Escapements Series MIW/MIS ø8, ø12, ø20, ø25, ø32 1

2 5.7 7 6 12.5 14 4 8.5 18.6 1.4 2.2 M4 x 0.7 -X 2.8 M5 x 0.8 2.5 6 8 7 14 18 6 8 24 1.8 20Data 2.7 M8 x 1 10.5 12 4 12 34 26 2.2 9 22.5 10 2.7 M8 x 1 11 12 4 9 26 15 40 36 2.8 14 M12 x 1.25 13 17 6 12.4 33 20 49 41 3.4 27 10-11-15 15 Series MIW/MIS Mounting of Auto Switch When mounting an auto switch, insert the switch in the switch mounting groove on the escapement from the direction

Escapements Series MIW/MIS ø8, ø12, ø20, ø25, ø32 1

2 5.7 7 6 12.5 4 8.5 18.6 14 1.4 2.2 M4 x 0.7 -X 2.8 M5 x 0.8 2.5 6 8 7 14 6 8 24 18 1.8 20Data 2.7 M8 x 1 12 4 12 10.5 34 26 2.2 9 22.5 10 2.7 M8 x 1 12 4 9 26 15 11 40 36 2.8 14 M12 x 1.25 17 6 12.4 33 20 13 49 41 3.4 27 10-11-15 15 Series MIW/MIS Mounting of Auto Switch When mounting an auto switch, insert the switch in the switch mounting groove on the escapement from the direction

CP95

11 16 10 72 94 50 36 5 20 45 16 50 CS1 100 110 60 115 12 11 20 10 55 20 89 41 5 25 113 60 C76 Mounting style (E) C85 C95 CP95 NCM NCA D-X 20Bore size (mm) d2 CK S5 K1 K2 l3 G1 l1 G2 EM G3 CA H6 R1 Data 32 11 10 38 51 10 21 18 26 31 32 10 6.6 7 8 40 11 12 41 54 10 24 22 28 35 36 11 6.6 9 10 50 15 12 50 65 12 33 30 32 45 45 12 9 11 12 63 15 16 52 67 14 37 35 40 50 50 15 9 11 12 80 18 16 66

Compact Cylinder with Air Cushion

40 50 Stroke range (mm) 20 to 100 44 37 13 16 45 18.5 M8 x 1.25 60 4.5 14 7 34 5.5 20 to 100 51 44 13 16 52 20 M8 x 1.25 69 5 14 7 40 5.5 30 to 100 57.5 49.5 15 20 64 28.5 M10 x 1.5 86 7 17 8 50 6.6 mm OB P Q RB S U Z Bore size (mm) 32 40 50 9 Rc 1/8 23 7 58.5 31.5 14 9 Rc 1/8 28 7 66 35 14 11 Rc 1/4 31.5 8 80 41 19 Refer to page 11 for details on rod end nut and accessories.

CP95

11 16 10 72 94 50 36 5 20 45 16 50 CS1 100 110 60 115 12 11 20 10 55 20 89 41 5 25 113 60 C76 Mounting style (E) C85 C95 CP95 NCM NCA D-X 20Bore size (mm) d2 CK S5 K1 K2 l3 G1 l1 G2 EM G3 CA H6 R1 Data 32 11 10 38 51 10 21 18 26 31 32 10 6.6 7 8 40 11 12 41 54 10 24 22 28 35 36 11 6.6 9 10 50 15 12 50 65 12 33 30 32 45 45 12 9 11 12 63 15 16 52 67 14 37 35 40 50 50 15 9 11 12 80 18 16 66

Series CQS Compact Cylinder Compact Type ø12, ø16, ø20, ø25

Metric Long stroke Standard stroke Without auto switch With auto switch A Long stroke L1 24 25.5 28.5 32.5 Long stroke (mm) Standard stroke (mm) Standard C Bore (mm) Bore (mm) With/Without auto switch A C1 H1 X Inch L1 14 15.5 18.5 22.5 B 22 22 F 5 5 5.5 5.5 L 3.5 3.5 4.5 5 A B 32 32 41 44 F 7.5 7.5 9 11 L B 17 17 F 5 5 5.5 5.5 L 3.5 3.5 4.5 5 Metric 6 8 7 12 12 16 20 25 12 16 20 25 9 10

JXCx-OMT0061CN

->/P.32 10.1 ->/P.15 3.4 ->/P.47 11. 5 (CN1: EMG ->/P.12 3. ) SV1.00 INP ON (INP INP OFF PLC ) ->/P.32 10.1 ->/P.12 3. PLC (PLC) 15ms30ms ->/P.55 12.4 91 - () ->/P.47 11. ->/P.12 3. ->/P.19 5. ->/P.32 10.1 ->/P.12 3. PLC 5 (PLC) 15ms30ms ->/P.55 12.4 () () (LED() ->/P.13 3.2 ) ->/P.47 11. ->/P.47 11. ->/P.47 11. ->/P.12 3. (CN1: EMG ->/P.12 3. ) 92 - 22. 10.

C95Series

I-B DA DB DL lou number II:, Imm) IDe OX D E DO (>"UN 'u, O S DH Z DDH9-: 32 164 10"" 36 18' 12 ' 45 202 ". . . , 46 31 21 18 5 38 26 51 6.5 6.6 11 7 41 28 54 6.5 6.6 11 9 ' 50 32 65 7.5 9 15 11 52 35 24 22 5.5 65 45 33 30 6 50 222 16' '" 52 40 67 7.5 9 15 11 66 50 86 10 11 16 12.5 ' 75 50 37 35 6.5 95 60 47 40 6,5 63 250 16 ' ." 76 60 96 10 11 18 1 3 5 71 70 20 114 70 55 50 7.5 ~, Rotating

0.4

Station 9 SQ SOL.B SOL.A 23 10 Station 10 SOL.A VFS SOL.B 24 11 Station 11 SOL.B SOL.A 25 12 Station 12 VFR VV5Q21 COM. () Orange Red (+) 13 VQ7 Positive COM spec. Negative COM spec. The total number of stations is tabulated starting from station one on the D-side. Note) When using the negative common specifications, use valves for negative common. (Refer to page 419.)

ZQ-OM01401

) 36 (33) 66 0.5 59 (54) 52 (49) 41 (39) 79 0.1 0.2 4 0.3 40 (30) 37 (29) 31 (23) 54 2) 46 (37) 49 (44) 41 (36) 68 0.5 63 (57) 57 (51) 46 (43) 82 0.1 0.2 6 0.3 43 (34) 39 (30) 35 (28) 54 2) 49 (41) 53 (50) 47 (43) 68 0.5 67 (64) 61 (59) 54 (51) 81 1) ( ) 2) ZQ05A0.35MPaZQ07AZQ10A0.43MPaZQ000A0.4MPa 3) (PD) V PD [MPa] ZQ05A ZQ07A ZQ10A ZQ000A 0.05 11 10 8 16 0.15 22 20 17 32 3.2 0.25

RQ

3 19 11 50 40 41 42 48 44.5 47.5 43.5 18 8 18.5 8.5 15.5 5.5 23.5 13.5 63 50 47.5 48.5 54.5 51 54 50 18 13.5 18.5 14 15.5 11 23.5 19 80 63 57.5 58.5 64.5 61 64 60 20.5 16.5 21 17 18 14 26 22 100 80 67.5 68.5 74.5 71 74 70 25.5 20 26 20.5 23 17.5 31 25.5 100 32 26 32.5 26.5 29.5 23.5 37.5 31.5 7-7-17 17 Series RQ Operation Range 100 Switch model Bore size (mm) 25 32 40 50 63 80 20 D-A7, A80

Environment

Note 11) The maximum instantaneous power consumption (including the controller) is for when the actuator is operating. This value can be used for the selection of the power supply. Note 12) With lock only Note 13) For an actuator with lock, add the power consumption for the lock.

Prevents Micro-Bubbles

VX2 VX How to Order Manifold Base Courtesy of Steven Engineering, Inc.-230 Ryan Way, South San Francisco, CA 94080-6370-Main Office: (650) 588-9200-Outside Local Area: (800) 258-9200-www.stevenengineering.com VX3 LLC 2 A 02 11 S VXA Tubing size for P port and R side connection Body class Tubing size for P port and L side connection VN Symbol 00 06 07 08 10 11 10 11 12 13 12 13 19 12 13 19

3 Port Solenoid Valve Metal Seal/Rubber Seal, Base Mounted Series VQZ100/200/300 21

VQZ115-M VQ110-L 4-14-41

Table of Contents

SET-ON 10 Start readiness signal CN2 24V DC + COM 1 COM 11 NO. 0 Indicates operation in progress when ON. ON when program is being executed and when returning to the home position. 2 BUSY 11 Operating signal NO. 1 12 NO. 2 3 When this signal is OFF, an alarm is being generated for the actuator/controller.

Speed Controller with One-touch Fitting Stainless Steel Type Elbow Type/Universal Type AS-FG Series Push-lock type

AS22l1FG-02-03(S)A 5/32" 8.2 AS22l1FG-02-07(S)A 1/4" 11.2 23.4 32.7 (32.8) 18 (18) AS22l1FG-02-09(S)A 5/16" 13.2 23.9 33.2 (33.3) 14.2 18 (19) AS22l1FG-02-11(S)A 3/8" 15.5 26.4 35.7 (35.8) 15.6 19 (20) AS32l1FG-02-07(S)A 1/4" 1/4 19 11.2 16.6 21.8 32.1 36.4 50 48.4 44.5 42.9 13.3 40 (40) AS32l1FG-02-09(S)A 5/16" 13.2 22.7 33 14.2 41 (41) AS32l1FG-02-11(S)A 3/8" 15.5 26.7 37 35.9 15.6 AS32l1FG

Integrated Controller

Weight [g] Auto switch model D-M9NE(V) D-M9PE(V) D-M9BE(V) 0.5 m (Nil) 8 7 1 m (M)1 14 13 Lead wire length 3 m (L) 41 38 5 m (Z)1 68 63 1 The 1 m and 5 m options are produced upon receipt of order.

Series MXQ 13- ø6, ø8, ø12, ø16, ø20, ø25 22- Air Slide Table

This could cause an auto switch malfunction. 11 11 Vacuum suction port M5 x 0.8 N x M5 x 0.8 thread depth 6 Note 1) Note 2) Extension end adjuster 36.5 (Extension end adjuster) 5.5 11 5H9 ( ) depth 5 +0.030 0 Retraction end adjuster 6 12.5 (Extension end adjuster) 24.5 28 58 1 24 3.5 49 29 24.5 14.5 5H9 ( ) depth 5 +0.030 0 F 6.5 4 x M5 x 0.8 thread depth 7 2 N 1 x F 14 41 3 x M6 x 1 thread

NVZ1000//3000/5000 4,5 Port Solenoid Valve/Rubber Seal Type

, 42, 43): DXT192-40-1TA Interface regulator (only for type 41, 42, 43): NARBZ3000-00-P Typ 20 NVV5Z3-2O-@1-OOr Stations a otl?

CLK1

2-M6 thread depth 11 15 15 35 18 15 2-M6 thread depth 11 2-M6 thread depth 11 20 20 A 17 17 40 A 20 20 15 45 60 25 45 60 A Applicable clamp cylinder A Applicable clamp cylinder Part no.