Cylinder with Lock Series CNG

25 2 104 10 (13) 26 7 8 47 to 300 301 to 800 58.5 12 301 to 800 (mm) Bore size (mm) 20 25 32 40 P J K KA MM NA PG PH PL S TA TB TC WA WB WH WW W XA XB M5 x 0.8 141 (149) 88 5.5 M4 x 0.7 depth 7 5 6 M8 x 1.25 24 M5 x 0.8 21.5 2 65 11 11 15 (16) 23 30 3 12 M6 x 0.75 151 (159) 98 6 M5 x 0.8 depth 7.5 5.5 8 M10 x 1.25 29 M5 x 0.8 26.5 2.5 73 11 11 15 (16) 25 30 3 12 M8 x 1.0 154 (162) 99 6 M5

3 Port Solenoid Valve Metal Seal/Rubber Seal, Body Ported Series VQZ100/200/300 1

(Inch) N1 N3 N7 N9 N11 M5 02 Symbol M5 thread 1/8" 5/32" 1/4" 5/16" 3/8" thread 1 4 Pressure Specifications VQZ100 2(A) port (2) VQZ100 VQZ200/300 Series VQZ200 Metal seal VQZ300 0.1 to 0.7 MPa (1) External pilot pressure range Note) Metric size of One-touch fittings (C) are also available.

Series VC, Direct Operated, 2 Port Solenoid Valve for Water, Series VCW

36.5 13.5 15 32 25 23 M5 24 59 46 57 60 54.5 48.5 101 57 68 1/2 22 45 89 41 11 17 36 22.5 23 M5 26 64.5 48 62.5 62 60 50.5 103 62.5 70 1/4, 3/8 VCW41 30 50 93.5 41 13.5 17 36 25 23 M5 26 66.5 48 64.5 62 62 50.5 103 64.5 70 1/2 35 60 101 41 17.5 17 36 30 28.2 M5 26 70 48 68 62 65.5 50.5 103 68 70 3/4 4 Direct Operated 2Port for Water Series VCW Dimensions (N.O.)

Compact Guide Cylinder

175, 200 50.5 75.5 50.5 52.5 39 41 10 10 0 25 23 9 2.5 25 50.5 77 50.5 53.5 37.5 40.5 10 14 0 26.5 23.5 10 3 Bore size [mm] G GA GB GC H HA J K L MM ML NN OA OB OL P PA PB PW Q 100 st or less Over 100 st Nil TN TF 12 25 10 6 7 10 54 M5 12.5 12.5 17 M4 x 0.7 10 M4 x 0.7 4.3 8 4.5 M5 x 0.8 11.5 8 16 14 16 29 12.5 5.5 7.5 11.5 59 M3.5 14.5 14.5 20 M5 x 0.8 11 M5 x 0.8 4.3 8 4.5 M5 x 0.8 11.5

CM2

20 33.5 5.5 M10 X 1.25 1to450 19.5 17 32 37 6 8 M26 X 1.5 120 40 10 15 30 62 22 13 41 7 4 60 25 75 8 45 26 34.5 37.5 5.5 M10 X 1.25 1to450 19.5 17 32 37 6 8 M26 X 1.5 122 40 12 15 64 22 13 41 7 4 60 32 75 8 45 26 21 47.3 7 M14 X 1.5 21.5 M32 X 2 42.5 46.5 1to500 22 41 8 10 154 52 14 88 24 16 45 7 5 66 40 36 82 11 50 32 With rod boot (mm) ZZ Symbol h l Stroke f e Bore 1 to 50 1 to 50 1

TABLE OF CONTENTS

50 50 40 150 125 75 45 50 30 25 1/32 3/64 1/16 1/16 3/32 1/16 3/32 1/32 3/64 1/16 3/32 3/32 1/8 1/8 .020 .048 .075 .075 .156 .075 .156 .022 .055 .075 .156 .156 .230 .230 ** MODEL E55 3 Way Directional Control E55GG8XCCM E55HH8XCCM E55JJ8XCCM E55KJ8XCCM E55KK8XCCM E55NJ8XCCM E55NK8XCCM 300 200 100 75 75 65 45 200 100 50 25 40 20 20 1/32* 3/64* 1/16* 3/32* 3/32* 1/8* 1/8* 1/32 3/64 1/16 1/16

Escapements Series MIW/MIS ø8, ø12, ø20, ø25, ø32 1

Supply port PD (mm) A B C EA EB FA FB FD FE FF FG GA GB GD 83 111 155 200 256 D FC GC 6 8 11 15 Model MIW8-8 MIW12-12 MIW20-20 MIW25-25 MIW32-32 M3 x 0.5 M3 x 0.5 M5 x 0.8 M6 x 1 22 34 43.5 58 73 28 37 54 71 80 9 12.5 16.5 20 24.5 2.6 3.3 5.1 6.8 8.6 4 4.5 6.5 10 12.5 7 9.5 12.5 17 22 16 21 29.5 40 47 15 19 25.5 37 51 34 44 64 84 95 18 23 28.5 41 55 57 26 35 48.5 66 87 6 (Effective depth

Escapements Series MIW/MIS ø8, ø12, ø20, ø25, ø32 1

Supply port PD (mm) D FC GC 6 8 11 15 A B C EA EB FA FB FD FE FF FG GA GB GD 83 111 155 200 256 Model MIW8-8 MIW12-12 MIW20-20 MIW25-25 MIW32-32 M3 x 0.5 M3 x 0.5 M5 x 0.8 M6 x 1 22 34 43.5 58 73 2.6 3.3 5.1 6.8 8.6 9 12.5 16.5 20 24.5 28 37 54 71 80 4 4.5 6.5 10 12.5 7 9.5 12.5 17 22 16 21 29.5 40 47 15 19 25.5 37 51 34 44 64 84 95 18 23 28.5 41 55 57 26 35 48.5 66 87 6 (Effective depth

SMC Pneumatic Clean Series

14 C 130 121 119 114 ZZ 14 10 8 6 KA 78 79 77 77 S 16 12 10 8 D 25 18 14 12 E 2 2 2 2 F 40 32 25 20 30 22 22 18 23 0<23> 0 0 10 0 0 0 M5 x 0.8 depth 7.5 M5 x 0.8 depth 8 M14 x 1.5 M6 x 1 depth 12 12 12 1/4 1/4 3/8 1/2 58 58 27 27 32 41 14<12> 14<12> 10 10 10 10 23 20 20 20 11 11 58 72 20<17> 20<17> 16 16 71 71 13 16 89 110 7 7 10 10 55 69 80 100 10 10 10 10 32 38 50 60 150 150 182 182 18

Compact Cylinder with Solenoid Valve/

C Example) Bolt M5 x 45L: 4 pcs.

XM, XY

) (CF flange) A B K S M J H G A (mm) Model A 123 170 183 217 256 B 48 66 79 100 117 C 1 2 2 3 3 D 40 55 75 87 114 Fn 95 110 Fd 70 114 Fc 26 41 52 70 83 G 41 63 68 72 98 H J K P.C.D L1 6 x 6.6 8 x 8.4 L2 XMD-25 XMD-40 XMD-50 XMD-63 XMD-80 50 65 70 88 90 16 20 20 20 20 7.5 15 17.5 19.5 26.5 P.C.D 58.7 P.C.D 92.1 C D XYD/In-line type XLA G Fd XL C XLQ (K flange) XM XY XM XY J K H B

MRHQ

D20Sizes 10 and 16 updated!

CQSY/CQ2Y/CM2Y/CG1Y/CA2Y

16.5 10 17 19.5 2 22 14 8 40 12 38 12 6 5.5 M10 x 1.25 M5 x 0.8 depth 8 Up to 300 20 12 17 19.5 2 22 18 10 50 13 47 13 8 6 M14 x 1.5 M6 x 1 depth 12 Up to 300 26 19 16 27 2 30 25 14 58 14 58 14 11 7 M18 x 1.5 M8 x 1.25 depth 16 Up to 300 32 20 27 32 2 35 30 18 58 14 72 14 11 7 M18 x 1.5 M10 x 1.5 depth 16 Up to 300 38 20 27 32 2 35 32 18 71 20 89 20 13 10 M22 x 1.5 M10 x 1.5 depth 22 Up

CQSY/CQ2Y/CM2Y/CG1Y/CA2Y

M4 x 0.7 depth 7 5 M8 x 1.25 Up to 200 14 13 8 15.5 2 18 12 6 40 12 31 12 6 5.5 M10 x 1.25 M5 x 0.8 depth 7.5 Up to 300 16.5 17 10 19.5 2 22 14 8 40 12 38 12 6 5.5 M10 x 1.25 M5 x 0.8 depth 8 Up to 300 20 17 12 19.5 2 22 18 10 50 13 47 13 8 6 M14 x 1.5 M6 x 1 depth 12 Up to 300 26 19 16 27 2 30 25 14 58 14 58 14 11 7 M18 x 1.5 M8 x 1.25 depth 16 Up to 300 32 27 20 32 2 35 30 18 58 14 72 14

Series CG1-Z 10-/11- ø20, ø25, ø32, ø40, ø50, ø63, ø80, ø100 21-/22- Air Cylinder: Double acting, Single rod

200 201 to 1500 6 8 10 14 18 18 22 26 8 10 12 16 20 20 25 30 18 22 22 30 35 35 40 40 5 6 6 8 11 11 13 16 77 (85) 77 (85) 79 (87) 78 (87) 90 (102) 90 (102) 108 (122) 108 (122) 12 14 18 25 30 32 40 50 2 2 2 2 2 2 3 3 20 20 20 13 14 14 20 20 M5 x 0.8 depth 7.5 M5 x 0.8 depth 8 M6 x 1 depth 12 Up to 300 301 to 1500 M8 x 1.25 depth 16 M10 x 1.5 depth 16 M10 x 1.5 depth 22 M12 x 1.75 depth 22

MY2

C D A B (mm) D-A9, D-A9V (mm) D-F9, D-F9V (mm) D-F9W, D-F9WV A B A B A B Bore size 16 25 32 Operating range Bore size 16 25 40 Operating range Bore size 16 25 40 Operating range 54 106 58 102 57 103 54 156 58 152 57 153 11 8.5 8.5 85 245 89 241 88 242 (mm) (mm) (mm) C D C D C D Bore size 16 25 32 Operating range Bore size 16 25 32 Operating range Bore size 16 25 32 Operating range 27 133

LEC-OM02904

ON E6,E7 2 ON 1 1 2 16 3. (1) 1 2 16 4 6 4 (2) SW1 Ab AC Ad Ab A b A b . A C A d A E A F A H A A (1) b # # Ready-off Ready-off (1) d # # ON ON (1) C # # OFF OFF (2) * * No.No.81 8 8 8 CPU CPU (3) 0 0. b JOGDO (1) # #. b (3) # #. d # #. C 1. ##0016 ## 00 01 1 02 2 03 3 04 4 05 5 06 6 07 7 08 8 09 9 10 10 11 11 12 12 13 13 14 14 15 15 16 16 2. **No. 3.

VCW

, 3/8 VCW31 30 50 86 36.5 13.5 15 32 25 23 M5 8 24 59 46 57 60 54.5 48.5 101 57 68 104 1/2 22 45 90 41 11 17 36 22.5 23 M5 8 26 64.5 48 62.5 62 60 50.5 103 62.5 70 107 1/4, 3/8 VCW41 30 50 94 41 13.5 17 36 25 23 M5 8 26 66.5 48 64.5 62 62 50.5 103 64.5 70 111.5 1/2 35 60 102 41 17.5 17 36 30 28.2 M5 8 26 70 48 68 62 65.5 50.5 103 68 70 119 3/4 17-2-55 8 Series VCW Dimensions (N.O.)

VK3000

stations Applicable blanking plate assembly VK3000-7-1A 01 1 station Rc Q CE-compliant Nil CE-compliant F N T G 20 20 stations NPT NPTF A port: M5 x 0.8 B port: M5 x 0.8 Note) Applicable only for DIN terminal type How to Order Type 41: Base mounted (A, B port side ported) Applicable solenoid valve VK3140-(-Q) VK334-(-Q) Type VK3140 VV5K3 M5 05 41 Type VK334 Solenoid direction Valve stations

Thermo-chiller

water temperature 90F (32C) 16 16 Cooling capacity [kW] Cooling capacity [kW] 14 14 12 12 10 10 8 8 6 Facility water temperature 104F (40C) 6 Facility water temperature 104F (40C) 4 4 0 2 0 2 41 [5] 50 [10] 59 [15] 68 [20] 77 [25] 86 [30] 95 [35] 41 [5] 50 [10] 59 [15] 68 [20] 77 [25] 86 [30] 95 [35] Circulating fluid temperature F [C] Circulating fluid temperature F [C] 11 Series HRS100