Air Cylinder

M8 x 1.25 24 20 0 0.033 1/8 76 39 12 103 25 1 to 200 22 19.5 36.3 17 10 22 8 31 6 33.5 5.5 8 39 6.6, 11 counterbore depth 7.5 18 25 M10 x 1.25 30 26 0 0.033 1/8 76 43 12 107 32 1 to 200 22 19.5 42.3 17 12 22 8 31 6 37.5 5.5 10 47 9, 14 counterbore depth 10 21 30 M10 x 1.25 34.5 26 0 0.033 1/8 78 43 12 109 40 1 to 300 24 21 52.3 22 14 27 11 34 8 46.5 7 12 58.5 11, 17.5 counterbore depth 12.5

Combination Cylinder

21 16 16 15 17 17 21 21 16 16 11 11 11 11 11 16 16 8 11 11 13 16 12 12 15 18 18 14 20 20 9.0 9.0 80 90 105 130 150 190 212 236 MXP 11.5 MG 13.5 13.5 19 19 19 MGP 112.5 121 133 141.5 150 167 18.5 18.5 18.5 MGQ W/o rod boot W/ rod boot Bore (mm) 40 50 63 80 100 125 140 160 J K KA MM N P S W MGG l H 51 58 58 71 72 110 110 120 e 36 45 45 60 60 75 75 75 f 16.5 16.0 16.0 18.0 18.0 40 40 40 h 59

5

Flat washer: Polished round MM Y-04D 40 22 24 10 55 M14 x 1.5 13 25 12 16 +0.3 +0.1 38 55.5 3 x 18 l Polished round 12 E1 NX NZ L Y-05D 50, 63 27 28 14 60 M18 x 1.5 15 27 12 16 +0.3 +0.1 38 55.5 3 x 18 l Polished round 12 D1 Y-08D 80 37 36 18 71 M22 x 1.5 19 28 18 28 +0.3 +0.1 55 76.5 4 x 25 l Polished round 18 A1 L1 U1 Y-10D 100 37 40 21 83 M26 x 1.5 21 38 20 30 +0.3 +0.1 61 83 4 x 30 l

Smooth Cylinder/Low Speed Cylinder

Cotter pin size MM 16 22 24 10 55 M14 x 1.5 13 25 12 38 55.5 3 x 18l Polished round 12 Y-04D 40 +0.3 +0.1 E1 NX NZ L 16 27 28 14 60 M18 x 1.5 15 27 12 38 55.5 3 x 18l Polished round 12 Y-05D 50, 63 +0.3 +0.1 D1 28 37 36 18 71 M22 x 1.5 19 28 18 55 76.5 4 x 25l Polished round 18 Y-08D +0.3 +0.1 80 A1 L1 U1 30 83 37 40 21 83 M26 x 1.5 21 38 20 61 4 x 30l Polished round 20 Y-10D +0.3 +0.1 100

SQ1000/2000

COM COM 25 26 COM COM 1 2 3 4 5 6 7 8 9 10 11 12 13 23 24 14 15 16 17 18 19 20 21 22 23 24 25 21 22 19 20 19 20 19 20 17 18 17 18 17 18 15 16 15 16 15 16 13 14 13 14 13 14 11 12 11 12 11 12 9 10 9 10 9 10 7 8 7 8 7 8 5 6 5 6 5 6 3 4 3 4 3 4 COM 1 2 1 2 1 2 COM COM P kit Flat ribbon cable connector (for 26P) J kit Flat ribbon cable connector (20P) PC Wiring System compatible P kit Flat ribbon

CQ2

12 3 2 16 6 4 20 12 8 25 24 16 32 52 34 12 40 6 54 34 12 155 214 50 6 106 64 21 243 373 63 19 106 64 21 324 559 Cylinder stroke (mm) Bore size (mm) 50 45 40 35 30 25 20 15 10 5 Male thread Nut Rod end male thread 12 97 90 83 76 69 62 16 One-touch fitting 117 106 95 84 73 62 Foot Flange 20 236 221 206 191 176 161 146 131 116 101 25 291 274 257 240 223 206 189 172 155 138 Calculation

Fluoropolymer Fittings Hyper Fitting / Flare Type Series LQ3

34.5 33.5 14 20 17 10 MQR 6 4 17 16 12 16 34.5 33.5 20 6 10 16 9 16 11 34.5 33.5 30.5 29.5 20 14 17 T 19.5 16 21 16 47.5 38 44.5 37 25 20 22.5 17 21 25 22.5 19.5 47.5 38 47.5 38 52.5 48.5 64 58.5 78 70 44.5 10 5 22.5 19.5 18 21 47.5 44.5 25 9 21 16 21 16 24 21 32 24 41 32 25 20 25 20 29 25 37 29 49 37 21 47.5 25 19.5 44.5 22.5 17 22.5 17 24 22.5 26.5 24 30 26.5 16 19.5 16 22 19.5 24 22 26

High Purity Fluoropolymer Fittings HYPER FITTING ® Series LQ1 1

x 10 10 x 8 12 x 10 10 x 8 19 x 16 12 x 10 19 x 16 12 x 10 25 x 22 19 x 16 25 x 22 19 x 16 Tubing O.D.

High Purity Fluoropolymer

M) 12 10 12 N 30 3/8" 6 36 21 33.1 28 11 22 30 H 28.5 1/2" 10 Class 4, 5 19 12 19 35 1/2" LQ2B52-M 7 42.5 46 40 32 14 28 36 LQ2B54-M LQ2B53-M 33.5 3/4" 12 Inch sizes Connection threads R/NPT Model Applicable tubing O.D.

0.4

Pink Red 22 SOL.A SOL.B (+) () 21 25 24 Gray Red 23 Station 11 3 13 (+) () 22 23 18 Black White 24 SOL.A SOL.B 4 12 (+) () 23 26 Station 12 22 19 White None 25 (+) () 24 5 11 21 20 White None 26 COM. 10 9 8 7 6 () (+) 25 COM. M27 female thread () (+) 26 Electrical characteristics Note) Positive COM spec. Negative COM spec.

Series SV

02 12 stations 2 stations 12 One-touch fitting Note 2) Specified layout (Up to 24 solenoids possible.)

Table of Contents

How to Order Sub-plate Assembly System Components System Solenoid valve Speed controller Silencer Tube bore x Length Pilot type Nil R External pilot Internal pilot AS2000-01 (S = 2.5 mm2) AN110-01 (S = 35 mm2) AS3000-02 (S = 12 mm2) AN110-01 (S = 35 mm2) AS3000-02 (S = 12 mm2) AN110-01 (S = 35 mm2) AS4000-02 (S = 21 mm2) AN110-01 (S = 35 mm2) AS4000-02 (S = 21 mm2) AN110-01 (S = 35 mm2) T0425

Dual Rod Cylinder Series CXSJ/CXS

size Model 11-/22-CXS6 6 11-/22-CXS10 11-/22-CXS15 11-/22-CXS20 11-/22-CXS25 11-/22-CXS32 10 15 20 25 32 10, 20, 30, 40, 50 Vacuum suction type Relief type M5 x 0.8 10, 20, 30, 40, 50, 75, 100 1/8 Double acting (Both sides) Non-lube 10-/12-/21-CXS6 6 single rod 10-/12-/21-CXS10 10-/12-/21-CXS15 10-/12-/21-CXS20 10-/12-/21-CXS25 10-/12-/21-CXS32 10, 20, 30, 40, 50 10 15 20 25 32 M5 x 0.8

Compact Cylinder Series CQ2 ø12, ø16, ø20, ø25, ø32, ø40, ø50, ø63, ø80, ø100, ø125, ø140, ø160, ø180, ø200 1

64 64 Nut 103 136 147 158 114 125 Built-in One-touch fittings 21 Calculation: (Example) CDQ2KWA40-20DM 12 12 21 RQ 169 220 237 254 186 203 271 288 305 322 Add the weight of auto switches and mounting brackets.

Guide Cylinder Series MGG ø20, ø25, ø32, ø40, ø50, ø63, ø80, ø100 1

) 12 (14) 104 11 21 47.5 175 37 46 28.3 40 25 25 25 107 (115) 12 (14) 104 11 21 48 201 37 52 31.3 43 32 32 32 110 (118) 12 (14) 106 11 21 49 238 44 62 38.3 52.5 40 40 40 121 (130) 12 (15) 123 11 25 53 285 55 75 44.5 58.5 50 50 50 137 (149) 14 (16) 140 16 26 59 Note) ( ): Denotes the dimensions for long stroke.

Series CM2-Z 10-/11- ø20, ø25, ø32, ø40 21-/22- Air Cylinder

(mm) B1 H LH LX 22 22 GA GB GC KA LD 138 109 107 103 1/8 AL MM X Y B 52.3 42.3 36.3 30.3 ND 20-0.033 0 7 5.5 5.5 5 K Bore size ZZ S P N L D A H1 I 17 17 13 34 31 31 27 6 6 5 18 15 25 21 8 8 6 6 8 6 5.5, 9.5 counterbore depth 6.5 M14 x 1.5 M10 x 1.25 M10 x 1.25 M8 x 1.25 49 43 43 39 15 12 12 12 104 78 76 76 42.5 34.5 30 24 14 12 10 8 58.5 47 39 33.5 21 19.5 19.5 15.5 40 32 25 20 24 22 22 18

LEC-OM071xx

CMD_DATA/RSP_DATA: Specified for individual commands. 10 11 12 13 14 15 16 17 18 19 20 21 22 23 24 25 26 27 28 29 30 31 Main Command Area CMD_DATA RSP_DATA 8-12 8 MECHATROLINK-III Commands Byte Command Response Description 32 SUBCMD RSUBCMD SUBCMD/RSUBCMD: 33 Command code specified for individual commands. Refer to 8.15 Subcommands.

Tamper Proof and Flat Head Screw

20.6 12.9 23 16.2 AS331F-03-12ST AS331F-N03-09ST 22 NPT3/8 19 9.5 53.7 5/16" 15.2 23 1.5 47.7 18.5 20.9 44.9 55.3 34.4 12 39.7 28.2 49.1 AS331F-N03-11ST AS431F-04-10ST 16.2 21 3/8" 17.9 23 49.4 16.2 21 25.8 58 10 32.6 18.5 43.7 32.6 53.5 R 1/2 24 12 55.8 28.6 63.8 1.5 AS431F-04-12ST AS431F-N04-11ST 20.9 16.2 3/8" 17.9 25.8 21 52 22 19.4 26.8 61.7 12 36.3 49.4 32.6 55.3 12 1/2" NPT1/2 23.8

Micro Mechanical Valve Series VM1000

EXH.2 Symbol 93.7 (112.2) (C1) 2 (C2) 4 CYL.2 CYL.1 18.5 18.5 12 12 14 23 19 21 20 3 (E1) 1 (S) 5 (E2) 0.5 MPa supply 2 x 4.2 mounting hole 6.5 mm T.T. 1.7 mm O.T. 4.8 mm P.T. 21 N F.O.F. 26.4 30.5 2 x 1 8 3 x 1 4 35 (EXH port) (SUP CYL port) Push button (Extended) VFM350-02-32R/B/G/Y Panel mounting hole 23 38 O.T. P.T.

The SYJ Valve is an innovative combination of space efficiency and performance superiority which provides real value to the design solution. Whether designed in a manifold or used as a single valve, this small profile increases design flexibility and minimizes space requirements. The SYJ valve utilizes a low power (0.5 watts standard) pilot solenoid design, which dramatically reduces thermal