29.5 35.5 Model 150 56.5 64 125 42.5 55 64 100 34 42.5 53.5 50 75 28.5 34 33 37.5 43 50 18.5 28 25 30 33.5 43 40 18.5 20.5 25 27 29.5 35.5 30 14.5 18.5 21 27 29.5 35.5 10 14.5 16.5 21 27 29.5 35.5 Allowable moment coefficient: Graph 2 MXQ 6 MXQ 8 MXQ12 MXQ16 MXQ20 MXQ25 6 7 9 10.5 14 16.5 13.5 16 19.5 24.5 30 37 13.5 16 19.5 24.5 30 37 6 7 9 10.5 14 16.5 1.0 Allowable moment coefficient
Refer to the theoretical output table on page 27. Selection Conditions: Determine the selection conditions in order, starting from the upper row in the table below, and choose one of the selection graphs to be used.
1414 1767 3.5 9.621 481 577 770 962 1924 2405 4 12.566 628 754 1005 1257 2513 3142 OVERSIZE PISTON RODS Selection Table Oversized Piston Rods Thrust In Piston Rod Diameter lbs 5/8 1 1 3/8 1 3/4 2 2 1/2 3 3 1/2 400 37 83 134 186 In applications where extra column strength is required, or for long push stroke 700 30 68 118 168 202 275 cylinders, oversized piston rods may be required. 1000 27
Qmax Q1 Suction flow rate 3 Series (N)ZL Multistage Ejector How to Order N ZL1 12 K1 12 25 5 M Z E With valve Without valve N ZL1 Fitting Size Lead wire length Air Supply Port Vacuum Port 6 12 1/4" 1/2" Nil N 0.5m 2.9m Nil L 1.2mm 12 Nozzle diameter Digital vacuum pressure switch specifications Exhaust specifications For E (ZSE4) EB (ZSE4B) Built-in silencer Port exhaust Nil P 25 26 65 27
velocity detection element Application examples Flow control of cooling water for welding gun Flow control of high frequency electric power supply cooling water, for wafer temperature regulation Flow control of N2 gas to prevent detection camera shimmering and lead frame oxidation Features 2 For Air For Air Digital Flow Switch Series PFA How to order Integrated display type PFA7 10 01 27
K L AA A R X AB I AP Y + Stroke Z + Stroke J V 8-AF AC AD AE 100 piston rod end connection For standard strokes (mm) Bore size (mm) Stroke range (mm) AC G H AB AF AA AE AD F N M D L C K B J AP I A E 63 80 100 75, 100 125, 150 200, 250 300 15 20 depth 14.5 M16 x 2 depth 28 25 25 50 170 13.5 100 66 140 180 30 135 M12 x 1.75 depth 24 228 117 60 65 200 200 15 20 depth 14.5 M16 x 2 depth 28 27
8 7 6 Conforms to IP40 2 Based-Mounted Type Plug-in Unit Series VQC4000 How to Order Manifolds VV5QC 4 1 08 02 TD0 T Kit VV5QC 4 1 16 03 SDQW S Kit Options Series 4 VQC4000 Input block COM (Indicate for I/O unit only) Manifold type Number of input blocks (Indicate for I/O unit only) 1 Plug-in unit Stations SI unit COM Cylinder port size Refer to manifold specification sheet on pages 27
20 27 Rectifying device AC type 20 27 Rectifying device 14 2 3.2 23.5 20 AC type 20.5 17 54 48 5 11 1 1 6 8 5 M5, 1/8 M5 1 (IN) port 1 (IN) port M5, 1/8 M5 2 (OUT) port 2 (OUT) port 15 2-M2.5 x 0.45 Thread depth 3.5 2-M3 x 0.5 Thread depth 5 VDW31 36 (27.6) Lead wire l approx. 300 SMC SMC 30 40 1 1 Rectifying device AC type 45 25 34 28 Bracket assembly part number.
Analog torque limit 10V/max. torque TLA 27 LG 28 SD Plate 2m max. Personal computer (Note 9) MR Configurator (Note 10) USB cable CN5 (option) (Note 1) Refer to LECSB Operation Manual, section 3.2 for wiring details.
Parameter setting (Driver side) . 23 4.1 power supply specifications . 23 4.2 Overtravel . 23 4.3 Rotation Direction . 24 4.4 Electronic Gear . 25 4.4.1 List of the electronic gear setting for each actuator . 26 4.5 Positioning Completed Width . 27 4.6 Regenerative Resistor . 27 5.
Trial Operation (SigmaWin+) . 27 5.1 Communications setting for PC . 27 5.2 JOG Operation . 29 5.3 Program JOG Operation . 31 6. The recommended the parameter for each actuator . 34 6.1 The recommended value of the parameter [LEF] . 34 6.2 The recommended value of the parameter [LEJ] . 35 6.3 The recommended value of the parameter [LEY] . 36 7.
Operating environment .27 5-7. Lubrication .27 6. Maintenance or inspection .27 6-1. Maintenance or inspection .27 6-2. Replacement part .28 6-3. Maintenance .28 1 - Safety Instructions These safety instructions are intended to prevent hazardous situations and/or equipment damage. These instructions indicate the level of potential hazard with the labels of Caution, Warning or Danger.
20 21 27 Rectifying device VDW AC type Rectifying device 2-3.5 27 20 AC type 14 2-3.2 20 VQ 20.5 VX2 17 VX Courtesy of Steven Engineering, Inc.-230 Ryan Way, South San Francisco, CA 94080-6370-Main Office: (650) 588-9200-Outside Local Area: (800) 258-9200-www.stevenengineering.com VX3 48 5 11 56 VXA 1 6 VN 1 8 5 M5 M5 LVC 2 (OUT) port M5, 1/8 1 (IN) port M5, 1/8 1 (IN) port 2 (OUT) port
40 (67) TI/ TIL Conduit terminal: T PA 92 2 PAX PB (2.3) 98 104 (7.5) (5.5) 25 52 55 (33) 36 G 1/2 (27) 30 (27) 30 11 14 IN OUT Bracket 50 (52) (67) 24 26 (28) 2-Rc 1/4, 3/8, 1/2 22 28 40 59 2 : Port size Rc 1/2 17-3-49 8 The VX series will be revised shortly.
armature, one time each in energized and deenergized states Characteristic Specifications Maximum operating pressure differential MPa Orifice size mm Note 1) Effective area mm (Cv factor) Weight kg Max. operating pressure MPa Class Model Port size 1.0 6 (0.33) 3 2 0.21 1.0 1/4 ( 8A) 0.15 15 (0.83) 5 VCA (for air) 2 port solenoid valve 1.0 10 (0.55) 4 1/4 ( 8A) 3/8 (10A) 0.30 1.0 3 0.15 27
20 27 Rectifying device AC type 20 27 Rectifying device 14 2 3.2 23.5 20 AC type 20.5 17 54 48 5 11 1 1 6 8 5 M5, 1/8 M5 1 (IN) port 1 (IN) port M5, 1/8 M5 2 (OUT) port 2 (OUT) port 15 2-M2.5 x 0.45 Thread depth 3.5 2-M3 x 0.5 Thread depth 5 VDW31 36 (27.6) Lead wire l approx. 300 SMC SMC 30 40 1 1 Rectifying device AC type 45 25 34 28 Bracket assembly part number.
9 8 7 6 Conforms to IP40 2 Series VQC4000 Base-Mounted Type Plug-in Unit How to Order Manifolds VV5QC 4 1 08 02 TD0 T Kit VV5QC 4 1 16 03 SDQW S Kit Options Series 4 VQC4000 Input block COM (Indicate for I/O unit only) Manifold type Number of input blocks (Indicate for I/O unit only) 1 Plug-in unit Stations SI unit COM Cylinder port size Refer to manifold specification sheet on pages 27
Output Specifications 25(L) 1 output NPN open collector 30 V, 80 mA or less ZSE4 ZSE4B 26(L) Analog output (1 to 5 V) 67(L) 1 output PNP open collector 80 mA or less 26(L) Analog output (1 to 5 V) 27(L) 2 outputs NPN open collector 30 V, 80 mA or less ZSE4E 67(L) 2 outputs PNP open collector 80 mA or less 13-7-6 7 Multistage Ejector Series ZL Construction q t e !
27 27 40 27 Suction flow rate Suction flow rate Suction flow rate Suction flow rate 20 13 13 13 13 20 0 60 40 20 0.6 0.3 0.5 0.4 0.2 0 0.1 0 60 40 20 0 0.6 0.5 0.4 0.3 0.2 0.1 Supply pressure (MPa) Flow rate (l/min (ANR)) Supply pressure (MPa) Flow rate (l/min (ANR)) 13-4-26 7 Series ZM Vacuum Ejector: With Solid State Timer Exhaust Characteristics/Flow Characteristics, Standard Supply Pressure
l 13.8 27 .6 dla. mm 8,10 12,16 20 25 32 40 50 63 80 100 125 140 160 0.6 0.8 1 I 1.3 1.2 1.6 2 2.7 3.7 4.4 5 6.8 8.1 10.8 12.6 16.8 20.4 27.2 3.4 c.c 8.5 13.5 21 2.4 4.3 6.8 10.5 1 7 27 2.2 3.4 5.4 8.4 13.6 21 .6 2.6 4 A E 10.2 16.2 za.z Equlvalent Flow Sectlon in mmZ Table 7.31 Eguiyalent Section S in mm2 for the valve and the tubing, lor 6 bar working pressure and a pressure drop ol 1 bar