HRX-OM-M091

(Request):0106000C0001EC [CR][LF] (Response):0106000C0001EC [CR][LF] Request message Response message Code Contents Code Contents 01 Slave Address 01 Slave Address 06 Function 06 Function 000C Address of specified register 000C Address of register to write 0001 Information written to 000Ch (Stop flag) 0001 Information of register to write EC LRC EC LRC 4.8 Explanation of function codes HRS

100

Tightening with excessive force may damage the product. 18 Multistage Ejector Max. suction flow rate: 300 L/min (ANR) Max. suction flow rate: 600 L/min (ANR) ZL3/ZL6 Series Only for the models with a valve or pressure switch RoHS How to Order ZL 3 M 06 06 06 Without valve ZL 3 M K1 5 LO Z E A M G With valve ZL 3 M K1 5 LO Z V A M Pressure switch with energy saving function q w e r u !

Auto Switch Guide

CDV3, CDVS CE2, CNA CDL1 CDS1 MDB, MDBB BT -04 BT -04 BT -06 BT -08 BT -08 BT -12 BT -12 BT -16 BT -18A BT -20 BT-03 BT-03 BT-05 BT-05 BT-06 BT-06 [Mounting screws set made of stainless steel] The following set of mounting screws made of stainless steel is also available. Use it in accordance with the operating environment.

A_HEC-OM-J017

32 0D 37 Temperature setting (with writing EEPROM) F 01 3F 02 37 32 35 30 30 03 33 3F 0D 06 3F 0D Set at 25.0 deg.C 38 Offset setting (with writing EEPROM) F 01 3F 02 38 30 31 35 30 03 33 3F 0D 06 3F 0D Set at +1.50 deg.C HEC 6-1

AN

Model Port size Effective area (mm2) Weight (g) ANB1-01 22 81 25 18 35 93 30 21 94 107 46 24 175 133 50 41 462 190 74 41 612 230 74 60 871 271 86 70 A B C Dimensions (mm) 1 8 ANB1-02 15 10 51 22 1 4 ANB1-03 35 3 8 ANB1-04 60 1 2 ANB1-06 90 3 4 ANB1-10 160 1 1 1 ANB1-12 280 1 4 ANB1-14 450 1 2 610 Construction/Parts/Dimensions ANB1-01 to 04 JIS symbol ANB1-04: PP ANB1-06 to 14 How to Order

VP4

20 16 (15) 19 (16) 22 (18) 3.6 4.0 5.2 3.6 4.0 5.2 4.0 4.7 5.3 3.9 4.5 5.1 0.22 0.15 0.13 0.22 0.15 0.13 0.28 0.27 0.19 0.28 0.24 0.15 15 17 21 15 17 21 16 18 22 16 18 21 2.5 Single VP4150 2 position 3 position 3.3 3.0 VP4250 Double 3.8 3.6 Closed center VP4350 4.4 3.6 VP4450 Exhaust center 4.4 ( ): Denotes the normal position.

Paddle Style Flow Switch Series IF3 For details about certified products conforming to international standards, visit us at www.smcworld.com. 1

1) IF30 is available for 06.

3 Port Solenoid Valve/

Thread Rc G NPT Nil None Port size 06 3/4" 10 1" A Yes 8 B 5/16" For internal pilot, the symbol is nil. Refer to Piping for External Pilot Type on page 20 for selection of the check valve. Made to Order Series Compatible with Secondary Batteries 1 For details about 25A-, refer to the WEB catalog Series Compatible with Secondary Batteries/Series 25A-.

Manifold Specifications

VV5ZS3 02 06 51F 1 D Thread type VK Series VZS3000 Manifold Standard Nil NPT Rc N T F VZ Plug-in type Stacking type manifold base with D-sub connector NPTF G Option Port size VF Rc 1 8 02 Rc 1 4 01 U side Connector mounting direction VFR Connector mounting position Symbol Applicable stations Embedded type One-touch fitting Applicable tubing O.D.: 6 C6 VP4 U D U side D side 2 to 8 2 to 8 9

KN Series Nozzles for Blowing

Copper extension nozzle/KNL (mm) Model Nozzle size D Outside diameter L1 Weight (g) KNL3-06-150 KNL3-06-200 KNL3-08-200 KNL3-08-250 KNL3-10-250 KNL3-10-300 KNL6-06-150 KNL6-06-200 KNL6-08-200 KNL6-08-250 KNL6-10-250 KNL6-10-300 1.5 2 2 2.5 2.5 3 1.5 2 2 2.5 2.5 3 6 6 8 8 10 10 6 6 8 8 10 10 300 300 300 300 300 300 600 600 600 600 600 600 43 43 61 61 94 94 84 84 117 117 183 183 O.D.

HRX-OM-M005

-TH2 -TH3 CH1-21 CH2-21 Controller Error FLT Stop -AT1 An error was detected during auto tuning of the electron expansion valve. Contact the product supplier for request of inspection and repair. -AT2 Contact the product supplier for request of inspection and repair. -LMT An error was detected in internal processing of the product.

HRX-OM-W004

3.13.8 Data display . 3-21 3.13.9 Circulating fluid set temperature . 3-21 3.13.10 Operation Start Command. 3-21 3.13.11 Serial remote instruction . 3-22 3.13.12 Data instruction . 3-22 Chapter 4 Communication alarm function . 4-1 4.1 Communication alarm occurs . 4-1 4.2 Communication alarm reset . 4-2 4.3 Setting and checking . 4-2 4.3.1 Setting and checking items. 4-2 4.3.2 Setting and

Piping: 21 (Base Mounted Common SUP Common EXH), Stations: 2 Stations

Piping: 21 (Base Mounted Common SUP Common EXH), Stations: 5 Stations

Piping: 21 (Base Mounted Common SUP Common EXH), Stations: 10 Stations

Piping: 21 (Base Mounted Common SUP Common EXH), Stations: 20 Stations

Piping: Base Mounted Common SUP Common EXH, Stations: 2 Stations, A B Port Size: -

Piping: Base Mounted Common SUP Common EXH, Stations: 5 Stations, A B Port Size: -

Piping: Base Mounted Common SUP Common EXH, Stations: 10 Stations, A B Port Size: -

Guide Cylinder Series MGG ø20, ø25, ø32, ø40, ø50, ø63, ø80, ø100 1

9 D20 to 63 80, 100 -X @7 y w 20Data 40 to 100 80, 100 With rod end locking (Base cylinder only) Since the guide unit figure is the same as the standard type, refer to pages 8-21-19 to 8-21-21. Component Parts Zinc chromated For lock type Material Note Material No. Description No.