Compact Manifold Regulator

Knob Position AR425 to 935 Symbol Position Knob position Knob position Knob position Front Top Bottom 56 A B C Top Front Bottom ARX 84 42 84 70 70 AMR P 26 (Max.28) 12 U S SMC SMC H 12 SMC L O C K ARM ARM SMC 28.5 6 51.5 ARP 80 51.5 15 13 OUT IN 3 28 IR-A 13 OUT IN 15 13 OUT IN 3 3 IR 3. IN/OUT Fitting Type 2.

3 Port Solenoid Valve Series VQ100 1

For DIN rail model number, refer to page 4-12-12.

Compact Type

-color display) 5 V,12 V 2-wire 12 V Water resistant (2-color display) . . .

CXS

8 Piston rod B Rod seal e Aluminum bearing alloy NBR !

CXS

Refer to Theoretical Output Table on page 8-29-12.

AC Servo Motor Driver (Pulse input type/Positioning type)

Positioning Mode: Minimum actuator travel distance of 1[m]. 28 - Recommended Parameter Values [LEY] LEY25/LEYG25 LEY25D/LEYG25D LEY32/LEYG32 LEY32D/LEYG32D Series Lead symbol A B C A B C A B C A B C Lead 12 6 3 12 6 3 20 10 5 16 8 4 Parameter *1,*2 Para. No Initial value Recommended value Number of command input pulses per revolution *3. PA05 100 100 Electronic gear numerator *3.

Vacuum Ejector Box Type (Built-in Silencer)/Body Ported Type Series ZH 1

-12-16-16 ZH20DL-12-16-16 12 12 16 16 15.8 35.5 50 17 10 15.8 35.5 50 10 17.2 38.5 54.3 12 17.2 38.5 54.3 12 12 12 16 16 17 21.7 21.7 One-touch and screw-in connection Applicable tubing diameter N Applicable tubing diameter E S type: White color L type: Black color (Mounting hole) B C D E F G H Model A ZH18DS-12-03-12 ZH18DL-12-03-12 ZH20DS-12-04-16 ZH20DL-12-04-16 12 12 12 12 110 52.45 42

AC Servo Motor Driver (SSCNET /H Type)

Recommended Parameter Values [LEF] LEFS25T6 LEFS32T7 LEFS40T8 Lead symbol H A B H A B H A B Series Lead 20 12 6 24 16 8 30 20 10 Parameter *1,*2 Para. Initial value Recommended value No.

IDG

drop P1 [MPa] Single unit (Refer to pages 14-19-12 and 13.)

Sine Cylinder Series REC

24.5 16 Hs Hs Auto switch A 26 B A 33 B D-H7, H7W, H7NF, H7BAL D-C73C, C80C Auto switch 8.5 8.5 16 16 Hs Hs A 29 B Auto switch A 36.7 B D-B5, B64, B59W D-H7C Auto switch Auto switch 8.5 12 24.5 16 Hs Hs A 38.2 B A 33 B 6.5 D-A3, G39, K39 D-A44 Hs Hs Auto switch Auto switch (Applicable cable O.D.: 6.8 to 9.6) (Applicable cable O.D.: 6.8 to 11.5) 1038 Sine Cylinder Series REC Auto

Sine Cylinder Series REC

24.5 16 Hs Hs Auto switch A 26 B A 33 B D-H7, H7W, H7NF, H7BAL D-C73C, C80C Auto switch 8.5 8.5 16 16 Hs Hs A 29 B Auto switch A 36.7 B D-B5, B64, B59W D-H7C Auto switch Auto switch 8.5 12 24.5 16 Hs Hs A 38.2 B A 33 B 6.5 D-A3, G39, K39 D-A44 Hs Hs Auto switch Auto switch (Applicable cable O.D.: 6.8 to 9.6) (Applicable cable O.D.: 6.8 to 11.5) 1038 Sine Cylinder Series REC Auto

LECA6_C

OFF 1 SV1.00 SETON OFFSETUP(2) -1 RESET SVRE ONRESET SVON ON 2 SETUP 48 - 12.2 code 12 12 0 1-048 B RESET -+ W 1W 2 W 12 0 1-049 PARA B RESET 1-050 B RESET No.

HRX-OM-X037

(B contact). Contact output signal 5selects Signal type and N.O. (A contact ) or N.C. (B contact). Contact output signal 6selects Signal type and N.O. (A contact) or N.C. (B contact).

1 High Purity Chemical Valve Compact Type Series LVD VC
Space saving, compact type is available. Space saving, compact type is available. VDW Compact type is introduced as a new series to complement VQ Body: New PFA Body: New PFA Body: New PFA conventio

Metric PA 4 4, 6 6, 8, 10 10, 12 12, 19 Inch Valve type Symbol Type 3, 1/8 1/8, 3/16, 1/4 1/4, 3/8 3/8, 1/2 1/2, 3/4 PAX Basic type N.C. PB PB PA PA N.O. PB B A B A B A N.C. N.O. Double acting Double acting With flow rate adjustment PA PA N.C. B A PB B A Double acting N.C. Double acting With by-pass PA PA N.C. PB B A B A Double acting N.C.

CJP

Symbol Bore size (mm) A A' B B' D E F GA GB H MM NN R X Y LC LH LT LX LZ 6 10 15 M3 x 0.5 17 6 28 6 20 8 10.5 1.6 3 11 14 3.4 14 6.5 10.5 9 M10 x 1.0 7 7 M4 x 0.7 20 7 33 6 24 8 13 1.6 5 13 17 4.5 15 7 12 12 M12 x 1.0 8 10 M5 x 0.8 24 7 43 6 30 10 15.5 2.3 6 18 19 5.5 20 16.5 14 M14 x 1.0 10 12 10 Symbol S Z With auto switch Bore size (mm) W J 5 st 10 st 15 st 20 st 30 st 5 st 10 st 15 st

CJP

Symbol Bore size (mm) A A' B B' D E F GA GB H MM NN R X Y LC LH LT LX LZ 6 10 15 M3 x 0.5 17 6 28 6 20 8 10.5 1.6 3 11 14 3.4 14 6.5 10.5 9 M10 x 1.0 7 7 M4 x 0.7 20 7 33 6 24 8 13 1.6 5 13 17 4.5 15 7 12 12 M12 x 1.0 8 10 M5 x 0.8 24 7 43 6 30 10 15.5 2.3 6 18 19 5.5 20 16.5 14 M14 x 1.0 10 12 10 Symbol S Z With auto switch Bore size (mm) W J 5 st 10 st 15 st 20 st 30 st 5 st 10 st 15 st

MIW/MIS

12 2.5 4 14 22.5 6 12 10 12 6 8 SB SC SA 43 62 18.5 27 1.8 2.2 Model Maximum adjustment dimension RJ MIW12-12 MIW20-20 Note) Observe the specified adjustment range when adjusting with a stroke adjuster. 9 Escapements Series MIW/MIS Dimensions MIS-D Scraper mounting thread 2-LA GC GB FC GD LB FA B JA 2-GA drill LC EB JB Mounting hole EA C D 2-M5 x 0.8 Attachment mounting thread 2-FE through

LEH_C

B 15 15 5 5 5 C C 20 20 5 () () R R S S / P.42 7.3 <> (NPNPNP) LEHF10K2-16 3 - 3.3 9 13 16 10 18 15 8 11 6 ( 12 4 5 7 2 1 3 17 14 1 2 A 3 B 4 + 5 6 + 7 + 8 9 10 A 11 B 12 13 NBR 14 15 16 17 18 ( DC24V) 4 - 4.

VZ100/300/500

M5 x 0.8 b Cv b Cv VV3Z1-01-1 VV4Z1-20-1 1/8 How to Order Manifold Instruct by specifying the valves and blanking plate assembly to be mounted on the manifold along with the manifold base model no.

2/3 Port Valve

B(9.5) B(12.7) B(19.1) 1B(25.4) 1 B(31.8) 1 B(38.1) 2B(50.8) VNA 111 211 311 411 511 611 711 AS 420-03 420-04 500-06 600-10 800-12 900-14 900-20 Caution Warning 1Piping When operation is suspended, surge pressure will be generated between the cylinder and VNA11A.