4 o !8 q @0 !2 e !3 !5 MX MTS t !6 r u y w !
Filtration material: HEPO II (PP) w q e r w q er 0.1 0.1 0.05 0.05 Pressure drop MPa Pressure drop MPa Filtration accuracy (m) 2 4 6 13 Filtration accuracy (m) 0.5 1 5 10 20 50 75 100 No.
0.8 6.5 14h9 29 38 With arm/MKl -llN 12 16 M R Q P O N S Model MKB12-llN MKB16-llN 18.5 M3 X 0.5 4 20 29 8 8 21.5 M4 X 0.7 5 25 36 11 11 20, 25 Both ends tapped/MKA U S R K L Oh9 Q F E C B Model MKB20 MKB20 A 0 0.052 0 0.052 0.15 0.15 4 31 62 72.5 24.5 48 36 46.8 36 13.5 0.15 0.15 7.5 20 5 32 63 73.5 27.5 53.8 40 52 40 16 8 23 Note 1) Above figure is for D-A73, A80.
Filtration material: HEPO II (PP) w q e r w q er 0.1 0.1 0.05 0.05 Pressure drop MPa Pressure drop MPa Filtration accuracy (m) 2 4 6 13 Filtration accuracy (m) 0.5 1 5 10 20 50 75 100 No.
B E E F G H L L M Min. port size 2 x B L, L LQ3T11 4 3.5 10 9 4.8 9.5 11 28.5 27.5 14 2.5 LQ3T12 3 2 LQ3T21 6 4 17 16 6 12 16 34.5 33.5 20 4 LQ3T31 10 5 22.5 19.5 9 18 21 47.5 44.5 25 7.5 LQ3T32 8 6.4 LQ3T41 12 6 24 22 10 20 24 52.5 50.5 29 9.5 LQ3T51 19 7 26.5 24 14 28 32 64 61.5 37 16 LQ3T61 25 8 30 26 18 36 41 78 74 49 22 M (E, E) (E, E) G H L, L L, L (E,E): Reference dimension for the
4 !7 !3 wu !8 @0 @2 @3 !6 q !5 !9 i *1 *1 C95K32 A A-A A !2 !
2 Port for Steam Dimensions (mm) 1in = 25.4mm T (Y) R Z 16 T 25 IN port 2-3/8 : Thread type S l = 280 l = 300 (X) 2.5 (N) E C D G Q SMC SMC C A B L1 L2 L3 16 D side U side Stations 1 2 3 4 5 n 21 5.5 N-1/4 N-1/8 : Thread type H H P = J (pitch) 2 L dimensions (mm) n (stations) Model Dimensions 3 5 8 4 6 10 7 2 9 103.5 172.5 276 138 207 345 241.5 L1 69 310.5 VV2CS2 115.5 184.5 288 150 219
Assy SYJ52(R)(-Q)) (SYJ54(R)(-Q)) SYJ500-10-3A(-Q) CE -Q M2.5-0.45N.m () 20 No.SYJ300-OMU0003 SYJ700 1 1 SYJ700-9-1(-Q) 1/8 7 2 SYJ700-9-2(-Q) 1/4 3 8 V111(T)4 Assy SYJ5000-13-3A 5 Assy 6 SUS CE -Q 3 SYJ700 SYJ7000 SYJ700 SYJ7000 SYJ7000 3 A B Assy SYJ700-3-1A(-Q) SYJ700-3-2A(-Q) SYJ700 SYJ700 M3 : 0.8N.m O 21 No.SYJ300-OMU0003 Assy SYJ72(R)(-Q)) (SYJ74(R)(-Q)) SYJ700
2 Port for Steam Dimensions (mm) 1in = 25.4mm T (Y) R Z 16 T 25 IN port 2-3/8 : Thread type S l = 280 l = 300 (X) 2.5 (N) E C D G Q SMC SMC C A B L1 L2 L3 16 D side U side Stations 1 2 3 4 5 n 21 5.5 N-1/4 N-1/8 : Thread type H H P = J (pitch) 2 L dimensions (mm) n (stations) Model Dimensions 3 5 8 4 6 10 7 2 9 103.5 172.5 276 138 207 345 241.5 L1 69 310.5 VV2CS2 115.5 184.5 288 150 219
cable O.D: 3.5 to 7 Max.10 69.8 83.4 75.9 2 x 4.5 (Mounting hole) Manual override (Non-locking) Pg7 300 (Lead wire length) 4 x Rc 1/8 (P, R port) 4 x Rc 1/8 (P, R port) 2 x 4.5 (Mounting hole) 39 23 8 (Pitch) 1.5 10.5 49.5 (Station 1) (Station n) 4 x M3 x 0.5 depth 6 (Bracket mounting screw) (Pitch) n x Rc 1/8 (A port) L Dimension n L n: Stations 1 37 27 20 398 388 13 32 51 70 89 108 127
Construction Straight type: AKH 4, 6 5/32, 1/4 8, 10, 12 5/16, 3/8, 1/2 Description Material Note Component Parts No. t y e w r q t y e w r q PBT Body q NBR, Aluminum alloy Valve w Stainless steel Spring e Brass Electroless nickel plated Spacer r Cassette t NBR Seal y Male connector type: AKH Bushing type: AKB R 1/4, 3/8, 1/2 NPT 1/4, 3/8, 1/2 R 1/8 NPT 1/8 M5 type U10/32 4, 6 8 x R 1/8
Model G F B H L E M M 3 4 LQ1T12 LQ1T11 1/8 10 11.5 18.5 8 4 2 Class 1 LQ1T52 LQ1T51 LQ1T42 LQ1T41 LQ1T33 LQ1T32 LQ1T31 LQ1T22 LQ1T21 12 19 10 12 6 8 10 4 6 15 16.5 28 14 12 6 4 20 23 36.5 17 18 9 5 F (E) 2-B L M 20 28 45 21 22 11 6 1/4 G 29 39 54 26 28 14 7 (E) (E) H L L 25 19 LQ1T62 LQ1T61 Class 2 to 5 39.5 49 69.5 36 36 18 8 Inch sizes Applicable tubing O.D.
4 !0 o CK1 CLK2 C(L)KQ MK2T/MK2/MK CKZ2N CKZT CLKZ1R CK/M(D)UKA q !2 u y e i For Asia For North America For Europe For France Special r w !1 Replaceable Kits List Table 1 Contents Kit no. Bore size (mm) Description Code Opening angle 30 H e Switch holder y Proximity switch u Parallel pin i Sheet gasket !
SI Unit for VQC/S0700 Series Valves ( EX500-Q 01 ) SI Unit for SV Series Valves ( EX500-S 01 ) M3 28: 4 pcs. ( Plus-minus slot round head screw ) Supply/exhaust block assembly Supply/exhaust block assembly 1.
Model G F B H L E M M 3 4 LQ1T12 LQ1T11 1/8 10 11.5 18.5 8 4 2 Class 1 LQ1T52 LQ1T51 LQ1T42 LQ1T41 LQ1T33 LQ1T32 LQ1T31 LQ1T22 LQ1T21 12 19 10 12 6 8 10 4 6 VC 15 16.5 28 14 12 6 4 VDW 20 23 36.5 17 18 9 5 F (E) VQ 2-B L M 24 28 43 21 18 9 6 VX2 1/4 H G 29 39 54 26 28 14 7 L L (E) (E) VX Courtesy of Steven Engineering, Inc.-230 Ryan Way, South San Francisco, CA 94080-6370-Main Office: (650
range D-M9N(M)(L)(Z) D-M9P(M)(L)(Z) D-M9B(M)(L)(Z) D-A90(L) D-A93(M)(L)(Z) H0 5 to 60C 5 to 150C Nil M9N(M)(L)(Z) M9P(M)(L)(Z) M9B(M)(L)(Z) A90(L) A93(M)(L)(Z) M9// Solid state auto switch y Number of auto switches/Detecting position Detecting position Valve open/closed Valve open Valve closed Symbol Quantity Without auto switch 2 pcs. 1 pc. 1 pc.
(Except 50) MY1MW16/20/50/63 MY1CW16/20/50/63 L L L L L L R R R R R R R L L R R R L L L R Slide table operating direction MY1MW25/32/40 MY1CW25/32/40 L L This port is not available for use. (Except 32, 40) L L L L L L L L R R R R R R R R L L R R L L L R Slide table operating direction 8-12-3 4 Series MY1W Specific Product Precautions 2 Be sure to read before handling.
(Except 50) MY1MW16/20/50/63 MY1CW16/20/50/63 L L L L L L R R R R R R R L L R R R L L L R Slide table operating direction MY1MW25/32/40 MY1CW25/32/40 L L This port is not available for use. (Except 32, 40) L L L L L L L L R R R R R R R R L L R R L L L R Slide table operating direction 8-12-3 4 Series MY1W Specific Product Precautions 2 Be sure to read before handling.