0.4

Bore size MB, CA2 series Pressure 0.5 MPa Load factor 50% Stroke 500 mm CM2 series Pressure 0.5 MPa Load factor 50% Stroke 300 mm CJ2 series Pressure 0.5 MPa Load factor 50% Stroke 60 mm Average speed (mm/s) Series 6 10 16 20 25 32 40 40 50 63 80 100 800 700 600 500 400 300 200 100 0 Perpendicular, upward actuation Horizontal actuation VQC1101 800 700 600 500 400 300 200 100 0 VQC2101 It

VXA21/22

Min. 60 5 (1) 40 5 40 40 5 5 (2) Note 1) Dew point: 5C or less Note 2) 500cSt or less Note 3) "V" in the parenthesis is option symbol. Options Material Tightness of Valve(Leakage) No. Description Standard Brass (Base is aluminum.)

KG

Connection thread 17 15.2 1 4 KGU08-02 18.5 8 15.2 3 8 KGU08-03 2-applicable tubing 1 4 KGU10-02 40 28.4 30 40 65 61 62 65 19 18.5 3 8 KGU10-03 21 10 18.5 1 2 KGU10-04 22 1 4 KGU12-02 64.5 65.5 68.5 57.4 45.4 32 40 65 3 8 KGU12-03 20.9 22 20.9 12 22 1 2 KGU12-04 Note) D: Max. diameter Reference dimensions after R thread installation.

Compact 5-Port Solenoid Valve

Can drive 40*1 bore cylinders Can drive 50*1 bore cylinders Can drive 80*1 bore cylinders JSY1000 JSY3000 JSY5000 6.4 mm 10 mm 15 mm A, B port size: 2, 4, 6 A, B port size: 6, 8 A, B port size: 10, 12 6 One-touch fitting 12 One-touch fitting 8 One-touch fitting 540 550 520 63 25 40 Bore size [mm] Bore size [mm] Bore size [mm] 360 310 430 80 40 50 100 140 110 160 63 100 100 300 500 100 300

2/3 Port Valve for Various

Temperature conditions Water (Standard) Air (Standard) Oil (Standard) Vacuum (3) (V, M) Maximum Minimum 40 1 60 5(1) 40 5 40 40 5 5(2) Pilot port Note 1) Dew point: 5C or less Note 2) 500 cSt or less Note 3) V, M in parentheses are option symbols.

ZQ-OM01301

-40 10 Suction flow rate -20 -20 5 0 0 0 0.2 0.3 0.4 0.5 0 1 2 3 4 5 6 Supply pressure[MPa] Suction flow rate [L/min (AMR) ] ZQ07A Exhaust Characteristics Flow Rate Characteristics Supply pressure0.43MPa -100 40 -100 35 Air consumption [L/min (AMR) ] -80 Vacuum pressure [kPa] -80 Suction flow rate [L/min (AMR) ] Vacuum pressure [kPa] Vacuum pressure 30 -60 25 -60 Air consumption 20 -40 -

Ejector Valve Unit Series ZYY/ZYX

-40 Air consumption -40 40 -40 40 Suction flow rate Suction flow rate -20 20 -20 -20 20 -20 0 0 0 0.1 0.2 0.3 0.4 0.5 0.6 0 0 10 20 30 40 50 5 10 15 20 25 0 0 0 0.1 0.2 0.3 0.4 0.5 0.6 0 0 Supply pressure (MPa) Suction flow rate (l/min(ANR)) Supply pressure (MPa) Suction flow rate (l/min(ANR)) How to Read Flow Characteristics Graph The flow rate characteristics indicate the relationship

Compact Proportional Solenoid Valve Series PVQ

) 24 VDC 12 VDC SRP PVQ30 (2.3) SRF 120 ARX20 P = 0.35 MPa 100 P = 0.25 MPa VCHR Flow rate (l/min) 80 P = 0.18 MPa ITV 60 P = 0.1 MPa 40 IC 20 PVQ 0 0 0 20 40 40 80 60 120 80 160 100 200 120 240 140 280 160 320 180 360 200 400 Current (mA) 24 VDC 12 VDC VEF VEP VER PVQ30 (4.0) VEA 120 100 P = 0.12 MPa VY2 Flow rate (l/min) P = 0.08 MPa 80 VBA VBAT P = 0.06 MPa 60 AP100 40 P = 0.04 MPa

Ejector Valve Unit Series ZYY/ZYX 1

40 40 40 40 40 Suction flow rate Suction flow rate 20 20 20 20 20 20 0 0 0.1 0.2 0.3 0.4 0.5 0.6 0 0 0.1 0.2 0.3 0.4 0.5 0.6 0 0 0 0 0 0 10 20 30 40 50 5 10 15 20 25 Supply pressure (MPa) Suction flow rate (l/min(ANR)) Supply pressure (MPa) Suction flow rate (l/min(ANR)) How to Read Flow Characteristics Graph The flow rate characteristics indicate the relationship between the vacuum pressure

0.4

Bore size Series MB, CA2 Pressure 0.5 MPa Load factor 50% Stroke 500 mm Series CM2 Pressure 0.5 MPa Load factor 50% Stroke 300 mm Series CJ2 Pressure 0.5 MPa Load factor 50% Stroke 60 mm Average speed (mm/s) Series 6 10 16 20 25 32 40 40 50 63 80 100 800 700 600 500 400 300 200 100 0 Perpendicular, upward actuation Horizontal actuation VQ1101 Port size: 6 one-touch fitting 800 700 600 500

Ejector Valve Unit, Series ZYY/ZYX

-40 40 40 -40 -40 Suction flow rate Suction flow rate 20 20 -20 -20 -20 -20 0 0 0.1 0.2 0.3 0.4 0.5 0.6 0 0 0.1 0.2 0.3 0.4 0.5 0.6 0 0 0 0 10 20 30 40 50 5 10 15 20 25 0 0 Supply pressure MPa Suction flow rate l/min (ANR) Supply pressure MPa Suction flow rate l/min (ANR) Viewing the flow rate characteristic graphs The flow rate characteristics indicate the relationship between the vacuum

155

V or less at 10 mA (2 V or less at 40 mA) 4 V or less 100 A or less at 24 VDC Leakage current 0.8 mA or less Indicator light Red LED illuminates when turned ON.

ZMA

60 40 40 40 40 27 27 27 40 27 Suction flow rate Suction flow rate Suction flow rate Suction flow rate 20 13 13 13 13 20 0 60 40 20 0.6 0.3 0.5 0.4 0.2 0 0.1 0 60 40 20 0 0.6 0.5 0.4 0.3 0.2 0.1 Supply pressure (MPa) Flow rate (l/min (ANR)) Supply pressure (MPa) Flow rate (l/min (ANR)) 13-4-26 7 Series ZM Vacuum Ejector: With Solid State Timer Exhaust Characteristics/Flow Characteristics,

KP/KPQ/KPG

Norte Parque Industrial Valle Grande, Lampa Santiago, Chile TEL: 02-270-8600 FAX: 02-270-8601 SWEDEN SMC Pneumatics Sweden AB Ekhagsvgen 29-31, S-141 05 Huddinge, Sweden TEL: 08-603-07-00 FAX: 08-603-07-10 ARGENTINA SMC Argentina S.A.

0.4

Bore size CJ2 series Pressure 0.5 MPa Load factor 50% Stroke 60 mm CM2 series Pressure 0.5 MPa Load factor 50% Stroke 300 mm MB, CA2 series Pressure 0.5 MPa Load factor 50% Stroke 500 mm Average speed (mm/s) Series 6 10 16 20 25 32 40 40 50 63 80 100 800 700 600 500 400 300 200 100 0 Perpendicular, upward actuation Horizontal actuation VQ1101 Port size: 6 One-touch fitting 800 700 600 500

Compact Vacuum Ejector Series ZA

pressure 80 80 40 Suction flow (l/min(ANR)) Air consumption (l/min(ANR)) 1 2 3 4 5 6 7 8 Left Right Vacuum pressure (kPa) Vacuum pressure (kPa) 70 ZA1071-K15L-FP1-M2 ZA1051-Q15L-FB-M1 ZA-BP1 60 60 30 Vacuum (V) port 50 40 40 20 Air consumption 30 20 20 Suction flow 10 10 0 0.6 0.4 0.2 0.5 0.3 0.1 0 8 6 4 2 Suction flow (l/min(ANR)) Supply pressure (MPa) 851 Series ZA Specifications General

Speed Controller with Residual Pressure Release Valve with One-touch Fitting Series AS



FE Elbow Type/Universal Type

Norte Parque Industrial Valle Grande, Lampa Santiago, Chile TEL: 02-270-8600 FAX: 02-270-8601 SWEDEN SMC Pneumatics Sweden AB Ekhagsvgen 29-31, S-141 05 Huddinge, Sweden TEL: 08-603-07-00 FAX: 08-603-07-10 ARGENTINA SMC Argentina S.A.

HRX-OM-K003

C Facility water temp. +15C Circulating fluid rated flow rate L/min 4 30 40 40 (1.1 [gal]/min) (7.9 [gal]/min) (10.6 [gal]/min) (10.6 [gal]/min) Facility water minimum necessary flow rate L/min 10 20 25 40 (2.6 [gal]/min) (5.3 [gal]/min) (6.6 [gal]/min) (10.6 [gal]/min) Operating temperature range C 20 to 90 Temperature stability *1 C 0.3 Circulating fluid *2 Galden HT200 or FluorinertTM

45

Both sides M Special specifications 5 LOZ SX 3 2 40 16 16 stations For special specifications, indicate separately by the manifold specification sheet. This also includes the number of blanking plate assemblies. When special wiring is required on manifold with 2 to 8 stations, please use the manifold specification sheet.

Space Saving Vacuum Ejector/Vacuum Pump System Series ZQ

Refer to Handling Precautions for SMC Products (M-E03-3) for Safety Instructions and Vacuum Equipment Precautions. 50 40 40 40 30 20 20 20 Caution Maximum suction flow 10 Refer to the vacuum equipment model selection on Best Pneumatics No.r for the selecting and sizing of Series ZQ. 0 0.1 0.2 0.3 0.4 0.5 0 5 10 15 20 25 Suction flow (l/min(ANR)) Supply pressure (MPa) 3 Space Saving Vacuum