Modular Type Filter Regulator Series AW

66 Mist separator regulator Series AWM Round pressure gauge AWM20 1/8, 1/4 Panel mount 0.3m (95% filtered particle size) AWM30 1/4, 3/8 AWM40 1/4, 3/8, 1/2 Pages 67 through 70 Micro-mist separator regulator Series AWD AWD20 1/8, 1/4 0.01m (95% filtered particle size) AWD30 1/4, 3/8 AWD40 1/4, 3/8, 1/2 Pages 71 through 74 55 Filter Regulator AW10 to 40 Integrated filter and regulator units

Micro Mist Separator with Prefilter AMH Model Model AMH250 AMH350 AMH450 AMH550 AMH650 AMH850 AMH150 Series AMH can separate and (1) remove aerosol state oil mist in 500 1000 2000 3500 6000 12000 200 Rated flow (l/min(ANR)) compressed air and remove Po

110 130 180 Q 26 28 28 34 34 50 50 60 76 R 4.5 5 5 5 5 9 9 10 12 S 1.6 2 2 2.3 2.3 3.2 3.2 4.5 4.5 T U 37 37 37 37 37 37 37 37 37 1/8, 1/4, 3/8 1/4, 3/8 1/2 3/8, 1/2 3/4 1/2, 3/4 1 3/4, 1 1, 11/2 159 172 178 204 210 225 232 259 311 13 13 16 16 19 19 22 22 32 100 113 119 145 151 166 173 200 253 63 76 76 90 90 106 106 122 160 20 20 20 20 20 20 20 20 20 63 76 76 90 90 106 106 122 160 24 27 27

Bag Filter

NBR FGFS5-60 AL-27S 1 FGFC5-60 11 O-ring FGFL3-40 AL-23S 1 FGFR3-40 FKM FGFL5-60 AL-24S 1 FGFR5-60 FGFS3-40 3 FGFC3-40 AL-20S NBR FGFS5-60 5 FGFC5-60 12 Gasket FGFL3-40 3 FGFR3-40 FKM AL-21S FGFL5-60 5 FGFR5-60 Note 1) Refer to How to Order on page 47 for the part of the model number.

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ECC-PNAL-20MR-A (AC100-240V) ECC-PNAL-20MR-D (DC24V) ECC-PNAL-20MT -D (DC24V TRANSISTOR OUTPUTS) 20 1/0 (12 inputs/8 outputs) stand alone controller ECC-PNAL-10MR-A (AC100-240V) ECC-PNAL-10MR-D (DC24V) ECC-PNAL-10MT -D (DC24V TRANSISTOR OUTPUTS) 10 1/0 (6 inputs/4 outputs) stand alone controller ECC-PNAL-6MR-A(AC100-240V) 6 1/0 (4 inputs/2 outputs) stand alone controller How T o Order Specifications

NCA1

-12 2 2.375 3/8 1 1/8 3 1/16 8 2 1 1/2-12 2 1/4 2.625 3/8 1 1/4 3 3/16 8 2 1/2 1 7/8-12 3 3.125 1/2 1 1/2 3 7/16 10 1 3/4 1 1/4-12 2 2.375 3/8 1 1/8 3 1/8 10 2 1 1/2-12 2 1/4 2.625 3/8 1 1/4 3 1/4 10 2 1/2 1 7/8-12 3 3.125 1/2 1 1/2 3 1/2 12 2 1 1/2-12 2 1/4 2.625 3/8 1 1/4 3 1/4 12 2 1/2 1 7/8-12 3 3.125 1/2 1 1/2 3 1/2 12 3 2 1/4-12 3 1/2 3.75 1/2 1 1/2 3 1/2 14 2 1/2 1 7/8-12 3 3.125 1

Air Cylinder NCA1 Series

1 3/4 1 1/4-12 2 2.375 3/8 1 1/8 3 1/16 8 2 1 1/2-12 2 1/4 2.625 3/8 1 1/4 3 3/16 8 2 1/2 1 7/8-12 3 3.125 1/2 1 1/2 3 7/16 10 1 3/4 1 1/4-12 2 2.375 3/8 1 1/8 3 1/8 10 2 1 1/2-12 2 1/4 2.625 3/8 1 1/4 3 1/4 10 2 1/2 1 7/8-12 3 3.125 1/2 1 1/2 3 1/2 12 2 1 1/2-12 2 1/4 2.625 3/8 1 1/4 3 1/4 12 2 1/2 1 7/8-12 3 3.125 1/2 1 1/2 3 1/2 12 3 2 1/4-12 3 1/2 3.75 1/2 1 1/2 3 1/2 14 2 1/2 1 7/8-12

4 Port Direct Operated Poppet Solenoid Valve Series VQD1000 1

12 00F 12 stations 00N NPTF 00T 1(P) port Rc 1/4 3/5(R) port Rc 1/4 For How to order applicable connector assemblies, refer to page 3-3-7.

VQ4000

1 (P) 5 (R1) 3 (R2) 1 (P) 5 (R1) 3 (R2) 24 VDC 1 W DC (42 mA), 0.5 W DC (21 mA) 3 position exhaust center 12 VDC 1 W DC (83 mA), 0.5 W DC (42 mA) 2 position double (Metal) (A) 4 (B) 2 (A) 4 (B) 2 100 VAC Inrush 1.2 VA (12 mA), Holding 1.2 VA (12 mA) Power consumption (Current) 110 VAC Inrush 1.3 VA (11.7 mA), Holding 1.3 VA (11.7 mA) 1 (P) 5 (R1) 3 (R2) 200 VAC Inrush 2.4 VA (12 mA), Holding

Base Mounted Type, VQ5000 Series, 5 Port Metal Seal/Rubber Seal Solenoid Valve

B 53 40 66 162 50 41 37 31.5 18 53 40 66 B A A B Manual override 1 3 5 14 12 14 5 1 3 12 53 2-6.5 Mounting hole 35 2-6.5 Mounting hole 35 53 Manual override 18 31.5 37 41 50 98 PE X PE X P R1 R2 R2 R1 P 27.5 27.5 41 41 1/8 Port PE Rc1/8 External pilot port 27.5 27.5 41 41 1/8 Port PE 1/8 External pilot port 5-1/2 Ports P, A, B, R1, R2 5-1/2 Ports P, A, B, R1, R2 Numbers inside ( ) are for

Vacuum Ejector Box Type (Built-in Silencer)/Body Ported Type Series ZH 1

color 76 41.5 29.5 12 3.2 12 14.2 L type: Black color 76 41.5 29.5 12 3.2 12 14.2 1 8 82 44.5 30.5 12 4.2 12 17.2 86 44.5 30.5 12 4.2 12 17.2 94.5 54 39 14 4.2 17 19.95 99.5 54 39 14 4.2 17 19.95 116.5 58.5 41 17 4.2 19 ZH15DS-02-03-03 22.45 116.5 58.5 41 17 4.2 19 ZH15DL-02-03-03 22.45 (Mounting hole) Model I J K L M N O P Rc 1 8 Rc 1 8 Rc 1 8 Rc 1 8 Rc 1 8 Rc 1 8 Rc 1 8 Rc 1 8 Rc 1 8 Rc

VQC

Proper tightening torque (Nm) Tightening torques for piping Connection thread Rc 1/8 Rc 1/4 Rc 3/8 Rc 1/2 Rc 3/4 7 to 9 12 to 14 22 to 24 28 to 30 28 to 30 5.

Rotary Actuator Vane Style Series CRB2 Size: 10, 15, 20, 30, 40 1

P611070-1 P611090-1 P611060-1 P611080-1 P612010-1 P611010-1 P611070-1 P611090-1 P611060-1 P611080-1 P612010-1 P411020-1 P411030-1 P411040-1 P411050-1 Series Vane type Unit part no.

Conforming to ISO Standard Solenoid Valve (with M12 Connector) Series EVS7-6/7-8/7-10 (Size 1) (Size 2) (Size 3) 1

connector VZS VFS 20 (12, 14 port) 10.5 (2, 4 port) VS4 85.5 72.5 VQ7 10.5 PE port 29 14 SMC EVS M5-2 port 12, 14 port 1/8, 1/4-2 port 2, 4 port 1/8, 1/4-2 port 3, 5 port 21 21 VFN 1/8, 1/4 1 port EVS1-01-F G-D-M0 H J I EVS1-01-FG-D-M0 151 166.5 75.5 75.5 27.5 (14 port) 27.5 (12 port) 27.5 (14 port) 27.5 (12 port) 10.5 (4 port) 10.5 (2 port) 10.5 (4 port) 10.5 (2 port) 14 12 2 4 12 14 4

Rotary Actuator Vane Style Series CRB2 Size: 10, 15, 20, 30, 40 1

P611070-1 P611090-1 P611060-1 P611080-1 P612010-1 P611010-1 P611070-1 P611090-1 P611060-1 P611080-1 P612010-1 P411020-1 P411030-1 P411040-1 P411050-1 Series Vane type Unit part no.

Series VQ Base Mounted Metal Seal/Rubber Seal

Name Material Number VVQ2000-80A-1 VVQ2000-80A-2 VVQ2000-80A-3 VVQ2000-80A-4 Gasket Packing Clamp screw Clip 12 12 12 12 Note) A set of parts containing 12 pcs.each are enclosed. NBR NBR Carbon steel Stainless steel !0 !1 !2 !3 !4Fitting Assembly No. (For cylinder port) VVQ100051A !5Fitting Ass'y No.

Stopper Cylinder

M9PWV M9PW 2-wire 12 V M9BWV M9BW Diagnostic indication (2-color indicator) Relay, PLC Grommet Yes 24 V 3-wire (NPN) 5 V, 12 V M9NAV*1 M9NA*1 IC circuit 3-wire (PNP) M9PAV*1 M9PA*1 2-wire 12 V M9BAV*1 M9BA*1 Magnetic field-resistant (2-color indicator) 2-wire (Non-polar) P3DWA Water-resistant (2-color indicator) Grommet Yes 3-wire (NPN equivalent) 5 V A96V A96 IC circuit Reed auto

5 Port Solenoid Valve, Series VQC

Kit type Thread type Port size F T Rc G NPT/NPTF 1 2 S Kit T Kit Symbol C3 C4 C6 C8 C10 C12 N1 N3 N7 N9 N11 M5 02 03 B T02 T03 G02 G03 VQC4000 Port size VQC2000 VQC1000 3.2 One-touch fitting 4 One-touch fitting 6 8 10 12 1/8" 5/32" 1/4" 5/16" 3/8" M5 thread Rc 1/4" Rc 3/8" Rc 1/4" bottom ported 1/4" NPT/NPTF 3/8" NPT/NPTF 1/4" G 3/8" G U-side end plate assembly 12 U-side end plate assembly

44

KFG2V0122-N01 KFG2V0122-N02 KFG2V0325-N01 KFG2V0325-N02 KFG2V0704-N01 KFG2V0704-N02 KFG2V0906-N01 KFG2V0906-N02 KFG2V0906-N03 KFG2V1163-N02 KFG2V1163-N03 KFG2V1163-N04 KFG2V1395-N02 KFG2V1395-N03 KFG2V1395-N04 KQ2 Applicable tubing 1/8 1/4 1/8 1/4 1/8 1/4 1/8 1/4 3/8 1/4 3/8 1/2 1/4 3/8 1/2 12 14 12 14 12 14 12 14 19 14 19 22 14 19 22 16.1 19.8 16.1 19.8 18.3 22 19.6 23.3 25.1 24.7 26.8 30.6

One-touch Fittings Series KQ2

13.7 15.4 14.29 7 20 3.5 10 11 20 12 21 4.4 12 22 35 16 24 36 31 29 38 64 34 43 69 10-32UNF 12.7 2.3 9.3 15.6 1 16 5 32 23 22 11.11 1 8 1 4 1 8 1 4 16 10.4 10 18 3 26 25 24 26 14.29 11.11 22.5 26.5 15.1 23.5 27.5 29.5 24.5 28.5 30.5 26.5 29.5 31.5 35.5 31.5 33.5 37.5 NPT 3 16 3.5 16.5 11.4 10 19.5 14.29 10-32UNF 2.3 18.1 13.6 12 16.1 7 1 8 1 4 3 8 1 8 1 4 3 8 1 8 1 4 3 8 1 2 1 4 3 8 1

Solid State Auto Switches

Refer to front matter 57 for Safety Instructions and pages 8 to 12 for Auto Switch Precautions. Caution 1. Use the reed switch within the operating range.