] Fig. 8-12 Pump capacity(HRL100/200/300-A-20 CH2) 8.5 Pump Capacity HRL Series 8-10 HRX-OM-W060 Chapter 8 Documents 8.6

One-touch Fittings Series KQ2

Nylon Urethane KQ2W23-M5 30 8 31 10 M5 0.8 8 9.6 37 43 10 17.5 15.5 38 42 19 2.8 2.4 41 1 8 KQ2W23-01S KQ2W23-02S 10 14 3.2 1 4 KQ2W04-M5 KQ2W04-01S 8 18 30 37.5 32 38.5 M5 0.8 11 3.0 3.0 8 10.4 1 8 4 16 4.0 4.0 23 14 10 10 1 4 KQ2W04-02S 43.5 42.5 38 11 26 KQ2W06-M5 KQ2W06-01S 30.5 40 33.5 42.5 M5 0.8 8 3 3 8 1 8 10 6 17 12.8 20 1 4 10 KQ2W06-02S 46 46.5 17 14 10.9 10.9 41 3 8 KQ2W06-03S