240

8 4 x M5 x 0.8 Depth 11 2 x M5 x 0.8 Cylinder port MXJ 4 x M5 x 0.8 Depth 8 6.5 34 6 MXP 24.5 34 63.5 64.5 MXY MTS 32 7 32 7 34 6 6 NS 52.5 + Stroke 68 + Stroke 32 20 11 15.5 20 15 10 + Stroke 15 4 x M5 x 0.8 Depth 8 20 Note 1) Refer to Specific Product Precautions for mounting of the Compact Slide and a workpiece.

Environment

2 Vertical 18 Max. instantaneous power consumption [W] Note 12) 1275 11LEFS 11LEJS Type Note 13) Non-magnetizing lock Holding force [N] 313 607 1146 2006 313 607 1146 Power consumption [W] at 20C Note 14) 7.9 Rated voltage [V] 24 VDC 0 10% Lock unit specifications 25ALEC Note 1) Please consult with SMC for non-standard strokes as they are produced as special orders.

MLU

I-MU02 I-MU03 I-MU04 I-MU05 CNS E1 16 18 20 28 A1 10.5 12 14 18 MM M10 x 1.25 M12 x 1.25 M14 x 1.5 M18 x 1.5 A1 10.5 12 14 18 L1 27 31 36 46 E1 14 18 20 28 L1 27 31 36 46 MM M10 x 1.25 M12 x 1.25 M14 x 1.5 M18 x 1.5 NDH10 8 10 10 14 Size 25 32 40 50 Size 25 32 40 50 +0.058 0 +0.058 0 +0.058 0 +0.070 0 CLS CLQ Applicable pin no.

MHK2

type 18.6 2-M5 x 0.8 thread depth 8 (Mounting thread) 24 4H9 depth 4 +0.030 0 21H9 depth 1.5 +0.052 0 2-M5 x 0.8 thread depth 10 (Mounting thread) 24-M5 x 0.8 thread depth 10 (Mounting thread) Bottom hole 4.3 through (Mounting hole) 0 0.1 8 Open 34 +1.2 0 5 13.5 16 0.02 70 68 46 30 32 0 0.2 32 Closed 16 4H9 depth 4 +0.030 0 18 44.5 20 27.6 0.05 73.5 Auto Switch Mounting Groove Dimensions

MHK2

x 0.8 (Finger closing port) MHC Auto switch mounting groove (2 positions) Adjustment needle for finger speed MHT 13.6 S 0 13 13 4 MHY 8 0 0.05 4 7 Note) For single acting, one port is used as a breather port. 7 MHW 18 2.3 M5 x 0.8 (Finger opening port) MRHQ Misc.

Wedge Cam Operation Provides

/Long stroke model 18.6 2-M5 X 0.8 thread depth 8 (Mounting thread) 24 4H9 depth1.5 +0.030 0 21H9 depth 1.5 +0.052 0 2-M5 X 0.8 thread depth 10 (Mounting thread) 4-M5 X 0.8 thread depth 10 (Mounting thread) Bottom hole 4.3 through (Mounting hole) 0 -0.1 8 Open 34 +1.2 0 5 13.5 16 0.02 70 68 46 30 32 0 -0.2 Closed 16 32 4H9 depth 4 +0.030 0 18 44.5 20 27.6 0.05 73.5 100 Groove position for

3-Screen Display High-Precision Digital Pressure Switch ∗1 ® New New The ∗1  Excluding the Z/ISE20B-L compatible type has been added to the 20B series.

Lightweight: Max. 21 g lighter (When an M5 female thread is used.) ZSE20(F)/ ISE20 ZSE30A(F)/ ISE30A 17.5 mm (20/20A) ZSE20(F)/ISE20 M5 female thread ZSE30A(F)/ISE30A M5 female thread Improved Installability Enclosure Grommet type Connector type Wiring is possible after piping has been connected.

Dual Rod Cylinder: Basic Type Series CXS ø6, ø10, ø15, ø20, ø25, ø32 1

counterbore depth 4.4 2-M5 x 0.8 4-M4 x 0.7 2-M4 x 0.7 thread depth 6 M5 x 0.8 x 10l CXS15 9 10 58 20 56 18 2-M5 x 0.8 45 25 5 30 8 48 10 10 M6 x 1.0 x 5l 38.5 thread depth 8 thread depth 5 Dimensions by Stroke (mm) Symbol SS Z ZZ Stroke 10, 15 20, 25 30, 35, 40, 45, 50 60, 70, 75 90, 100 25 30 20 15 100 80 10 35 40 45 50 60 70 75 80 90 40 45 35 30 25 20 15 100 10 50 60 70 75 80 90 Model

REC

24 21 22 41 14 32 16 12.5 50 8 10 56 7 26.5 51 181 247 REC L/Axial foot G H F G Width across flats B2 2-Rc(PT)P K A lNA F AL 2-NN Relieving port M5 X 0.8 Standard port H1 H2 I Width across flats B1 Relieving port D C B 4-LD LH MM 2-4 3.2 N N X X Y S+Stroke Y LX Z LS+Stroke LZ ZZ+Stroke (mm) A AL B B1 B2 C D F G H H1 H2 I K LD LH LS LX LZ MM N NA Bore size Stroke range 20 M8 X 1.25 18 15.5

REC

24 21 22 41 14 32 16 12.5 50 8 10 56.2 7 26.5 51 1/4 181 247 Axial foot style: RECL G H Width across flats B2 F G K A NA 2-RcP F AL Standard port 2-NN Pluged (M5 x 0.8) H1 H2 Width across flats B1 I D C B 4-LD LH MM 2-4 3.2 N N X X Y S + Stroke Y LX Z LS + Stroke LZ ZZ + Stroke (mm) A AL B B1 B2 C D F G H H1 H2 I K LD LH LS LX LZ MM N NA Bore (mm) Stroke range 20 M8 x 1.25 Up to 700 18 15.5

Series IDG

Note 2) When symbols C or D are specified, an auto drain with a part number shown on page 18 is mounted.

MY1

M5 x 0.8 (Port) M5 x 0.8 (Hexagon socket head plug) PP TT UU GB TT UU G NW GB 10 N A Z + Stroke M5 x 0.8 (Port) M5 x 0.8 (Hexagon socket head plug) (WW) QQ M5 x 0.8 (Hexagon socket head plug) M5 x 0.8 (Port) (WW) GB PP XX XX G Centralized piping Centralized piping 2-M5 x 0.8 (Hexagon socket head plug) 2-M5 x 0.8 (Hexagon socket head plug) VV VV 1.1 S WX 8.4 2-4 Bottom port (Applicable O-ring

Slide Tables MX Series

MXQ 6 MXQ 8 MXQ12 MXQ16 MXQ20 MXQ25 2.1{21.4} 2.1{21.4} 4.4{44.9} 7.4{75.5} 7.4{75.5} 18{180} 8 8 10 12 12 16 M4 x 0.7 M4 x 0.7 M5 x 0.8 M6 x 1 M6 x 1 M8 x 1.25 2. Side through hole mounting These conditions could lead to malfunctions.

Vacuum Pad: Ball Joint Type, Series ZPT/ZPR

Standard Specifications Weight Table (g) Pad diameter (mm) Vacuum entry (One-Touch fitting) Lateral Vacuum entry direction Mounting female thread 6 tube 4 tube 8 tube Connection Vacuum entry Connection M5 x 0.8 19 18 Female thread One-Touch fitting 10 to 16 M5 x 0.8 22 23 4 tube M5 x 0.8 20 to 32 10 to 16 M8 x 1.25 21 22 6 tube Pad diameter M5 x 0.8 58 60 6 tube M5 x 0.8 40, 50 (mm) M8

Self-seal Fittings Series KC

L M Nylon Urethane M5 0.8 KCH04-M5 KCH04-01S KCH06-M5 KCH06-01S KCH06-02S KCH08-01S KCH08-02S KCH08-03S KCH10-02S KCH10-03S KCH12-03S KCH12-04S 2.1 2.6 2.4 18 2.1 2.6 2.4 27.3 22.1 28.9 33.4 22.9 38.4 39.7 27.5 44.5 45 47.7 33.6 9.8 30.8 26.1 32.4 37.4 28.9 42.4 45.7 34 50.5 51.5 54.2 41.6 4 8 1 8 10 11.8 12 14 M5 0.8 10 16 14 20 27 25 34 43 48 41 19.5 1 8 1 4 1 8 1 4 3 8 1 4 3 8 3 8 1 2

MIW/MIS

Supply port 2-M5 x 0.8 FC FA FE FH GD GC GB FG FF EB EA D FB B MIS12-10 A C FD GA Model 72 92 112 86.5 106.5 126.5 33 43 53 38.5 48.5 58.5 48 38 28 165 135 105 18 185 155 125 MIS12-30 MIS12-20 19 9.5 6 (Effective depth 3) 4.5 8 -0.1 0 8 -0.1 0 10 M3 x 0.5 5 3.3 23 26 21 MIS20-30 MIS20-20 MIS20-10 52 42 32 11-0.1 0 11-0.1 0 29.5 35 25.5 13 12.5 10 (Effective depth 4) M5 x 0.8 6.5 28.5 7 5.1

Precision Air Slide Table Series MXP ø6, ø10, ø12, ø16, (ø8: new addition, see 8-8-23 ) 1

diameter 5.1 19 6.5 W 32 0.05 46 0.5 0.05 8 B D Piping port 2-M5 x 0.8 47 13 J Mounting base side B D 16.5 14.5 Across AA MXP16-30 Without magnet and switch rail 2-M3 x 0.5, depth 3.5 For rail mounting 8 2-M2 x 0.4, depth 3 For magnet mounting 8.5 10.7 6-M5 x 0.8, depth 7 20 20 L (mm) Model G M W H S Z J V K L MXP16-20 18 40 65 58 20 102 93 82 40 36 MXP16-30 28 56 75 70 30 128 119 108 50

MXH Series Compact Slide

4 30 40 45 72 6 20 20 50 55 25 25 82 6 60 30 92 60 30 6 33 MXH Series Compact Slide Dimensions 10 LT (mm) 11 19 11 LA LB J-M4 x 0.7 Depth 8 3-M5 x 0.8 through Bottom hole dia. 4.3 6-7.5 counter bore depth 4.4 Plug for port (hexagon socket head set screw) 4-M5 x 0.8 x 4l 2-M5 x 0.8 Guide rail width 7 4-M4 x 0.7 Depth 7.5 4-M4 x 0.7 Depth 6 23 5 13 8 18 21.5 46 47 20 23 5 20 6.5 6.5 5 NS 12.5

Compact Cylinder

x 0.8 8 40 M5 x 0.8 8 Minimum lead wire bending radius 10 Auto switch F Q H thread effective depth C 4 x N through 2 x M5 x 0.8 (Port size) I D E M Z A + Stroke B + Stroke L W G M K J 25 to 40 Minimum lead wire bending radius 10 Auto switch H thread effective depth C 4 x N through F Q 2 x M5 x 0.8 (Port size) I D E M Z A + Stroke B + Stroke L W E M K J Standard [mm] Bore size Stroke range

ARM10/11

(for L and R sides) AXT100-DR-9 123 AXT100-DR-11 148 AXT100-DR-13 173 AXT100-DR-16 210.5 AXT100-DR-18 235.5 AXT100-DR-20 260.5 AXT100-DR-22 285.5 53 AXT100-DR-25 323 33.5 AXT100-DR-27 348 18 14 OUT IN IN OUT IN AXT100-DR-29 373 ARM11AA1-12-A Handle position: Top/Common supply block with pressure switch L2 L2-10.5 L1=(28 x n)+56 18 20 28 28 5.3 56 5.5 84 0.1 0.3 0.2 0.4 0.5 0.6 SMC MPa SMC