air-filter-e

, 100 Fiber 65 x L250 1, 5, 10, 20 5, 10, 20, 40 74, 105 Micromesh 65 x L250 Refer to pages 256 and 257 for the replacement element type.

Air Preparation Equipment

, 100 Fiber 65 x L250 1, 5, 10, 20 5, 10, 20, 40 74, 105 Micromesh 65 x L250 Refer to pages 256 and 257 for the replacement element type.

VCC

00 02 04 No 2 port valves used 2 pcs.

PF2A/PF2W

Note 6) The flow switch is comformed to CE mark. 16-11-17 14 Series PF2W How to Order Remote type Sensor unit PF2W5 20 03 Flow rate range 0.5 to 4 l/min 2 to 16 l/min 5 to 40 l/min 10 to 100 l/min Nil 1 2 04 20 40 11 Output specifications Output for display unit (sensor output) only Output for display unit + Analog output (1 to 5V) Output for display unit + Analog output (4 to 20 mA) Thread

Vacuum Ejector Box Type (Built-in Silencer)/Body Ported Type Series ZH 1

type: White color L type: Black color (Mounting hole) B C D E F G H Model A 3 8 Rc3 8 Rc3 8 Rc3 8 ZH18DS-03-03-03 ZH18DL-03-03-03 ZH20DS-03-04-04 ZH20DL-03-04-04 Rc 133 52.45 42 19 3.5 19 20.95 20.95 133 52.45 42 19 3.5 19 151.1 60.95 47.7 19 3.5 24 26.75 151.1 60.95 47.7 19 3.5 24 26.75 I J K L M N O Model 3 8 Rc3 8 Rc3 8 Rc1 2 Rc1 2 ZH18DS-03-03-03 ZH18DL-03-03-03 ZH20DS-03-04-04 ZH20DL

3 Port Air Operated Valve

Applicable series 1/4 3/8 1/2 VTA 02 03 04 VPA300 VPA500 VPA700 2 stations VGA 20 20 stations VPA VPA VPA3 VV3PA 3 3 42 04 02 Type 42/Individual exhaust Series 3 5 7 Thread type VPA300 VPA500 VPA700 Nil F N T Rc G NPT NPTF Port size Stations 02 Symbol Port size Applicable series 1/4 3/8 1/2 02 03 04 VPA300 VPA500 VPA700 2 stations 20 20 stations Manifold Option Description Part no.

Speed Controller with Indicator In-line Brass Stainless steel Electroless nickel plated In-line Type “Made to Order” “Made to Order” section has been added. Pages 3, 8 section has been added. ¡Lubricant: Vaseline -X12 The numerical indication of ¡Greas

AS1002FS-23 3.2 8.4 6.7 9.5 3.3 5.5 9.4 10 36.6 5.1 11.8 36.4 33.9 11 15.4 8.8 10.1 13.5 13.6 15.1 5.5 9.6 5.2 AS1002FS-04 4 9.3 7.7 10 37.6 5.5 AS1002FS-06 6 11.6 9.7 12 40.1 6.1 12.8 37.4 34.9 12.3 6.6 AS2002FS-04 4 9.3 7.7 10 3.3 5.5 12 12 41.3 6.3 13.4 44.5 43 12.6 17 10.5 12.3 13.5 20 21.5 6.5 15 9.5 AS2002FS-06 6 11.6 9.7 12 43.1 10.4 AS2052FS-06 6 12.8 11.5 4.3 7.8 13 16 54.2 7.6

Digital Flow Switches

Note 6) The flow switch is comformed to CE mark. 12 Series PF2W How to Order Remote Type Sensor Unit PF2W5 20 03 Flow rate range 0.5 to 4l/min 2 to 16l/min 5 to 40l/min 10 to 100l/min Nil 1 2 04 20 40 11 Output specification Output for display unit (sensor output) only Output for display unit + Analog output (1 to 5V) Output for display unit + Analog output (4 to 20mA) Thread type Wiring

Fluoropolymer Piping Equipment

LQ3T2A-R1 1/4" 1/8" 1/4" 4 17 16 10 9 17 16 6 12 16 11 16 34.5 33.5 30.5 29.5 34.5 33.5 20 14 20 2 LQ3T2A-R5 1/4" 1/8" 17 16 10 9 16 11 34.5 33.5 30.5 29.5 20 14 LQ3T3A-R1 20 25 4 LQ3T3A-R2 1/8" 3/8" 10 9 11 33.5 32.5 14 2 LQ3T3A-R5 3/8" 1/4" 22.5 19.5 17 16 21 16 47.5 44.5 38 37 25 20 4 LQ3T3A-R7 1/4" 1/4" 17 16 16 38 37 20 LQ3T3A-R9 1/4" 3/8" 1/4" 17 16 22.5 19.5 16 21 38 37 47.5 44.5 20

Digital Flow Switches, Series PF2A, Series PF2W

Note 6) The flow switch is comformed to CE mark. 12 Series PF2W How to Order Remote Type Sensor Unit PF2W5 20 03 Flow rate range 0.5 to 4l/min 2 to 16l/min 5 to 40l/min 10 to 100l/min Nil 1 2 04 20 40 11 Output specification Output for display unit (sensor output) only Output for display unit + Analog output (1 to 5V) Output for display unit + Analog output (4 to 20mA) Thread type Wiring

SX

-05DRS-C6 20 20 stations For special specifications, indicate separately by the manifold specification sheet.

ASR

MIN. 1 2 Note 1) d Note 2) L3 Note 3) L4 ASR430F-02-06S,-F20 ASR430F-02-08S,-F20 ASR430F-02-10S,-F20 ASR530F-02-06S,-F20 ASR530F-02-08S,-F20 ASR530F-02-10S,-F20 ASR530F-02-12S,-F20 ASR530F-03-06S,-F20 ASR530F-03-08S,-F20 ASR530F-03-10S,-F20 ASR530F-03-12S,-F20 ASR630F-03-10S,-F20 ASR630F-03-12S,-F20 ASR630F-04-10S,-F20 ASR630F-04-12S,-F20 89 111 17 34.9 57.7 6 63.7 21.5 20 17 R1/4 93 114

VQ5000

How to Order Sub-plates 04 P VQ5000 Electrical entry Port size Replacement of pilot valve assembly (Voltage) Refer to pages 2-6-40 to 2-6-41 for pilot valve assembly part numbers. Refer to page 2-6-3 for replacement method. 04 Rc 1/2 Porting specifications P S Plug-in conduit terminal Plug lead Note1) For bottom ported, port size is Rc 1/2.

AS-FPQ/AS-FPG

(mm) Applicable cylinder bore size (mm) 4 6 8 10 12 AS-FPG AS-FPQ Clean performance Resin: PP Metal: Brass (electroless nickel plated) Resin: PP Metal: Stainless steel 304 M5 x 0.8 6, 10, 16, 20 AS121FP-M5 R 1/8 20, 25, 32 AS221FP-01 R 1/4 20, 25, 32, 40 AS221FP-02 R 3/8 40, 50, 63 AS321FP-03 10-AS-F 10-AS-FG R 1/2 63, 80, 100 AS421FP-04 Resin: PBT, POM Metal: Brass (electroless nickel plated

AS-FPQ/AS-FPG

(mm) Applicable cylinder bore size (mm) 4 6 8 10 12 AS-FPG AS-FPQ Clean performance Resin: PP Metal: Brass (electroless nickel plated) Resin: PP Metal: Stainless steel (SUS304) M5 x 0.8 6, 10, 16, 20 AS121FP-M5 R 1/8 20, 25, 32 AS221FP-01 R 1/4 20, 25, 32, 40 AS221FP-02 R 3/8 40, 50, 63 AS321FP-03 10-AS-F 10-AS-FG R 1/2 63, 80, 100 AS421FP-04 Resin: PBT, POM Metal: Brass (electroless nickel

Speed Controller with One-touch Fitting for Clean Room Series AS-FPQ/AS-FPG

(mm) Applicable cylinder bore size (mm) 4 6 8 10 12 AS-FPG AS-FPQ Clean performance Resin: PP Metal: Brass (electroless nickel plated) Resin: PP Metal: Stainless steel (SUS304) M5 x 0.8 6, 10, 16, 20 AS121FP-M5 R 1/8 20, 25, 32 AS221FP-01 R 1/4 20, 25, 32, 40 AS221FP-02 R 3/8 40, 50, 63 AS321FP-03 10-AS-F 10-AS-FG R 1/2 63, 80, 100 AS421FP-04 Resin: PBT, POM Metal: Brass (electroless nickel

ATEX Compliant 5 Port Solenoid Valve Series 52-SY

Manifold Specifications for 20 Type Manifold Specifications for 20 Type Port size Flow characteristics SS5Y5-20 52-SY520 SS5Y7-20 Model 1 4/2 (P A/B) 4/2 5/3 (A/B EA/EB) 1,5,3 Model 52-SY720 4,2 Applicable valve (A,B) c[dm3/(sbar)] c[dm3/(sbar)] Cv b b Cv (P,EA,EB) Single base / B mounting Manifold style SS5Y5-20 1/4 C8 1.90 0.28 0.53 0.20 0.48 2.20 1 (SUP) / 3/5 (EXH) Common SUP / Common

Speed Controller: Standard Type Elbow Type (Metal Body) Series AS

Free flow Controlled flow Weight (g) Sonic conductance dm3/(sbar) Sonic conductance dm3/(sbar) Critical pressure ratio Critical pressure ratio Model Port size Flow rate (L/min (ANR)) Flow rate (L/min (ANR)) AS1000-M3 AS1000-M5 AS2000-01 AS2000-02 AS3000-02 AS3000-03 AS4000-02 AS4000-03 AS4000-04 AS5000-02 AS5000-03 AS5000-04 0.06 20 0.06 20 M3 x 0.5 4.7 0.15 0.22 80 0.25 90 M5 x 0.8 33 0.7

Smooth Cylinder/Low Speed Cylinder

40 12, 16, 20 25, 32, 40 50, 63, 80 100 10, 16 20, 25 32 6, 10 15, 20 25, 32 6, 10 15, 20 25, 32 12, 16 20, 25 32, 40 20, 25, 32 40, 50, 63 80, 100 32, 40 50, 63 80, 100 20, 25, 32 40, 50, 63 80, 100 20, 25 32, 40 50 6, 10 16 6, 10 16, 20 10, 15 25 Bore size (mm) 5 to 50 mm/s 7 to 50 mm/s 5 to 50 mm/s 5 to 50 mm/s Piston speed Air cushion on both ends Shock absorber (CX2: Option) Rubber

Air Cylinder Series CG1 ø20, ø25, ø32, ø40, ø50, ø63, ø80, ø100 1

Rod End Lock: -R Bore size (mm) WH W P WA WB 20 30 M5 x 0.8 16 15(16) 23 25 30 M5 x 0.8 16 15(16) 25 32 25 Rc 1/8 16 15(16) 28.5 40 20 Rc 1/8 16 15(16) 33 50 20 Rc 1/4 18 17(18) 40.5 63 20 Rc 1/4 18 17(18) 47.5 80 20 Rc 3/8 22 22 60.5 100 20 Rc 1/2 22 22 71 ( ): Denotes the dimensions for long strokes.